Abstract: A communication device, e.g. a transmitter, that constitutes a multicarrier wireless transmission system and communicates with another communication device, e.g. a receiver, including a function of measuring an interference-plus-noise power by using a null symbol inserted into a received data, includes a null-symbol inserting unit that arranges a predetermined number of null symbols in a data-symbol storing region of a data frame to be transmitted to the receiver to generate a data frame including the null symbols, thereby realizing measuring an interference power in a data transmission section with high accuracy.

Abstract: The present invention concerns a method and a device for reporting, through a wireless network using multiple frequency subbands, interference components received by a first telecommunication in a first and a second frequency subbands of the wireless network, to a second telecommunication device. The first telecommunication device measures the interference components it receives in the first and second frequency subbands, determines at least a first weight from the measured interference components in the first frequency subband and at least a second weight from the measured interference components in the second frequency subband, weights a first pilot signal with the at least one first determined weight and a second pilot signal with the at least one second determined weight, transfers the first weighted pilot signal through said first frequency subband and the second weighted pilot signal through said second frequency subband to the second telecommunication device.

Abstract: Techniques can curtail time for which a substrate is held to no purpose and improves the throughput of a coating and developing system. An inspection station through which a substrate processed in a processing station is transferred to a carrier station includes a plurality of different inspection modules respectively taking different inspection times, a buffer unit for temporarily holding a substrate and a substrate carrying means controlled by a controller. When the inspection module is engaged in inspecting a substrate, the substrate carrying means carries another substrate to be inspected by the same inspection module to the buffer unit and the substrate is held in the buffer unit. Thus, holding the wafers W in the inspection modules can be suppressed and the throughput can be improved.

Abstract: Disclosed herein is a coating and developing apparatus 1 whose decreases in substrate-conveying accuracy can be suppressed. A processing block S2 of the coating and developing apparatus 1 includes multiple resist-film forming blocks G2, G3, and a developing block G1. A conveyance element 12 for substrate loading into the processing block S2 is provided to convey substrates W from a carrier C to the resist-film forming blocks G2, G3. Also, a conveyance element I for substrate loading into an exposure apparatus S4 is provided in an interface block S3 to load the substrates W into the exposure apparatus S4 and after unloading the substrates W from the exposure apparatus S4, convey the substrates W to the developing block G1.

Abstract: A substrate processing system processes a plurality of substrates in a single-substrate processing mode by a plurality of processes and provided with a plurality of modules respectively for carrying out processes. When a defect is found in a substrate, a defective processing unit that caused the defect can be easily found out. The substrate processing system and a substrate processing method to be carried out by the substrate processing system can suppress the reduction of throughput when a large number of substrates are to be processed. The substrate processing system is provided with a plurality of modules for processing a plurality of substrates (W) in a single-substrate processing mode by a plurality of processes and includes a substrate carrying means (A4) for carrying a substrate (W) from a sending module to a receiving module, and a control means (6) for controlling the substrate carrying means (A4) on the basis of one of at least two carrying modes each assigning receiving modules to sending modules.

Abstract: A buffer module is installed in a coating film forming unit block of a coating and developing system to reduce the number of interface arms needed by an interface block, and the manufacturing cost and footprint of the coating and developing system. For example, buffer modules BF31 to BF34 capable of holding a number of wafers W greater by one than the number of coating modules COT1 to COT3 of a COT layer B3 is installed in the COT layer B3, In the COT layer B3, a wafer W is carried along a carrying route passing a temperature control module CPL3, COT1 to COT3, a heating and cooling module LHP3, and the buffer modules BF31 to BF34. A main arm A3 carries wafers W such that the number of wafers W placed in the modules on the downstream side of the CPL3 is greater by one than the number of modules between the CPL3 and the buffer module when a processing rate at which an exposure system processes wafers W is lower that at which the COT layer B3 processes wafers W.

