Patents by Inventor Yugo Tanigaki

Yugo Tanigaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11822243
    Abstract: The present invention provides a negative-type photosensitive resin composition capable of obtaining a cured film suppressing generation of development residues caused by a pigment and having high sensitivity and excellent heat resistance and light blocking capability. A negative-type photosensitive resin composition contains an alkali-soluble resin (A), a radical-polymerizable compound (B), a photopolymerization initiator (C1), and a pigment (D1).
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: November 21, 2023
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Yugo Tanigaki, Akihiro Ishikawa, Kazuto Miyoshi
  • Patent number: 11561470
    Abstract: The invention aims to provide a cured film that is high in sensitivity, able to form a pattern having a small-tapered shape after a development step and after a heat curing step, helpful to depress the difference in the width of patterned openings between before and after the heat curing step, and high in light-shielding capability and also aims to provide a negative type photosensitive resin composition that serves for the production thereof.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: January 24, 2023
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Yugo Tanigaki, Kazuto Miyoshi
  • Patent number: 11086219
    Abstract: To provide a negative-type photosensitive resin composition that is highly sensitive and capable of formation of a low-taper pattern shape and that is capable of providing a cured film that is excellent in heat resistance. A negative-type photosensitive resin composition contains an (A) alkali-soluble resin, a (B) radical polymerizable compound, and a (C) photo initiator, the negative-type photosensitive resin composition being characterized in that the (A) alkali-soluble resin contains one or more species of resins selected from a (A-1) polyimide, a (A-2) polybenzoxazole, a (A-3) polyimide precursor, a (A-4) polybenzoxazole precursor, a (A-5) polysiloxane, and a (A-6) cardo based resin, and that the (B) radical polymerizable compound contains a compound having five ethylenic unsaturated bond groups in a (B-1) molecule, in an amount within the range of 51 to 99 mass %.
    Type: Grant
    Filed: March 15, 2017
    Date of Patent: August 10, 2021
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Yugo Tanigaki, Daisuke Sakii, Satoshi Kamemoto
  • Publication number: 20210191264
    Abstract: An object of the invention is to provide a cured film which is high in sensitivity, capable of forming a pattern in a low-taper shape after development, capable of the change in pattern opening width between before and after thermal curing, an excellent in light-blocking property, and a negative photosensitive resin composition that forms the film. The negative photosensitive resin composition contains an (A) alkali-soluble resin, a (C1) photo initiator, and a (Da) black colorant, where the (A) alkali-soluble resin contains a (A1) first resin including one or more selected from the group consisting of a (A1-1) polyimide, a (A1-2) polyimide precursor, a (A1-3) polybenzoxazole, and a (A1-4) polybenzoxazole precursor, and has a structural unit having a fluorine atom at a specific ratio, and the (C1) photo initiator contains an (C1-1) oxime ester-based photo initiator that has a specific structure.
    Type: Application
    Filed: October 26, 2018
    Publication date: June 24, 2021
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yugo TANIGAKI, Kazuto MIYOSHI
  • Patent number: 10983436
    Abstract: The present invention provides a negative type photosensitive resin composition having high sensitivity, excellent halftone characteristics, capability to form a small tapered pattern shape, and alkali-developability. The negative type photosensitive resin composition includes, as an alkali-soluble resin (A), at least a weakly acidic group-containing resin (A1) and an unsaturated group-containing resin (A2), the weakly acidic group-containing resin (A1) containing an acidic group having an acid dissociation constant in the range of 13.0 to 23.0 in dimethyl sulfoxide, and the unsaturated group-containing resin (A2) containing an ethylenically unsaturated double bond group.
    Type: Grant
    Filed: March 17, 2017
    Date of Patent: April 20, 2021
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Yugo Tanigaki, Satoshi Kamemoto, Kazuto Miyoshi
  • Publication number: 20210011381
    Abstract: To provide an alkaline developable negative-type photosensitive resin composition from which a cured film that has a high-resolution and low-taper pattern shape and that are excellent in heat resistance and light blocking property can be obtained. A negative-type photosensitive resin composition is characterized by containing an (A1) first resin, a (A2) second resin, a (C) photopolymerization initiator, and a (D) coloring agent, wherein the (A1) first resin is an (A1-1) polyimide and/or an (A1-2) polybenzo-oxazole, and wherein the (A2) second resin is one or more species selected from a (A2-1) polyimide precursor, a (A2-2) polybenzo-oxazole precursor, a (A2-3) polysiloxane, a (A2-4) cardo based resin, and an (A2-5) acrylic resin, and wherein a content ratio of the (A1) first resin in a total of 100 mass % of the (A1) first resin and the (A2) second resin is within the range of 25 to 90 mass %.
    Type: Application
    Filed: September 9, 2020
    Publication date: January 14, 2021
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yugo TANIGAKI, Satoshi KAMEMOTO, Kazuto MIYOSHI
  • Publication number: 20200356005
    Abstract: A problem to be addressed by the present invention is to obtain: a cured film that has high sensitivity, makes it possible to prevent generation of a development residue arising from a pigment, and has excellent heat resistance and light-blocking ability; and a negative photosensitive resin composition that is formed into the cured film.
