Abstract: An abnormality diagnosis system that diagnoses an abnormality related to each control shaft in equipment in which the plurality of control shafts, each including a motor and an output unit driven by the motor, are incorporated, includes: a plurality of vibration sensors that are provided for the plurality of control shafts, respectively, and that detect vibration occurring in connection with driving of the motor corresponding to each control shaft; a calculation unit that calculates, for each of the plurality of control shafts, vibration levels in a plurality of predetermined frequency ranges, based on vibration information detected by each of the plurality of vibration sensors; and a diagnosis unit that diagnoses an abnormality related to each control shaft, based on a distribution state, across the plurality of predetermined frequency ranges and across the plurality of control shafts, of the vibration levels calculated by the calculation unit.

Abstract: An object of the present invention is to preferably detect the failure accompanied with the decrease in the pre-load in a ball screw unit. The failure diagnosis is performed for the ball screw unit on the basis of a combination of a resonance frequency in an axial direction of a predetermined machine assembly including the ball screw unit and a motor and a position of a nut member on a screw shaft corresponding to the resonance frequency as provided when the screw shaft is driven and rotated by the motor.

Abstract: An object of the present invention is to preferably detect the failure accompanied with the decrease in the pre-load in a ball screw unit. The failure diagnosis is performed for the ball screw unit on the basis of a combination of a resonance frequency in an axial direction of a predetermined machine assembly including the ball screw unit and a motor and a position of a nut member on a screw shaft corresponding to the resonance frequency as provided when the screw shaft is driven and rotated by the motor.

Abstract: Provided is a diagnosis method of appropriately recognizing a state of a rolling surface of a track member of a rolling guide device or a lubrication state of rolling elements using a sensor mounted to the rolling guide device. The diagnosis method is applied to a rolling guide device including: a track member having a rolling surface extending along a longitudinal direction of the track member; and a moving member, which is assembled to the track member through intermediation of a plurality of rolling elements configured to roll on the rolling surface so that the moving member is movable along the track member, and has an endless circulation path for the rolling elements.

Abstract: A fault detection sensor-equipped actuator is provided which can easily detect a fault in at least one of a linear guide unit and a ball screw unit, using a shared sensor. In an actuator (10) including a linear guide unit (4) that guides linear movement of a movable body (1) and a ball screw unit (7) that drives the movable body (1) in an axial direction of a screw shaft (6), a sensor (18) configured to detect a fault in the actuator (10) is placed in a housing (11) where a coupling (12) that couples the screw shaft (6) and a motor (14) for rotating the screw shaft (6) is housed.

Abstract: Provided is a state diagnosis system, which is applied to a rolling guide device in which a moving member including an endless circulation path for rolling elements is freely movable along a track member, and which is configured to appropriately recognize a state of a rolling surface of the track member. The state diagnosis system includes: a sensor configured to detect a physical quantity exhibited when the moving member is moving along the track member; a signal processing unit configured to process an output signal from the sensor to output analysis data; and a determination processing unit configured to compare the analysis data with threshold value data to determine whether or not the rolling guide device has an abnormality.

Abstract: Provided is a state diagnosis system, which is applied to a rolling guide device in which a moving member including an endless circulation path for rolling elements is freely movable along a track member, and which is configured to appropriately recognize a state of a rolling surface of the track member. The state diagnosis system includes: a sensor configured to detect a physical quantity exhibited when the moving member is moving along the track member; a signal processing unit configured to process an output signal from the sensor to output analysis data; and a determination processing unit configured to compare the analysis data with threshold value data to determine whether or not the rolling guide device has an abnormality.

Abstract: The state diagnosis system including: a sensor configured to detect a physical quantity exhibited when the moving member is moving along the track member; and a diagnosis processing unit configured to take in an output signal from the sensor, to thereby generate analysis data, compare the analysis data with threshold value data, determine whether the rolling guide device has an abnormality in accordance with a comparison result, and output a determination result, wherein the diagnosis processing unit has: a first processing mode of taking in the output signal from the sensor for a data collection time period T1, to thereby generate the analysis data; and a second processing mode of taking in the output signal from the sensor for a data collection time period T2 longer than the data collection time period Ti, to thereby generate the analysis data, and wherein the diagnosis processing unit outputs the determination result.

