Patents by Inventor Yuya NAGATA

Yuya NAGATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12001134
    Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light. The phase shift film contains it as a main component. A ratio of a maximum value of an intensity of a peak of diffracted light from the phase shift film in a 2?range of 35° to 45° to an average value of an intensity of the diffracted light in a 28 range of 55° to 60° measured using an XRD method with a CuK? ray, upon being irradiated with the EUV light with an incident angle of ?, is 1.0 or more and 30 or less. A refractive index and an extinction coefficient of the phase shift film to the EUV light are 0.925 or less, and 0.030 or more, respectively.
    Type: Grant
    Filed: November 22, 2023
    Date of Patent: June 4, 2024
    Assignee: AGC Inc.
    Inventors: Yuya Nagata, Daijiro Akagi, Kenichi Sasaki, Hiroaki Iwaoka
  • Publication number: 20240160096
    Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light. The substrate, the multilayer reflective film, the protection film, and the phase shift film are arranged in this order. The phase shift film is made of an Ir-based material containing Ir as a main component, and the protection film is made of a Rh-based material containing Rh as a main component.
    Type: Application
    Filed: January 24, 2024
    Publication date: May 16, 2024
    Applicant: AGC Inc.
    Inventors: Yuya NAGATA, Daijiro AKAGI, Kenichi SASAKI, Hiroaki IWAOKA
  • Patent number: 11982309
    Abstract: A ball joint includes: a ball stud including a stud portion having one end portion connected to a structural member and another end portion, to which a ball portion is integrally joined; a housing made of metal and configured to support the ball portion to allow swinging and rotating movement of the ball portion; and a ball seat made of plastic and interposed between the housing and the ball portion. The ball seat includes a plurality of protrusions jutting out from the ball seat and inserted into a plurality of through holes formed in a bottom portion of the housing. The protrusions having pierced through the through holes are staked at their distal portions. The protrusion of the ball seat has a large diameter portion, whose diameter is larger than an inner diameter of the through hole, at its proximal portion proximal from the distal portion thereof.
    Type: Grant
    Filed: July 13, 2020
    Date of Patent: May 14, 2024
    Assignee: NHK SPRING CO., LTD.
    Inventors: Shigeru Kuroda, Yuya Nagata
  • Publication number: 20240094622
    Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light. The phase shift film contains Ir as a main component. A ratio of a maximum value of an intensity of a peak of diffracted light from the phase shift film in a 2? range of 35° to 45° to an average value of an intensity of the diffracted light in a 2? range of 55° to 60° measured using an XRD method with a CuK? ray, upon being irradiated with the EUV light with an incident angle of ?, is 1.0 or more and 30 or less. A refractive index and an extinction coefficient of the phase shift film to the EUV light are 0.925 or less, and 0.030 or more, respectively.
    Type: Application
    Filed: November 22, 2023
    Publication date: March 21, 2024
    Applicant: AGC Inc.
    Inventors: YUYA NAGATA, Daijiro Akagi, Kenichi Sasaki, Hiroaki Iwaoka
  • Patent number: 11862471
    Abstract: A manufacturing method for a semiconductor device according to an embodiment includes performing first etching for forming a recess in a layer to be processed using a reactive ion etching method, performing a first treatment of supplying a silylation agent to the recess after the first etching, and performing second etching of etching at least a bottom surface of the recess using a reactive ion etching method after the first treatment.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: January 2, 2024
    Assignee: Kioxia Corporation
    Inventors: Atsushi Takahashi, Ayata Harayama, Yuya Nagata
  • Publication number: 20230307520
    Abstract: According to one embodiment, a method for manufacturing a semiconductor device includes forming an electrode layer on a film containing indium and etching portions of the electrode layer left exposed by a mask layer until at least a portion of the film is exposed. A spacer film is formed to cover an upper surface of the electrode layer, side surfaces of the electrode layer, and an exposed upper surface of the film. The spacer film on the upper surface of the electrode layer and the exposed upper surface of the film is removed while leaving the spacer film on the side surfaces of the electrode layer. The exposed upper surface of the film is exposed to a reductive gas plasma to reduce portions of the film. These reduced portions of the film are then etched with a chemical solution.
