Abstract: An EUV light generating apparatus includes: EUV light sensors configured to measure energy of EUV light from mutually different directions, the EUV light being generated by applying laser light to a target supplied to a predetermined region in a chamber; an application position adjusting unit configured to adjust an application position of the laser light to the target supplied to the predetermined region; and a controller configured to control the application position adjusting unit such that a centroid of the EUV light becomes a target centroid, the centroid of the EUV light being specified from measurement results of the EUV light sensors. The controller calibrates the target centroid based on EUV light centroids obtained from the energy of the EUV light measured by the EUV light sensors, and a parameter related to the measured energy of the EUV light corresponding to the EUV light centroids.

Abstract: A keyboard instrument includes a plurality of key blocks, and an instrument case. Each key block includes, a plurality of key main bodies, an area of the top surface abutting one edge side of the key main body in a longitudinal direction is pressed by a user; a plurality of connecting sections, the connecting section is deformed in response to be pressed by the user; and a supporting section which supports the plurality of key main bodies as one key block through the plurality of connecting sections. The plurality of supporting sections included in the plurality of key blocks are piled up in a direction intersecting with the longitudinal direction in the instrument case. The plurality of connecting sections included in one key block and the plurality of connecting sections included in another key block are overlapped each other in the instrument case.

Abstract: An object of the present invention is to provide a method for producing 5-hydroxymethyl-2-furfural (5-HMF) suitable for industrial-scale production and a novel catalyst composition for use in synthesizing 5-HMF. The present invention provides a method for producing 5-HMF comprising performing a dehydration reaction of a carbohydrate comprising a hexose as a constituent sugar or a derivative thereof by using activated carbon as a catalyst; and a catalyst composition for use in the reaction for producing 5-HMF from a carbohydrate comprising a hexose as a constituent sugar through a dehydration reaction, the catalyst composition comprising activated carbon.

Abstract: An EUV light generation system includes: a target supply unit; a prepulse laser that outputs a prepulse laser beam; a main pulse laser that outputs a main pulse laser; a light focusing optical system that focuses the prepulse and main pulse laser beams on a predetermined region; an actuator that changes a focusing position of the prepulse laser beam by the light focusing optical system; a first sensor that captures an image of a target; and a control unit that stores a reference position of the actuator, calculates a predetermined parameter on the target after irradiation with the prepulse laser beam and before irradiation with the main pulse laser beam based on image data obtained from the first sensor, and controls the actuator to approach the reference position if the predetermined parameter does not satisfy a first condition.

Abstract: An extreme ultraviolet light generation device includes: an EUV sensor configured to measure energy of extreme ultraviolet light generated when a target is irradiated with a plurality of laser beams in a predetermined region in a chamber; an irradiation position adjustment unit configured to adjust at least one of irradiation positions of the laser beams with which the target is irradiated in the predetermined region; an irradiation timing adjustment unit configured to adjust at least one of irradiation timings of the laser beams with which the target is irradiated in the predetermined region; and a control unit configured to control the irradiation position adjustment unit and the irradiation timing adjustment unit, the control unit controlling the irradiation position adjustment unit and then controlling the irradiation timing adjustment unit based on a measurement result of the EUV sensor.

Abstract: An extreme ultraviolet light generating apparatus includes: EUV light sensors configured to measure energy of extreme ultraviolet light from mutually different directions, the extreme ultraviolet light being generated by applying laser light to a target supplied to a predetermined region in a chamber; an application position adjusting unit configured to adjust an application position of the laser light to the target supplied to the predetermined region; and a controller configured to control the application position adjusting unit such that a centroid of the extreme ultraviolet light becomes a targeted centroid, the centroid of the extreme ultraviolet light being specified from measurement results of the EUV light sensors, the controller controlling the application position adjusting unit such that the application position is scanned in accordance with reference scan points mutually different in position, and calibrating the targeted centroid based on the measurement results acquired for the reference scan po