Abstract: A fault detection sensor-equipped actuator is provided which can easily detect a fault in at least one of a linear guide unit and a ball screw unit, using a shared sensor. In an actuator (10) including a linear guide unit (4) that guides linear movement of a movable body (1) and a ball screw unit (7) that drives the movable body (1) in an axial direction of a screw shaft (6), a sensor (18) configured to detect a fault in the actuator (10) is placed in a housing (11) where a coupling (12) that couples the screw shaft (6) and a motor (14) for rotating the screw shaft (6) is housed.

Abstract: Provided is a rolling guide device which is capable of directly recognizing an operation condition of a moving member with respect to a track member or a circulation state of rolling elements in an endless circulation path, the rolling guide device including: a track member having a rolling surface; and a moving member, which is assembled to the track member through intermediation of a large number of rolling elements which roll on the rolling surface, and has an endless circulation path for the rolling elements, the moving member including: a main body member having a load rolling surface and a no-load return path for the rolling elements, the load rolling surface being opposed to the rolling surface of the track member to define a load path for the rolling elements, a pair of covers, which have direction change paths for allowing the rolling elements to move between the load path and the no-load return path, and is mounted to the main body member; and a measurement plate, which is interposed at least betwee

Abstract: Provided is a diagnosis method of appropriately recognizing a state of a rolling surface of a track member of a rolling guide device or a lubrication state of rolling elements using a sensor mounted to the rolling guide device. The diagnosis method is applied to a rolling guide device including: a track member having a rolling surface extending along a longitudinal direction of the track member; and a moving member, which is assembled to the track member through intermediation of a plurality of rolling elements configured to roll on the rolling surface so that the moving member is movable along the track member, and has an endless circulation path for the rolling elements.

Abstract: Provided is a rolling guide device which is capable of directly recognizing an operation condition of a moving member with respect to a track member or a circulation state of rolling elements in an endless circulation path, the rolling guide device including: a track member having a rolling surface; and a moving member, which is assembled to the track member through intermediation of a large number of rolling elements which roll on the rolling surface, and has an endless circulation path for the rolling elements, the moving member including: a main body member having a load rolling surface and a no-load return path for the rolling elements, the load rolling surface being opposed to the rolling surface of the track member to define a load path for the rolling elements, a pair of covers, which have direction change paths for allowing the rolling elements to move between the load path and the no-load return path, and is mounted to the main body member; and a measurement plate, which is interposed at least betwee

Abstract: A state detecting apparatus S for detecting a current operating state of an LM (linear motion) system includes an AE sensor 1 generating a detection signal Sae by detecting an AE wave elastically generated when a plurality of balls contained in the LM system revolve in a circulation portion while spinning themselves; and a signal processing unit 4 generating a parameter indicating an intensity of the AE wave based on only the detection signal Sae corresponding to an operating frequency of the ball, and uses the parameter to determine a lubrication state of the LM system. Thereby, it is possible to provide the state detecting apparatus capable of predicting failure occurrence in the LM system; providing an improved maintenance to a user of the LM system and further longer lifetime thereof; and providing a performance guarantee and an improved quality of a device or equipment manufactured using the LM system.

Abstract: [PROBLEM] The purpose of the present invention is to provide a reference electrode which is easy to manufacture and handle, its manufacturing method, and an electrochemical cell using this. [METHOD FOR SOLVING THE PROBLEM] The reference electrode 10 comprises a core material 11 extending parallel to the anode 14 or the cathode 16 from a terminal, a lithium membrane 12 coating from a tip of the core material 11 to a field with predetermined length, and an insulator 13 partially coating a field uncoated with the lithium membrane 12 on the core material 11. The material consisting of at least a surface of the core material 11 is a conductive material which is substantially unresponsive to lithium or lithium alloy. The maximum width in a cross section of the core material 11 is preferably in the range of not less than 5 micrometers but not more than 50 micrometers, and thickness of the lithium membrane is preferably in the range of not less than 0.1 micrometers but not more than 20 micrometers.