Abstract: Conventionally, if the number of transmission antennas is greater than that of reception antennas, different signals simultaneously transmitted from the transmission antennas cannot be separated from one another at the receiving end, resulting in a significant degradation of received-signal quality. A transmitter and a receiver each have a plurality of antennas. The transmitter transmits a pilot signal. The receiver receives the pilot signal, calculates transmission-related information corresponding to the pilot signal, selects, based on this calculated information, a transmission signal to be used by the transmitter, and notifies the transmitter of the selected signal. The transmitter selects, from the informed transmission signal, transmission antennas and uses the selected antennas to transmit information signals, so that a signal separation can be easily performed at the receiving end.

Abstract: The present invention relates to a wireless communication system that performs data communication using a spatial multiplex transmission scheme. A mobile station includes a transmission weight calculating unit that calculates a transmission weight and a beam information notifying signal generating unit that transmits a known signal for generating partial space information at a base station side. A base station includes a scheduling unit (DL spatial scheduling unit (17), UL spatial scheduling unit (18), and beam information notifying signal response vector estimating unit (20)) that generates the partial space information based on a received first known signal, and performs downstream scheduling and upstream scheduling based on the partial space information, and a scheduling result transmitting unit (UL control information generating unit (14) and transmission weight calculating unit (19)) that transmits a packet including an upstream scheduling result.

Abstract: The present invention concerns a method and a device for transferring power information and preferably information related to interference components received by a first telecommunication device and power information used by the first telecommunication device for weighting at least one pilot signal transferred by the first telecommunication device to a second telecommunication device, the first and the second telecommunication devices being linked through a wireless telecommunication network, the at least one pilot signal being preferably further weighted by the information related to interference components received by a first telecommunication device. The first telecommunication device transfers plural weighted pilot signals at a first rate and transfers plural power information at a second rate which is strictly lower than the first rate.

Abstract: Disclosed herein is a coating and developing apparatus 1 whose decreases in substrate-conveying accuracy can be suppressed. A processing block S2 of the coating and developing apparatus 1 includes multiple resist-film forming blocks G2, G3, and a developing block G1. A conveyance element 12 for substrate loading into the processing block S2 is provided to convey substrates W from a carrier C to the resist-film forming blocks G2, G3. Also, a conveyance element I for substrate loading into an exposure apparatus S4 is provided in an interface block S3 to load the substrates W into the exposure apparatus S4 and after unloading the substrates W from the exposure apparatus S4, convey the substrates W to the developing block G1.

Abstract: In a radio communication system that simultaneously provides communication service using a plurality of discontinuous frequency bands, a multi-band radio communication method according to the present invention is a method in which a base station constituting the system allocates a band to a mobile station that requests a communication starting. For example, a specific receiving unit within the base station extracts control information concerning a channel state in each of the frequency bands, and recognizes a frequency band in which the mobile station can receive information, from a result of the extraction. A channel controller 9 determines, starting from a high frequency band, whether a new traffic responding to the communication starting request can be allocated in each frequency band.

Abstract: A communication apparatus associated with a system that uses two or more discontinuous frequency bands. The communication apparatus includes a BPF (band pass filter) including a plurality of BPFs associated with signals having respective frequency bands; a controller that controls each unit to transmit/receive the signals having the respective frequency bands; a down-converter that down-converts a filtered signal into a baseband signal while switching frequencies under control of the controller; a receiver that performs predetermined reception processing under control of the controller; and a transmitter that performs predetermined transmission processing under control of the controller, and common hardware is used in communication in all frequency bands with respect to processing of the baseband signal.

Abstract: A plurality of process modules for conducting processes on a wafer; conveying modules for conveying the wafer, a turnout module for transferring the wafer to/from the conveying module, and a CPU for detecting a trouble occurring in the process module and centrally controlling each of the modules based on a detection signal. When the controller detects the trouble occurring in any one of the process modules, the wafer to be conveyed to the process module where the trouble occurs is conveyed to the turnout module, and conveyance of the wafer before the process module where the trouble occurs is temporarily stopped, and conveyance and processing of the other wafer are continued, and thereafter, conveyance and processing of the wafer before the process module where the trouble occurs are conducted.