Abstract: A keyboard instrument includes a plurality of key blocks, and an instrument case. Each key block includes, a plurality of key main bodies, an area of the top surface abutting one edge side of the key main body in a longitudinal direction is pressed by a user; a plurality of connecting sections, the connecting section is deformed in response to be pressed by the user; and a supporting section which supports the plurality of key main bodies as one key block through the plurality of connecting sections. The plurality of supporting sections included in the plurality of key blocks are piled up in a direction intersecting with the longitudinal direction in the instrument case. The plurality of connecting sections included in one key block and the plurality of connecting sections included in another key block are overlapped each other in the instrument case.

Abstract: An extreme ultraviolet light generating apparatus moves a generation position of extreme ultraviolet light based on an instruction from an external device and includes a chamber in which a target fed therein is irradiated with laser light so that the extreme ultraviolet light is generated from the target; a target feeder configured to output and feed the target into the chamber; a condensing mirror configured to condense the laser light on the target fed into the chamber; a stage configured to regulate a position of the target feeder; a manipulator configured to regulate a position of the condensing mirror; and a control unit configured to be able to control at least one of the stage, the manipulator, and a radiation timing of the laser light to the target, in a feedforward method, when the generation position is moved during generation of the extreme ultraviolet light.

Abstract: An extreme ultraviolet light generating apparatus moves a generation position of extreme ultraviolet light based on an instruction from an external device and includes a chamber in which a target fed therein is irradiated with laser light so that the extreme ultraviolet light is generated from the target; a target feeder configured to output and feed the target into the chamber; a condensing mirror configured to condense the laser light on the target fed into the chamber; a stage configured to regulate a position of the target feeder; a manipulator configured to regulate a position of the condensing mirror; and a control unit configured to be able to control at least one of the stage, the manipulator, and a radiation timing of the laser light to the target, in a feedforward method, when the generation position is moved during generation of the extreme ultraviolet light.

Abstract: An extreme ultraviolet light generating apparatus includes: EUV light sensors configured to measure energy of extreme ultraviolet light from mutually different directions, the extreme ultraviolet light being generated by applying laser light to a target supplied to a predetermined region in a chamber; an application position adjusting unit configured to adjust an application position of the laser light to the target supplied to the predetermined region; and a controller configured to control the application position adjusting unit such that a centroid of the extreme ultraviolet light becomes a targeted centroid, the centroid of the extreme ultraviolet light being specified from measurement results of the EUV light sensors, the controller controlling the application position adjusting unit such that the application position is scanned in accordance with reference scan points mutually different in position, and calibrating the targeted centroid based on the measurement results acquired for the reference scan po

Abstract: A keyboard device includes a plurality of hammer members provided corresponding to a plurality of keys, whereby each hammer member applies an action load to a depressed key by rotating in conjunction with the key, and a key load applying member which applies a key load to the key by the hammer member coming in contact therewith when the hammer member is rotated, in which the key load applying member is singly provided corresponding to the plurality of keys, and a first portion of the key load applying member corresponding to a first key and a second portion of the key load applying member corresponding to a second key are different in at least one of thickness, level of elasticity, and level of viscosity.

Abstract: An extreme ultraviolet light generation device includes: an EUV sensor configured to measure energy of extreme ultraviolet light generated when a target is irradiated with a plurality of laser beams in a predetermined region in a chamber; an irradiation position adjustment unit configured to adjust at least one of irradiation positions of the laser beams with which the target is irradiated in the predetermined region; an irradiation timing adjustment unit configured to adjust at least one of irradiation timings of the laser beams with which the target is irradiated in the predetermined region; and a control unit configured to control the irradiation position adjustment unit and the irradiation timing adjustment unit, the control unit controlling the irradiation position adjustment unit and then controlling the irradiation timing adjustment unit based on a measurement result of the EUV sensor.

