Abstract: The present invention relates to a beam steering system. The system includes an array of a plurality of antenna elements, each antenna element being electrically and mechanically controlled for steering a beam in a specific direction, and a millimeter wave subsystem quasi-optically integrated with a 3-dimensional beam steering device and an MMIC-type active circuit. The antenna element is controlled in real time by an electrical driving method so as to be moved in 2-dimensional space. That is, in the 3-dimensional system of the present invention, the beam is electrically controlled by a phase shifter, and each antenna element is physically moved by a mechanical driving mechanism. The 3-dimensional beam steering antenna and the associated devices are monolithically integrated on a substrate using MEMS technology, and the active circuit elements such as a mixer, a power amplifier (PA), a low noise amplifier (LNA), a VCO, etc. are integrated in an MMIC active array.

Abstract: A microwave tunable filter having some advantages as follows: a) the integration of MEMS tunable filter and MMIC; b) the very low signal transmission loss and low dispersion; and c) the drastic variation and linear characteristic of frequency by means of MEMS capacitor and an external control signal. The microwave tunable MEMS filter includes a plurality of unit resonant cells, each unit resonant cell being formed by various serial and parallel combination of an inductor, a capacitor, a transmission line, and a variable MEMS capacitor, whereby capacitance variation of the variable MEMS capacitor in the unit resonant cell converts a resonant frequency of the unit resonant cell to thereby convert a center frequency of the filter.