    Type: Application
    Filed: August 29, 2022
    Publication date: September 28, 2023
    Inventors: Takuya KIKUCHI, Yuya NAGATA, Masaya TODA, Kappei IMAMURA, Tsubasa IMAMURA
  • Publication number: 20220243761
    Abstract: A ball joint includes: a ball stud including a stud portion having one end portion connected to a structural member and another end portion, to which a ball portion is integrally joined; a housing made of metal and configured to support the ball portion to allow swinging and rotating movement of the ball portion; and a ball seat made of plastic and interposed between the housing and the ball portion. The ball seat includes a plurality of protrusions jutting out from the ball seat and inserted into a plurality of through holes formed in a bottom portion of the housing. The protrusions having pierced through the through holes are staked at their distal portions. The protrusion of the ball seat has a large diameter portion, whose diameter is larger than an inner diameter of the through hole, at its proximal portion proximal from the distal portion thereof.
    Type: Application
    Filed: July 13, 2020
    Publication date: August 4, 2022
    Applicant: NHK SPRING CO., LTD.
    Inventors: Shigeru KURODA, Yuya NAGATA
  • Publication number: 20220238345
    Abstract: A manufacturing method for a semiconductor device according to an embodiment includes performing first etching for forming a recess in a layer to be processed using a reactive ion etching method, performing a first treatment of supplying a silylation agent to the recess after the first etching, and performing second etching of etching at least a bottom surface of the recess using a reactive ion etching method after the first treatment.
    Type: Application
    Filed: September 10, 2021
    Publication date: July 28, 2022
    Applicant: Kioxia Corporation
    Inventors: Atsushi TAKAHASHI, Ayata HARAYAMA, Yuya NAGATA
  • Patent number: 11391700
    Abstract: [PROBLEM] To provide a defect detection device capable of detecting not only a defect within a visible range but also a defect outside the visible range among the objects to be inspected.
    Type: Grant
    Filed: May 21, 2019
    Date of Patent: July 19, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Takahide Hatahori, Yuya Nagata, Kenji Takubo
  • Patent number: 11310401
    Abstract: An image capture apparatus to which a module having a predetermined function can be attached, the apparatus comprises a connecting unit configured to attach the module, a heat transfer unit configured to exchange heat with the module, a communication unit configured to communicate with the module, and a control unit configured to control a heat dissipation state of a system including the image capture apparatus and the module on the basis of information pertaining to heat dissipation performance of the module and position information pertaining to an attachment position of the module, the information having been acquired by the communication unit.
    Type: Grant
    Filed: February 19, 2020
    Date of Patent: April 19, 2022
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hironobu Makara, Tadanori Saito, Kazuaki Maruhashi, Takamichi Kosugi, Takutomi Ogawa, Tsubasa Nakatani, Naohiro Arai, Manabu Abe, Takeshi Hamada, Manami Gunji, Yuya Nagata, Yuta Nakamura, Hiroshi Yano
  • Publication number: 20210270777
    Abstract: A defect detection device 10 includes: an excitation source 11 capable of being placed at any position on a surface of an inspection target object S, the excitation source 11 being configured to excite an elastic wave within the inspection target object S, the elastic wave being predominant in one vibration mode and propagating in a predetermined direction; an illumination unit (pulsed laser light source 13, illumination light lens 14) configured to perform stroboscopic illumination on an illumination area of the surface of the inspection target object by using a laser light source; a displacement measurement unit (speckle shearing interferometer 15) configured to collectively measure a displacement of each point in a front-back direction within the illumination area in at least three different phases of the elastic wave, by speckle interferometry or speckle shearing interferometry; and a reflected wave/scattered wave detector 16 configured to detect either one or both of a reflected wave and a scattered wave
    Type: Application
    Filed: May 21, 2019
    Publication date: September 2, 2021
    Inventors: Takahide HATAHORI, Yuya NAGATA, Kenji TAKUBO
  • Patent number: 11089186
    Abstract: An image pickup apparatus that is capable of efficiently dissipating heat generated in a sensor substrate or a control substrate. An image sensor is implemented on the sensor substrate. A first heat dissipation section has four faces approximately parallel to an optical axis of an image pickup optical system of a lens unit and is fixed to the lens unit so that the four faces will surround the optical system from four sides. The control substrate is thermally coupled with the first heat dissipation section. A second heat dissipation section is arranged at a side opposite to the optical system in an optical axis direction with respect to the sensor substrate and is fixed to the first heat dissipation section. A heat conduction member is arranged between the sensor substrate and the second heat dissipation section in the optical axis direction so as to contact the both.