Abstract: The present invention concerns a method for reporting, through a wireless network, a channel state information between a first telecommunication device which comprises Mk antennas and a second telecommunication device which comprises antennas. The method comprises the steps executed by the first telecommunication device of: determining the propagation gains between the antennas of the first and second telecommunication devices, determining, from the propagation gains, a linear transform of a dimension of m0*Mk with m0<Mk, transferring information representative of the linear transform to the second telecommunication device.

Abstract: A buffer module is installed in a coating film forming unit block of a coating and developing system to reduce the number of interface arms needed by an interface block, and the manufacturing cost and footprint of the coating and developing system. For example, buffer modules BF31 to BF34 capable of holding a number of wafers W greater by one than the number of coating modules COT1 to COT3 of a COT layer B3 is installed in the COT layer B3, In the COT layer B3, a wafer W is carried along a carrying route passing a temperature control module CPL3, COT1 to COT3, a heating and cooling module LHP3, and the buffer modules BF31 to BF34. A main arm A3 carries wafers W such that the number of wafers W placed in the modules on the downstream side of the CPL3 is greater by one than the number of modules between the CPL3 and the buffer module when a processing rate at which an exposure system processes wafers W is lower that at which the COT layer B3 processes wafers W.

Abstract: The present invention concerns a method, a device and a system for transferring signals representative of a pilot symbol pattern to a first telecommunication device by a second telecommunication device. The method comprises the steps, executed by the second telecommunication device, of: obtaining information associated to data to be transferred to the first telecommunication device, adjusting the transmission power of the signals representative of the pilot symbol pattern according the associated information, transferring the signals representative of the pilot symbol pattern at the adjusted transmission power.

Abstract: A wet-processing apparatus includes module groups each including plural processing modules and a shared nozzle device to be used in common by the processing module of the module group. The wet-processing apparatus includes plural processing modules not less than four processing modules, for example, six processing modules. The six processing modules are divided into two module groups, namely, first and second module groups each of the three processing modules. Each of the first and the second module group is provided with a nozzle device for pouring a processing solution onto a wafer. The first wafer is delivered to the first processing module, the second wafer is delivered to the processing module of the second module group, the third wafer is delivered to the processing module of the first module group. Thus the successive wafers are delivered alternately to the first and the second module groups.

Abstract: Conventionally, if the number of transmission antennas is greater than that of reception antennas, different signals simultaneously transmitted from the transmission antennas cannot be separated from one another at the receiving end, resulting in a significant degradation of received-signal quality. A transmitter and a receiver each have a plurality of antennas. The transmitter transmits a pilot signal. The receiver receives the pilot signal to calculate transmission-related information corresponding to the pilot signal, and then selects, based on this calculated information, a signal to be sent to and utilized by the transmitter. The receiver then informs the selected signal to the transmitter. The transmitter selects, from the informed signal, transmission antennas and uses them to transmit information signals, so that a signal separation can be easily performed at the receiving end.

Abstract: Wafers A1 to A10 of a first lot A and wafers B1 to B10 of a second lot B are processed by a second heating unit at different temperatures, respectively. A wafer W is carried in a processing block included in coating and developing system along a route passing a temperature control unit CPL2, a coating unit BCT, a heating unit LHP2, a temperature control unit CPL3, a coating unit COT, a heating unit LHP3, and a cooling unit COL in that order. The process temperature of the heating unit LHP3 is changed after the last wafer A10 of the first lot A has been processed by the heating unit LHP3.

Abstract: When a trouble occurs in a substrate treatment apparatus, the substrate existing in the substrate treatment apparatus is quickly collected without exerting adverse effects on the subsequent substrate treatment to resume the substrate treatment early. At the time of occurrence of trouble in a coating and developing treatment apparatus, all of the substrates in the coating and developing treatment apparatus are collected to a transfer-in/out section using a transfer unit in the apparatus. In this event, each transfer unit transfers the substrate from each position at the time of occurrence of trouble in a direction toward the transfer-in/out section for collection. Further, the substrate under treatment in the treatment unit at the time of occurrence of trouble is collected after the treatment is finished.