Abstract: A GaN based substrate is obtained with a simple etching. The GaN based substrate is separate from another base substrate with the etching. The whole process is easy and costs low. The substrate is made of a material having a matching lattice length for a lattice structure so that the substrate has good characteristics. And the GaN based substrate has good heat dissipation so that the stability and life-time of GaN based devices on the GaN based substrate are enhanced even when they are constantly operated under a high power.

Abstract: A method comprises, in a reaction chamber, depositing a seed layer of germanium over a silicon-containing surface at a first temperature. The seed layer has a thickness between about one monolayer and about 1000 ?. The method further comprises, after depositing the seed layer, increasing the temperature of the reaction chamber while continuing to deposit germanium. The method further comprises holding the reaction chamber in a second temperature range while continuing to deposit germanium. The second temperature range is greater than the first temperature.

Abstract: A simply-constructed paint-spraying platform comprises: a platform body comprising a top wall, a ventilation part, a bottom wall, two support plates, and a backing plate. When in use, the paint-spraying platform is expanded, and the article to be painted is hung on the first and second hooking holes or placed on the backing palate for spraying paint by using a spray gun. Therefore, the advantages including easy carriage, good ventilation, low cost, and enhanced steadiness can be provided.

Abstract: A supply or feed center for dry particulate material is modular in design with an application module and an exhaust module, along with optimal cabinet modules such as a pump cabinet module. The application module is partitioned into an application section and a utility section, both of which communicate with the exhaust module. An air diverter may be used to change relative air flow into the two sections, and in one embodiment is a swingable door. The exhaust module may include a self-contained exhaust system including after filters, motor, fan and final filters, or may share energy from a remote exhaust system. An inventive suction device is also provided to extract material from a hopper.

Abstract: A substrate processing chamber comprises an electrostatic chuck comprising a ceramic puck having a substrate receiving surface and an opposing backside surface. In one version, the ceramic puck comprises a thickness of less than 7 mm. An electrode is embedded in the ceramic puck to generate an electrostatic force to hold a substrate, and heater coils in the ceramic puck allow independent control of temperatures at different heating zones of the puck. A chiller provides coolant to coolant channels in a base below the ceramic puck. A controller comprises temperature control instruction sets which set the coolant temperature in the chiller in relation prior to ramping up or down of the power levels applied to the heater.

Abstract: Branch piping (18) branches off from the upstream side of opening/closing valves (13d, 14d) provided near the entrance of a processing chamber (11) of a gas supply system for supplying a processing gas, and the branch piping (18) is connected to gas discharge piping (17). In the branch piping (18) are provided a gas flow rate detection mechanism (19) and opening/closing valves (13h, 14h) for switching a flow path between the processing chamber (11) side and the branch piping (18) side. The gas flow rate detection mechanism (19) causes a gas to flow through a resistance body to measure a pressure across the resistance body, detecting a gas flow rate from the pressure difference. Mass flow controllers (13a, 14a) are tested or corrected by the detected value.

Abstract: Systems and methods are used to modify a layer on a substrate that is used to form a pattern generator, so that light reflecting from the modified substrate has a trapezoidal or other custom profile. The layer is modified using various vapor deposition techniques in conjunction with moving or positioning the substrate a desired distance from a blocking device and/or at a desired rate or speed.

Abstract: A plasma processing apparatus having an electrostatic chucking electrode that allows temperature control of a semiconductor wafer during etching process with high efficiency comprises: a holder stage comprising an electrode block S having a dielectric film 4 on the surface thereof and a coolant flow passage 6 therein, in which temperature control is performed while holding a semiconductor wafer W on the dielectric film on the surface of the electrode block; and a cooling cycle 50 including a compressor 52, a condenser 55, an expansion valve 53, a heat exchanger 54 having a heater built therein, and an evaporator, wherein the temperature control of the electrode block S is performed by using a direct-expansion-type temperature controller in which the electrode block S is used as the evaporator of the cooling cycle, and the coolant is directly circulated and expanded inside the electrode block.

