Patents by Inventor Yukio Watanabe

Yukio Watanabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130105713
    Abstract: An apparatus for generating extreme ultraviolet light may include: a chamber having an opening through which a laser beam is introduced into the chamber; a reference member on which the chamber is mounted; a target supply unit for supplying a target material to be irradiated by the laser beam to a predetermined region inside the chamber; a laser beam focusing optical system for focusing the laser beam in the predetermined region inside the chamber to turn the target material into plasma; and a collector mirror for collecting the extreme ultraviolet light emitted from the plasma.
    Type: Application
    Filed: March 23, 2012
    Publication date: May 2, 2013
    Applicant: GIGAPHOTON INC.
    Inventors: Yukio Watanabe, Miwa Igarashi, Masato Moriya, Hiroaki Nakarai
  • Publication number: 20130075625
    Abstract: A target supply unit includes a nozzle through which a target material is outputted, and a first electrically conductive member having a first opening formed therein and positioned to face the nozzle in a direction into which the target material is outputted through the nozzle. The first electrically conductive member is positioned so that the first opening is located below the nozzle in a gravitational direction. The target supply unit includes a voltage generator which applies a voltage between the target material and the first electrically conductive member.
    Type: Application
    Filed: July 19, 2012
    Publication date: March 28, 2013
    Inventors: Takayuki YABU, Yoshifumi UENO, Junichi FUJIMOTO, Yukio WATANABE, Toshihiro NISHISAKA
  • Publication number: 20130050862
    Abstract: A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.
    Type: Application
    Filed: December 29, 2011
    Publication date: February 28, 2013
    Applicant: GIGAPHOTON INC
    Inventors: Hiroshi Someya, Yukio Watanabe, Katsuhiko Wakana, Osamu Wakabayashi
  • Publication number: 20130003370
    Abstract: A lighting device (10) includes an optical member (1) having (i) an entrance surface which is provided with a columnar convex lens and a prism group constituted by a plurality of prisms and (ii) an exit surface (1 a) which is provided with a prism group (4a, 4b) constituted by a plurality of prisms that differ in shape. The prism group (4a) which is provided on the exit surface (1 a) changes a direction of a light ray which (i) is emitted in a normal direction of a substrate surface by being reflected therein and (ii) has a high intensity to a direction which is highly inclined with respect to the normal direction. Accordingly, it is possible to provide the lighting device (10) which has a simple arrangement and is capable of controlling a light distribution characteristic.
    Type: Application
    Filed: June 8, 2010
    Publication date: January 3, 2013
    Applicant: Sharp Kabushiki Kaisha
    Inventor: Yukio Watanabe
  • Patent number: 8301024
    Abstract: A camera flash comprises a light guide arranged to extract light at least through one surface; and one or more light sources arranged, in use, to emit light into the lightguide. Each light source is an LED or a laser diode. The camera flash is connectable, in use, to drive circuitry, the drive circuitry being for driving the light source(s) to emit a pulse of light. The waveguide spreads out the light from the light source(s), so that a flash of light from the camera flash does not present a safety risk, while minimizing loss of the light from the light source(s). The camera flash can thus provide a high overall optical output, spread over an extended area (as defined by the waveguide). The lightguide may for example be disposed around a camera module of a mobile telephone camera.
    Type: Grant
    Filed: November 23, 2010
    Date of Patent: October 30, 2012
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Jonathan Mather, Andrew Kay, David James Montgomery, James Rowland Suckling, Emma Jayne Walton, Yasunori Kanazawa, Yukio Watanabe, Hirofumi Oda, Taro Sugita
  • Publication number: 20120267343
    Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion an
    Type: Application
    Filed: July 6, 2012
    Publication date: October 25, 2012
    Applicant: Gigaphoton Inc.
    Inventors: Yukio WATANABE, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki, Hideo Hoshino
  • Patent number: 8258492
    Abstract: [Technical Problem] To provide a differential evacuation system capable of easily maintaining, at a low cost, a large differential pressure between a light generation chamber and an illumination optical chamber in which optical processing, e.g. exposure, is performed by using extreme ultraviolet (EUV) light generated in the light generation chamber, and yet capable of sufficiently ensuring a desired optical path. [Solution to Problem] The differential evacuation system has a light generation chamber 10 that generates EUV light, an illumination optical chamber 100 in which optical processing is performed by using the EUV light generated in the light generation chamber 10, and a chamber connecting passage 150 that connects together the light generation chamber 10 and the illumination optical chamber 100 to guide the EUV light generated in the light generation chamber 10 into the illumination optical chamber 100.
