Abstract: A method for calculating power input to at least one thermal control element of an electrostatic chuck includes: setting the at least one thermal control element to a first predetermined power level; measuring a first temperature of the at least one thermal control element when the at least one thermal control element is powered at the first predetermined power level; setting the at least one thermal control element to a second predetermined power level; measuring a second temperature of the at least one thermal control element when the at least one thermal control element is powered at the second predetermined power level; calculating a difference between the first temperature and the second temperature; calculating a system response of the at least one thermal control element based on the difference; inverting the system response; and calibrating the at least one thermal control element based on the inverted system response.

Abstract: A projection system is disclosed including a safety detection system for a protected space, said projection system including a projection light source, a projection imaging system, a projection lens system, a detection source comprising at least of a detection light source and a detection camera comprising at least of a detection sensor, characterized by the fact that the optical axis of the projection source is identical to the optical axis of the detection source and the detection camera at least in the protected space.

Abstract: Hybrid sensors comprising Shack-Hartmann Wavefront Sensor (S-HWFS) and Zernike Wavefront Sensor (Z-WFS) capabilities are presented. The hybrid sensor includes a Z-WFS optically arranged in-line with a S-HWFS such that the combined wavefront sensor operates across a wide dynamic range and noise conditions. The Z-WFS may include the ability to introduce a dynamic phase shift in both transmissive and reflective modes.

Abstract: The invention relates to a high temperature sensor, in particular for measuring the exhaust gas temperature of motor vehicles, comprising a hot section for arranging in the medium which is to be measured, a cold section for arranging on the outside of the medium which is to be measured, a sensor element comprising a measuring section in a hot section and a protective enveloping which at least partially surrounds the sensor element. A protective tube which at least partially surrounds the sensor element and/or the protective enveloping and which comprises a collar towards the hot section, is provided in the cold section. Preferably, said protective tube does not extend into the hot section.

Abstract: A temperature detecting device adapted to detect temperature based on output voltage at a connection point of a thermistor and a voltage-dividing resistor, includes a temperature estimator to estimate temperature of the thermistor, a supply voltage regulator to regulate voltage supplied to the thermistor, a voltage dividing resistance regulator to regulate resistance of the voltage-dividing resistor, and a switching controller to determine whether the estimated temperature of the thermistor is in a high or low-temperature range and to control the regulators simultaneously based on the determination.

Abstract: A sensor for determining a temperature is provided, having a first insulating layer made of a first dielectric, which layer is arranged between a first and a second conductive layer made of a conductive material, and having a second insulating layer made of a second dielectric, which layer is arranged between the second and a third conductive layer made of a conductive material, wherein the first and the second dielectric have a different temperature dependency of the respective permittivity thereof. A method for determining a temperature by such a sensor is also provided.

Abstract: A thermochromic indicator includes a coating on the substrate. The coating comprising a solid crystalline particles having a melting point of 0-130° C. At temperatures below the melting point, the coating is opaque. At temperatures above the melting point, the coating becomes translucent. The change in opacity can be reversible or irreversible.

Abstract: A method for calibrating a temperature sensor arranged in a vapour compression system is disclosed. The opening degree of an expansion device is alternatingly increased and decreased. Simultaneously a temperature of refrigerant entering the evaporator and a temperature of refrigerant leaving the evaporator are monitored. For each cycle of the opening degree of the expansion device, a maximum temperature, T1, max, of refrigerant entering the evaporator, and a minimum temperature, T2, min, of refrigerant leaving the evaporator are registered. A calibration value, ?T1, is calculated as ?T1=C?(T2, min?T1, max) for each cycle, and a maximum calibration value, among the calculated values is selected. Finally, temperature measurements performed by the first temperature sensor are adjusted by an amount defined by ?T1, max.

Abstract: The invention relates to a method for producing a micro-electromechanical device in a material substrate suitable for producing integrated electronic components, in particular a semiconductor substrate, wherein a material substrate (12,14,16) is provided on which at least one surface structure (26) is to be formed during production of the device. An electronic component (30) is formed in the material substrate (12,14,16) using process steps of a conventional method for producing integrated electronic components. A component element (44) defining the position of the electronic component (30) and/or required for the function of the electronic component (30) is selectively formed on the material substrate (12,14,16) from an etching stop material acting as an etching stop in case of etching of the material substrate (12,14,16) and/or in case of etching of a material layer (52) disposed on the material substrate (12,14,16).

