Patents by Inventor Yutaka Shiraishi
Yutaka Shiraishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10349508Abstract: A target storage device may include a tank configured to store a target that generates extreme ultraviolet light when being irradiated with laser light, a heater connected with the tank and configured to heat the tank, and a radiation member disposed to cover at least a part of the tank connected with the heater and configured to reflect heat radiation from the tank and the heater toward the tank.Type: GrantFiled: February 5, 2018Date of Patent: July 9, 2019Assignee: Gigaphoton Inc.Inventors: Yutaka Shiraishi, Toshihiro Nishisaka, Toshiyuki Hirashita, Takuya Ishii
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Publication number: 20190155163Abstract: A target generation device according to one aspect of the present disclosure includes a tank for containing a target substance, a heater provided at the tank, a nozzle communicating with the inside of the tank, a lid having a gas inlet port communicating with the inside of the tank, and a plurality of shielding plates that are disposed inside the tank and suppress entry of the target substance to the gas inlet port. Each of the shielding plates includes at least one non-shielding region for allowing the gas to pass through. The non-shielding regions of at least two of the shielding plates are arranged at positions in which one of the non-shielding regions of the at least two of the shielding plates is not seen into the other of the non-shielding regions of the at least two of the shielding plates.Type: ApplicationFiled: January 29, 2019Publication date: May 23, 2019Applicant: Gigaphoton Inc.Inventors: Yutaka SHIRAISHI, Toshihiro NISHISAKA
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Patent number: 10237961Abstract: A target supply device according to a first aspect of the present disclosure is configured to supply a metal target in a plasma generation region and may include a tank configured to house the metal target, a filter having been subjected to a dehydration process, the filter being configured to suppress passage of particles in the metal target housed in the tank, and a nozzle provided with a nozzle hole configured to eject the metal target that has passed through the filter.Type: GrantFiled: October 9, 2018Date of Patent: March 19, 2019Assignee: Gigaphoton Inc.Inventors: Tsukasa Hori, Yutaka Shiraishi, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki
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Patent number: 10225917Abstract: A target supply device may include a nozzle configured to output a liquid target substance contained in a tank, an excitation element, a droplet detection unit configured to detect a droplet output from the nozzle, a passage time interval measurement unit configured to measure a passage time interval of droplets, and a control unit. The control unit may be configured to set a proper range of the passage time interval, change the duty value of the electric signal to be input to the excitation element, store the passage time interval measurement values of the droplets generated with respect to a plurality of duty values and variation thereof in association with the duty values, and determine an operation duty value based on the variation from among the duty values with which the passage time interval measurement values are within the proper range, among the duty values.Type: GrantFiled: June 6, 2018Date of Patent: March 5, 2019Assignee: Gigaphoton Inc.Inventors: Takahisa Fujimaki, Takayuki Yabu, Yuta Takashima, Fumio Iwamoto, Yutaka Shiraishi
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Publication number: 20190045614Abstract: A target supply device according to a first aspect of the present disclosure is configured to supply a metal target in a plasma generation region and may include a tank configured to house the metal target, a filter having been subjected to a dehydration process, the filter being configured to suppress passage of particles in the metal target housed in the tank, and a nozzle provided with a nozzle hole configured to eject the metal target that has passed through the filter.Type: ApplicationFiled: October 9, 2018Publication date: February 7, 2019Applicant: Gigaphoton Inc.Inventors: Tsukasa HORI, Yutaka SHIRAISHI, Shinya IKESAKA, Takanobu ISHIHARA, Toshiro UMEKI
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Publication number: 20180341180Abstract: A target supply device may include a tank for storing a target material, a nozzle which is connected to the tank and outputs the target material, and a gas supply section for supplying the tank with gas. The gas supply section may include a booster which is connected to a gas line, boosts the gas supplied from the gas line, and outputs the boosted gas to the tank, a pressure sensor for measuring the pressure inside the tank, and a pressure controller which adjusts the pressure of the gas to be supplied to the tank on the basis of a measurement result from the pressure sensor.Type: ApplicationFiled: August 1, 2018Publication date: November 29, 2018Applicant: Gigaphoton Inc.Inventors: Yutaka SHIRAISHI, Hideki SHISHIBA
