Abstract: Reflected light can be effectively utilized by increasing a light receiving area. Incremental light receiving element groups are separated and arranged in the circumferential direction of a rotating unit while placing a light source therebetween. First and second absolute light receiving element groups are arranged at both sides of the outside and inside of the light source in the radial direction of the rotating unit. As a result, first and second absolute light receiving elements are continuously arranged, and also the incremental light receiving element groups and the absolute light receiving element groups can be arranged to surround the periphery of the light source from four directions.

Abstract: This disclosure discloses a servomotor production method of a servomotor including a motor and an encoder. The encoder includes a rotating disk and an optical module. The rotating disk is mounted on a shaft of the motor and includes at least one concentric slit formed around a disk center. The optical module is provided with a light receiving element configured to receive light emitted from a light source and subjected to an action of the concentric slit on a substrate. The servomotor production method includes adjusting a position of the optical module with respect to the rotating disk by using the concentric slit by means of an output of the light receiving element when the optical module is fixed and arranged facing the rotating disk.

Abstract: A rotation detector provided in a motor unit according to an embodiment includes a first support and a second support, a pair of magnetic field generator, at least one magnetic field detector, and a first magnetic member and a second magnetic member. The pair of magnetic field generator is provided on the first support in a manner facing the second support, and has opposite polarities. The magnetic field detector is formed by winding a coil around a magnetic element whose magnetized direction changes in the longitudinal direction, and is provided on the second support in such a manner that a longitudinal-direction side of the magnetic element faces the first support. Each of the first magnetic member and the second magnetic member is made of a magnetic material, and covers a longitudinal-direction end of the magnetic field detector facing the first support.

Abstract: A motor with an encoder has a motor, and an encoder disposed on the anti-load side of this motor. The motor includes a motor electromagnetic part, and a motor shaft rotatably supported by a load side bearing and an anti-load side bearing, and the encoder includes a hub having a convex part formed in a load side end thereof, the hub being coaxially fixed to an anti-load side end of the motor shaft, and a rotating disc fixed to an anti-load side end of this hub. The convex part of the hub is fitted to a concave part formed in the anti-load side end of the motor shaft so that the hub is fixed to the motor shaft.

Abstract: An encoder includes a disc-shaped disk disposed so as to be rotatable about a rotation axis and having at least one ring-shaped track in which a rotating grating is formed and at least one fixed grating which is fixedly disposed opposed to the disk so that the fixed grating and the rotating grating construct a diffraction interference optical system. Each of a plurality of slits included in the at least one rotating grating is formed along a curved line obtained by making each of a plurality of radial lines using the rotation axis as a center curved in the circumferential direction at a predetermined curve degree so that a pitch of the slits can be set to a predetermined value.

Abstract: Reflected light can be effectively utilized by increasing a light receiving area. Incremental light receiving element groups are separated and arranged in the circumferential direction of a rotating unit while placing a light source therebetween. First and second absolute light receiving element groups are arranged at both sides of the outside and inside of the light source in the radial direction of the rotating unit. As a result, first and second absolute light receiving elements are continuously arranged, and also the incremental light receiving element groups and the absolute light receiving element groups can be arranged to surround the periphery of the light source from four directions.

Abstract: An encoder includes: a main scale having two or more band-shaped tracks in each of which an optical main grating is formed so that longitudinal direction of the main scale corresponds to a measurement axis direction; and an index scale opposed to the main scale so as to form a diffraction interference optical system in cooperation with the main grating, disposed so as to be movable relative to the main scale in the measurement axis direction, and in which two or more optical index gratings are formed. A plurality of slits included in the main grating in at least one track are formed so as to be inclined at a predetermined inclination angle from a direction perpendicular to the measurement axis direction so that pitch of the slits in the track becomes equal to the pitch of the slits in the at least one other track.

