Patents by Inventor Yu-Lin Yang

Yu-Lin Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10630018
    Abstract: A waterproof connector includes an insulating housing integrally molded, a plurality of terminals, a fastening element and an outer shell. The insulating housing has a connecting end, and an assembling end connected with the connecting end. The insulating housing opens a penetrating groove penetrating through the connecting end and the assembling end. An insertion groove is opened in a rear end of the assembling end. The plurality of terminals are assembled in the penetrating groove. Each terminal has a main portion, a lying U-shaped soldering portion connected with one end of the main portion, and a lying U-shaped contact portion connected with the other end of the main portion. The fastening element includes an isolation part inserted into the insertion groove. The soldering portion of each terminal clamps a top surface and a bottom surface of the isolation part. The outer shell surrounds the insulating housing.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: April 21, 2020
    Assignee: Cheng Uei Precision Industry Co., Ltd.
    Inventors: Yu Lin Yang, Feng Tian Liu
  • Patent number: 10629679
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. The first semiconductor layers, the second semiconductor layer and an upper portion of the fin structure at a source/drain region of the fin structure, which is not covered by the sacrificial gate structure, are etched. A dielectric layer is formed over the etched upper portion of the fin structure. A source/drain epitaxial layer is formed. The source/drain epitaxial layer is connected to ends of the second semiconductor wires, and a bottom of the source/drain epitaxial layer is separated from the fin structure by the dielectric layer.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: April 21, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Lin Yang, Chao-Ching Cheng, Tzu-Chiang Chen, I-Sheng Chen
  • Patent number: 10591434
    Abstract: The invention provides a bio-detection device, including a carrier, a plurality of spacers, an electronic circuit, and a package layer, wherein an open platform is formed. The carrier includes a test region and a signal transmission wiring, wherein the test region is configured to carry a fluid under test. The spacers are located on the test region and electrically connected to two different voltage levels to form a capacitor for sensing a capacitance of the fluid. The spacers are connected to the signal transmission wiring. The electronic circuit receives and processes a sensing signal corresponding to the capacitance of the fluid. The package layer covers a portion of the carrier but does not cover the test region. The open platform is formed whereby a user can easily put in the fluid. The open platform has a bottom which includes the test region, and an area of the open platform is defined by the spacers and the package layer.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: March 17, 2020
    Assignee: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Yu-Lin Yang, Chun-Hao Chang, Min-Da Wu, Hung-Der Su, Da-Hong Qian
  • Publication number: 20200083339
    Abstract: A gate-all-around structure including a first transistor is provided. The first transistor includes a semiconductor substrate having a top surface, and a first nanostructure over the top surface of the semiconductor substrate and between a first source and a first drain. The first transistor also includes a first gate structure around the first nanostructure, and an inner spacer between the first gate structure and the first source, wherein an interface between the inner spacer and the first gate structure is non-flat. The first transistor includes an isolation layer between the top surface of the semiconductor substrate and the first source and the first drain.
    Type: Application
    Filed: November 12, 2019
    Publication date: March 12, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chao-Ching CHENG, Yu-Lin YANG, I-Sheng CHEN, Tzu-Chiang CHEN
  • Publication number: 20200052092
    Abstract: A semiconductor device and a method of manufacturing the same are disclosed. The semiconductor device includes semiconductor wires disposed over a substrate, a source/drain epitaxial layer in contact with the semiconductor wires, a gate dielectric layer disposed on and wrapping around each channel region of the semiconductor wires, a gate electrode layer disposed on the gate dielectric layer and wrapping around the each channel region, and dielectric spacers disposed in recesses formed toward the source/drain epitaxial layer.
    Type: Application
    Filed: October 18, 2019
    Publication date: February 13, 2020
    Inventors: Chao-Ching CHENG, Yu-Lin YANG, Wei-Sheng YUN, Chen-Feng HSU, Tzu-Chiang CHEN
  • Publication number: 20200052086
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. A source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is etched, thereby forming a source/drain space. The first semiconductor layers are laterally etched through the source/drain space. A first insulating layer is formed, in the source/drain space, at least on etched first semiconductor layers. A source/drain epitaxial layer is formed in the source/drain space, thereby forming air gaps between the source/drain epitaxial layer and the first semiconductor layers.
    Type: Application
    Filed: October 18, 2019
    Publication date: February 13, 2020
    Inventors: Yu-Lin YANG, Tung Ying LEE, Shao-Ming YU, Chao-Ching CHENG, Tzu-Chiang CHEN, Chao-Hsien HUANG
  • Publication number: 20200052091
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. A source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is etched, thereby forming a source/drain space. The first semiconductor layers are laterally etched through the source/drain space. An inner spacer made of a dielectric material is formed on an end of each of the etched first semiconductor layers. A source/drain epitaxial layer is formed in the source/drain space to cover the inner spacer. A lateral end of each of the first semiconductor layers has a V-shape cross section after the first semiconductor layers are laterally etched.
