Abstract: The invention aims at providing a vacuum circuit-breaker, a vacuum bulb used therein and electrodes for the vacuum bulb, which can reduce the manufacturing cost while being of high performance and compact in size. The invention resides in a vacuum circuit-breaker, a vacuum bulb and electrodes for the vacuum bulb, which are characterized in that fixed and movable electrodes each comprise arc electrodes, whose entire surfaces, mutually facing each other, are made of an alloy containing a refractory metal and a highly conductive metal, and electrode rods of a highly conductive metal supporting the respective arc electrodes, and that each arc electrode and the mating electrode rod are integrally formed by means of solid-phase diffusion bonding.

Abstract: The invention aims at providing a vacuum circuit-breaker, a vacuum valve used therein and electrodes for the vacuum valve, which can reduce the manufacturing cost while being of high performance and compact in size. The invention resides in a vacuum circuit-breaker, a vacuum valve and electrodes for the vacuum valve, which are characterized in that fixed and movable electrodes each comprise arc electrodes, whose entire surfaces, mutually facing each other, are made of an alloy containing a refractory metal and a highly conductive metal, and electrode rods of a highly conductive metal supporting the respective arc electrodes, and that each arc electrode and the mating electrode rod are integrally formed by means of solid-phase diffusion bonding.

Abstract: There is disclosed a vacuum insulation switch provided with a movable electrode, a stationary electrode and an earthing electrode, which are insulated from each other, in a vacuum container made of a conductive material which is earthed, and a switchgear using the same. Since the vacuum insulation, which is excellent in the insulation ability, is utilized, the switch is drastically miniaturized and the number of constituent parts are reduced, whereby the manufacturing cost of the switch and the switchgear can be decreased.

Abstract: Disclosed is a vacuum circuit breaker including a small-sized electrode structure capable of reducing deformation with age thereby enhancing the reliability and a vacuum bulb and a vacuum bulb electrode used for the breaker. In the vacuum circuit breaker, each of a fixed electrode and a movable side electrode includes an arc electrode made from particles of a refractory metal material, a high conductive metal material and a low melting point metal; an electrode supporting portion, made from the high conductive metal material, for supporting the arc electrode; a back conductor having a diameter smaller than the electrode supporting portion; and an external side connecting portion having a diameter larger than that of the back conductor. The arc electrode is integrated with the electrode supporting portion, back conductor, and external side connecting portion by the high conductive metal material, preferably, by melting of the highly conductive metal material.

Abstract: A vacuum insulation switch provided with a movable electrode, a stationary electrode and an earthing electrode, which are insulated from each other, in a vacuum container made of a conductive material which is earthed, and a switchgear using the same.

Abstract: According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.

Abstract: According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.

Abstract: An electrode for a vacuum circuit breaker provided with a connecting portion made of a material having the same resistivity as the arc running face portions across the corresponding arc guiding channel at the outer circumferential end thereof, wherein when the outer diameter of the connecting portion is D.sub.1 and the inner diameter of the connecting portion is D.sub.2, the width of the connecting portion is designed so that the ratio D.sub.2 /D.sub.1 is in a range of more than 0.9 and less than 1.0. An arc generated between the electrodes is magnetically driven over the arc running face portions via the connecting portion so that the current interrupting capacity of the electrode is increased and the size and weight of the electrode are reduced.

Abstract: According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.

Abstract: A vacuum switch having a fixed side electrode unit and a movable side electrode unit mounted in a vacuum vessel. Each electrode unit includes an arc electrode, an arc electrode supporting member for supporting the arc electrode, a coil electrode and a conducting rod. Joining portions between the arc electrode and the arc electrode supporting member, the coil electrode and the conducting rod are integrally and directly formed metallurgically by solid phase diffusion using a hot isostatic process. A vacuum circuit breaker may be constructed incorporating the vacuum switch.

Abstract: A portion of a highly conductive metal member is infiltrated in voids of a porous high melting point metal member, and both the metal members are integrally joined to each other. An arc electrode portion 13 is formed of a high melting point area 11 in which the highly conductive metal is infiltrated in voids of the high melting point metal member. A coil electrode portion 14 is formed by hollowing out the interior of a highly conductive metal area 12 composed only of highly conductive metal and by forming slits 15 to 17 thereon. A rod 18 is hard-brazed on the rear surface of the coil electrode portion 14. With this electrode, it is possible to reduce the number of parts, and to omit the brazing portion between the arc electrode portion 13 and the coil electrode portion 14 for lowering the electric resistance and thereby the calorific value.

Abstract: A low cost and highly reliable vacuum circuit interrupter and a method of manufacturing the same improve production efficiency and vacuum tight sealing property of the vacuum circuit interrupter. In the vacuum circuit interrupter, within a sealed vacuum vessel 100 a pair of separable conductors in center axial direction of the sealed vacuum vessel composed of a stationary conductor 3 and a movable conductor 5 are disposed.

Abstract: According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.

Abstract: An ion implanting apparatus includes a magnetic quadrupole lens disposed between an ion source and an RFQ accelerator. The magnetic quadrupole lens carries out mass spectrometry of an ion beam extracted from the ion source while converging the ion beam, and reduces the divergence of the ion beam due to the space charge effect as compared to an electrostatic quadrupole lens. The use of the magnetic quadrupole lens makes it possible to utilize to a maximum extent the ion beam extracted from the ion source and to restrict to a minimum the reduction in the current of the ion beam during passage of the ion beam, thereby making it possible to generate a high-energy ion beam having a large current on the order of several tens of milliamperes.

Abstract: An apparatus for generating plasma by making use of electron cyclotron resonance employs permanent magnets for forming magnetic fields, and the permanent magnets are arranged in such a manner as to form stronger magnetic fields in peripheral portion of a plasma chamber than in a central portion of the same. in addition, a cross-sectional area of the plasma chamber is gradually increased. Furthermore, electrons are introduced into an additional plasma chamber in which an electric field is not applied so as to generate low-temperature plasma.

Abstract: An ion source application device comprising a gas tight plasma formation chamber sustaining a plasma produced by high frequency discharge, a high frequency coil producing the high frequency discharge, and means for extracting an ion beam from the plasma thus produced, characterized in that it comprises further an electron beam generator or a laser light generator as means for obtaining electrons serving as seeds for starting the high frequency discharge.

Abstract: An ion source device comprises a plasma generating vessel for generating plasma therein, a plurality of magnets arranged on an outer periphery of the plasma generating vessel to establish a cusp field in the plasma generating vessel, means for supplying a power to generate the plasma in the plasma generating vessel, and an anode electrode arranged on an inner wall of the plasma generating vessel and adapted to be heated by electrons emitted from the plasma and maintain the heat.

Abstract: An ion beam for use in fabrication and processing of semiconductors, thin films or the like. For making uniform the radial distribution of an ion beam extracted from the ion source, a plasma chamber is formed by extending a plasma producing chamber in the direction in which microwave energy is introduced. The plasma chamber thus formed is provided with second magnetic means for generating a magnetic field of multicusp geometry.

Abstract: An ion source for producing an ion beam utilized for fabrication and processing of semiconductors, thin films or the like includes a plasma producing chamber equipped with first magnetic means for limiting a plasma region and a plasma expansion chamber provided in combination with the plasma producing chamber on the side where a beam extracting electrode is disposed. The plasma expansion chamber is provided with second magnet array for confining and holding a plasma region therein which is of a larger area than that of the plasma region formed in the plasma producing chamber.