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Patent number: 10143074Abstract: A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area.Type: GrantFiled: June 13, 2014Date of Patent: November 27, 2018Assignee: Gigaphoton Inc.Inventors: Tomohide Ichinose, Fumio Iwamoto, Yutaka Shiraishi, Tsukasa Hori, Hideo Hoshino
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Patent number: 10136509Abstract: A target supply device according to a first aspect of the present disclosure is configured to supply a metal target in a plasma generation region and may include a tank configured to house the metal target, a filter having been subjected to a dehydration process, the filter being configured to suppress passage of particles in the metal target housed in the tank, and a nozzle provided with a nozzle hole configured to eject the metal target that has passed through the filter.Type: GrantFiled: June 7, 2017Date of Patent: November 20, 2018Assignee: Gigaphoton Inc.Inventors: Tsukasa Hori, Yutaka Shiraishi, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki
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Publication number: 20180288863Abstract: A target supply device may include a nozzle configured to output a liquid target substance contained in a tank, an excitation element, a droplet detection unit configured to detect a droplet output from the nozzle, a passage time interval measurement unit configured to measure a passage time interval of droplets, and a control unit. The control unit may be configured to set a proper range of the passage time interval, change the duty value of the electric signal to be input to the excitation element, store the passage time interval measurement values of the droplets generated with respect to a plurality of duty values and variation thereof in association with the duty values, and determine an operation duty value based on the variation from among the duty values with which the passage time interval measurement values are within the proper range, among the duty values.Type: ApplicationFiled: June 6, 2018Publication date: October 4, 2018Applicant: GIGAPHOTON INC.Inventors: Takahisa FUJIMAKI, Takayuki YABU, Yuta TAKASHIMA, Fumio IWAMOTO, Yutaka SHIRAISHI
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Patent number: 10073353Abstract: A target supply device may include a tank for storing a target material, a nozzle which is connected to the tank and outputs the target material, and a gas supply section for supplying the tank with gas. The gas supply section may include a booster which is connected to a gas line, boosts the gas supplied from the gas line, and outputs the boosted gas to the tank, a pressure sensor for measuring the pressure inside the tank, and a pressure controller which adjusts the pressure of the gas to be supplied to the tank on the basis of a measurement result from the pressure sensor.Type: GrantFiled: September 9, 2016Date of Patent: September 11, 2018Assignee: Gigaphoton Inc.Inventors: Yutaka Shiraishi, Hideki Shishiba
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Patent number: 10028365Abstract: A chamber device may include a chamber, and a target generation device assembled into the chamber and configured to supply a target material into the chamber, the target generation device including a tank configured to store the target material, a temperature variable device configured to vary temperature of the target material in the tank, and a nozzle section in which a nozzle hole configured to output the target material in a liquid form is formed, and the chamber device may further include a gas nozzle having an inlet port facing the nozzle section and configured to introduce gas into the chamber, a gas supply source configured to supply gas containing hydrogen to the gas nozzle to supply the gas containing the hydrogen to at least periphery of the nozzle section, and a moisture remover configured to remove moisture at least in the periphery of the nozzle section in the chamber.Type: GrantFiled: September 7, 2017Date of Patent: July 17, 2018Assignee: Gigaphoton Inc.Inventors: Takanobu Ishihara, Tsukasa Hori, Takashi Saito, Yutaka Shiraishi
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Publication number: 20180160518Abstract: A target storage device may include a tank configured to store a target that generates extreme ultraviolet light when being irradiated with laser light, a heater connected with the tank and configured to heat the tank, and a radiation member disposed to cover at least a part of the tank connected with the heater and configured to reflect heat radiation from the tank and the heater toward the tank.Type: ApplicationFiled: February 5, 2018Publication date: June 7, 2018Applicant: Gigaphoton Inc.Inventors: Yutaka SHIRAISHI, Toshihiro NISHISAKA, Toshiyuki HIRASHITA, Takuya ISHII
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Patent number: 9894744Abstract: An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of greater than 90 degrees with the target.Type: GrantFiled: March 7, 2016Date of Patent: February 13, 2018Assignee: Gigaphoton Inc.Inventors: Fumio Iwamoto, Yutaka Shiraishi, Tsukasa Hori, Takuya Ishii