Abstract: A method of combusting a gas comprises the steps of conveying the gas to a combustion nozzle connected to a combustion chamber, and supplying to the chamber gas for forming a pilot flame around the combustion nozzle. To form the pilot flame, hydrogen is supplied to the chamber through a first plurality of apertures extending about the combustion nozzle, and an oxidant is supplied to the chamber, separately from the hydrogen, through a second plurality of apertures extending about the combustion nozzle.

Abstract: A system for processing a semiconductor substrate is provided. The system includes a mainframe having a plurality of modules attached thereto. The modules include processing modules, storage modules, and transport mechanisms. The processing modules may include combinatorial processing modules and conventional processing modules, such as surface preparation, thermal treatment, etch and deposition modules. In one embodiment, at least one of the modules stores multiple masks. The multiple masks enable in-situ variation of spatial location and geometry across a sequence of processes and/or multiple layers of a substrate to be processed in another one of the modules. A method for processing a substrate is also provided.

Abstract: A rotation evaporator for thin film deposition and a thin film deposition apparatus using the same are provided. The rotation evaporator includes a melting pot that has an opened top surface and in which a deposition material is filled, a heating unit that heats the melting pot, and a rotation unit that rotates the evaporator using predetermined electric power to be supplied from the outside. The thin film deposition apparatus that uses a rotation evaporator includes a substrate that is to be subject to deposition, a mask that is coupled to the substrate so as to cover a portion to be not deposited of the substrate and to deposit a necessary portion of the substrate, a substrate chucking system that supports the substrate and the mask, and an evaporator that rotates using a rotation unit. The rotation unit includes a melting pot that has an opened top surface and in which a deposition material is filled, and a heating unit that heats the melting pot.

Abstract: Wafer contamination is prevented, while preventing damage to a high-frequency electrode and a susceptor. A main body 41 of the susceptor 40 of an MMT apparatus is composed of a heater arranging plate 42, an electrode arranging plate 48, and a supporting plate 56 all made from quartz. A circular electrode arranging hole 49 with a fixed depth is concentrically formed on the upper surface of the electrode arranging plate 48, and quadrangular pillars 50 are formed protruding in a matrix on the bottom of the electrode arranging hole 49. Multiple insertion holes 52 are formed in a disk-shaped high-frequency electrode 51, and the high-frequency electrode 51 is installed in the electrode arranging hole 49 by inserting each pillar 50 into each insertion hole 52. The gaps Sa and Sb are provided between the high-frequency electrode 51 and the electrode arranging plate 48. The pillar 50 boosts the strength of the electrode arranging plate 48.

Abstract: An ion source capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions is provided. The ion source includes at least one anode and at least one cathode. In certain example embodiments, the anode may have a recess formed therein in which ions to be included in the ion beam may accelerate. Walls of the recess optionally may be insulated using, for example, ceramic. One or more holes may be provided to allow a supply of gas to flow into the recess, and those holes optionally may be tapered such that they narrow towards the recess. Thus, certain example embodiments produce an ion source having a higher energy efficiency (e.g., having increasing ion energy).

Abstract: An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

Abstract: Nitrogen gas is exhausted from a plurality of gas outlets formed in a relatively upper part of a chamber side portion. The gas outlets are configured such that gas exhaust directions as viewed from the gas outlets are deviated at an equal angle from a central axis that passes through the center of a chamber in a vertical direction. The atmosphere in the chamber is exhausted from a bottom opening formed in a central portion of the bottom surface of the chamber. This produces such a tornado-like flow of nitrogen gas as directing from a relatively upper part of the chamber side portion to the central portion of the bottom surface of the chamber. In this condition, a flash of light is emitted with no semiconductor wafer transported into the chamber, whereby particles in the chamber are scattered and exhausted outside along with the flow of nitrogen gas.

Abstract: In one embodiment, the invention is a guard ring for reducing particle entrapment along a moveable shaft of a substrate support. In one embodiment, the guard ring comprises a substantially annular guard ring positioned within a step formed in a sleeve that circumscribes the shaft. The guard ring is positioned to substantially seal a gap separating the shaft from the sleeve, so that the amount of particles and foreign matter that travel within or become trapped in the gap is substantially reduced. In another embodiment, a guard ring comprises a base portion having an inner perimeter and an outer perimeter, a first flange coupled to the inner perimeter, a second flange coupled to the outer perimeter, and a continuous channel separating the first flange from the second flange. The first flange is adapted to function as a spring that accommodates displacement of the shaft.

