Abstract: A hydraulic pump performance deterioration detection system according to one embodiment includes: a variable displacement hydraulic pump that supplies a hydraulic liquid to a hydraulic actuator to move the hydraulic actuator; a regulator that changes a displacement of the hydraulic pump in accordance with a command current; and control circuitry that feeds the command current to the regulator. When the hydraulic actuator is not moving, in a state where a switching valve located on a passage through which the hydraulic liquid delivered from the hydraulic pump flows is switched to a closed position and the hydraulic pump is being driven at a predetermined rotation speed, the control circuitry determines whether or not performance of the hydraulic pump has deteriorated based on a current value of the command current and a delivery pressure of the hydraulic pump measured by a pressure sensor.

Abstract: A hydraulic pump performance deterioration detection system according to one embodiment includes: a hydraulic pump that is driven by a prime mover and that supplies a hydraulic liquid to a hydraulic actuator to move the hydraulic actuator; a switching valve located on a passage through which the hydraulic liquid delivered from the hydraulic pump flows, the switching valve being switchable between an open position and a closed position; and control circuitry configured to change a rotation speed of the prime mover. When the hydraulic actuator is not moving, in a state where the switching valve is switched to the closed position, the control circuitry determines whether or not performance of the hydraulic pump has deteriorated based on the rotation speed of the prime mover and a delivery pressure of the hydraulic pump measured by a pressure sensor.

Abstract: In a case where it is determined that forming processing can be performed, a curable composition on a substrate is cured by a first curing unit in a state where a member is in contact with the curable composition, the member is separated, and the curable composition is further cured by a second curing unit. In a case where it is determined that the forming processing cannot be performed, the curable composition is cured by the second curing unit in a state where the curable composition is separated from the member without the curable composition being cured by the first curing unit. This can prevent carry-out of the substrate to which an uncured composition is applied and contamination inside and outside an apparatus even in a case where normal processing cannot be performed.

Abstract: An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.

Abstract: An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.

Abstract: An imprint apparatus includes a controller for controlling an imprint process and a supply device for supplying an imprint material. The supply device includes discharge devices to discharge an imprint material, and a discharge controller to control the discharge devices under the control of the controller. The discharge controller includes a buffer memory to temporarily store driving waveform data. Each of the discharge devices includes a discharge element and a driver for driving the discharge element based on the driving waveform data stored in the buffer memory. While a supply step of supplying an imprint material for a first shot region is performed, the controller transfers the driving waveform data for the supply step of a second shot region to a storage area of the buffer memory which is not used in the supply step of the first shot region.

Abstract: An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.

Abstract: An imprinting apparatus 100 includes a control unit 126 that controls movement of a stage 104. During a period after a pattern is formed in a first region of regions until a pattern is formed in a second region that differs from the first region of the regions, the control unit 126 does not allow the first region to pass through a facing portion that faces a discharge ports 122b. After a predetermined time has elapsed since the discharging unit 106 finally discharges a imprint material 127 to the substrate with an airstream generated along a substrate from the facing portion at the facing portion that faces the discharge ports 122b, the control unit 126 controls movement of the stage such that the regions in which the pattern is formed are allowed to pass through the facing portion.

Abstract: An imprint apparatus includes a controller for controlling an imprint process and a supply device for supplying an imprint material. The supply device includes discharge devices to discharge an imprint material, and a discharge controller to control the discharge devices under the control of the controller. The discharge controller includes a buffer memory to temporarily store driving waveform data. Each of the discharge devices includes a discharge element and a driver for driving the discharge element based on the driving waveform data stored in the buffer memory. While a supply step of supplying an imprint material for a first shot region is performed, the controller transfers the driving waveform data for the supply step of a second shot region to a storage area of the buffer memory which is not used in the supply step of the first shot region.

Abstract: A wiring board includes: an insulator layer composed mainly of ceramic; a conductor extending through the insulator layer in a thickness direction thereof; and an electrode pad disposed on a first surface of the insulator layer and connected electrically with the conductor, wherein: the electrode pad includes through holes extending through the electrode pad in a thickness direction thereof; and each of the through holes is positioned to avoid overlapping with the conductor in the thickness direction of the insulator layer.

