Patents by Inventor Yoshiyuki Tomita
Yoshiyuki Tomita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 9283647Abstract: A centrifugal barrel polishing machine includes a barrel which is configured to perform planetary rotation and into which workpieces and ceramic polishing media are put, thereby polishing the workpieces by the polishing media. A relative centrifugal acceleration F during the planetary rotation of the barrel is set in a range of 2.1(n/N)+29.5?F?6.1(n/N)+40.7 where N designates a revolution speed of the barrel, n designates a rotation speed of the barrel, R designates a radius of an orbital path drawn by a rotation center of the barrel, n/N designates a rotation/revolution ratio of the barrel, and F=4?2N2R/g designates a relative centrifugal acceleration which is a ratio of a centrifugal acceleration on the orbital path during the planetary rotation of the barrel to gravity acceleration g.Type: GrantFiled: February 18, 2013Date of Patent: March 15, 2016Assignee: TIPTON CORP.Inventors: Yoshiyuki Tomita, Tomoyuki Kobayashi
-
Publication number: 20150038054Abstract: Provided is a centrifugal barrel polishing machine capable of maintaining or improving polishing efficiency while increasing polishing amount. The centrifugal barrel polishing machine (10) includes a barrel (12) which is configured to perform planetary rotation and into which workpieces and polishing media are put, thereby polishing the workpieces by the polishing media. A relative centrifugal acceleration F during the planetary rotation of the barrel (12) is set in a range of ?2.5(n/N)+12.6?F?6.1(n/N)+40.7 where N designates a revolution speed of the barrel (12), n designates a rotation speed of the barrel (12), R designates a radius of an orbital path (15) drawn by a rotation center of the barrel (12), n/N designates a rotation/revolution ratio of the barrel (12), and F=4?2N2R/g designates a relative centrifugal acceleration which is a ratio of a centrifugal acceleration on the orbital path (15) during the planetary rotation of the barrel (12) to gravity acceleration g.Type: ApplicationFiled: February 18, 2013Publication date: February 5, 2015Inventors: Yoshiyuki Tomita, Tomoyuki Kobayashi
-
Publication number: 20100270476Abstract: The invention can provide a reaction force treatment mechanism used in a stage apparatus including a pedestal, a platen which supported by the pedestal through a vibration isolation unit, a mobile body which supported by the platen and moves on the platen, and an actuator which actuates the mobile body in one direction, the reaction force treatment mechanism including: a connection portion which connects a stator of the actuator to the pedestal through an stress relief mechanism for absorbing displacement in a direction different from the one direction; and a guide portion which movably guides the stator of the actuator in the one direction while restraining the stator of the actuator relative to the platen in a direction different from the one direction.Type: ApplicationFiled: April 28, 2010Publication date: October 28, 2010Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.Inventors: Jun NISHIMAKI, Yasuhito NAKAMORI, Yoshiyuki TOMITA
-
Patent number: 7502127Abstract: According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.Type: GrantFiled: October 27, 2006Date of Patent: March 10, 2009Assignees: Sumitomo Heavy Industries, Ltd., Tohoku Technoarch Co., Ltd.Inventors: Wei Gao, Satoshi Kiyono, Yoshiyuki Tomita, Toru Hirata, Yoji Watanabe, Kennichi Makino
-
Patent number: 7257902Abstract: This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.Type: GrantFiled: September 18, 2006Date of Patent: August 21, 2007Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Wei Gao, Satoshi Kiyono, Yoshiyuki Tomita, Makoto Tano
-
Patent number: 7239939Abstract: The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.Type: GrantFiled: April 21, 2005Date of Patent: July 3, 2007Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Hidehiko Mori, Yoshiyuki Tomita, Kazutoshi Sakaki
-
Publication number: 20070041024Abstract: According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.Type: ApplicationFiled: October 27, 2006Publication date: February 22, 2007Inventors: Wei Gao, Satoshi Kiyono, Yoshiyuki Tomita, Toru Hirata, Yoji Watanabe, Kennichi Makino
-
Publication number: 20070035267Abstract: This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.Type: ApplicationFiled: September 18, 2006Publication date: February 15, 2007Inventors: Wei Gao, Satoshi Kiyono, Yoshiyuki Tomita, Makoto Tano
-
Patent number: 7082674Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.Type: GrantFiled: October 6, 2003Date of Patent: August 1, 2006Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Hidehiko Mori, Yasushi Koyanagawa, Yoshiyuki Tomita
-
Patent number: 6965115Abstract: An airtight processing apparatus comprises a chamber having a side wall and a bottom wall airtightly fixed to the side wall, and a bed supported inside the chamber by the side wall with a gap from the bottom wall.Type: GrantFiled: June 25, 2004Date of Patent: November 15, 2005Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Naoki Yasumitsu, Eiichi Hiraoka, Yoshiyuki Tomita
-
Publication number: 20050187653Abstract: The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.Type: ApplicationFiled: April 21, 2005Publication date: August 25, 2005Inventors: Hidehiko Mori, Yoshiyuki Tomita, Kazutoshi Sakaki
-
Patent number: 6925355Abstract: The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.Type: GrantFiled: August 27, 2002Date of Patent: August 2, 2005Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Hidehiko Mori, Yoshiyuki Tomita, Kazutoshi Sakaki