Abstract: A method and apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a first portion configured to mount to a bottom of a processing chamber and second portion configured to support a substrate support. The first portion is releaseably coupled to the second portion. The second portion includes a lower housing coupled to a lower collar. The lower collar is laterally positionable relative to the first portion. The lower housing has a planar orientation that is adjustable relative to a planar orientation of the lower collar.

Abstract: Methods for positioning a substrate support within a processing chamber are provided. In one embodiment, a method for adjusting the orientation of a substrate support within a processing chamber using a mounting assembly is provided. The mounting assembly includes an upper portion coupled to the processing chamber and a lower portion coupled to the upper portion. The method includes adjusting a lateral position of a collar of the second portion relative to the first portion, and adjusting a planar orientation of the lower housing of the second portion relative to the first portion.

Abstract: A milking arrangement (1) for automatic milking of animals (9) is described. The milking arrangement includes a feeding area (4) arranged for supplying food to the animals (9), a resting area (2) arranged for allowing the animals (9) to rest, and a milking area (3) with at least one milking station (16, 17) for milking the animals. The milking arrangement also includes a oneway gate (12) arranged between the resting area (2) and the feeding area (4) allowing access from the resting area (2) to the feeding area (4) and at least a first access device (14) arranged between the feeding area (4) and the milking area (3) allowing access between the feeding area (4) and the milking area (3) only in the direction from the feeding area (4) to the milking area (3). A method for managing animals within a milking arrangement is also described.

Abstract: An assembly for feeding and milking animals is disclosed. The assembly comprises a feeding system with a movable feed platform and a drive unit for driving the feed platform. The feed platform is provided with a number of feeding places. The assembly further comprises a milking system for automatically milking animals on the feed platform, which milking system comprises sets of teat cups. At least a large number of the sets of teat cups is disposed separately from the feed platform.

Abstract: An improved drinking system having a water source capable of delivery ambient water through water lines; watering stations fluidly connected drinking lines; and at least one light source optically connected to at least one of the watering stations. Also provided is a method for selectively distributing water to animals within a farm facility.

Abstract: The present invention is an apparatus that is used to hold a bag in which pet refuse or waste is deposited without the need to directly hold the bag with the hands or another item closely associated with the person accompanying the pet, such as the person's clothing. The apparatus is generally comprised of a cord member and a clamping member. A bag-holding loop and a leach-connecting loop are formed in the cord member by the clamping member. The pet refuse bag is held within the bag-holding loop by sliding the clamping member down the cord member until the clamping member is adjacent to the bag. The leash-connecting loop is attached to a pet leash or a cord connecting member, which may be attached to a pet leash. The present invention also includes a method of using the apparatus.

Abstract: A self-cleaning pet litter box has a conveyor to incrementally transport clumped litter material and solid pet waste to a waste receptacle. The conveyor has one end configured to extend into a pet litter container of the self-cleaning litter box and an opposite exit end. The conveyor is configured for reciprocating movement to lift the clumped litter material and solid pet waste from below, transport it some distance along the conveyor, place the material down again, return to its original position, and repeat the motion again to incrementally move the material along the conveyor toward the exit end for subsequent disposal.

Abstract: An improved sanitary facility for pets for the collecting, removing and disposing of small animal excrement without the attendant mess and odor heretofore experienced, uses a rotatable chamber which contains pet litter, sand or other suitable material. A first opening is provided for animal ingress and egress, and a second opening for expulsion of separated waste. Filter means, disposed circumferentially within the chamber, selectively separate solid excrement and agglomerated matter from unsoiled litter as the chamber is rotated. The separated waste is urged, by the action of gravity on the inclined filter means, toward a sealable second opening in the chamber. The separated matter is expelled from the chamber through the second opening and deposited in an attached receptacle. The media's weight prevents rotation of the chamber during use by the animal. Means are also provided for automatically sealing the second opening to prevent odor from escaping the chamber.

