Abstract: A user terminal is connected through the Internet to a server. On the basis of the identification information of the client inputted from the client terminal, the server extracts an service selected by the client from a database for user management, further, extracts calculated maintenance contents for each service from a database for service management and sends them to the user terminal. Thus, the user can collect maintenance contents, such as the staff capable of providing service, the time until the user receives a service, and the charge, so that the user can utilize the information as indications to select an optimal service such as maintenance.

Abstract: A computer terminal connected to a manufacturing apparatus as an object of the maintenance management is connected to a server machine providing a maintenance management service by a network, enabling bi-directional communication. The computer terminal monitors whether or not the object apparatus is restarted and transmits restart information indicating restart completion due to maintenance performed on the object apparatus by the customer to the server machine upon determining that the object apparatus is restarted. The server machine generates a random number within the specific range when receiving the restart information from the computer terminal, retrieves points corresponding to the random number from the lottery point setting storage unit, and stores the retrieved points in the lottery point storage unit. This can encourage the customer to perform maintenance on the object apparatus in order to indicate said restart completion to obtain more points.

Abstract: A computer terminal connected to a manufacturing apparatus as an object of the maintenance management is connected to a server machine providing a maintenance management service by a network, enabling bi-directional communication. The computer terminal transmits maintenance information including a kind of a maintenance method executed at the customer side to the server machine. The server machine acquires the kind of the maintenance method from the maintenance information received from the computer terminal, retrieves points corresponding to the kind of the maintenance method, and stores the retrieved points in a maintenance point storage unit. More points are set for more time consuming maintenance. This can encourage the customer to perform more time consuming maintenance on the manufacturing apparatus in order to obtain more points.

Abstract: A computer terminal connected to a manufacturing apparatus as an object of the maintenance management is connected to a server machine providing a maintenance management service by a network, enabling bi-directional communication. The computer terminal monitors whether or not the object apparatus is restarted and transmits restart information indicating restart completion due to maintenance performed on the object apparatus by the customer to the server machine upon determining that the object apparatus is restarted. The server machine generates a random number within the specific range when receiving the restart information from the computer terminal, retrieves points corresponding to the random number from the lottery point setting storage unit, and stores the retrieved points in the lottery point storage unit. This can encourage the customer to perform maintenance on the object apparatus in order to indicate said restart completion to obtain more points.

Abstract: A computer terminal 110 connected to a manufacturing apparatus 120 as an object of the maintenance management is connected to a server machine 210 providing a maintenance management service by a network 500, enabling bi-directional communication. The computer terminal transmits status information on an apparatus as an object of the maintenance management to the server machine in response to a status information transmission request received from a server at every predetermined interval. The server machine includes a status point information management database for storing status points generated according to status information and determines whether status information has been received at every predetermined interval. Each time it is determined that status information is received, a predetermined point is added so as to update the status points of the status point information management database. This can encourage a customer to perform maintenance by him/herself and reduce workload of a serviceman.

Abstract: A computer terminal 110 connected to a manufacturing apparatus 120 as an object of the maintenance management is connected to a server machine 210 providing a maintenance management service by a network 500, enabling bi-directional communication. The computer terminal transmits status information on an apparatus as an object of the maintenance management to the server machine in response to a status information transmission request received from a server at every predetermined interval. The server machine includes a status point information management database for storing status points generated according to status information and determines whether status information has been received at every predetermined interval. Each time it is determined that status information is received, a predetermined point is added so as to update the status points of the status point information management database. This can encourage a customer to perform maintenance by him/herself and reduce workload of a serviceman.

Abstract: A computer terminal 110 connected to a manufacturing apparatus 120 as an object of the maintenance management is connected to a server machine 210 providing a maintenance management service by a network 500, enabling bi-directional communication. The computer terminal transmits status information on an apparatus as an object of the maintenance management to the server machine in response to a status information transmission request received from a server at every predetermined interval. The server machine includes a status point information management database for storing status points generated according to status information and determines whether status information has been received at every predetermined interval. Each time it is determined that status information is received, a predetermined point is added so as to update the status points of the status point information management database. This can encourage a customer to perform maintenance by him/herself and reduce workload of a serviceman.

