Patents by Inventor Yukiyoshi Nakazawa

Yukiyoshi Nakazawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for monitoring thickness of epitaxial growth layer on substrate
    Patent number: 4203799
    Abstract: In growing on a substrate a film of substance of a similar kind to the substrate, ions are implanted into the substrate to form within the substrate a layer of substance having an optical property different from that of the substrate, and an epitaxial film is then grown. Thus, the thickness of the film can be monitored with an interference waveform appearing with its growth.
    Type: Grant
    Filed: May 2, 1978
    Date of Patent: May 20, 1980
    Assignee: Hitachi, Ltd.
    Inventors: Katsuro Sugawara, Yukiyoshi Nakazawa, Katsuhiko Itoh