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Publication number: 20180007770Abstract: A chamber device may include a chamber, and a target generation device assembled into the chamber and configured to supply a target material into the chamber, the target generation device including a tank configured to store the target material, a temperature variable device configured to vary temperature of the target material in the tank, and a nozzle section in which a nozzle hole configured to output the target material in a liquid form is formed, and the chamber device may further include a gas nozzle having an inlet port facing the nozzle section and configured to introduce gas into the chamber, a gas supply source configured to supply gas containing hydrogen to the gas nozzle to supply the gas containing the hydrogen to at least periphery of the nozzle section, and a moisture remover configured to remove moisture at least in the periphery of the nozzle section in the chamber.Type: ApplicationFiled: September 7, 2017Publication date: January 4, 2018Applicant: Gigaphoton Inc.Inventors: Takanobu ISHIHARA, Tsukasa HORI, Takashi SAITO, Yutaka SHIRAISHI
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Publication number: 20170280543Abstract: A target supply device according to a first aspect of the present disclosure is configured to supply a metal target in a plasma generation region and may include a tank configured to house the metal target, a filter having been subjected to a dehydration process, the filter being configured to suppress passage of particles in the metal target housed in the tank, and a nozzle provided with a nozzle hole configured to eject the metal target that has passed through the filter.Type: ApplicationFiled: June 7, 2017Publication date: September 28, 2017Applicant: Gigaphoton Inc.Inventors: Tsukasa HORI, Yutaka SHIRAISHI, Shinya IKESAKA, Takanobu ISHIHARA, Toshiro UMEKI
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Patent number: 9648715Abstract: A target supply device may include: a target generator configured to accommodate a liquid target material and having a nozzle with a nozzle hole from which the liquid target material is outputted; and a filter disposed in the target generator and made of glass, the glass reacting with the liquid target material, so that a solid reaction product is generated. The filter may include a first through-hole configured to allow the liquid target material to pass therethrough, and an inner surface of the first through-hole may be coated with a material which is not easy to react with the liquid target material.Type: GrantFiled: April 29, 2016Date of Patent: May 9, 2017Assignee: GIGAPHOTON INC.Inventors: Yutaka Shiraishi, Toshiyuki Hirashita, Shinya Ikesaka
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Publication number: 20170053780Abstract: A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.Type: ApplicationFiled: November 8, 2016Publication date: February 23, 2017Applicant: Gigaphoton Inc.Inventors: Fumio IWAMOTO, Yutaka SHIRAISHI, Tsukasa HORI, Osamu WAKABAYASHI
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Publication number: 20160377986Abstract: A target supply device may include a tank for storing a target material, a nozzle which is connected to the tank and outputs the target material, and a gas supply section for supplying the tank with gas. The gas supply section may include a booster which is connected to a gas line, boosts the gas supplied from the gas line, and outputs the boosted gas to the tank, a pressure sensor for measuring the pressure inside the tank, and a pressure controller which adjusts the pressure of the gas to be supplied to the tank on the basis of a measurement result from the pressure sensor.Type: ApplicationFiled: September 9, 2016Publication date: December 29, 2016Applicant: Gigaphoton Inc.Inventors: Yutaka SHIRAISHI, Hideki SHISHIBA
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Publication number: 20160249443Abstract: A target supply device may include: a target generator configured to accommodate a liquid target material and having a nozzle with a nozzle hole from which the liquid target material is outputted; and a filter disposed in the target generator and made of glass, the glass reacting with the liquid target material, so that a solid reaction product is generated. The filter may include a first through-hole configured to allow the liquid target material to pass therethrough, and an inner surface of the first through-hole may be coated with a material which is not easy to react with the liquid target material.Type: ApplicationFiled: April 29, 2016Publication date: August 25, 2016Applicant: Gigaphoton Inc.Inventors: Yutaka SHIRAISHI, Toshiyuki HIRASHITA, Shinya IKESAKA
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Publication number: 20160227637Abstract: A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area.Type: ApplicationFiled: June 13, 2014Publication date: August 4, 2016Applicant: GIGAPHOTON INC.Inventors: Tomohide ICHINOSE, Fumio IWAMOTO, Yutaka SHIRAISHI, Tsukasa HORI, Hideo HOSHINO