Abstract: An optical encoder, with a simple structure, that can output a high-precision origin signal is provided. Rotary origin phase slits (112), which are formed into a pattern of linear slits arranged in parallel at equal pitches, are prepared for a rotary disk (110), while fixed origin phase slits (122), which are formed into a pattern of linear slits arranged in parallel at equal pitches, are prepared for a fixed origin phase scale (120). Light emitted by a light source (130) passes through an ejection window (121) and irradiates the rotary origin phase slits (112). The light reflected at the rotary origin phase slits (112) passes through the fixed origin phase slits (122) and is detected by a light-receiving element (140). Then, based on the detection signal, an origin signal is generated.

Abstract: An encoder includes a disc-shaped disk disposed so as to be rotatable about a rotation axis and having at least one ring-shaped track in which a rotating grating is formed and at least one fixed grating which is fixedly disposed opposed to the disk so that the fixed grating and the rotating grating construct a diffraction interference optical system. Each of a plurality of slits included in the at least one rotating grating is formed along a curved line obtained by making each of a plurality of radial lines using the rotation axis as a center curved in the circumferential direction at a predetermined curve degree so that a pitch of the slits can be set to a predetermined value.

Abstract: An encoder includes: a main scale having two or more band-shaped tracks in each of which an optical main grating is formed so that longitudinal direction of the main scale corresponds to a measurement axis direction; and an index scale opposed to the main scale so as to form a diffraction interference optical system in cooperation with the main grating, disposed so as to be movable relative to the main scale in the measurement axis direction, and in which two or more optical index gratings are formed. A plurality of slits included in the main grating in at least one track are formed so as to be inclined at a predetermined inclination angle from a direction perpendicular to the measurement axis direction so that pitch of the slits in the track becomes equal to the pitch of the slits in the at least one other track.

Abstract: A high-precision magnet encoder in which high-order harmonic components can be suppressed without increasing the number of lead wires connecting magnetic field detecting elements to a signal processing circuit. Hall sensors of phase A1, phase B1, phase A2 and phase B2 are arranged sequentially around a permanent magnet 2 at intervals of 90 degrees via an air gap. Hall sensors of phase C1, phase D1, phase C2, phase D2 are arranged at positions 60 degrees away from the Hall sensors of phase A1, phase B1, phase A2 and phase B2, respectively. Connection is made between the positive output terminals of a set of Hall sensors located at positions 60 degrees away from each other and between their negative output terminals.

Abstract: Provided are a magnetic encoder apparatus, which can accurately perform angle detection, wherein at very accurate positions, magnetic field detection elements are mounted on a fixed member, and wherein the positions of the magnetic field detection elements are little changed due to temperature, and a method for manufacturing the magnetic encoder apparatus. Conductive pads (32) are formed, using an insulating material as a base, on the four side faces of a fixed member (3) having a shape that is substantially a right square prism. Magnetic field detection elements (4) are mounted on these pads (32). A cylindrical space (28) is formed in the center of the fixed member (3), and when a permanent magnet (2) fixed to a rotary member (1) is rotated in the space (28), the magnetic field detection elements (4) output signals, with a small phase error between them. A signal processing circuit (not shown) converts these output signals into angular signals.

Abstract: An optical encoder, with a simple structure, that can output a high-precision origin signal is provided. Rotary origin phase slits (112), which are formed into a pattern of linear slits arranged in parallel at equal pitches, are prepared for a rotary disk (110), while fixed origin phase slits (122), which are formed into a pattern of linear slits arranged in parallel at equal pitches, are prepared for a fixed origin phase scale (120). Light emitted by a light source (130) passes through an ejection window (121) and irradiates the rotary origin phase slits (112). The light reflected at the rotary origin phase slits (112) passes through the fixed origin phase slits (122) and is detected by a light-receiving element (140). Then, based on the detection signal, an origin signal is generated.

Abstract: A magnetic encoder unit with a small size and low power consumption is provided which can detect an angle in not more than one-turn and an amount of multi-turn. The magnetic encoder unit includes a permanent magnet 2 magnetized in a direction perpendicular to a rotation axis of a rotating member 1 and fixed to the rotating member 1, a magnetic field detecting element 4 fixed to a fixed member 3 so as to be opposite to the permanent magnet 2 with a gap therebetween, and a signal processing circuit 5 processing a signal from the magnetic field detecting element 4. Here, multi-turn detecting means including a multi-turn magnetic field detecting element 6 and a multi-turn signal processing circuit 7 detecting an amount of multi-turn from a signal of the multi-turn magnetic field detecting element 6 is added thereto.