Abstract: A plasma processing device is able to positively enhance a process-gas exhaust efficiency in a processing region and restrict plasma leaking. A processing container of a magnetron type parallel plate plasma processing device has a separator for separating the inside of the processing container into a processing region and an exhaust region. The separator has a plurality of gas passage holes to establish communication between the processing region and the exhaust region, and consists of a non-conductive member. A conductive member is disposed on a gas passage-side surface facing the gas passage holes. A voltage V is applied by a power supply to the conductive member so that the gas passage-side surface is at a potential higher than that of a processing-region surface.

Abstract: A plasma processing device able to positively enhance a process-gas exhaust efficiency in a processing region and restrict plasma leaking. A processing container of a magnetron type parallel plate plasma processing device has a separator for separating the inside of the processing container into a processing region and an exhaust region. The separator has a plurality of gas passage holes to establish communication between the processing region and the exhaust region, and includes a non-conductive member. A conductive member is disposed on a gas passage-side surface facing the gas passage holes. A voltage V is applied by a power supply to the conductive member so that the gas passage-side surface is at a potential higher than that of a processing-region surface.

Abstract: A computer terminal 110 connected to a manufacturing apparatus 120 as an object of the maintenance management is connected to a server machine 210 providing a maintenance management service by a network 500, enabling bi-directional communication. The computer terminal transmits status information on an apparatus as an object of the maintenance management to the server machine in response to a status information transmission request received from a server at every predetermined interval. The server machine includes a status point information management database for storing status points generated according to status information and determines whether status information has been received at every predetermined interval. Each time it is determined that status information is received, a predetermined point is added so as to update the status points of the status point information management database. This can encourage a customer to perform maintenance by him/herself and reduce workload of a serviceman.

Abstract: A user terminal is connected through the Internet to a server. On the basis of the identification information of the client inputted from the client terminal, the server extracts an service selected by the client from a database for user management, further, extracts calculated maintenance contents for each service from a database for service management and sends them to the user terminal. Thus, the user can collect maintenance contents, such as the staff capable of providing service, the time until the user receives a service, and the charge, so that the user can utilize the information as indications to select an optimal service such as maintenance.

Abstract: An electron beam excited plasma system is provided with a first auxiliary electrode for initial discharge, an anode having an opening, a cathode, having an opening and located between the anode and the first auxiliary electrode, for producing an initial discharge between the first auxiliary electrode and the cathode, and for producing a plasma-generating discharge between the anode and the cathode, a second auxiliary electrode, having an opening and located between the cathode and the anode, for facilitating the generation of the discharge plasma between the cathode and the anode, a gas supply device for supplying a discharge plasma-generating gas into the region between the cathode and the anode, and magnetic field generator for generating a magnetic field and for applying this magnetic field to the region between the cathode and the anode, such that a cusp magnetic field is generated in the vicinity of the cathode.

Abstract: A mesa type power semiconductor device comprising a mesa groove disposed on the bottom thereof with separated gate electrodes leaving the central portion of the groove bottom free from a gate electrode. This construction is effective in preventing occurrence of an insulator breakdown between a cathode and a gate electrode.

Abstract: Disclosed is a semiconductor device comprising: a semiconductor body having a first semiconductor layer of the N conductivity type, second and third semiconductor layers of the P conductivity type, and first and second regions of the N conductivity type formed in the second semiconductor layer; a cathode electrode having first and second portions formed on the first semiconductor region; a gate electrode provided in the second semiconductor layer in opposition to the cathode electrode with the second semiconductor region interposed therebetween; an anode electrode provided on the third semiconductor layer; an auxiliary electrode consisting of two first portions and one second portion connected at ends respectively to the first portions, said first portions being formed on said second region and having free ends spaced from each other, and said second portion formed on said second layer and extending along the periphery of the first portion of said cathode electrode; and the second portion of the cathode elect

Abstract: With a semiconductor device embodying this invention, a semiconductor element is clamped between a pair of electrodes in a housing. A hollow cylindrical explosion-proof member is so set in the housing as to enclose the semiconductor element. The hollow cylindrical explosion-proof element is prepared from soft elastic material capable of absorbing the force of the explosion of the semiconductor element.