Abstract: An image processor includes an image generator configured to generate corresponding image data corresponding to first microscopic image data obtained under a first observation condition, based on second microscopic image data and third microscopic image data obtained under a second observation condition, and an image output unit configured to output the corresponding image data. The corresponding image data may be image data corresponding to a first focal plane from which the first microscopic image data are obtained, and wherein the second microscopic image data and the third microscopic image data may be image data on a second focal plane and a third focal plane, respectively, which are different from the first focal plane.

Abstract: An image processor includes an image generator configured to generate corresponding image data corresponding to first microscopic image data obtained under a first observation condition, based on second microscopic image data and third microscopic image data obtained under a second observation condition, and an image output unit configured to output the corresponding image data. The corresponding image data may be image data corresponding to a first focal plane from which the first microscopic image data are obtained, and wherein the second microscopic image data and the third microscopic image data may be image data on a second focal plane and a third focal plane, respectively, which are different from the first focal plane.

Abstract: To acquire an image of a sample. A microscope includes: an illumination optical system that includes a light flux splitter that splits light from a light source into a plurality of light fluxes, and scans a sample in a plurality of directions with interference fringes generated by interference of at least part of the light fluxes split by the light flux splitter; a detection optical system on which light from the sample is incident; a detection device that includes a plurality of detectors that detect the light from the sample via the detection optical system; and an image processor that generates an image using detection results of two or more of the detectors of the detection device.

Abstract: To acquire an image of a sample. A microscope includes: an illumination optical system that includes a light flux splitter that splits light from a light source into a plurality of light fluxes, and scans a sample in a plurality of directions with interference fringes generated by interference of at least part of the light fluxes split by the light flux splitter; a detection optical system on which light from the sample is incident; a detection device that includes a plurality of detectors that detect the light from the sample via the detection optical system; and an image processor that generates an image using detection results of two or more of the detectors of the detection device.

Abstract: An image processor includes an image generator configured to generate corresponding image data corresponding to first microscopic image data obtained under a first observation condition, based on second microscopic image data and third microscopic image data obtained under a second observation condition, and an image output unit configured to output the corresponding image data. The corresponding image data may be image data corresponding to a first focal plane from which the first microscopic image data are obtained, and wherein the second microscopic image data and the third microscopic image data may be image data on a second focal plane and a third focal plane, respectively, which are different from the first focal plane.

Abstract: The invention provides a technique for more accurately executing failure diagnosis for an exhaust gas control apparatus having both a selective reduction function and a filter function. To this end, a failure diagnosis apparatus according to the invention for the exhaust gas control apparatus having both the selective reduction function and the filter function computes a NOx purification rate pertaining to a case where the exhaust gas control apparatus is normal based on an estimated value of the amount of particulate matter (PM) collected or accumulated in the exhaust gas control apparatus and an estimated value of the NO2 ratio of exhaust gas flowing into the exhaust gas control apparatus, and determines that the exhaust gas control apparatus fails when the difference between the result of the calculation and an actual NOx purification rate exceeds a threshold.

Abstract: An optical system configured as part of optical metrology unit used to assess the operational status of a workpiece and, in a specific case, configured as an encoder head of a lithographic exposure tool. The optical system is devoid of a stand-alone optical corner-cubes and includes, instead, a single, imperfect or frustrated cuboid of optically-isotropic material that, in operation with the diffraction grating of the workpiece, simultaneously forms four interferometric signals for measuring x-, y, and z-positions of the workpiece grating relative to the optical system. Proposed system and method solve problems of (i) structural complexity of a conventional metrology unit for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such metrology unit, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based metrology units.

Abstract: An optical system configured as part of optical metrology unit used to assess the operational status of a workpiece and, in a specific case, configured as an encoder head of a lithographic exposure tool. The optical system is devoid of a stand-alone optical corner-cubes and includes, instead, a single, imperfect or frustrated cuboid of optically-isotropic material that, in operation with the diffraction grating of the workpiece, simultaneously forms four interferometric signals for measuring x-, y, and z-positions of the workpiece grating relative to the optical system. Proposed system and method solve problems of (i) structural complexity of a conventional metrology unit for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such metrology unit, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based metrology units.