-
Publication number: 20040263819Abstract: An airtight processing apparatus comprises a chamber having a side wall and a bottom wall airtightly fixed to the side wall, and a bed supported inside the chamber by the side wall with a gap from the bottom wall.Type: ApplicationFiled: June 25, 2004Publication date: December 30, 2004Applicant: Sumitomo Heavy Industries, Ltd.Inventors: Naoki Yasumitsu, Eiichi Hiraoka, Yoshiyuki Tomita
-
Patent number: 6817104Abstract: The speed and precision in positioning a moving table in the X-axis and Y-axis directions is enhanced dramatically. An X-Y stage apparatus is provided, in which a moving table is supported relative to a stationary base, with slight displacements made possible within the XY plane, and in which a component mounted and placed on the moving table can be positioned within the XY plane. The X-Y stage apparatus includes an elastic hinge that is flexible only in one or two direction among the X-axis, Y-axis, and Z-axis directions, and rigid in directions of the other axes. The moving table is supported relative to the stationary base with slight displacements made possible in the XY plane, using an elastic deformation of each of the elastic hinges in the flexible direction. Furthermore, the moving table can be slightly displaced within the XY plane, using an X-axis linear motor, and a Y-axis linear motor.Type: GrantFiled: May 15, 2002Date of Patent: November 16, 2004Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Makoto Kaneko, Hiroshi Morita, Yasuhito Nakamori, Masanobu Sugimine, Yoshiyuki Tomita
-
Publication number: 20040064935Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.Type: ApplicationFiled: October 6, 2003Publication date: April 8, 2004Applicant: Sumitomo Heavy Industries, Ltd.Inventors: Hidehiko Mori, Yasushi Koyanagawa, Yoshiyuki Tomita
-
Patent number: 6668202Abstract: A position control system includes a PID controller for generating a current target value of a linear motor from a difference between a positional detected value and a positional command value, and a disturbance observer. The disturbance observer includes a signal processing unit comprising a filter for filtering a torque command value for a motor drive and an input torque estimating filter carrying out estimation for obtaining an estimated input load torque from the detected positional value. An inverse model of a motor torque constant calculates an estimated disturbance load torque from the difference between the filtered torque command value and the estimated input load torque and generates a correction value for the current target value so as to cancel a disturbance torque on the basis of the estimated disturbance load torque being calculated.Type: GrantFiled: November 21, 2001Date of Patent: December 23, 2003Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Kenichi Makino, Masayuki Yamamoto, Yoshiyuki Tomita
-
Publication number: 20030213135Abstract: The speed and precision in positioning a moving table in the X-axis and Y-axis directions is enhanced dramatically. An X-Y stage apparatus is provided, in which a moving table is supported relative to a stationary base, with slight displacements made possible within the XY plane, and in which a component mounted and placed on the moving table can be positioned within the XY plane. The X-Y stage apparatus includes an elastic hinge that is flexible only in one or two direction among the X-axis, Y-axis, and Z-axis directions, and rigid in directions of the other axes. The moving table is supported relative to the stationary base with slight displacements made possible in the XY plane, using an elastic deformation of each of the elastic hinges in the flexible direction. Furthermore, the moving table can be slightly displaced within the XY plane, using an X-axis linear motor, and a Y-axis linear motor.Type: ApplicationFiled: May 15, 2002Publication date: November 20, 2003Inventors: Makoto Kaneko, Hiroshi Morita, Yasuhito Nakamori, Masanobu Sugimine, Yoshiyuki Tomita
-
Patent number: 6644584Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.Type: GrantFiled: February 27, 2002Date of Patent: November 11, 2003Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Hidehiko Mori, Yasushi Koyanagawa, Yoshiyuki Tomita
-
Publication number: 20030160126Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.Type: ApplicationFiled: February 27, 2002Publication date: August 28, 2003Inventors: Hidehiko Mori, Yasushi Koyanagawa, Yoshiyuki Tomita
-
Patent number: 6584367Abstract: A Y stage is capable of translational driving in the Y-axial direction, by independently controllable Y1 linear motor and Y2 linear motor. The amount of movement of the Y stage is detected by a Y1 linear encoder and Y2 linear encoder, and fed back to a Y control system and &thgr; control system. The Y control system outputs a translational thrust command value, by receiving the average value of each positional detecting value measured by the Y1 linear encoder and Y2 linear encoder as the stage translational direction position feedback value. The &thgr; control system receives the difference between each position detecting value as a stage yawing direction position feedback value, and outputs a yawing direction thrust command value. A non-interference block outputs Y1 linear motor thrust command value and Y2 linear motor thrust command value, by the use of the translational thrust command value and the thrust command value.Type: GrantFiled: June 30, 2000Date of Patent: June 24, 2003Assignee: Sumitomo Heavy Industries, Ltd.Inventors: Kenichi Makino, Yoshiyuki Tomita, Hidehiko Mori