    Type: Application
    Filed: October 18, 2019
    Publication date: February 13, 2020
    Inventors: Chao-Ching CHENG, Chen-Feng HSU, Tzu-Chiang CHEN, Tung Ying LEE, Wei-Sheng YUN, Yu-Lin YANG
  • Publication number: 20200044062
    Abstract: A method includes providing a structure having a substrate and a fin extending from the substrate, wherein the fin includes a first semiconductor material and has a source region, a channel region, and a drain region for a transistor; forming a gate stack over the channel region; performing a surface treatment to the fin in the source and drain regions, thereby converting an outer portion of the fin in the source and drain regions into a different material other than the first semiconductor material; etching the converted outer portion of the fin in the source and drain regions, thereby reducing a width of the fin in the source and drain regions; and depositing an epitaxial layer over the fin in the source and drain regions.
    Type: Application
    Filed: October 14, 2019
    Publication date: February 6, 2020
    Inventors: Wei-Han Fan, Wei-Yuan Lu, Yu-Lin Yang, Chun-Hsiang Fan, Sai-Hooi Yeong
  • Publication number: 20200043803
    Abstract: Nanowire devices and fin devices are formed in a first region and a second region of a substrate. To form the devices, alternating layers of a first material and a second material are formed, inner spacers are formed adjacent to the layers of the first material, and then the layers of the first material are removed to form nanowires without removing the layers of the first material within the second region. Gate structures of gate dielectrics and gate electrodes are formed within the first region and the second region in order to form the nanowire devices in the first region and the fin devices in the second region.
    Type: Application
    Filed: October 11, 2019
    Publication date: February 6, 2020
    Inventors: Chao-Ching Cheng, Tzu-Chiang Chen, Chen-Feng Hsu, Yu-Lin Yang, Tung Ying Lee, Chih Chieh Yeh
  • Patent number: 10535732
    Abstract: Transistor structures and methods of forming transistor structures are provided. The transistor structures include alternating layers of a first epitaxial material and a second epitaxial material. In some embodiments, one of the first epitaxial material and the second epitaxial material may be removed for one of an n-type or p-type transistor. A bottommost layer of the first epitaxial material and the second epitaxial material maybe be removed, and sidewalls of one of the first epitaxial material and the second epitaxial material may be indented or recessed.
    Type: Grant
    Filed: November 20, 2017
    Date of Patent: January 14, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Yi Peng, Hung-Li Chiang, Yu-Lin Yang, Chih Chieh Yeh, Yee-Chia Yeo, Chi-Wen Liu
  • Publication number: 20190393102
    Abstract: In a method, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. The first semiconductor layers are etched at a source/drain region of the fin structure, which is not covered by the sacrificial gate structure, thereby forming a first source/drain space in which the second semiconductor layers are exposed. A dielectric layer is formed at the first source/drain space, thereby covering the exposed second semiconductor layers. The dielectric layer and part of the second semiconductor layers are etched, thereby forming a second source/drain space. A source/drain epitaxial layer is formed in the second source/drain space. At least one of the second semiconductor layers is in contact with the source/drain epitaxial layer, and at least one of the second semiconductor layers is separated from the source/drain epitaxial layer.
    Type: Application
    Filed: August 29, 2019
    Publication date: December 26, 2019
    Inventors: Hung-Li CHIANG, Chao-Ching CHENG, Chih-Liang CHEN, Tzu-Chiang CHEN, Ta-Pen GUO, Yu-Lin YANG, I-Sheng CHEN, Szu-Wei HUANG
  • Patent number: 10483262
    Abstract: A method for manufacturing a semiconductor device includes forming a fin structure over a substrate and forming a first gate structure over a first portion of the fin structure. A first nitride layer is formed over a second portion of the fin structure. The first nitride layer is exposed to ultraviolet radiation. Source/drain regions are formed at the second portion of the fin structure.
    Type: Grant
    Filed: May 15, 2015
    Date of Patent: November 19, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Lin Yang, Chia-Cheng Ho, Chih Chieh Yeh, Cheng-Yi Peng, Tsung-Lin Lee
  • Publication number: 20190341469
    Abstract: A semiconductor device and a method of manufacturing the same are disclosed. The semiconductor device includes semiconductor wires disposed over a substrate, a source/drain epitaxial layer in contact with the semiconductor wires, a gate dielectric layer disposed on and wrapping around each channel region of the semiconductor wires, a gate electrode layer disposed on the gate dielectric layer and wrapping around the each channel region, and dielectric spacers disposed in recesses formed toward the source/drain epitaxial layer.
