Patents Issued in March 28, 2023
  • Patent number: 11616006
    Abstract: According to an aspect, a semiconductor package includes a substrate having a first surface and a second surface opposite to the first surface, a semiconductor die coupled to the second surface of the substrate, and a molding encapsulating the semiconductor die and a majority of the substrate, where at least a portion of the first surface is exposed through the molding such that the substrate is configured to function as a heat sink.
    Type: Grant
    Filed: July 9, 2019
    Date of Patent: March 28, 2023
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Maria Clemens Ypil Quinones, Elsie Agdon Cabahug, Jerome Teysseyre
  • Patent number: 11616007
    Abstract: An electronic package and method for manufacturing the same are provided. The electronic package includes a substrate and a wetting layer. The substrate includes a plurality of conductive step structures each including a first portion and a second portion. The first portion has a first bottom surface, a first outer surface and a first inner surface. The second portion has a second bottom surface, a second outer surface and a second inner surface, wherein the second portion partially exposes the first bottom surface. The wetting layer at least covers the second bottom surface, the second outer surface and the second inner surface of the second portion of each of the conductive step structures.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: March 28, 2023
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: You-Lung Yen, Bernd Karl Appelt, Kay Stephan Essig
  • Patent number: 11616008
    Abstract: A method for forming a through-substrate via structure includes providing a substrate and providing a conductive via structure adjacent to a first surface of the substrate. The method includes providing a recessed region on an opposite surface of the substrate towards the conductive via structure. The method includes providing an insulator in the recessed region and providing a conductive region extending along a first sidewall surface of the recessed region in the cross-sectional view. In some examples, the first conductive region is provided to be coupled to the conductive via structure and to be further along at least a portion of the opposite surface of the substrate outside of the recessed region. The method includes providing a protective structure within the recessed region over a first portion of the first conductive region but not over a second portion of the first conductive region that is outside of the recessed region.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: March 28, 2023
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Michael J. Seddon, Francis J. Carney
  • Patent number: 11616009
    Abstract: A semiconductor device includes a semiconductor element, an internal electrode connected to the semiconductor element, a sealing resin covering the semiconductor element and a portion of the internal electrode, and an external electrode exposed from the sealing resin and connected to the internal electrode. The internal electrode includes a wiring layer and a columnar portion, where the wiring layer has a wiring layer front surface facing the back surface of the semiconductor element and a wiring layer back surface facing opposite from the wiring layer front surface in the thickness direction. The columnar portion protrudes in the thickness direction from the wiring layer front surface. The columnar portion has an exposed side surface facing in a direction perpendicular to the thickness direction. The external electrode includes a first cover portion covering the exposed side surface.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: March 28, 2023
    Assignee: ROHM CO., LTD.
    Inventors: Yusuke Harada, Mamoru Yamagami
  • Patent number: 11616010
    Abstract: A transistor module assembly includes a longitudinally extending load bus bar, a longitudinally extending feed bus bar parallel to the load bus bar, and at least one transistor package operatively connected to the load and feed bus bars. The transistor package includes a drain surface and a source lead. The drain surface is operatively connected to the feed bus bar for receiving current therefrom. The source lead is operatively connected to the load bus bar for dissipating current from the transistor package to the load bus bar.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: March 28, 2023
    Assignee: Hamilton Sundstrand Corporation
    Inventors: John A. Dickey, David M. Kucharski
  • Patent number: 11616011
    Abstract: An integrated circuit (IC) includes a semiconductor surface layer of a substrate including circuitry formed in the semiconductor surface layer configured together with a Metal-Insulator-Metal (MIM) capacitor. A multi-layer metal stack on the semiconductor surface layer includes a bottom plate contact metal layer including a bottom capacitor plate contact. A first interlevel dielectric (ILD) layer is over the bottom plate contact metal layer. The MIM capacitor includes a trench in the first ILD layer over the bottom capacitor plate contact, wherein the trench is lined by a bottom capacitor plate with a capacitor dielectric layer thereon, and a top capacitor plate on the capacitor dielectric layer. A fill material fills the trench to form a filled trench. A second ILD layer is over the filled trench. A filled via through the second ILD layer provides a connection to the top capacitor plate.
