Abstract: A heater comprises a plurality of zones with at least two zones having a variable power density gradient different from one another. The heater having zones of different variable power density gradients allows for controlling the heat output and temperature profile of the heater in one or more directions of the heater. The heater can be used, for example, to control the temperature profile in a vertical direction.

Abstract: A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.

Abstract: A heater assembly is disclosed herein. The heater assembly may comprise a tubular body. The tubular body may include a graphite core disposed in a heating path. The graphite core may be coated with an overcoat layer. The tubular body may include slits that may cut-off heat transfer between portions of the tubular body. The heater assembly may have a configuration comprising a plurality of heating rungs having a predominant portion disposed substantially perpendicular to an upper surface of the heater so that the predominant portion is disposed vertically. The heater assembly may include a flange at a first end and a lip at a second end. The heater assembly configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to other designs.

Abstract: A heater assembly is provided having a configuration to promote more uniform heating and temperature distribution to the heating surface. A heater assembly as disclosed herein comprises a bottom plate comprising a heating element and a top plate having an upper surface for heating a substrate and a lower surface that contacts the bottom plate. The upper plate is provide such that the lower surface has a surface topography such that the contact points between the upper plate and the lower plate.

Abstract: A heater assembly is disclosed herein. The heater assembly may comprise a tubular body. The tubular body may include a graphite core disposed in a heating path. The graphite core may be coated with an overcoat layer. The tubular body may include slits that may cut-off heat transfer between portions of the tubular body. The heater assembly may have a configuration comprising a plurality of heating rungs having a predominant portion disposed substantially perpendicular to an upper surface of the heater so that the predominant portion is disposed vertically. The heater assembly may include a flange at a first end and a lip at a second end. The heater assembly configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to other designs.

Abstract: A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.

Abstract: A heater comprises a plurality of zones with at least two zones having a variable power density gradient different from one another. The heater having zones of different variable power density gradients allows for controlling the heat output and temperature profile of the heater in one or more directions of the heater. The heater can be used, for example, to control the temperature profile in a vertical direction.

Abstract: A coated graphite heater. The heater has a configuration comprising a plurality of heating rungs having a major portion disposed substantially parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating rungs with a major portion oriented perpendicular to the plane of the upper surface of the heater.

Abstract: A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.

Abstract: A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.

Abstract: A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.

Abstract: There is disclosed a wafer processing apparatus having optimized electrode patterns for its resistive heating element. The optimized electrode pattern is designed to compensate for the heat loss around contact areas, electrical connections, and through-holes, etc., by generating more heat near or around those areas, providing maximum temperature uniformity. In another embodiment of the optimized design of the invention, the resistance of heating element closely matches the impedance of the power supply for higher efficiency, especially when higher operating temperature or higher electrical power is required.

Abstract: A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.

Abstract: There is disclosed a wafer processing apparatus having optimized electrode patterns for its resistive heating element. The optimized electrode pattern is designed to compensate for the heat loss around contact areas, electrical connections, and through-holes, etc., by generating more heat near or around those areas, providing maximum temperature uniformity. In another embodiment of the optimized design of the invention, the resistance of heating element closely matches the impedance of the power supply for higher efficiency, especially when higher operating temperature or higher electrical power is required.

Abstract: A thermal control device for wafer processing which comprises a) a platform for placement of an object of various sizes to be heated, b) at least a shaft extending substantially transverse to the platform; and c) a plurality of resistance heating elements patterned in a plurality of circuits defining at least one zone for independent controlled heating of objects of varying sizes on the platform.