    Type: Grant
    Filed: December 4, 2019
    Date of Patent: August 10, 2021
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Yuya Fujiwara, Yoshinobu Shibayama, Koichi Shigeta, Masato Ito, Yuya Nagata
  • Patent number: 11076072
    Abstract: An image capturing apparatus improved in heat dissipation efficiency while avoiding increase in size. A rotary fan is rotated to draw air from a suction port and discharge air from a discharge port. A heat dissipation duct includes an intake opening, a discharge opening, intake-side fins, an intake-side duct portion, and an exhaust-side duct portion. Projected shadows of at least part of the intake-side fins and at least part of the rotary fan overlap each other, as viewed from a direction of a rotational axis of the rotary fan. Ends of the intake-side fins toward the intake opening and the exhaust opening are closer thereto than ends of the rotary fan toward the same, respectively. The intake opening and the suction port of the rotary fan communicate with each other via a space adjacent to the end of the intake-side fins toward the discharge opening.
    Type: Grant
    Filed: November 23, 2020
    Date of Patent: July 27, 2021
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Kenji Yamagata, Yoshinobu Shibayama, Manabu Abe, Koichi Shigeta, Masato Ito, Yuya Nagata
  • Publication number: 20210160411
    Abstract: An image capturing apparatus improved in heat dissipation efficiency while avoiding increase in size. A rotary fan is rotated to draw air from a suction port and discharge air from a discharge port. A heat dissipation duct includes an intake opening, a discharge opening, intake-side fins, an intake-side duct portion, and an exhaust-side duct portion. Projected shadows of at least part of the intake-side fins and at least part of the rotary fan overlap each other, as viewed from a direction of a rotational axis of the rotary fan. Ends of the intake-side fins toward the intake opening and the exhaust opening are closer thereto than ends of the rotary fan toward the same, respectively. The intake opening and the suction port of the rotary fan communicate with each other via a space adjacent to the end of the intake-side fins toward the discharge opening.
    Type: Application
    Filed: November 23, 2020
    Publication date: May 27, 2021
    Inventors: Kenji YAMAGATA, Yoshinobu SHIBAYAMA, Manabu ABE, Koichi SHIGETA, Masato ITO, Yuya NAGATA
  • Publication number: 20210096085
    Abstract: A vibration measurement device 10 includes an excitation unit (signal generator 11 and vibrator 12) for exciting an elastic wave to an inspection target S, an illumination unit (wavelength stabilized laser beam source 13 and illumination light lens 14) for performing stroboscopic illumination to a measurement region of a surface of the inspection target S using a wavelength stabilized laser beam source 13, a displacement measurement unit (speckle-sharing interferometer 15) for collectively measuring a displacement of each point of the measurement region in the back-and-forth direction by speckle interferometry or speckle-sharing interferometer. By using the wavelength stabilized laser beam source 13, an interference image can be obtained even when the inspection target S has large surface irregularities.