    Type: Application
    Filed: July 15, 2019
    Publication date: November 7, 2019
    Inventors: Chao-Ching CHENG, Yu-Lin YANG, Wei-Sheng YUN, Chen-Feng HSU, Tzu-Chiang CHEN
  • Patent number: 10446669
    Abstract: A method includes providing a structure having a substrate and a fin extending from the substrate, wherein the fin includes a first semiconductor material and has a source region, a channel region, and a drain region for a transistor; forming a gate stack over the channel region; performing a surface treatment to the fin in the source and drain regions, thereby converting an outer portion of the fin in the source and drain regions into a different material other than the first semiconductor material; etching the converted outer portion of the fin in the source and drain regions, thereby reducing a width of the fin in the source and drain regions; and depositing an epitaxial layer over the fin in the source and drain regions.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: October 15, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei-Han Fan, Wei-Yuan Lu, Yu-Lin Yang, Chun-Hsiang Fan, Sai-Hooi Yeong
  • Publication number: 20190279911
    Abstract: Nanowire devices and fin devices are formed in a first region and a second region of a substrate. To form the devices, alternating layers of a first material and a second material are formed, inner spacers are formed adjacent to the layers of the first material, and then the layers of the first material are removed to form nanowires without removing the layers of the first material within the second region. Gate structures of gate dielectrics and gate electrodes are formed within the first region and the second region in order to form the nanowire devices in the first region and the fin devices in the second region.
    Type: Application
    Filed: May 20, 2019
    Publication date: September 12, 2019
    Inventors: Chao-Ching Cheng, Tzu-Chiang Chen, Chen-Feng Hsu, Yu-Lin Yang, Tung Ying Lee, Chih Chieh Yeh
  • Patent number: 10403550
    Abstract: In a method, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. The first semiconductor layers are etched at a source/drain region of the fin structure, which is not covered by the sacrificial gate structure, thereby forming a first source/drain space in which the second semiconductor layers are exposed. A dielectric layer is formed at the first source/drain space, thereby covering the exposed second semiconductor layers. The dielectric layer and part of the second semiconductor layers are etched, thereby forming a second source/drain space. A source/drain epitaxial layer is formed in the second source/drain space. At least one of the second semiconductor layers is in contact with the source/drain epitaxial layer, and at least one of the second semiconductor layers is separated from the source/drain epitaxial layer.
    Type: Grant
    Filed: January 31, 2018
    Date of Patent: September 3, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Li Chiang, Chao-Ching Cheng, Chih-Liang Chen, Tzu-Chiang Chen, Ta-Pen Guo, Yu-Lin Yang, I-Sheng Chen, Szu-Wei Huang
  • Publication number: 20190259877
    Abstract: A method for forming a semiconductor structure includes receiving a substrate including a dielectric structure; forming a first recess in the substrate; forming a dielectric spacer over a sidewall of the first recess; forming a first semiconductor layer to fill the first recess; removing the dielectric structure to form a second recess over the substrate; and forming a second semiconductor layer to fill the second recess. The dielectric spacer is sandwiched between the first semiconductor layer and the second semiconductor layer.
    Type: Application
    Filed: May 6, 2019
    Publication date: August 22, 2019
    Inventors: CHAO-CHING CHENG, CHEN-FENG HSU, YU-LIN YANG, JUNG-PIAO CHIU, TZU-CHIANG CHEN
  • Publication number: 20190227018
    Abstract: The invention provides a bio-detection device, including a carrier, a plurality of spacers, an electronic circuit, and a package layer, wherein an open platform is formed. The carrier includes a test region and a signal transmission wiring, wherein the test region is configured to carry a fluid under test. The spacers are located on the test region and electrically connected to two different voltage levels to form a capacitor for sensing a capacitance of the fluid. The spacers are connected to the signal transmission wiring. The electronic circuit receives and processes a sensing signal corresponding to the capacitance of the fluid. The package layer covers a portion of the carrier but does not cover the test region. The open platform is formed whereby a user can easily put in the fluid. The open platform has a bottom which includes the test region, and an area of the open platform is defined by the spacers and the package layer.
    Type: Application
    Filed: April 24, 2017
    Publication date: July 25, 2019
    Inventors: Yu-Lin Yang, Chun-Hao Chang, Min-Da Wu, Hung-Der Su, Da-Hong Qian
  • Patent number: 10361278
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. A source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is etched, thereby forming a source/drain space. The first semiconductor layers are laterally etched through the source/drain space. A first insulating layer is formed, in the source/drain space, at least on etched first semiconductor layers. A source/drain epitaxial layer is formed in the source/drain space, thereby forming air gaps between the source/drain epitaxial layer and the first semiconductor layers.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: July 23, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Lin Yang, Tung Ying Lee, Shao-Ming Yu, Chao-Ching Cheng, Tzu-Chiang Chen, Chao-Hsien Huang
  • Patent number: 10355102
    Abstract: A semiconductor device and a method of manufacturing the same are disclosed. The semiconductor device includes semiconductor wires disposed over a substrate, a source/drain epitaxial layer in contact with the semiconductor wires, a gate dielectric layer disposed on and wrapping around each channel region of the semiconductor wires, a gate electrode layer disposed on the gate dielectric layer and wrapping around the each channel region, and dielectric spacers disposed in recesses formed toward the source/drain epitaxial layer.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: July 16, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chao-Ching Cheng, Yu-Lin Yang, Wei-Sheng Yun, Chen-Feng Hsu, Tzu-Chiang Chen