Abstract: Provided is a magnetic encoder device capable of detecting a rotating angle of an actuator having a cavity structure. The magnetic encoder device includes a ring-shaped rotating body 11, a ring-shaped permanent magnet 12 which is inscribed in and fixed to an inner circumferential side of the ring-shaped rotating body 11 and magnetized in a direction perpendicular to a center axis of the rotating body 11, and a fixed body 13 which is disposed on an inner circumferential side of the permanent magnet 12 through an air gap and has a circular circumference and a cavity, and a magnetic field detecting element 14 disposed on an outer circumferential side of the fixed body 13 through the permanent magnet 12 and the air gap.

Abstract: A high-precision magnet encoder in which high-order harmonic components can be suppressed without increasing the number of lead wires connecting magnetic field detecting elements to a signal processing circuit. Hall sensors of phase A1, phase B1, phase A2 and phase B2 are arranged sequentially around a permanent magnet 2 at intervals of 90 degrees via an air gap. Hall sensors of phase C1, phase D1, phase C2, phase D2 are arranged at positions 60 degrees away from the Hall sensors of phase A1, phase B1, phase A2 and phase B2, respectively. Connection is made between the positive output terminals of a set of Hall sensors located at positions 60 degrees away from each other and between their negative output terminals.

Abstract: An encoder signal processing device comprising an A/D converter converting a periodic analog signal, a memory storing position detection error information and a computing unit including a position data calculator which calculates position data from the digital data and an error correcting section which corrects the position data based on the position detection error information. The memory includes a first memory encoding position error data which is included in the position data by the use of the computing unit and storing a correction coefficient. A second memory decoding the position error data on the basis of the correction coefficient by the use of the computing unit and storing correction data for correcting the position data and error-containing position data generated on the basis of the encoded position error data.

Abstract: A wafer pre-alignment apparatus according to this invention includes a wafer rotating member, a rotation detecting member, a light emitting member for emitting light toward the periphery of the wafer, a COD linear sensor linearly arranged and signal processing member for detecting the edge position of the wafer to acquire at least one of an orientation flat position, notch position and center position of the wafer on the basis of the edge position detected, and further includes an up-down counter for converting a signal received from the rotation detecting member into rotating position information, a measured angle setting register for storing the rotation position information when the wafer rotating member rotates by an interval angle and a comparator for comparing a set value in the measured angle setting register and a counted value in the up-down counter.

Abstract: There is provided a position detecting signal with high accuracy in which a high order distortion error is corrected by the use of a simple processing circuit and method. Two measuring targets which are not illustrated are displaced at a constant velocity, and an analog signals Sa and Sb detected with displacement by the sensor signal detection section are converted into digital data by A/D converter (1). Then, position data ?0 is calculated by position data calculator (2). Next, the position data ?0 is encoded in an error-correction parameter acquiring section (3) and stored in a first memory (4). When a power source is applied, an error-containing position data preparing section (5) decodes by reading out a correction coefficient. An error-correction position table preparing section (6) prepares a decoded data and a correction table of ideal position data and recodes in a second memory (7).

Abstract: A magnetic encoder unit with a small size and low power consumption is provided which can detect an angle in not more than one-turn and an amount of multi-turn. The magnetic encoder unit includes a permanent magnet 2 magnetized in a direction perpendicular to a rotation axis of a rotating member 1 and fixed to the rotating member 1, a magnetic field detecting element 4 fixed to a fixed member 3 so as to be opposite to the permanent magnet 2 with a gap therebetween, and a signal processing circuit 5 processing a signal from the magnetic field detecting element 4. Here, multi-turn detecting means including a multi-turn magnetic field detecting element 6 and a multi-turn signal processing circuit 7 detecting an amount of multi-turn from a signal of the multi-turn magnetic field detecting element 6 is added thereto.