    Type: Grant
    Filed: December 4, 2009
    Date of Patent: September 4, 2012
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Someya, Yukio Watanabe
  • Patent number: 8238392
    Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion an
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: August 7, 2012
    Assignee: Gigaphoton Inc.
    Inventors: Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki, Hideo Hoshino
  • Patent number: 8189434
    Abstract: An optical pickup device includes: a splitting section for splitting a beam; a light-receiving section for receiving the split beams. The light-receiving section includes: a tracking-use main light-receiving region and tracking-use sub light-receiving regions, and auxiliary light-receiving regions. Each of the auxiliary light-receiving regions receives only a light beam reflected off a recording layer other than a recording layer subjected to an information writing/reading process. A light-receiving area of each of the auxiliary light-receiving area is smaller than a light-receiving area of each tracking-use light-receiving region. Further, an optical pickup device includes: a splitting section for splitting a beam; and a light-receiving section for receiving the split beams. The light-receiving section includes a sub light-receiving regions for receiving tracking-use sub beams.
    Type: Grant
    Filed: April 27, 2005
    Date of Patent: May 29, 2012
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Osamu Miyazaki, Keiji Sakai, Yukio Watanabe
  • Publication number: 20120119118
    Abstract: An extreme ultraviolet (EUV) light source system in which parts of an EUV light source apparatus can easily be replaced. The system includes: (i) an extreme ultraviolet light source apparatus having a chamber in which extreme ultraviolet light is generated, a target supply unit for supplying a target material into the chamber, a driver laser for irradiating the target material supplied by the target supply unit with a laser beam to generate plasma, and a collector mirror for collecting the extreme ultraviolet light radiated from the plasma to allow the extreme ultraviolet light to enter projection optics of exposure equipment; and (ii) a lifting apparatus provided to lift and move a replacement part which is a part of the extreme ultraviolet light source apparatus.
    Type: Application
    Filed: January 26, 2012
    Publication date: May 17, 2012
    Applicant: Gigaphoton Inc.
    Inventors: Yukio WATANABE, Osamu Wakabayashi, Junichi Fujimoto, Toshihiro Nishisaka, Hiroshi Someya, Hideo Hoshino
  • Publication number: 20120104290
    Abstract: An apparatus for generating extreme ultraviolet light by exciting a target material to turn the target material into plasma may include: a frame; a chamber in which the extreme ultraviolet light is generated; a target supply unit for supplying the target material into the chamber; a first connection member for connecting the frame and the chamber flexibly; a mechanism for fixing the target supply unit to the frame; and a second connection member for connecting the target supply unit to the chamber flexibly.
    Type: Application
    Filed: October 28, 2011
    Publication date: May 3, 2012
    Inventors: Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Hideo Hoshino
  • Publication number: 20110310365
    Abstract: A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet for introducing thereinto a laser beam outputted from the laser apparatus; a target supply unit provided to the chamber for supplying a target material to a predetermined region in the chamber; a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit; and a position measuring unit for measuring a position of the target material supplied from the target supply unit into the chamber.
    Type: Application
    Filed: March 18, 2011
    Publication date: December 22, 2011
    Inventors: Takayuki YABU, Kouji KAKIZAKI, Yukio WATANABE, Osamu WAKABAYASHI
  • Publication number: 20110309260
    Abstract: A chamber apparatus used with an external apparatus having an obscuration region may include: a chamber in which extreme ultraviolet light is generated; a collector mirror provided in the chamber for collecting the extreme ultraviolet light; a support for securing the collector mirror to the chamber; and an output port provided to the chamber for allowing the extreme ultraviolet light collected by the collector mirror to be introduced therethrough into the external apparatus.
    Type: Application
    Filed: March 11, 2011
    Publication date: December 22, 2011
    Inventors: Toshihiro Nishisaka, Yukio Watanabe, Tamotsu Abe, Osamu Wakabayashi
  • Patent number: 7990834
    Abstract: An optical pickup device has a semiconductor laser emitting light which is in turn branched via a diffraction grating into at least three beams of light including a main beam and two sub beams which are in turn condensed via an objective lens on an optical disk at a guide groove and reflected by the optical disk to provide three reflections of light which are in turn received by detectors, each divided into two regions, respectively, to generate a tracking error signal. The diffraction grating is divided into three regions including a first region, a second region and a third region located intermediate therebetween, each having a periodical structure out of phase, the periodical structure having grating grooves in a direction determined depending on the phase of the second region to incline relative to a direction perpendicular to the guide groove of the optical disk.