Abstract: A method and system to generate the highest level of return on investment of a cattle ranch producing beef to the consumer. Through the use of computer software integrated with an individual cow and calf identification system, the method and system disclosed herein allows a cattle producer to analyze the yearly production characteristics of each individual cow's calf or calves through all the various phases of growth and production with an accumulation of the economic cost and gain of value up to the end product as a feeder or cull. The total value of the carcass at the end of production, expressed as a sum of the costs associated with producing each animal minus the market value of the animal, allows the animal's economic value to be expressed by one figure which can then be used to judge the cow's ability to produce animals that meet all predetermined economically important genetic traits.

Abstract: The present invention is directed to a culture tank for marine organisms, having a water tank, an overflow sill with an algae scrub and an optional cover. The culture tank provides an environment capable of culturing both the target marine organism and secondary organisms, simultaneously.

Abstract: A system and method for the sorting of livestock including a livestock processing station, a computer network system, and a trolley system. The livestock processing station confines the individual livestock, allowing individual livestock data to be collected and analyzed. The computer network system includes a first computer for data input at the livestock processing station and a second computer coupled to the first computer via a computer network, the second computer for storing and analyzing individual livestock data and assigning livestock to pens. The trolley system is controlled by the computer network system for transporting livestock from the livestock processing station to the assigned livestock pen. Such system includes a plurality of trolley cars for containing livestock and a conveyor system coupled to the plurality of trolley cars for transporting livestock to the assign livestock pen.

Abstract: The present invention is a pet cage stand and organizer device, which comprises a main cabinet structure having a front, back, sides, top and bottom as well as at least one door. The main cabinet structure has at least one divider wall on its inside to create a first storage area for hay, bedding, litter and other non-food products and a second storage area, isolated from the first storage area, for storage of food and other sanitary pet accessories. It also includes a cage support frame that has sidewall means located on the main cabinet structure top or side, to inhibit movement of a cage.

Abstract: A feeding system includes a cage and hanging or suspended feeder that is used to feed a bird resident in the cage at a convenient location distal from the sides of the cage.

Abstract: A collapsible, portable animal shelter or carrier having air holes, a carrying handle and an animal access door that could be rapidly configured between a substantially flat configuration for easy storage or shipping and portable shelter or carrier configuration for holding an animal.

Abstract: A pet grooming tool comprises a pet engageable portion formed of polymeric material and having a plurality of teeth. A method of forming a pet grooming tool comprises molding a pet engageable portion out of a first polymeric material and thereafter over molding a handle portion to the pet engageable portion.

Abstract: A closure apparatus for restricting access to an opening of a container includes a first interlocking closure member having an elongate body having at least one external thread and an edible second interlocking closure member having a body sized to restrict access to an opening in a container. The body has a threaded recess having at least one internal thread formed therein to removably couple the second interlocking closure member to the first interlocking closure member by engaging the external thread of the first interlocking closure member.

Abstract: In an embodiment at least an animal repeller is provided. Each animal repeller is provided a flexible tubing that protrudes from the animal repeller. The flexible tubing flails when an animal is detected within a perimeter of coverage in which the presence of animals is unwanted.

Abstract: A signal transmitter system for an animal training system including an electrical impedance loop, a signal generator and a power supply. The signal generator is connected to the electrical impedance loop. The signal generator provides a current signal to the electrical impedance loop. The power supply provides a voltage level to the signal generator. The voltage level is dependent upon a measured characteristic of a voltage signal that results from an interaction of the current signal with the electrical impedance loop.

Abstract: The present invention provides a retractable pet leash apparatus having a hollow casing, a spool which is mounted for rotation within the casing and which has a pair of sides, a leash which is coiled on the spool in a retracted position and which is extendable through an aperture formed in a wall of the hollow casing upon application of a force, a spring means which is disposed within the hollow housing and which is engageable with the spool for biasing the spool for rotation to retract the leash into the hollow casing. A brake device is engageable with the spool for selectively fixing a free end of the leash at a predetermined distance from the casing and enabling retraction and extension of the leash relative to the hollow casing. The invention also provides a pocket on the exterior surface of the casing for receiving pet identification or immunization tag and a carrying ring.

Abstract: A jacket for a water tank comprises a sheet of water-containing material such as plastic. A closure is provided to draw together two opposed edges of the sheet. A fastener, such as a strap clamp extends along a third edge of the sheet. The jacket may be retrofitted to an existing tank, such as a domestic hot water tank, by clamping the fastener around a drain pan under the tank and closing the closure so that the jacket wraps around the tank. Any water leaking from the tank is caught by the jacket and directed into the drain pan from where it can escape safely into a drain.