Abstract: A strain sensor assembly is configured to detect one or more of forces applied to a structure having a recess. The strain sensor can include at least a pair of opposed strain gauge members that extend from the support member. Each strain gauge member defines a support portion carried by the support member and a biasing portion. The support portion includes at least one strain gauge sensor. The biasing portion is configured to bias against a wall of the recess of the structure when the strain sensor assembly is disposed in the recess. The strain sensor assembly is configured such that the at least a pair of strain gauge members form an interference fit with the wall of the recess when the strain sensor assembly is inserted in the recess.

Abstract: A method for performing distributed pressure sensing including the steps of, forming a grating in a birefringent fiber, measuring the birefringence distribution along the length of the birefringent fiber, and determining pressure present along the length of the fiber using the measured the birefringence distribution. The invention also relates to a corresponding sensing device.

Abstract: Provided is a dynamometer system control device capable of stable and highly responsive control. This dynamometer system control device is provided with a torque control device which outputs a torque command signal on the basis of an output signal (LC_det) of a load cell, and with a characteristic vibration suppression circuit which corrects the torque command signal to suppress the characteristic vibration of an oscillator and which inputs said signal to an inverter as a control input signal. The circuit is provided with a differential compensator which performs a differentiation operation on a load cell approximation signal (Pmdl_det) calculated using an approximation equation in a secondary delay canonical form in a vibration output calculation unit, and with a subtractor which corrects the torque command signal by subtracting the output signal from the compensator from the torque command signal (Tdy_ref).

Abstract: A device and method are disclosed for evaluating closing performance of a door in which the door engages an engagement element included in the device which is detachably mounted to fixed structure adjacent the door and which is moved by an opening movement of the door. An elastic element such as a spring is deflected by the motion of the engagement element to generate elastic potential energy which is detected and shown by a detector/display so that the point of release of the door is determined when the potential energy reaches that corresponding to a predetermined minimum mechanical energy level. The door is then swung in a closing direction by the potential energy stored in the elastic element and it can be immediately determined if the door closure performance is met by the door becoming fully closed.

Abstract: A method and system for calculation and consolidation of a first plurality of aircraft flight parameters including a second plurality of pressure sensors is provided. The pressure sensors are arranged in respective aircraft locations; each pressure sensor provides a pressure value based on a respective detected static pressure value.

Abstract: In aspects of the invention, a sensor unit is stored in a recessed sensor mount portion formed in a resin case. The sensor unit can be formed so that a semiconductor pressure sensor chip is joined to one side of a glass pedestal, and the other side of the glass pedestal is die-bonded to the bottom of the sensor mount portion through an adhesive. An electrode pad on the semiconductor pressure sensor chip is electrically connected through a bonding wire to a lead terminal for leading externally that pierces through the resin case and is integrally insert-molded therein. An entire surface of the sensor unit, an exposed part of the lead terminal internally-located in the resin case, the bonding wire, and an exposed part of an inner wall of the resin case can be coated with the protective film composed of a poly(p-xylylene)-family polymer including fluorine.

Abstract: This pressure and temperature determining device (1) comprises a membrane (2), which has a face of contact (2.1) with the fluid and a securing face (2.2) opposite to the contact face (2.1), a pressure determining element (20) secured to the membrane (2), and a temperature determining element (40) secured to the membrane (2). The pressure determining element (20) comprises at least one piezoresistive track. The temperature determining element (40) comprises at least one thermoresistive track.

Abstract: A physical quantity sensor includes a substrate having a diaphragm, a sensor element disposed on the diaphragm, a wall section disposed on the substrate, and having a hollow section surrounding the sensor element, a covering section connected to the wall section, and a reinforcement section disposed so as to partially overlap the covering section, and including a material lower in thermal expansion coefficient than a constituent material of the covering section.

Abstract: A method of detecting a flow blockage in a pipe includes: arranging a fluid flow along the pipe, the pipe in fluid communication with a pressure sensor; configuring the pressure sensor to measure a pressure within the pipe; recording plurality of measurements of pressure within the pipe; sampling ‘n’ successive values of pressure within the pipe; performing an analytical test on the ‘n’ successive values, the analytical test producing an output value, the output value representative of a variation in the individual ones of the ‘n’ successive values; comparing the output value to a pre-defined threshold value, the threshold value indicative of a lack of variation in the individual ones of the ‘n’ successive values; and if the output value is less than the threshold value, generating an alert to provide a user with an indication of the presence of flow blockage in the pipe.