    Type: Application
    Filed: December 13, 2018
    Publication date: April 1, 2021
    Inventors: Takahide HATAHORI, Yuya NAGATA, Kenji TAKUBO
  • Patent number: 10942152
    Abstract: The defect inspection device is provided with a sound wave excitation unit for exciting a sound wave having a time waveform represented by a continuous periodic function to a prescribed position on the surface of an object to be measured, a displacement amount measurement unit for measuring a periodically varying displacement amount generated by the propagation of the sound wave from the prescribed position through the surface at at least three different phases of the periodic variation, and a periodic function acquisition unit for determining a periodic function expressing the periodic variation of the physical quantity on the basis of the displacement amount at the at least three different phases.
    Type: Grant
    Filed: June 21, 2016
    Date of Patent: March 9, 2021
    Assignee: Shimadzu Corporation
    Inventors: Takahide Hatahori, Yuya Nagata, Kenji Takubo
  • Patent number: 10866656
    Abstract: A handheld display apparatus including a display unit that displays an image includes a handheld grip portion including a plurality of bar members to be gripped by a user, and an operation unit that receives a manual operation and generates a control signal for the handheld display apparatus, the operation unit arranged on either at least one of the plurality of bar members or in proximity to at least one of the plurality of bar members.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: December 15, 2020
    Assignee: Canon Kabushiki Kaisha
    Inventors: Shigeru Toriihara, Yuya Nagata
  • Publication number: 20200288048
    Abstract: An image capture apparatus to which a module having a predetermined function can be attached, the apparatus comprises a connecting unit configured to attach the module, a heat transfer unit configured to exchange heat with the module, a communication unit configured to communicate with the module, and a control unit configured to control a heat dissipation state of a system including the image capture apparatus and the module on the basis of information pertaining to heat dissipation performance of the module and position information pertaining to an attachment position of the module, the information having been acquired by the communication unit.
    Type: Application
    Filed: February 19, 2020
    Publication date: September 10, 2020
    Inventors: Hironobu Makara, Tadanori Saito, Kazuaki Maruhashi, Takamichi Kosugi, Takutomi Ogawa, Tsubasa Nakatani, Naohiro Arai, Manabu Abe, Takeshi Hamada, Manami Gunji, Yuya Nagata, Yuta Nakamura, Hiroshi Yano
  • Publication number: 20200276957
    Abstract: A seatbelt use determination device includes: a sensor section configured to detect insertion of a seatbelt tongue into a seatbelt buckle; a detection section configured to detect rotation of a take-up section for taking up a webbing; and a notification section that is configured to, when insertion of the tongue into the buckle has been detected by the sensor section, use a detection result of the detection section to determine a predetermined improper use of the webbing and to provide notification of the improper use. When insertion of the tongue into the buckle has been detected by the sensor section, the notification section is configured to determine improper use and to notify of the improper use in cases in which a time period during which a rotation change amount per unit time of the take-up section is continuously less than a predetermined value is longer than a predetermined first threshold.
    Type: Application
    Filed: May 17, 2017
    Publication date: September 3, 2020
    Inventors: Yuya NAGATA, Tomonari UMAKOSHI, Takuhiro SAITO, Takahiro OSAKI
  • Patent number: 10752205
    Abstract: A webbing take-up device that includes a spool that is rotated in a take-up direction to take up webbing worn by an occupant and that is rotated in a pull-out direction by the webbing being pulled out, and a frame that rotatably supports the spool. The frame includes a fixed stay portion that is fixed to a vehicle body, and a rotation stop stay portion that is disposed spaced apart from the vehicle body and that by being engaged with the vehicle body is restricted from rotational displacement relative to the fixed stay portion.
    Type: Grant
    Filed: June 1, 2018
    Date of Patent: August 25, 2020
    Assignee: KABUSHIKI KAISHA TOKAI-RIKA-DENKI-SEISAKUSHO
    Inventors: Yuya Nagata, Takuhiro Saito, Tomonari Umakoshi, Takahiro Osaki