Abstract: A method of controlling combustion of an air-fuel charge in a piston engine having at least one combustion chamber comprising, (a) mixing at least one hydrocarbon fluid fuel and no more than about 10,000 ppm of at least one combustion initiating additive to thereby produce a fluid fuel mixture; (b) combining the fluid fuel mixture with a gaseous medium containing oxygen thereby producing an air-fuel charge; (c) supplying the air-fuel charge to the at least one combustion chamber; (d) compressing the air-fuel charge with a piston in the at least one combustion chamber; and (e) igniting the air-fuel charge with at least one light source.

Abstract: A system includes an electrolysis unit capable of producing hydrogen and oxygen gases and interoperably connected to a diesel engine. The amount of amount of hydrogen and oxygen gases produced by the electrolysis unit is proportionally correlated to the stroke type and stroke displacement of the diesel engine. The system also includes a power supply system that is interoperably connected to the electrolysis unit. The power supplied by the power supply system is proportional to an amount of hydrogen and oxygen to be supplied to the diesel engine. The system also includes a safety mechanism interoperably connected to the power supply system so as to terminate power to the electrolysis unit in response to cessation of operation of the diesel engine.

Abstract: The invention relates to a cooling system (1) for a motor vehicle (3), comprising at least one heat exchanger (14, 15), in particular an intercooler, which is traversed by a medium, in particular a coolant that is used to cool a motor (9) and which comprises a heat exchanger air-penetration surface that is traversed by an air stream along a first stream path (26) in a first operating mode, in particular a back-pressure mode and is additionally or alternatively traversed by an air stream along a second stream path (24) running through an air conduction unit (20) in a second operating mode, in particular a ventilator mode. The air conduction unit is located between the heat exchanger (14, 15) and the motor (9) and comprises a conduction air-penetration surface.

Abstract: The invention relates to a piston spray nozzle (12, 112) for cooling a piston (10) of a combustion engine by means of a liquid jet (20, 120) that is directed to a cooling chamber (14) of the piston (10). According to the invention, a member (16, 116) that has an approximately round cross-section and provides the discharged liquid jet (20,12) with a substantially tubular shape is disposed in the center of the discharge port (15, 115) of the piston spray nozzle (12, 112). The inventive piston spray nozzle delivers a directed, laminar liquid jet who shape remains essentially the same until the jet hits the cooling area (14).

Abstract: A rotary displacement machine with radial pistons, comprising a supporting structure, with a main body and a cover, a centrally mounted distributor, a rotating unit consisting of a rotor provided with a number of radially extending cylindrical chambers, each chamber containing a respective piston mounted for sliding movement in a first direction along a first axis coaxial with the longitudinal centerline of the respective cylindrical chamber; wherein the rotor is mounted by support bearings means in the main body and cover and the distributor is mounted to float within a space defined by the cover and with coaxial relationship in the rotor by bearing means.

Abstract: The invention is directed to a novel self-supercharging internal combustion engine with two pairs of three pistons and cylinders. A self-supercharging internal combustion engine comprising: (a) a first piston and cylinder with intake and exhaust valves, the piston being connected to a crankshaft; (b) a second piston and cylinder with intake and exhaust valves, the piston being connected to the crankshaft; (c) a third piston and cylinder of a size which is at least double the size of the first and second pistons, the third piston having a valve which enables air and fuel to be drawn into the cylinder, the third cylinder being connected to the intake valves of the first and second pistons and cylinders, the third piston being connected to the same crankshaft as the first and second pistons, and a corresponding second set of three pistons and cylinders, the three pistons being connected to a second crankshaft, each crankshaft being interconnected by meshing gears.

Abstract: A hydraulic circuit is disclosed. The hydraulic circuit includes an actuating mechanism having an engine valve and an engine valve spring, an added motion valve system having a cam system, a valve in fluid communication with the actuator mechanism, and a dump valve and at least one check valve in fluid communication with the valve to allow a recovery of energy stored in an engine valve spring during closing movement of the engine valve associated with the added motion system. A method for controlling a hydraulic circuit is also disclosed.