Abstract: An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.

Abstract: An imprint apparatus, to perform an imprinting process for bringing a mold and an imprint material on a substrate into contact with each other and curing the imprint material, includes a substrate deforming mechanism and a controller. The substrate deforming mechanism deforms the substrate in such a manner that a surface geometry of at least part of the substrate protrudes toward the mold. The controller determines a condition for the imprinting process on a shot area of the substrate based on the surface geometry of the shot area when the mold is brought into contact with the imprint material on the shot area.

Abstract: [Objective] To provide a wiring substrate for electronic component inspection apparatus which includes a first laminate of resin layers with a plurality of pads for probe provided on its front surface and a second laminate of ceramic layers disposed on the back side of the first laminate and which, despite joining by brazing of a plurality of studs to the back surface of the second laminate, is free from deformation of resin of the first laminate caused by softening or the like and from accidental formation of a short circuit between brazing material layers used for the brazing and external connection terminals formed on the back surface of the second laminate.

Abstract: A wiring board includes: an insulator layer composed mainly of ceramic; a conductor extending through the insulator layer in a thickness direction thereof; and an electrode pad disposed on a first surface of the insulator layer and connected electrically with the conductor, wherein: the electrode pad includes through holes extending through the electrode pad in a thickness direction thereof; and each of the through holes is positioned to avoid overlapping with the conductor in the thickness direction of the insulator layer.

Abstract: An imprinting apparatus 100 includes a control unit 126 that controls movement of a stage 104. During a period after a pattern is formed in a first region of regions until a pattern is formed in a second region that differs from the first region of the regions, the control unit 126 does not allow the first region to pass through a facing portion that faces a discharge ports 122b. After a predetermined time has elapsed since the discharging unit 106 finally discharges a imprint material 127 to the substrate with an airstream generated along a substrate from the facing portion at the facing portion that faces the discharge ports 122b, the control unit 126 controls movement of the stage such that the regions in which the pattern is formed are allowed to pass through the facing portion.

Abstract: [Objective] To provide a wiring substrate for electronic component inspection apparatus which includes a first laminate of resin layers with a plurality of pads for probe provided on its front surface and a second laminate of ceramic layers disposed on the back side of the first laminate and which, despite joining by brazing of a plurality of studs to the back surface of the second laminate, is free from deformation of resin of the first laminate caused by softening or the like and from accidental formation of a short circuit between brazing material layers used for the brazing and external connection terminals formed on the back surface of the second laminate.

Abstract: An imprint apparatus, to perform an imprinting process for bringing a mold and an imprint material on a substrate into contact with each other and curing the imprint material, includes a substrate deforming mechanism and a controller. The substrate deforming mechanism deforms the substrate in such a manner that a surface geometry of at least part of the substrate protrudes toward the mold. The controller determines a condition for the imprinting process on a shot area of the substrate based on the surface geometry of the shot area when the mold is brought into contact with the imprint material on the shot area.

Abstract: An imprint apparatus include: a substrate stage; a dispense unit; an irradiation unit; a receiving unit configured to receive an imprint material that is dummy dispensed from the dispense unit; and a controller configured to cause the dummy dispensed imprint material to be irradiated by an energy beam from the irradiation unit without bringing the dummy dispensed imprint material into contact with the mold.

Abstract: An imprint apparatus include: a substrate stage; a dispense unit; an irradiation unit; a receiving unit configured to receive an imprint material that is dummy dispensed from the dispense unit; and a controller configured to cause the dummy dispensed imprint material to be irradiated by an energy beam from the irradiation unit without bringing the dummy dispensed imprint material into contact with the mold.

Abstract: Provided is an imprint method comprising a step for determining whether or not a process for reducing adhesive strength between the imprint material and the pattern of the mold is required, wherein, if the determination step determines that the process for reducing adhesive strength is required, the process for reducing adhesive strength is performed by bringing the material for reducing adhesive strength on the substrate for reducing adhesive strength, which is different from a substrate to be patterned, into contact with the pattern of the mold, and then an imprint process is performed, whereas if the determination step determines that the process for reducing adhesive strength is not required, the process for reducing adhesive strength is not performed, and the imprint process is performed.