Abstract: Apparatus having a hermetic seal that seals a portion of the apparatus, for example and without limitation, a portion having a MEMS sensor.

Abstract: A leak locator, system and method is light-weight, portable, and can be used to locate a leak in a closed environment, including tires, pipes, inflatables and other closed air/fluid filed structures, in situ. The leak locator includes an applicator and a leak locating/detecting liquid. The applicator includes a portion that is moistened and/or saturated by the leak detecting liquid, which portion is used to wipe or brush a film of the liquid onto a surface to be checked. The leak detecting liquid is formulated to cause bubbles to be formed in the film on the surface to be checked as a consequence of air or another fluid escaping from a leak in the surface.

Abstract: The present invention provides an oil leakage sensing composition comprising a mixture, which rapidly reacts with leaking oil upon contact with the oil to change its electrical resistance, and an oil leakage sensor comprising an electrically conductive line formed of the composition on a base film. The oil leakage sensing composition comprises a mixture of 70-85 parts by weight of a dispersion of carbon nanotubes (CNTs), 3-15 parts by weight of an alkyd resin, and 5-15 parts by weight of silver flakes. The oil leakage sensor comprises a tape-shaped base film layer, and at least one electrically conductive line printed on the upper surface of the base film layer in the length direction, wherein the electrically conductive line is formed by applying the composition to the base film layer by a printing process.

Abstract: A die is supported in a die holder such as a frame or an adapter supported in a frame such that it is operational use in a material deforming operation. One or both of the die and the die holder have at least one gas passage which is substantially closed by at least part of the die. Gas such as pressurised air is directed into an end of the gas passage opposite the die via a hose connected to a gas source. If the die is broken or loose leak paths are available for the escape of gas past the die to or from atmosphere. A pressure sensor connected to the hose detects the change in pressure of the gas and the magnitude of that pressure is used to determine the die condition. Alternatively a flow rate sensor is used to detect a change in the flow rate of the gas in order to determine the condition of the die.

Abstract: A method for an engine, comprising: sealing a fuel tank; and indicating fuel system degradation based on a comparison of a first correlation coefficient, determined based on a change in fuel tank pressure and a change in fuel tank temperature, to a second correlation coefficient determined based on a change in ambient pressure and a change in ambient temperature. In this way, leak tests, such as engine-off natural vacuum tests, may be performed without knowledge of the properties of the fuel stored in the fuel tank.

Abstract: A rotor state sensor system is provided for use with a rotor including a hub, a hub arm and a blade coupled to the hub by the hub arm. The sensor system includes sensors disposed on the hub arm to define a first plane, which emit emissions and receive reflected emissions, and which generate a signal according to the received reflected emissions, reflector plates disposed on the blade which define a second plane at locations where the emissions from the sensors are incident on the reflector plates and from which the reflected emissions are reflected towards the sensors and a computing device which receives the signal from the sensors, determines relative orientations of the first and second planes according to the received signal and determines a condition of the rotor based on the determined relative orientations.

Abstract: A method of modifying a workpiece includes providing a workpiece, determining a load stress profile associated with a load condition, the load stress profile comprising a load stress greater than a material stress limit of the workpiece, determining a residual stress profile, the residual stress profile comprising a residual stress less than the material stress limit of the workpiece, and providing the workpiece with the residual stress profile, wherein a sum of the load stress and the residual stress is less than the material stress limit of the workpiece.

Abstract: A method for predicting the residual life of a bearing comprising the step of: obtaining data concerning one or more of the factors that influence the residual life of the bearing using at least one sensor, obtaining identification data uniquely identifying the bearing, transmitting data to and/or from the at least one sensor using an industrial wireless protocol, and recording the data concerning one or more of the factors that influence the residual life of the bearing and the identification data as recorded data in a database, whereby at least one sensor of the at least one sensor is configured to be powered by electricity generated by the motion of a bearing or the bearing when it is in use, and whereby the at least one sensor, the transmission means, and the power generating unit are provided within the same housing.

