Abstract: A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor; and a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor.

Abstract: A treatment method includes an indwelling step of indwelling a medical appliance in a trachea T of a patient, the medical appliance having a plurality of types of metals disposed side by side on a side surface of a pipe body, and the medical appliance generates a current between adjacent metals out of the plurality of types of metals when in contact with a foreign substance or saliva having flown into the trachea.

Abstract: A first tube is a medical tube provided with a first portion, a second portion and a third portion in this order from the proximal end side toward the distal end side and is made of a resin. At the second portion, the outer diameter is smaller than the outer diameter of the first portion and the inner diameter is substantially equal to the inner diameter of the first portion. At the third portion, the outer diameter and the inner diameter are respectively smaller than the outer diameter and the inner diameter of the second portion. In this manner, a medical tube in which the outer diameter of the proximal end side is relatively large and the outer diameter of the distal end side is relatively small while securing the inner diameter having a sufficient size at the distal end side can be provided.

Abstract: A medical tube includes a first portion, a second portion, a third portion, and a fourth portion in this order from a proximal side to a distal side thereof. The first portion has a tubular resin layer, the second portion has a tubular inner layer and outer layer, the third portion as an inner layer and outer layer, and the fourth portion has a tubular resin layer. When flexural rigidity of the first portion, the second portion, the third portion, and the fourth portion is G1, G2, G3, and G4, respectively, the flexural rigidity of each portion being configured to have a relationship with each other portion based upon the following expression (1): G1>G2>G3>G4??(1).

Abstract: A treatment method includes an indwelling step of indwelling a medical appliance in a trachea T of a patient, the medical appliance having a plurality of types of metals disposed side by side on a side surface of a pipe body, and the medical appliance generates a current between adjacent metals out of the plurality of types of metals when in contact with a foreign substance or saliva having flown into the trachea.

Abstract: A medical tube includes a first portion, a second portion, a third portion, and a fourth portion in this order from a proximal side to a distal side thereof. The first portion has a tubular resin layer, the second portion has a tubular inner layer and outer layer, the third portion as an inner layer and outer layer, and the fourth portion has a tubular resin layer.

Abstract: A first tube is a medical tube provided with a first portion, a second portion and a third portion in this order from the proximal end side toward the distal end side and is made of a resin. At the second portion, the outer diameter is smaller than the outer diameter of the first portion and the inner diameter is substantially equal to the inner diameter of the first portion. At the third portion, the outer diameter and the inner diameter are respectively smaller than the outer diameter and the inner diameter of the second portion. In this manner, a medical tube in which the outer diameter of the proximal end side is relatively large and the outer diameter of the distal end side is relatively small while securing the inner diameter having a sufficient size at the distal end side can be provided.

Abstract: A power converting apparatus includes a rectifying circuit having a pair of AC power input terminals and a pair of rectified voltage output terminals; a reactor; and a charging and discharging circuit connected between the rectified voltage output terminals. The charging and discharging circuit includes a first condenser connected with one of the rectified voltage output terminals and one of the AC power input terminals; and a second condenser connected with the other of the rectified voltage output terminals and the one AC power input terminal. The reactor generates a resonance current together with the first condenser and the second condenser, and the second condenser discharges to zero voltage while the first condenser is charged.

Abstract: A power converting apparatus includes a rectifying circuit having a pair of AC power input terminals and a pair of rectified voltage output terminals; a reactor; and a charging and discharging circuit connected between the rectified voltage output terminals. The charging and discharging circuit includes a first condenser connected with one of the rectified voltage output terminals and one of the AC power input terminals; and a second condenser connected with the other of the rectified voltage output terminals and the one AC power input terminal. The reactor generates a resonance current together with the first condenser and the second condenser, and the second condenser discharges to zero voltage while the first condenser is charged.

Abstract: A power converting apparatus includes a rectifying circuit having a pair of AC power input terminals and a pair of rectified voltage output terminals; a reactor; and a charging and discharging circuit connected between the rectified voltage output terminals. The charging and discharging circuit includes a first condenser connected with one of the rectified voltage output terminals and one of the AC power input terminals; and a second condenser connected with the other of the rectified voltage output terminals and the one AC power input terminal. The reactor generates a resonance current together with the first condenser and the second condenser, and the second condenser discharges to zero voltage while the first condenser is charged.

Abstract: A method and system of holding a substrate to decrease foreign substances on the back surface thereof. The substrate holding system includes a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface thereof to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts a cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact each other in the large portion of the remaining area.

Abstract: A method and system of holding a substrate where foreign substances on the back surface can be decreased. The substrate holding system comprises a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact to each other in the large portion of the remaining area.

Abstract: A method and system of holding a substrate where foreign substances on the back surface can be decreased. The substrate holding system comprises a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact to each other in the large portion of the remaining area.

Abstract: Present invention provides a method of holding substrate and a substrate holding system where the amount of foreign substances on the back surface can be decreased, and a little amount of foreign substances may be transferred from a mounting table to a substrate. The substrate holding system comprises a ring-shaped leakage-proof surface having smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions against the substrate on the specimen table between the corresponding position to the periphery of the substrate and the corresponding position to the center of the substrate, and electrostatic ttraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface.

Abstract: A method and system of holding a substrate where foreign substances on the back surface can be decreased. The substrate holding system comprises a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact to each other in the large portion of the remaining area.

Abstract: A method and system of holding a substrate where foreign substances on the back surface can be decreased. The substrate holding system comprises a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact to each other in the large portion of the remaining area.

Abstract: A method and system of holding a substrate where foreign substances on the back surface can be decreased. The substrate holding system comprises a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact to each other in the large portion of the remaining area.

Abstract: A method and system of holding a substrate where foreign substances on the back surface can be decreased. The substrate holding system comprises a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact to each other in the large portion of the remaining area.

Abstract: It is intended to extend life spans of devices as a whole by reducing differences of temperatures of devices which are mounted on a printed circuit board by plural number without increasing the volume of cooling gas. In the method of cooling multiple driver's ICs which are continuously mounted on a printed circuit board, the devices having heat sinks provided with multiple radiating fins disposed thereon in parallel with one another, each radiating fin is positioned relative to a blowing direction of cooling gas at a given inclination angle &thgr;.

Abstract: A method and system of holding a substrate where foreign substances on the back surface can be decreased. The substrate holding system comprises a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact to each other in the large portion of the remaining area.