    Type: Grant
    Filed: July 28, 2006
    Date of Patent: August 2, 2011
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Tetsuo Ueyama, Osamu Miyazaki, Yukio Watanabe, Yasuo Nakata, Tomio Mashiyama
  • Publication number: 20110123184
    Abstract: A camera flash comprises a light guide arranged to extract light at least through one surface; and one or more light sources arranged, in use, to emit light into the lightguide. Each light source is an LED or a laser diode. The camera flash is connectable, in use, to drive circuitry, the drive circuitry being for driving the light source(s) to emit a pulse of light. The waveguide spreads out the light from the light source(s), so that a flash of light from the camera flash does not present a safety risk, while minimising loss of the light from the light source(s). The camera flash can thus provide a high overall optical output, spread over an extended area (as defined by the waveguide). The lightguide may for example be disposed around a camera module of a mobile telephone camera.
    Type: Application
    Filed: November 23, 2010
    Publication date: May 26, 2011
    Applicant: SHARP KABUSHIKI KAISHA
    Inventors: Jonathan MATHER, Andrew KAY, David James MONTGOMERY, James Rowland SUCKLING, Emma Jayne WALTON, Yasunori KANAZAWA, Yukio WATANABE, Hirofumi ODA, Taro SUGITA
  • Publication number: 20110085709
    Abstract: A contact history recording system for recording a contact history for each of target portions in an apparatus in cases of being contacted by a person, including: a plurality of transmitters, each installed at each of the target portions; and a receiver which communicates with the plurality of transmitters, wherein each transmitter includes: a memory section which previously stores individual identification information of a target portion where a transmitter is installed; and transmitting section which transmits the individual identification information stored in the memory section in cases where the target portion where the transmitter is installed is contacted by a person, and wherein the receiver includes: a receiving section which receives the individual identification information transmitted from the transmitter; and a control section which inputs the individual identification information received by the receiving section to a recording section to record the inputted individual identification information
    Type: Application
    Filed: October 6, 2010
    Publication date: April 14, 2011
    Applicant: KONICA MINOLTA BUSINESS TECHNOLOGIES, INC.
    Inventors: Yukio WATANABE, Shunichi Kumakura, Motoaki Aoyama
  • Publication number: 20100288937
    Abstract: An extreme ultraviolet light source apparatus for supplying extreme ultraviolet light to a processing unit for performing processing by using the extreme ultraviolet light. The extreme ultraviolet light source apparatus includes: a chamber in which the extreme ultraviolet light to be supplied to the processing unit is generated; a collector mirror for collecting the extreme ultraviolet light generated in the chamber to output the extreme ultraviolet light to the processing unit; and an optical path connection module for defining a route of the extreme ultraviolet light between the chamber and the processing unit and isolating the route of the extreme ultraviolet light from outside.
    Type: Application
    Filed: April 21, 2010
    Publication date: November 18, 2010
    Inventors: Yukio WATANABE, Osamu Wakabayashi, Miwa Igarashi
  • Publication number: 20100277763
    Abstract: An information equipment apparatus provided with: an operation section; a communication section which carries out communication with a terminal apparatus storing identification data of an operator related to an operation in the operation section, by using a human body of the operator as a communication path; and a control section which, in coordination with a detection of the operation in the operation section, executes an identification of the operator based on the identification data by carrying out communication with the terminal apparatus via the communication section, and according to a result of the identification, controls a control operation corresponding to the operation in the operation section.
    Type: Application
    Filed: April 28, 2010
    Publication date: November 4, 2010
    Applicant: KONICA MINOLTA BUSINESS TECHNOLOGIES, INC.
    Inventors: Motoaki AOYAMA, Shunichi Kumakura, Yukio Watanabe
  • Publication number: 20100217444
    Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion an
    Type: Application
    Filed: February 23, 2010
    Publication date: August 26, 2010
    Inventors: Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki, Hideo Hoshino
  • Publication number: 20100193711
    Abstract: An extreme ultraviolet (EUV) light source system in which parts of an EUV light source apparatus can easily be replaced. The system includes: (i) an extreme ultraviolet light source apparatus having a chamber in which extreme ultraviolet light is generated, a target supply unit for supplying a target material into the chamber, a driver laser for irradiating the target material supplied by the target supply unit with a laser beam to generate plasma, and a collector mirror for collecting the extreme ultraviolet light radiated from the plasma to allow the extreme ultraviolet light to enter projection optics of exposure equipment; and (ii) a lifting apparatus provided to lift and move a replacement part which is a part of the extreme ultraviolet light source apparatus.
    Type: Application
    Filed: January 12, 2010
    Publication date: August 5, 2010
    Inventors: Yukio WATANABE, Osamu Wakabayashi, Junichi Fujimoto, Toshihiro Nishisaka, Hiroshi Someya, Hideo Hoshino