    Type: Grant
    Filed: June 28, 2021
    Date of Patent: March 28, 2023
    Assignee: Texas Instruments Incorporated
    Inventors: Mona M. Eissa, Umamaheswari Aghoram, Pushpa Mahalingam, Erich Wesley Kinder, Bhaskar Srinivasan, Brian E. Goodlin
  • Patent number: 11616012
    Abstract: A patterned shielding structure is disposed between an inductor structure and a substrate. The patterned shielding structure includes a shielding layer and a first stacked structure. The shielding layer extends along a plane. The first stacked structure is stacked, along a first direction, on the shielding layer. The first direction is perpendicular to the plane. The first stacked structure has a crossed shape and is configured to enhance a shielding effect.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: March 28, 2023
    Assignee: REALTEK SEMICONDUCTOR CORPORATION
    Inventors: Hsiao-Tsung Yen, Kuan-Yu Shih, Chih-Yu Tsai, Ka-Un Chan
  • Patent number: 11616013
    Abstract: A device includes a substrate, a first conductive layer on the substrate, a first conductive via, and further conductive layers and conductive vias between the first conductive via and the substrate. The first conductive via is between the substrate and the first conductive layer, and is electrically connected to the first conductive layer. The first conductive via extends through at least two dielectric layers, and has thickness greater than about 8 kilo-Angstroms. An inductor having high quality factor is formed in the first conductive layer and also includes the first conductive via.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: March 28, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung Hsun Lin, Che-Chih Hsu, Wen-Chu Huang, Chinyu Su, Yen-Yu Chen, Wei-Chun Hua, Wen Han Hung
  • Patent number: 11616014
    Abstract: Disclosed herein are peripheral inductors for integrated circuits (ICs), as well as related methods and devices. In some embodiments, an IC device may include a die having an inductor extending around at least a portion of a periphery of the die.
    Type: Grant
    Filed: September 20, 2017
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Kevin L. Lin, Paul B. Fischer
  • Patent number: 11616015
    Abstract: Transistor cell architectures including both front-side and back-side structures. A transistor may include one or more semiconductor fins with a gate stack disposed along a sidewall of a channel portion of the fin. One or more source/drain regions of the fin are etched to form recesses with a depth below the channel region. The recesses may extend through the entire fin height. Source/drain semiconductor is then deposited within the recess, coupling the channel region to a deep source/drain. A back-side of the transistor is processed to reveal the deep source/drain semiconductor material. One or more back-side interconnect metallization levels may couple to the deep source/drain of the transistor.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Mauro J. Kobrinsky, Mark T. Bohr, Tahir Ghani, Rishabh Mehandru
  • Patent number: 11616016
    Abstract: A semiconductor device may include a plurality of active patterns and a plurality of gate structure on a substrate, a first insulating interlayer covering the active patterns and the gate structures, a plurality of first contact plugs extending through the first insulating interlayer, a plurality of second contact plugs extending through the first insulating interlayer, and a first connecting pattern directly contacting a sidewall of at least one contact plug selected from the first and second contact plugs. Each of gate structures may include a gate insulation layer, a gate electrode and a capping pattern. Each of first contact plugs may contact the active patterns adjacent to the gate structure. Each of the second contact plugs may contact the gate electrode in the gate structures. An upper surface of the first connecting pattern may be substantially coplanar with upper surfaces of the first and second contact plugs.
    Type: Grant
    Filed: April 20, 2021
    Date of Patent: March 28, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hwi-Chan Jun, Seul-Ki Hong, Hyun-Soo Kim, Sang-Hyun Lee
  • Patent number: 11616017
    Abstract: An IC package structure and an IC package unit are disclosed. The IC package includes an array of metal wall grids formed into a panel, each one of the metal wall grids having a continuous and closed metal wall to surround an IC package unit with at least one IC chip/IC die disposed therein. Each IC chip/IC die has a top surface with a plurality of metal pads formed thereon. A panel-shaped metal layer is formed on entire back side of the panel of the array of metal wall grids and bonded to the metal wall of each metal wall grid. A panel-shaped rewiring substrate having a plurality of metal pillars is connected to each IC chip/IC die with each one of the plurality of metal pillars soldered with a corresponding one of the plurality of metal pads.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: March 28, 2023
    Assignee: Chengdu Monolithic Power Systems Co., Ltd.