Abstract: A technical object is to prevent oil from leaking out, to reduce axial dimensions, and to reduce the number of parts and the cost in a valve timing control apparatus. The valve timing control apparatus comprises a rotor 2 linked to a camshaft 1 of an internal combustion engine; a drive member 30 which is linked to the drive shaft of the internal combustion engine and supports the rotor 2 in a relatively rotational manner; and a hydraulic chamber 35 which is partitioned by a vane 6 and is disposed between the rotor 2 and the drive member 30, wherein the drive member 30 comprises an outer rotor 31 forming the hydraulic chamber 35 together with the rotor 2; a housing member 3 including a front plate portion 32 joined to one axial end of the outer rotor 31 and a tubular portion 33 linked the front plate portion 32 and positioned on the outer radial side of the outer rotor 31; and a rear plate [member] 4 joined to the other axial end of the outer rotor 31 and to the housing member 3.

Abstract: A method for an internal combustion engine that reduces the possibility of misfire during transitions between a lower valve lift mode and a higher valve lift mode.

Abstract: A valve timing control device includes a rotational shaft, a rotational torque transmitting member attached to the rotational shaft, a plurality of vanes each attached to the rotational shaft or the rotational torque transmitting device, a plurality of fluid chambers formed between the rotational shaft and the rotational torque transmitting device, a plurality of first chambers and second chambers, the fluid chambers each divided by means of each vane into each first chamber and each second chamber, a plurality of first fluid passages through each of which fluid is supplied to or drained from the each first chamber, a plurality of second fluid passages through each of which the fluid is supplied to or drained from the each second chamber, passage opening/closing device for opening/closing the first fluid passage or the second fluid passage, and chamber opening/closing device for opening/closing the first chamber and the second chamber.

Abstract: The invention relates to a valve train for internal combustion engines, comprising a camshaft and valve actuation elements for one or more valves, the elements being located in the cylinder head. The aim of the invention is to provide a valve train for an internal combustion engine, with which a reliable stroke adjustment of the valves can be made, without the need for complex technical resources, while at the same time allowing a forward or rear displacement of the valve orifice region. To achieve this, in order to modify the valve stroke curve, the contact point between the transfer member and the cam can be displaced along the periphery of the cam and the contact point between the transfer member and a control curve of the support body can be displaced, forcing the part of the transfer member that interacts with the cam to be guided, by shifting the transfer member in relation to the camshaft.

Abstract: A variable valve system includes a transmission mechanism T which transmits a valve actuating force to an inlet valve 11 and which varies a maximum lift amount of the inlet valve 11 and biasing members 60. A sub-cam 40 oscillatably supported on a holder 30 driven by a control member 70 has a roller 43 contacting the inlet cam 15a, a drive cam portion 46 outputting the valve actuating force, and acting portions A contacting the biasing members 60. The acting portions A are provided in the vicinity of the roller 43 so that biased contact points 45a1, 45b1 are positioned nearer to a cam contact point 43a than an oscillation center line Ls and that an acting line L1 of a biasing force is superposed on the roller 43 as viewed in the direction of the oscillation center line Ls.

Abstract: A variable mechanical valve train for actuating a valve in an internal combustion engine includes a two-part follower operatively coupled between a cam shaft and a valve, so that the follower: in a fully-activated mode, causes a maximum lift of the valve in response to a rotation of the cam shaft; in a partial load mode, collapses partially so as to cause a partial valve lift during the rotation of the cam shaft; and in a deactivated mode, collapses in response to the rotation of the cam resulting in no valve lift.

Abstract: A phase angle detection device includes a crank-angle detecting element for detecting a rotational position of a crankshaft through a predetermined crank target, a cam target fixedly connected to a camshaft and having a first detecting section whose detected position continuously changes and at least one second detecting section whose detected position discontinuously changes, and a cam-angle detecting element for detecting a displacement of the cam target. Also provided is a controller configured to adequately update a phase difference of the camshaft relative to the crankshaft through all engine operating conditions, utilizing interpolation based on an analogue sensor signal generated by the first and second detecting sections and/or a rate of change in the sensor signal generated by the first detecting section.