Abstract: A method for processing semiconductor wafers in a furnace is provided. The method includes forming a thin film on each of the semiconductor wafers in a furnace. The furnace includes a first end thermal zone, a middle thermal zone and a second end thermal zone arranged in sequence. The method further includes controlling the temperature of the furnace in a first thermal mode during the formation of the thin film. The method also includes supplying a purging gas into the furnace after the formation of the thin film. In addition, the method includes controlling the temperature of the furnace in a second thermal mode during the supply of the purging gas. The temperature distributions of the furnace are different in the first and second thermal modes.

Abstract: A method for processing semiconductor wafers in a furnace is provided. The method includes forming a thin film on each of the semiconductor wafers in a furnace. The furnace includes a first end thermal zone, a middle thermal zone and a second end thermal zone arranged in sequence. The method further includes controlling the temperature of the furnace in a first thermal mode during the formation of the thin film. The method also includes supplying a purging gas into the furnace after the formation of the thin film. In addition, the method includes controlling the temperature of the furnace in a second thermal mode during the supply of the purging gas. The temperature distributions of the furnace are different in the first and second thermal modes.

Abstract: A method for processing semiconductor wafers in a furnace is provided. The method includes forming a thin film on each of the semiconductor wafers. The method further includes controlling the temperature of the furnace in a first thermal mode during the formation of the thin film. In the first thermal mode, a first end thermal zone, a middle thermal zone and a second end thermal zone of the furnace which are arranged in sequence have a gradually increasing temperature. The method also includes controlling the temperature of the furnace in a second thermal mode after the formation of the thin film. In the second thermal mode, the first end thermal zone, the middle thermal zone and the second end thermal zone of the furnace have a gradually decreasing temperature.

Abstract: A method for processing semiconductor wafers in a furnace is provided. The method includes forming a thin film on each of the semiconductor wafers. The method further includes controlling the temperature of the furnace in a first thermal mode during the formation of the thin film. In the first thermal mode, a first end thermal zone, a middle thermal zone and a second end thermal zone of the furnace which are arranged in sequence have a gradually increasing temperature. The method also includes controlling the temperature of the furnace in a second thermal mode after the formation of the thin film. In the second thermal mode, the first end thermal zone, the middle thermal zone and the second end thermal zone of the furnace have a gradually decreasing temperature.

Abstract: Ferrous (II) phosphate (Fe3(PO4)2) powders, lithium iron phosphate (LiFePO4) powders for a Li-ion battery and methods for manufacturing the same are provided. The lithium iron phosphate powders are represented by the following formula (II): LiFe(1-a)MaPO4 ??(II) wherein, M, and a are defined in the specification, the lithium iron phosphate powders are composed of plural flake powders, the length of each of the flake powders is 0.1-10 ?m, and a ratio of the length and the thickness of each of the flake powder is in a range from 11 to 400.

Abstract: Ferrous (II) phosphate (Fe3(PO4)2) powders, lithium iron phosphate (LiFePO4) powders for a Li-ion battery and methods for manufacturing the same are provided. The lithium iron phosphate powders are represented by the following formula (II): LiFe(1-a)MaPO4 ??(II) wherein, M, and a are defined in the specification, the lithium iron phosphate powders are composed of plural flake powders, the length of each of the flake powders is 0.1-10 ?m, and a ratio of the length and the thickness of each of the flake powder is in a range from 11 to 400.

Abstract: Ferrous (II) phosphate (Fe3(PO4)2) powders, lithium iron phosphate (LiFePO4) powders for a Li-ion battery and methods for manufacturing the same are provided. The lithium iron phosphate powders are represented by the following formula (II): LiFe(1-a)MaPO4??(II) wherein, M, and a are defined in the specification, the lithium iron phosphate powders are composed of plural flake powders, the length of each of the flake powders is 0.1-10 ?m, and a ratio of the length and the thickness of each of the flake powder is in a range from 11 to 400.

Abstract: Ferrous (II) phosphate (Fe3(PO4)2) powders, lithium iron phosphate (LiFePO4) powders for a Li-ion battery and methods for manufacturing the same are provided. The lithium iron phosphate powders are represented by the following formula (II): LiFe(1-a)MaPO4??(II) wherein, M, and a are defined in the specification, the lithium iron phosphate powders are composed of plural flake powders, the length of each of the flake powders is 0.1-10 ?m, and a ratio of the length and the thickness of each of the flake powder is in a range from 11 to 400.

Abstract: Ferrous (II) phosphate (Fe3(PO4)2) powders, lithium iron phosphate (LiFePO4) powders for a Li-ion battery and methods for manufacturing the same are provided. The lithium iron phosphate powders are represented by the following formula (II): LiFe(1-a)MaPO4??(II) wherein, M, and a are defined in the specification, the lithium iron phosphate powders are composed of plural flake powders, the length of each of the flake powders is 0.1-10 ?m, and a ratio of the length and the thickness of each of the flake powder is in a range from 11 to 400.

Abstract: Ferrous (II) phosphate (Fe3(PO4)2) powders, lithium iron phosphate (LiFePO4) powders for a Li-ion battery and methods for manufacturing the same are provided. The ferrous (II) phosphate powders are represented by the following formula (I): Fe(3-x)Mx(PO4)2.yH2O??(I) wherein, M, x, and y are defined in the specification, the ferrous (II) phosphate powders are composed of plural flake powders, and the length of each of the flake powders is 0.2-10 ?m.

Abstract: Ferrous (II) phosphate (Fe3(PO4)2) powders, lithium iron phosphate (LiFePO4) powders for a Li-ion battery and methods for manufacturing the same are provided. The ferrous (II) phosphate powders are represented by the following formula (I): Fe(3-x)Mx(PO4)2.yH2O??(I) wherein, M, x, and y are defined in the specification, the ferrous (II) phosphate powders are composed of plural flake powders, and the length of each of the flake powders is 0.2-10 ?m.

Abstract: Ferrous (II) phosphate (Fe3(PO4)2) powders, lithium iron phosphate (LiFePO4) powders for a Li-ion battery and methods for manufacturing the same are provided. The ferrous (II) phosphate powders are represented by the following formula (I): Fe(3-x)Mx(PO4)2.yH2O??(I) wherein, M, x, and y are defined in the specification, the ferrous (II) phosphate powders are composed of plural flake powders, and the length of each of the flake powders is 0.2-10 ?m.