    Inventors: Yingjiang Pu, Hunt Hang Jiang, Xiuhong Guo
  • Patent number: 11616018
    Abstract: A semiconductor device includes a plurality of middle interconnections and a plurality of middle plugs, which are disposed in an interlayer insulating layer and on a substrate. An upper insulating layer is disposed on the interlayer insulating layer. A first upper plug, a first upper interconnection, a second upper plug, and a second upper interconnection are disposed in the upper insulating layer. Each of the plurality of middle interconnections has a first thickness. The first upper interconnection has a second thickness that is greater than the first thickness. The second upper interconnection has a third thickness that is greater than the first thickness. The third thickness is twice to 100 times the first thickness. The second upper interconnection includes a material different from the second upper plug.
    Type: Grant
    Filed: August 10, 2021
    Date of Patent: March 28, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Juik Lee, Joongwon Shin, Jihoon Chang, Junghoon Han, Junwoo Lee
  • Patent number: 11616019
    Abstract: A semiconductor assembly is described that includes a substrate having top and bottom sides. An integrated circuit die coupled to the substrate includes first and second distinct sets of ground pads. In some embodiments, the first and second sets of ground pads are configured to have distinct ground return paths to a host system. In further embodiments, one of the ground return paths may include a metal plate coupled between ground contacts on the top side of the substrate and ground contacts on a printed circuit board of the host system.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: March 28, 2023
    Assignee: NVIDIA Corp.
    Inventors: Jacky Qiu, Martin Ding, Jerry Zhou, Minto Zheng
  • Patent number: 11616020
    Abstract: A semiconductor device includes a transistor stack. The transistor stack has a plurality of transistors that are stacked over a substrate. Each of the plurality of transistors includes a channel region stacked over the substrate and extending in a direction parallel to the substrate, a gate structure stacked over the substrate and surrounding the channel region of each of the plurality of transistors, and source/drain (S/D) regions stacked over the substrate and further positioned at two ends of the channel region of each of the plurality of transistors. The semiconductor device also includes one or more conductive planes formed over the substrate. The one or more conductive planes are positioned adjacent to the transistor stack, span a height of the transistor stack, and are electrically coupled to the transistor stack.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: March 28, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Lars Liebmann, Jeffrey Smith, Anton J. deVilliers, Kandabara Tapily
  • Patent number: 11616021
    Abstract: A semiconductor device includes a lower structure, a stack structure on the lower structure and extending from a memory cell region into a connection region, gate contact plugs on the stack structure in the connection region, and a memory vertical structure through the stack structure in the memory cell region, wherein the stack structure includes interlayer insulating layers and horizontal layers alternately stacked, wherein, in the connection region, the stack structure includes a staircase region and a flat region, wherein the staircase region includes lowered pads, wherein the flat region includes a flat pad region, a flat edge region, and a flat dummy region between the flat pad region and the flat edge region, and wherein the gate contact plugs include first gate contact plugs on the pads, flat contact plugs on the flat pad region, and a flat edge contact plug on the flat edge region.
