Pressing member for substrate polishing apparatus
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Claims
The ornamental design for a pressing member for a substrate polishing apparatus, as shown and described.
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Type: Grant
Filed: Feb 3, 2017
Date of Patent: Nov 20, 2018
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Kenji Kamimura (Tokyo), Masayuki Nakanishi (Tokyo), Satoru Yamamoto (Tokyo), Yasuyuki Miyasawa (Tokyo), Kenji Kodera (Tokyo)
Primary Examiner: Patricia A Palasik
Application Number: 29/592,889