Abstract: A method wherein the possible abnormal noisiness and vibrations of a rolling bearing for a wheel hub unit are detected by fixing a first one of the inner and outer rings of the bearing integral on a support provided with a first and a second accelerometer so that the first and second accelerometers have respective measurement axes (X, Y) arranged at a right angle relative to each other on a plane perpendicular to the axis of symmetry (A) of the bearing. A second ring of the bearing is angularly coupled with means for rotating it at a predetermined speed, calculated beforehand based on operating parameters of the bearing; processing means detect in a predetermined time interval a first and a second electric signal (T1, T2) emitted by the first and second accelerometers and, through a frequency analysis, obtain a frequency spectrum (P) of the amplitude of any vibrations detected.

Abstract: An arrangement and a method of measuring a mechanical bearing oscillation within a bearing, the bearing supporting a rotating shaft which is coupled to an inner ring of the bearing, the arrangement comprising: a bolt arranged in a force fit with an outer ring of the bearing in order to excite, by the bearing oscillation, a bolt oscillation; a sensor mechanically coupled to the bolt for registering the bolt oscillation, the bolt oscillation being indicative of the bearing oscillation.

Abstract: A method for monitoring a thrust fault of a turbofan during a modification of the thrust setting of the turbofan, the method including a step of processing the thrust setting via a filtering function and a transient-phase model such as to obtain a modelled thrust, a step of comparing the modelled thrust to the actual thrust such as to determine a thrust difference, a step of comparing the thrust difference to an alarm threshold; and a step of emitting an alarm in the event of exceeding the alarm threshold, wherein at a given iteration, in which the prior modelled thrust is known, the transient-phase model provides a time constant in accordance with the prior modelled thrust, and the filtering function provides a modelled thrust in accordance with the time constant obtained, the prior modelled thrust and the thrust setting.

Abstract: Provided is a testing system for a drivetrain, the testing system capable of simulating the slip behavior of a tire. A testing system is provided with: tire speed calculation units; a vehicle speed calculation unit; vehicle driving torque calculation units which calculate vehicle driving torque values; and speed control devices which output command signals such that the deviations between command values and output values from encoders are eliminated, respectively. The tire speed calculation units calculate the tire speed values on the basis of tire driving torque values obtained by subtracting the vehicle driving torque values from output values from shaft torque meters, respectively, and the vehicle speed calculation unit calculates the vehicle speed value on the basis of the vehicle driving torque values.

Abstract: Detection of event conditions in an industrial plant includes receiving process data corresponding to one or more sensors, estimating normal statistics from the process data, estimating abnormal statistics from the process data with potentially abnormal operation of the one or more components, determining a fault model from the estimated normal and abnormal statistics, the fault model including a learning matrix, one or more fault indices indicating a likelihood of an occurrence of one or more fault events, and a fault threshold corresponding to the one or more sensors, determining one or more further fault indices from the further process data; applying the fault threshold to the one or more further fault indices, and indicating a further occurrence of the one or more fault events when a magnitude of the one or more further fault indices exceeds the fault threshold corresponding to the one or more sensors.

Abstract: Disclosed is apparatus for distributing a solid, gel, powder or viscous test substance in an extraction fluid, the apparatus comprising a flow cell for holding the test substance and having an inlet and an outlet; an extraction chamber located between said inlet and outlet comprising a convergent nozzle; and a recirculating pump for driving extraction fluid: (i) into the flow cell via the inlet; (ii) through the extraction chamber; and (iii) back to the flow cell via the outlet, whereby a pressure differential is established across the extraction chamber such that the velocity of the extraction fluid is greater at the outlet than at the inlet; characterized in that the apparatus further comprises a tortuous path flow control valve (TPV) located at the outlet and configured to permit flow of extraction fluid and extracted test substance but to prevent or retard passage of said test substance through the outlet.

Abstract: A sample introduction device having a channel configuration which allows recapture of samples and in which thorough purging is performed so that no sample components remain inside the channel. In the trap capture process, a first six-way switching valve is placed in state where ports a-f, b-c and d-e are connected, a second six-way switching valve is placed in state where ports a-b, c-d and e-f are connected, and an electromagnetic valve is opened. Carrier gas is introduced through a carrier gas channel, and is discharged via the first six-way valve-sample channel-second six-way switching valve-trap channel-second six-way switching valve-channel-first six-way valve-discharge channel. Carrier gas is also introduced through the path going through the electronic control flow controller, so the operation of stabilization of the analysis channel continues to be performed.