    Type: Application
    Filed: January 15, 2019
    Publication date: November 12, 2020
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yukinori TOGO, Yugo TANIGAKI, Kazuto MIYOSHI
  • Patent number: 10802401
    Abstract: To provide an alkaline developable negative-type photosensitive resin composition from which a cured film that has a high-resolution and low-taper pattern shape and that are excellent in heat resistance and light blocking property can be obtained. A negative-type photosensitive resin composition is characterized by containing an (A1) first resin, a (A2) second resin, a (C) photopolymerization initiator, and a (D) coloring agent, wherein the (A1) first resin is an (A1-1) polyimide and/or an (A1-2) polybenzo-oxazole, and wherein the (A2) second resin is one or more species selected from a (A2-1) polyimide precursor, a (A2-2) polybenzo-oxazole precursor, a (A2-3) polysiloxane, a (A2-4) cardo based resin, and an (A2-5) acrylic resin, and wherein a content ratio of the (A1) first resin in a total of 100 mass % of the (A1) first resin and the (A2) second resin is within the range of 25 to 90 mass %.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: October 13, 2020
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Yugo Tanigaki, Satoshi Kamemoto, Kazuto Miyoshi
  • Publication number: 20200319549
    Abstract: An object of the invention is to provide a cured film which is high in sensitivity, capable of forming a pattern in a low-taper shape, capable of the change in pattern opening width between before and after thermal curing, an excellent in light-blocking property, and a photosensitive resin composition that forms the film. The photosensitive resin composition contains an (A) alkali-soluble resin, a (C) photosensitive agent, a (Da) black colorant, and a (F) a cross-linking agent, where the (A) alkali-soluble resin contains a (A1) first resin including one or more selected from the group consisting of: a specific (A1-1) polyimide; a (A1-2) polyimide precursor; a (A1-3) polybenzoxazole; and a (A1-4) polybenzoxazole precursor, and contains a structural unit having a fluorine atom at a specific ratio, the content ratio of the (Da) black colorant is a specific ratio, and the (F) cross-linking agent contains an epoxy compound that has a specific structure, and/or an epoxy resin that has a specific structural unit.
    Type: Application
    Filed: September 27, 2018
    Publication date: October 8, 2020
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yugo TANIGAKI, Kazuto MIYOSHI
  • Patent number: 10723884
    Abstract: Provided is a black pigment that enables pattern formation of pixel division layer while suppressing generation of development residue. The black pigment comprises (a) a core containing at least one organic black pigment selected from the group consisting of benzodifuranone-based black pigments, perylene-based black pigments, azo-based black pigments, and isomers thereof and (b) a coating layer containing silica and/or a metal oxide and/or a metal hydroxide.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: July 28, 2020
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Akihiro Ishikawa, Yugo Tanigaki, Kazuto Miyoshi
  • Publication number: 20200110337
    Abstract: The invention aims to provide a cured film that is high in sensitivity, able to form a pattern having a small-tapered shape after a development step and after a heat curing step, helpful to depress the difference in the width of patterned openings between before and after the heat curing step, and high in light-shielding capability and also aims to provide a negative type photosensitive resin composition that serves for the production thereof.
    Type: Application
    Filed: March 27, 2018
    Publication date: April 9, 2020
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yugo TANIGAKI, Kazuto MIYOSHI
  • Publication number: 20200012191
    Abstract: The present invention provides a photosensitive resin composition which has a light-blocking property, and at the same time, a high sensitivity, and has excellent half-tone characteristics. The present invention provides a photosensitive resin composition including an (A) alkali-soluble resin, a (B) radically polymerizable compound, a (C) photo initiator, and a (D) colorant, where the (A) alkali-soluble resin contains a polyimide, a polyimide precursor, a polybenzoxazole precursor, and/or a copolymer thereof, and the (B) radically polymerizable compound contains a (B-1) bifunctional or higher (meth)acrylic compound that has a glass transition temperature of 150° C. or higher as a homopolymer, and a (B-2) tetrafunctional or higher (meth)acrylic compound other than the (B-1).
    Type: Application
    Filed: March 16, 2018
    Publication date: January 9, 2020
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Satoshi KAMEMOTO, Yugo TANIGAKI, Kazuto MIYOSHI
  • Patent number: 10451969
    Abstract: Provided is a resin composition including: (A1) an alkali-soluble resin having a specific structural unit; (A2) at least one resin selected from the group consisting of polyimides, polybenzoxazoles, polyamideimides, precursors thereof, and copolymers thereof, the resin having a substituent that reacts with a reactive group of the alkali-soluble resin; and (B) a photosensitizer, in which the amount of the resin (A2) is 310 to 2,000 parts by weight with respect to 100 parts by weight of the resin (A1).