Abstract: The extreme ultraviolet light generating apparatus includes a target supply unit to output a target, a driver laser to output a driver laser beam with which the target is irradiated, a guide laser to output a guide laser beam, a beam combiner to have optical paths of the driver laser beam and the guide laser beam substantially coincide with each other and output these beams, a first optical element including a first actuator to adjust an optical path of the driver laser beam to be incident on the beam combiner, a second optical element including a second actuator to adjust an optical path of the guide laser beam to be incident on the beam combiner, a sensor to detect the guide laser beam outputted from the beam combiner to output detected data, and a controller to receive the detected data, control the second actuator based on the detected data, and control the first actuator based on an amount of controlling of the second actuator.

Abstract: Provided is an illumination device containing a light source configured to emit an excitation light, a phosphor layer containing a phosphor and configured to allow the excitation light of the light source to be transmitted and emitted therethrough, and a coating film formed by applying a paint containing a pigment and mica and configured to allow the emitted light of the phosphor layer to be transmitted and emitted therethrough, in which the coating film has a light transmission spectrum having a peak wavelength located between a peak wavelength of an emission spectrum of the light source and a peak wavelength of an emission spectrum of the phosphor layer.

Abstract: A keyboard device includes a plurality of hammer members provided corresponding to a plurality of keys, whereby each hammer member applies an action load to a depressed key by rotating in conjunction with the key, and a key load applying member which applies a key load to the key by the hammer member coming in contact therewith when the hammer member is rotated, in which the key load applying member is singly provided corresponding to the plurality of keys, and a first portion of the key load applying member corresponding to a first key and a second portion of the key load applying member corresponding to a second key are different in at least one of thickness, level of elasticity, and level of viscosity.

Abstract: A keyboard device includes a plurality of transmission members which are displaced in response to a depression operation on each of a plurality of keys and a plurality of hammer members each of which provides an action load to a depressed key by performing a rotating motion in response to the displacement of a transmission member corresponding to the depressed key. The weight of the transmission member is set in accordance with the formation density of a plurality of ribs formed on a transmission body section. Therefore, the weight of the transmission member set in accordance with the formation density of the ribs can be provided to the key as a static load. As a result of this structure, an initial load on a key can be optimized, and a key depressing force on the key at the time of key depression can be favorably transmitted to the hammer member.

Abstract: A cover mechanism includes a cover which is detachably attached to a housing and a slide member which is slidably attached to the housing. The slide member includes a lock portion which locks the cover to keep the cover closed and a push-up portion which pushes up the cover as the slide member slides in a direction to release the lock.

Abstract: A keyboard device includes a plurality of transmission members which are displaced in response to a depression operation on each of a plurality of keys and a plurality of hammer members each of which provides an action load to a depressed key by performing a rotating motion in response to the displacement of a transmission member corresponding to the depressed key. The weight of the transmission member is set in accordance with the formation density of a plurality of ribs formed on a transmission body section. Therefore, the weight of the transmission member set in accordance with the formation density of the ribs can be provided to the key as a static load. As a result of this structure, an initial load on a key can be optimized, and a key depressing force on the key at the time of key depression can be favorably transmitted to the hammer member.

Abstract: Provided is an illumination device containing a light source configured to emit an excitation light, a phosphor layer containing a phosphor and configured to allow the excitation light of the light source to be transmitted and emitted therethrough, and a coating film formed by applying a paint containing a pigment and mica and configured to allow the emitted light of the phosphor layer to be transmitted and emitted therethrough, in which the coating film has a light transmission spectrum having a peak wavelength located between a peak wavelength of an emission spectrum of the light source and a peak wavelength of an emission spectrum of the phosphor layer.

Abstract: A cover mechanism includes a cover which is detachably attached to a housing and a slide member which is slidably attached to the housing. The slide member includes a lock portion which locks the cover to keep the cover closed and a push-up portion which pushes up the cover as the slide member slides in a direction to release the lock.