Abstract: The present invention is: a guest-compound-enveloping polymer-metal-complex crystal characterized by at least one selected from an aliphatic hydrocarbon, an alicyclic hydrocarbon, an ether, an ester, an aromatic hydrocarbon, a halogenated hydrocarbon, and a nitrile being enveloped as a guest compound (A) in the minute pores or the like of a polymer-metal complex that contains a metal ion as a central metal and a ligand having at least two ligating sites, has a 3D network structure formed by the ligand being ligated to the metal ion, and has the minute pores or the like regularly arranged three-dimensionally within the 3D network structure, the amount of the guest compound (A) present within the minute pores or the like being at least 60 mol % of all the guest compounds enveloped in the minute pores or the like; a method for producing the guest-compound-enveloping polymer-metal-complex crystal; a method for preparing a crystal structure analysis sample using the crystal; and a method for determining the molecu

Abstract: A device according to various embodiments can include a first chamber and a second chamber configured to contain at least one biological sample. A triturating element is interdisposed between the first chamber and the second chamber and provides fluid communication between the first chamber and the second chamber.

Abstract: A sample is cleaned up for spectroscopic analysis by receiving a slide substrate having the sample thereon, fixing the sample to a substrate surface of the slide substrate by applying heat to the slide substrate for a predetermined heating time and incubating the sample on the slide substrate for a predetermined incubation time after fixing the sample to the slide substrate. The sample is further cleaned by washing the sample on the slide substrate after the sample has been incubated and drying the sample by applying heat to the slide substrate for a predetermined drying time, wherein the sample on the slide substrate after drying has retained particles of interest and interferant particles are removed from the substrate. A substrate is also provided for sample collection, which is culturable and Raman silent.

Abstract: A sample preparation and testing system (10) includes a mixing container (1, 18). A display element (2, 40, 58, 60), functioning as a shaking indicator, is located in the interior of the mixing container (1, 18).

Abstract: A method for determining a spring constant/rigidity of a cantilever of a known shape, the method involving: measuring a resonance frequency of the cantilever in a plurality of static equilibrium positions in which the shape of the cantilever is different and determining a spring constant and/or rigidity of the cantilever using the measured frequencies. The resonance frequency may be at least one of a torsional and lateral resonance frequency.

Abstract: The invention relates to a test system for dynamically and/or cyclically load testing a material sample, a component, or an assembly, hereinafter referred to as sample. The test system is provided with a test frame, to which a bearing and a counter bearing are attached. At least one actuator comprising a multifunctional solid state transducer material system is connected to the counter bearing, directly or indirectly, to which, also directly or indirectly, a fastener provides firm fixation of the sample. Likewise, on the bearing side, a fastener firm fixation of the sample such that the at least one actuator is able to introduce dynamic and/or cyclical mechanical loads into the sample, which act along a load path extending lengthwise between the bearing and the counter bearing and through the sample.

Abstract: A method of determining the non-propagation threshold of fatigue cracks at high frequency, wherein cyclic loading is exerted on at least one testpiece having an elliptical hole in a testpiece zone, the elliptical hole having a notch at one end and the testpiece being held between two rigid masses with two rigid pre-stress plates being arranged on either side of the at least one testpiece and each fastened at its two ends to the two rigid masses, which cyclic loading is at a frequency that is selected as being equal to the resonant frequency of the assembly including the testpiece, the masses, and the stress plates, so as to generate a fatigue crack from the notch, and then once it has been observed that the crack has stopped propagating, the final length of the crack is measured and a chart is used to determine the non-propagation threshold.

Abstract: A vibrating member (500) for a vibrating densitometer (800) is provided. The vibrating member (500) includes an inner surface (531) with one or more arcuate portions (730). The inner surface (531) of the vibrating member (500) also includes one or more raised portions (530) sized and located to increase a frequency separation between a resonant frequency of a desired vibrational drive mode and a resonant frequency of one or more undesired vibrational modes.

Abstract: An apparatus for determining a fluid's kinematic viscosity from ultrasonic energy that has passed through the fluid of unknown viscosity along an acoustic path of known length. A computer of the apparatus determines a characteristic frequency of a received electrical signal associated with the ultrasonic energy and measures the fluid's velocity of sound. The kinematic viscosity of the fluid is determined by the computer on a continuous basis based on the characteristic frequency and the sound velocity. A method for determining a fluid's kinematic viscosity.