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: October 22, 2019
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Takenori Fujiwara, Yugo Tanigaki
  • Publication number: 20190302617
    Abstract: The present invention provides a negative photosensitive resin composition that has high pigment dispersibility and stability and can reduce residues of unexposed portions during development. The present invention provides a negative photosensitive resin composition containing an (A) alkali-soluble resin, a (B) dispersant having an amine value exceeding 0, a (C) benzofuranone based organic pigment having an amide structure, a (D) radical polymerizable compound, and a (E) photoinitiator.
    Type: Application
    Filed: June 27, 2017
    Publication date: October 3, 2019
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Shinichi MATSUKI, Yugo TANIGAKI, Kazuto MIYOSHI
  • Patent number: 10409163
    Abstract: To provide a photosensitive resin composition which is capable of forming a pattern with high resolution and obtaining a cured film having excellent heat resistance and cracking resistance, and is also alkali developable; and a method capable of shortening the step required to remove a cured film of the composition after formation of an impurity region on a semiconductor substrate; and a method for manufacturing a semiconductor device using the same. Disclosed is a photosensitive resin composition including a polysiloxane (A).
    Type: Grant
    Filed: September 18, 2015
    Date of Patent: September 10, 2019
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Yugo Tanigaki, Takenori Fujiwara
  • Publication number: 20190258164
    Abstract: The present invention provides a negative-type photosensitive resin composition capable of obtaining a cured film suppressing generation of development residues caused by a pigment and having high sensitivity and excellent heat resistance and light blocking capability. A negative-type photosensitive resin composition contains an alkali-soluble resin (A), a radical-polymerizable compound (B), a photopolymerization initiator (C1), and a pigment (D1).
    Type: Application
    Filed: August 22, 2017
    Publication date: August 22, 2019
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yugo TANIGAKI, Akihiro ISHIKAWA, Kazuto MIYOSHI
  • Publication number: 20190218396
    Abstract: Provided is a black pigment that enables pattern formation of pixel division layer while suppressing generation of development residue. The black pigment comprises (a) a core containing at least one organic black pigment selected from the group consisting of benzodifuranone-based black pigments, perylene-based black pigments, azo-based black pigments, and isomers thereof and (b) a coating layer containing silica and/or a metal oxide and/or a metal hydroxide.
    Type: Application
    Filed: August 22, 2017
    Publication date: July 18, 2019
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Akihiro ISHIKAWA, Yugo TANIGAKI, Kazuto MIYOSHI
  • Patent number: 10324376
    Abstract: The present invention provides a negative type colored photosensitive resin composition that serves to produce a cured film having a forward tapered shape. This negative type colored photosensitive resin composition includes an alkali-soluble resin (A), a photo initiator (B), a photo polymerizable compound (C), and a coloring agent (D), the alkali-soluble resin (A) containing a polyimide precursor, polybenzoxazole precursor, and/or a copolymer thereof (A-1), each resin (A-1) having a trifluoromethyl group in the backbone chain.
    Type: Grant
    Filed: September 21, 2016
    Date of Patent: June 18, 2019
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Satoshi Kamemoto, Yugo Tanigaki, Kazuto Miyoshi
  • Publication number: 20190072851
    Abstract: The present invention provides a negative type photosensitive resin composition having high sensitivity, excellent halftone characteristics, capability to form a small tapered pattern shape, and alkali-developability. The negative type photosensitive resin composition includes, as an alkali-soluble resin (A), at least a weakly acidic group-containing resin (A1) and an unsaturated group-containing resin (A2), the weakly acidic group-containing resin (A1) containing an acidic group having an acid dissociation constant in the range of 13.0 to 23.0 in dimethyl sulfoxide, and the unsaturated group-containing resin (A2) containing an ethylenically unsaturated double bond group.
    Type: Application
    Filed: March 17, 2017
    Publication date: March 7, 2019
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yugo TANIGAKI, Satoshi KAMEMOTO, Kazuto MIYOSHI
  • Publication number: 20180356729
    Abstract: To provide a negative-type photosensitive resin composition that is highly sensitive and capable of formation of a low-taper pattern shape and that is capable of providing a cured film that is excellent in heat resistance. A negative-type photosensitive resin composition contains an (A) alkali-soluble resin, a (B) radical polymerizable compound, and a (C) photo initiator, the negative-type photosensitive resin composition being characterized in that the (A) alkali-soluble resin contains one or more species of resins selected from a (A-1) polyimide, a (A-2) polybenzoxazole, a (A-3) polyimide precursor, a (A-4) polybenzoxazole precursor, a (A-5) polysiloxane, and a (A-6) cardo based resin, and that the (B) radical polymerizable compound contains a compound having five ethylenic unsaturated bond groups in a (B-1) molecule, in an amount within the range of 51 to 99 mass %.
    Type: Application
    Filed: March 15, 2017
    Publication date: December 13, 2018
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yugo TANIGAKI, Daisuke SAKII, Satoshi KAMEMOTO