Abstract: A state detecting apparatus S for detecting a current operating state of an LM (linear motion) system includes an AE sensor 1 generating a detection signal Sae by detecting an AE wave elastically generated when a plurality of balls contained in the LM system revolve in a circulation portion while spinning themselves; and a signal processing unit 4 generating a parameter indicating an intensity of the AE wave based on only the detection signal Sae corresponding to an operating frequency of the ball, and uses the parameter to determine a lubrication state of the LM system. Thereby, it is possible to provide the state detecting apparatus capable of predicting failure occurrence in the LM system; providing an improved maintenance to a user of the LM system and further longer lifetime thereof; and providing a performance guarantee and an improved quality of a device or equipment manufactured using the LM system.

Abstract: A condition detection apparatus comprising an AE sensor 1 that detects AE waves, which elastically-occur when a plurality of balls included in an LM system self-rotate and revolve within a circulation section at the same time, and generates detection signals Sae, and a signal processing unit 4 that generates a first parameter indicating an intensity of the AE waves based on the generated detection signals Sae, generates based on the detection signals Sae a second parameter by weighting only detection signals Sae temporally-continuously detected among the detection signals Sae, generates based on the detection signals Sae a third parameter by weighting only detection signals Sae temporally-discontinuously detected in correspondence with the movement of the balls among the detection signals Sae, and judges contents of an operational condition of the LM system using any one of the first, second or third parameter, is provided to enable prognosis of occurrences of failures in the LM system, to improve maintainabi

Abstract: A condition detection apparatus comprising an AE sensor 1 that detects AE waves, which elastically-occur when a plurality of balls included in an LM system self-rotate and revolve within a circulation section at the same time, and generates detection signals Sae, and a signal processing unit 4 that generates a first parameter indicating an intensity of the AE waves based on the generated detection signals Sae, generates based on the detection signals Sae a second parameter by weighting only detection signals Sae temporally-continuously detected among the detection signals Sae, generates based on the detection signals Sae a third parameter by weighting only detection signals Sae temporally-discontinuously detected in correspondence with the movement of the balls among the detection signals Sae, and judges contents of an operational condition of the LM system using any one of the first, second or third parameter, is provided to enable prognosis of occurrences of failures in the LM system, to improve maintainabi

Abstract: A lithium or lithium alloy film forming method comprises: the step of heating and evaporating lithium or lithium alloy under an atmosphere of inert gas in an ultra fine particle producing chamber to produce ultra fine particles of lithium or lithium alloy therein; the step of transporting the ultra fine particles through a transfer pipe with the inert gas into a film forming chamber under vacuum atmosphere; the step of jetting the ultra fine particles onto a substrate arranged in the film forming chamber from a nozzle; the step of moving a substrate holder holding the substrate in the X-direction and/or Y-direction; the step of preheating the substrate at a predetermined temperature within the range of 100 to the melting point of lithium or lithium alloy: and the step of forming a film of lithium or lithium alloy on the substrate being moved with the substrate holder.

Abstract: This invention relates to grease compositions containing mineral oil and/or synthetic oil as base oil, (A) lithium stearate as thickener, and (B) one kind or two kinds of more of compounds selected from a group of oxidized paraffins and diphenyl hydrogenphosphite and displaying a worked penetration in the range 270-350 and also to bearings such a s linear guides, ball screws, and rolling bearings sealed with said grease compositions. This invention can provide grease compositions of low dust emission which perform with an excellent balance of low dust emission, low rolling characteristics and fretting resistance, extend the lubricating period, reduce the maintenance cost, and are suitable for use in a clean environment. This invention can also provide bearings sealed with said grease compositions of low dust emission suitable for use in a clean environment such as semiconductor manufacturing equipment, liquid crystal manufacturing equipment, and electronic computers.