Abstract: The present invention relates to a device for home monitoring of haematological parameters of patients. In particular, the device may be configured for home monitoring of patients undergoing chemotherapy. A white blood cell counter is presented in combination with a physically separated user device. The user interface and the white blood cell counter are configured to exchange data with each other. The present invention allows the white blood cell counter to be produced at lower costs, since no display is integrated into it directly. The patients may use the user interface device anywhere in their home or even on the go, allowing the maximum in freedom to fill in patient-reported outcomes or health assessment questionnaires. Also taking temperature readings is facilitated. In the home, a white blood cell test can be performed if required. The user interface guides the patient through the correct process and may therefore be brought to the cell counter.

Abstract: The present invention relates to a cell evaluation method comprising evaluating a cell differentiation degree based on a cell thickness.

Abstract: A cell analyzing and sorting apparatus includes a substrate, a detection device embedded in a substrate configured to detect cells labeled with magnetic beads, a focusing device embedded in the substrate configured to align the labeled cells with and introduce the labeled cells serially to the detection device, and a sorting device in the substrate configured to separate the labeled target cells passing through the detection device. The detection device comprises a plurality of magnetic sensing elements. Each of the magnetic sensing elements comprises a Hall-effect sensor configured to detect a magnetic characteristic of a magnetic bead labeled to a cell.

Abstract: System and method for point-of-care monitoring of neutrophils in a peritoneal dialysis sample with the use of a microfluidic system. The immunoassay based chip is configured to bound neutrophils to a microfluidic channel surface while leaving auxiliary cells and particles unattached and suspended in the sample and flushable with a wash buffer. Data representing images of neutrophils, formed by an (optionally lensless) imaging system, are processed to determine a count of neutrophils based on statistical parameters including characteristics of the microfluidic channel.

Abstract: A method of manufacturing a nozzle assembly may include the step of over molding a nozzle housing, or a portion of a nozzle housing, onto at least one nozzle component, such as an injection tube. Nozzle assemblies and flow cytometers incorporating nozzle assemblies may include any combination of straight smooth injection tubes, improved features for securing a nozzle assembly, improved features for debubbling a nozzle assembly, and aggressive orienting geometries. A method of sorting cells may include the step of magnetically coupling a nozzle assembly with a flow cytometer.

Abstract: A particle analysis instrument is offered which can make a measurement in a shorter time than heretofore. The particle analysis instrument (100) is used to analyze a sample (S) containing plural particles by measuring the sample over plural fields of view. The instrument (100) includes a measuring section (10) for scanning primary rays (EB) over the sample (S) and detecting a signal emanating from the sample (S), a particle area totalizing portion (222) for finding the area of particles for each field of view from the results of the measurement made by the measuring section (10) and summing up such areas of particles for all of the fields of view to find a total area of particles, and a decision portion (226) for making a decision as to whether the measurement process should be ended, based on the ratio of the total area of particles to an area of the sample (S) measured to obtain the total area of particles.

Abstract: An examination apparatus 1 for microorganisms for measuring an amount of microorganisms in a sample solution, the apparatus including stirring and mixing means 7 for stirring and mixing the sample solution into which a sample and a fluorescent staining reagent are added, in a sample container 5 formed of a material allowing light to pass through, an excitation light source 10 including a light source that irradiates an irradiation target surface of the sample container 5 with excitation light while the sample solution is being stirred by the stirring and mixing means 7, light receiving means 14 for detecting light and converting the light resulting from a fluorescent emission caused by excitation light from the excitation light source 10, into an electric signal, and control means 23 for detecting the number of emissions based on the electric signal from the light receiving means 14 and calculating the amount of the microorganisms contained in the sample in the sample container 5 based on the number of emissi

Abstract: A measuring apparatus is capable of measuring an amount of hydrogen penetrated into a metal. In the apparatus, a specimen formed of a metallic material has one surface exposed to a corrosive environment to serve as a penetration surface of hydrogen generated by a corrosion reaction while having the other surface as a hydrogen detection surface. On the hydrogen detection surface side, an electrochemical cell constituted of a plurality of cells is disposed. At least one of the plurality of cells is configured as a base cell to compensate for a residual current so that anodic currents detected in other cells than the base cell are compensated for based on the residual current detected in the base cell, and an amount of hydrogen penetrating from a corrosive surface side is calculated based on the compensated currents.