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: March 28, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seungjun Shin, Siwan Kim, Bonghyun Choi
  • Patent number: 11616022
    Abstract: The present application discloses a method for fabricating a semiconductor device. The method includes providing a substrate; forming an insulating layer above the substrate; forming a first opening in the insulating layer; conformally forming a first framework layer in the first opening; forming an energy-removable layer on the first framework layer and filling the first opening; forming a second opening along the energy-removable layer and the first framework layer; conformally forming a second framework layer in the second opening; forming a top contact on the second framework layer and filling the second opening and forming a top conductive layer on the top contact; and performing an energy treatment to transform the energy-removable layer into porous insulating layers on two sides of the top contact.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: March 28, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tse-Yao Huang
  • Patent number: 11616023
    Abstract: In accordance with the disclosure, an inductor may be formed over a semiconductor substrate of one or both dies in a face-to-face die arrangement while reducing the parasitic capacitance between the inductor and the adjacent die. In disclosed embodiments, a semiconductor device may include a void (e.g., an air gap) between the inductor and the adjacent die to reduce the parasitic capacitance between the inductor and the adjacent die. The void may be formed in the die that includes the inductor and/or the adjacent die. In some respects, the void may be etched in interface layers (e.g., comprising bump pads and dielectric material) between the semiconductor dies, and may extend along the length of the inductor.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: March 28, 2023
    Assignee: NVIDIA Corporation
    Inventors: Joseph Greco, Joseph Minacapelli
  • Patent number: 11616024
    Abstract: A semiconductor device includes a metal plate; a sidewall member surrounding a periphery of a space above the metal plate; a circuit board provided on the metal plate; a semiconductor chip provided on the circuit board; a first wire connecting the semiconductor chip and an interconnect part of the circuit board; a first resin member covering a bonding portion between the semiconductor chip and the first wire; and a second resin member provided in the space, the second resin member covering an upper surface of the metal plate, the circuit board, the first resin member, and the first wire. A Young's modulus of the first resin member is greater than a Young's modulus of the second resin member. A volume of the second resin member is greater than a volume of the first resin member.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: March 28, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventor: Noritoshi Shibata
  • Patent number: 11616025
    Abstract: A semiconductor device has a semiconductor package including a substrate comprising a land grid array. A component is disposed over the substrate. An encapsulant is deposited over the component. The land grid array remains outside the encapsulant. A fanged metal mask is disposed over the land grid array. A shielding layer is formed over the semiconductor package. The fanged metal mask is removed after forming the shielding layer.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: March 28, 2023
    Assignee: STATS ChipPAC Pte. Ltd.
    Inventors: ChangOh Kim, KyoungHee Park, JinHee Jung, OMin Kwon, JiWon Lee, YuJeong Jang
  • Patent number: 11616026
    Abstract: A device includes an interconnect device attached to a redistribution structure, wherein the interconnect device includes conductive routing connected to conductive connectors disposed on a first side of the interconnect device, a molding material at least laterally surrounding the interconnect device, a metallization pattern over the molding material and the first side of the interconnect device, wherein the metallization pattern is electrically connected to the conductive connectors, first external connectors connected to the metallization pattern, and semiconductor devices connected to the first external connectors.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: March 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jiun Yi Wu, Chen-Hua Yu
  • Patent number: 11616027
    Abstract: An integrated circuit package can contain a semiconductor die and provide electrical connections between the semiconductor die and additional electronic components. The integrated circuit package can reduce stress placed on the semiconductor die due to movement of the integrated circuit package due to, for example, temperature changes and/or moisture levels. The integrated circuit package can at least partially mechanically isolate the semiconductor die from the integrated circuit package.
    Type: Grant
    Filed: November 18, 2020
    Date of Patent: March 28, 2023
    Assignee: Analog Devices International Unlimited Company
    Inventors: Ramji Sitaraman Lakshmanan, Bernard Stenson, Padraig Liam Fitzgerald, Oliver Kierse, Michael James Twohig, Michael John Flynn, Laurence Brendan O'Sullivan
  • Patent number: 11616028
    Abstract: Semiconductor devices having metallization structures including crack-inhibiting structures, and associated systems and methods, are disclosed herein. In one embodiment, a semiconductor device includes a metallization structure formed over a semiconductor substrate. The metallization structure can include a bond pad electrically coupled to the semiconductor substrate via one or more layers of conductive material, and an insulating material—such as a low-? dielectric material—at least partially around the conductive material. The metallization structure can further include a crack-inhibiting structure positioned beneath the bond pad between the bond pad and the semiconductor substrate. The crack-inhibiting structure can include (a) a metal lattice extending laterally between the bond pad and the semiconductor substrate and (b) barrier members extending vertically between the metal lattice and the bond pad.
