Fluid apparatus for semiconductor manufacturing equipment
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The file of this patent contains at least one drawing/photograph executed in color. Copies of this patent with color drawing(s)/photograh(s) will be provided by the Office upon request and payment of the necessary fee.
The drawings are lined for the color black.
Figures indicated in broken lines in the drawings represent environmental structure, which forms no part of the claimed design. Dash-dot lines in the drawings represent the boundary of the claimed design. In
Claims
The ornamental design for a fluid apparatus for semiconductor manufacturing equipment, as shown and described.
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Type: Grant
Filed: Apr 20, 2016
Date of Patent: Apr 16, 2019
Assignee: Surpass Industry Co., Ltd. (Gyoda-shi, Saitama)
Inventor: Takashi Imai (Saitama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/561,806