Abstract: A flowrate control device includes: a storing unit that stores opening degree characteristic of a flowrate regulating valve; an inputting unit that inputs a target flowrate of the fluid flowing out from the flowrate regulating valve, and a flowrate change velocity to reach the target flowrate; a detecting unit that detects, from when the control of the flowrate to the target flowrate is started, the flowrate of the fluid flowing out from the flowrate regulating valve at a predetermined cycle; and an opening-degree regulating unit that regulates an opening degree of the flowrate regulating valve. The opening-degree regulating unit determines a difference between a detected flowrate detected by the detecting unit and a planned flowrate in the course of achieving the target flowrate, the planned flowrate corresponding to the detected flowrate and being defined by the flowrate change velocity and the number of detection executed by the detecting unit.

Abstract: A cooling structure includes a fan that suctions gas through an inlet and sends gas, a flow path that connects the inlet and the fan to each other, a foreign matter entry suppression member that suppresses entry of a foreign matter into the flow path through the inlet, and a vibration suppression member set between the foreign matter entry suppression member and the fan and provided to suppress vibration of a rod-like foreign matter caused by rotation of a blade of the fan. The foreign matter entry suppression member includes a plurality of opening portions for suctioning gas into the flow path. The vibration suppression member is constructed to be provided with a plurality of opening portions while it is set in the flow path.