    Type: Grant
    Filed: October 5, 2020
    Date of Patent: March 28, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shams U. Arifeen, Hyunsuk Chun, Sheng Wei Yang, Keizo Kawakita
  • Patent number: 11616029
    Abstract: Semiconductor structures and methods of testing the same are provided. A semiconductor structure according to the present disclosure includes a substrate, a semiconductor device over the substrate, wherein the semiconductor device includes an interconnect structure, and the interconnect structure includes a plurality of metallization layers disposed in a dielectric layer; and a delamination sensor. The delamination sensor includes a connecting structure and a plurality of contact vias in at least one of the plurality of metallization layers. The connecting structure bonds the semiconductor device to the substrate and does not functionally couple the semiconductor device to the substrate. The plurality of contact vias fall within a first region of a vertical projection area of the connecting structure but do not overlap a second region of the vertical projection area.
    Type: Grant
    Filed: July 1, 2021
    Date of Patent: March 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Hsuan Tai, Ming-Chung Wu, Kuo-Wen Chen, Hsiang-Tai Lu
  • Patent number: 11616030
    Abstract: A method for making a three-dimensional (3-D) module includes the steps of: A) forming a laminate of alternate ceramic tape layers and internal electrode layers on a substrate; B) etching said laminate to form first and second capacitor stacks at said first and second locations; C) firing said first and second capacitor stacks integrally; D) forming first and second pairs of external electrodes on said first and second capacitor stacks, respectively.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: March 28, 2023
    Assignee: Southern University of Science and Technology
    Inventors: Guobiao Zhang, Hongyu Yu, Shengming Zhou, Yuejin Guo, Kai Chen, Yida Li, Jun Lan
  • Patent number: 11616031
    Abstract: The present technology relates to a semiconductor device and an electronic apparatus that make it possible to suppress the generation of noise in signals. A semiconductor device includes: a first semiconductor substrate on which at least a portion of a first conductor loop is formed; and a second semiconductor substrate on which a second conductor loop is formed. The second semiconductor substrate includes a first conductor layer and a second conductor layer. The first conductor layer and the second conductor layer each include a conductor. The first conductor layer and the second conductor layer are configured to cause a direction of a loop surface in which a magnetic flux is generated from the second conductor loop to be different from a direction of a loop surface in which an induced electromotive force is generated in the first conductor loop. The present technology is applicable, for example, to a CMOS image sensor.
    Type: Grant
    Filed: July 13, 2018
    Date of Patent: March 28, 2023
    Assignee: Sony Semiconductor Solutions Corporation
    Inventors: Takashi Miyamoto, Yoshiyuki Akiyama, Junichi Tsunoda, Shuuichi Kojima
  • Patent number: 11616032
    Abstract: A semiconductor device includes a semiconductor substrate having a main surface over which a plurality of die pads and at least one alignment pad for optical process control for semiconductor wafer probing are arranged. The alignment pad has a hardness smaller than a hardness of the plurality of die pads.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: March 28, 2023
    Assignee: Infineon Technologies AG
    Inventors: Daniel Maurer, Christof Altstaetter, Thomas Beyreder, Oliver Blank, Jürgen Bostjancic, Andreas Kleinbichler, Josef Liegl, Nicole Schulze-Ollmert
  • Patent number: 11616033
    Abstract: A semiconductor device includes a substrate, a semiconductor chip, a plurality of bonding pads on a surface of the semiconductor chip, a plurality of probe pads on a surface of the semiconductor chip, a plurality of connection pads on a surface of the substrate, and a plurality of bonding wires that electrically connect the bonding pads and the connection pads. The plurality of bonding pads include a first bonding pad and a second bonding pad, the plurality of probe pads include a first probe pad and a second probe pad, and a part of the first probe pad is disposed between the second bonding pad and the second probe pad.
