Pressing member for substrate polishing apparatus

- EBARA CORPORATION
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Description

FIG. 1 is a first perspective view, observed from a front of a first pressing member for a substrate polishing apparatus showing our new design;

FIG. 2 is a second perspective view, observed from a rear thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a rear view thereof;

FIG. 5 is a top view thereof;

FIG. 6 is a bottom view thereof;

FIG. 7 is a right-side view thereof, a left-side view being a mirror image thereof;

FIG. 8 is a first perspective view, observed from a front of a second pressing member for a substrate polishing apparatus showing our new design;

FIG. 9 is a second perspective view, observed from a rear thereof;

FIG. 10 is a front view thereof;

FIG. 11 is a rear view thereof;

FIG. 12 is a top view thereof;

FIG. 13 is a bottom view thereof;

FIG. 14 is a right-side view thereof, a left-side view being a mirror image thereof;

FIG. 15 is a first perspective view, observed from a front of a third pressing member for a substrate polishing apparatus showing our new design;

FIG. 16 is a second perspective view, observed from a rear thereof;

FIG. 17 is a front view thereof;

FIG. 18 is a rear view thereof;

FIG. 19 is a top view thereof;

FIG. 20 is a bottom view thereof;

FIG. 21 is a right-side view thereof, a left-side view being a mirror image thereof;

FIG. 22 is a first perspective view, observed from a front of a fourth pressing member for a substrate polishing apparatus showing our new design;

FIG. 23 is a second perspective view, observed from a rear thereof;

FIG. 24 is a front view thereof;

FIG. 25 is a rear view thereof;

FIG. 26 is a top view thereof;

FIG. 27 is a bottom view thereof; and,

FIG. 28 is a right-side view thereof, a left-side view being a mirror image thereof.

Claims

The ornamental design for a pressing member for a substrate polishing apparatus, as shown and described.

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Patent History
Patent number: D834075
Type: Grant
Filed: Feb 3, 2017
Date of Patent: Nov 20, 2018
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Kenji Kamimura (Tokyo), Masayuki Nakanishi (Tokyo), Satoru Yamamoto (Tokyo), Yasuyuki Miyasawa (Tokyo), Kenji Kodera (Tokyo)
Primary Examiner: Patricia A Palasik
Application Number: 29/592,889
Classifications
Current U.S. Class: Element Or Attachment (D15/126)