Abstract: An object of the present invention is to increase the accuracy of a deterioration determination in a deterioration determination system of an exhaust emission control device having a selective reduction type NOx catalyst, by suppressing false determinations when the deterioration determination is made. The deterioration determination system includes a catalyst having an oxidative capacity downstream of a NOx catalyst using ammonia as a reducing agent. When an amount of ammonia adsorbed by the NOx catalyst is larger than an equilibrium adsorption amount, out of the amount of ammonia flowing into the catalyst having the oxidative capacity, at least one of the amount of ammonia flowing out from the catalyst having the oxidative capacity and the amount of ammonia converted to NOx in the catalyst having the oxidative capacity or a total value of both is calculated.

Abstract: In a failure determination system that performs failure determination of an exhaust gas purification apparatus having a NOx selective catalytic reduction catalyst (NOx catalyst) that is disposed in an exhaust passage of an internal combustion engine and uses ammonia as a reducing agent, the failure determination of the exhaust gas purification apparatus is performed by a failure determination unit, based on a detected value of a NOx sensor that detects NOx in exhaust gas. Then, based on an adsorption amount difference at assumed failure that is the difference between an ammonia equilibrium adsorption amount in the NOx catalyst in an equilibrium state of ammonia adsorption, assuming that the exhaust gas purification apparatus is in a predefined failure state, and an actual ammonia adsorption amount in the NOx catalyst, the failure determination itself by the failure determination unit is inhibited or the use of the NOx sensor in the failure determination is restricted.

Abstract: An object of the present invention is to increase the accuracy of a deterioration determination in a deterioration determination system of an exhaust emission control device having a selective reduction type NOx catalyst, by suppressing false determinations when the deterioration determination is made. The deterioration determination system includes a catalyst having an oxidative capacity downstream of a NOx catalyst using ammonia as a reducing agent. When an amount of ammonia adsorbed by the NOx catalyst is larger than an equilibrium adsorption amount, out of the amount of ammonia flowing into the catalyst having the oxidative capacity, at least one of the amount of ammonia flowing out from the catalyst having the oxidative capacity and the amount of ammonia converted to NOx in the catalyst having the oxidative capacity or a total value of both is calculated.

Abstract: The invention provides a technique for more accurately executing failure diagnosis for an exhaust gas control apparatus having both a selective reduction function and a filter function. To this end, a failure diagnosis apparatus according to the invention for the exhaust gas control apparatus having both the selective reduction function and the filter function computes a NOx purification rate pertaining to a case where the exhaust gas control apparatus is normal based on an estimated value of the amount of particulate matter (PM) collected or accumulated in the exhaust gas control apparatus and an estimated value of the NO2 ratio of exhaust gas flowing into the exhaust gas control apparatus, and determines that the exhaust gas control apparatus fails when the difference between the result of the calculation and an actual NOx purification rate exceeds a threshold.

Abstract: In a failure determination system that performs failure determination of an exhaust gas purification apparatus having a NOx selective catalytic reduction catalyst (NOx catalyst) that is disposed in an exhaust passage of an internal combustion engine and uses ammonia as a reducing agent, the failure determination of the exhaust gas purification apparatus is performed by a failure determination unit, based on a detected value of a NOx sensor that detects NOx in exhaust gas. Then, based on an adsorption amount difference at assumed failure that is the difference between an ammonia equilibrium adsorption amount in the NOx catalyst in an equilibrium state of ammonia adsorption, assuming that the exhaust gas purification apparatus is in a predefined failure state, and an actual ammonia adsorption amount in the NOx catalyst, the failure determination itself by the failure determination unit is inhibited or the use of the NOx sensor in the failure determination is restricted.