    Type: Grant
    Filed: August 23, 2021
    Date of Patent: March 28, 2023
    Assignee: Kioxia Corporation
    Inventor: Noriyuki Moriyasu
  • Patent number: 11616034
    Abstract: An integrated circuit structure is provided. The integrated circuit structure includes a die that contains a substrate, an interconnection structure, active connectors and dummy connectors. The interconnection structure is disposed over the substrate. The active connectors and the dummy connectors are disposed over the interconnection structure. The active connectors are electrically connected to the interconnection structure, and the dummy connectors are electrically insulated from the interconnection structure.
    Type: Grant
    Filed: March 19, 2021
    Date of Patent: March 28, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Chao Mao, Chin-Chuan Chang, Szu-Wei Lu, Kun-Tong Tsai, Hung-Chih Chen
  • Patent number: 11616035
    Abstract: A semiconductor structure, including a substrate and multiple chips, is provided. The chips are stacked on the substrate. Each of the chips has a first side and a second side opposite to each other. Each of the chips includes a transistor adjacent to the first side and a storage node adjacent to the second side. Two adjacent chips are bonded to each other. The transistor of one of the two adjacent chips is electrically connected to the storage node of the other one of the two adjacent chips to form a memory cell.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: March 28, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Teng-Chuan Hu, Chun-Hung Chen, Chu-Fu Lin
  • Patent number: 11616036
    Abstract: A method includes forming a first substrate including a first dielectric layer and a first metal pad, forming a second substrate including a second dielectric layer and a second metal pad, and bonding the first dielectric layer to the second dielectric layer, and the first metal pad to the second metal pad. One or both of the first and second substrates is formed by forming a first insulating layer, forming an opening in the layer, forming a barrier on an inner surface of the opening, forming a metal pad material on the barrier, polishing the metal pad material to expose a portion of the barrier and to form a gap, expanding the gap, forming a second insulating layer to fill the opening and the gap, and polishing the insulating layers such that a top surface of the metal pad is substantially planar with an upper surface of the polished layer.
    Type: Grant
    Filed: March 14, 2022
    Date of Patent: March 28, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Joohee Jang, Seokho Kim, Hoonjoo Na, Jaehyung Park, Kyuha Lee
  • Patent number: 11616037
    Abstract: An integrated fan-out package includes a die, an encapsulant, a seed layer, a conductive pillar, a redistribution structure, and a buffer layer. The encapsulant encapsulates the die. The seed layer and the conductive pillar are sequentially stacked over the die and the encapsulant. The redistribution structure is over the die and the encapsulant. The redistribution structure includes a conductive pattern and a dielectric layer. The conductive pattern is directly in contact with the seed layer and the dielectric layer covers the conductive pattern and surrounds the seed layer and the conductive pillar. The buffer layer is disposed over the redistribution structure. The seed layer is separate from the dielectric layer by the buffer layer, and a Young's modulus of the buffer layer is higher than a Young's modulus of the dielectric layer of the redistribution structure.
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: March 28, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Yang Yu, Chin-Liang Chen, Hai-Ming Chen, Kuan-Lin Ho, Yu-Min Liang
  • Patent number: 11616038
    Abstract: A semiconductor die includes a substrate and an integrated circuit provided on the substrate and having contacts. An electrically conductive layer is provided on the integrated circuit and defines electrically conductive elements electrically connected to the contacts. Electrically conductive interconnects coupled with respective electrically conductive elements. The electrically conductive interconnects have at least one of different sizes or shapes from one another.
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: March 28, 2023
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Patrick Francis Thompson, Christopher Daniel Manack, Stefan Herzer, Rakshit Agrawal
  • Patent number: 11616039
    Abstract: A semiconductor package including a first stack; a plurality of TSVs passing through the first stack; a second stack on the first stack and including a second surface facing a first surface of the first stack; a first pad on the first stack and in contact with the TSVs; a second pad on the second stack; a bump connecting the first and second pads; a first redundancy pad on the first surface of the first stack, spaced apart from the first pad, and not in contact with the TSVs; a second redundancy pad on the second surface of the second stack and spaced apart from the second pad; and a redundancy bump connecting the first redundancy pad and the second redundancy pad, wherein the first pad and first redundancy pad are electrically connected to each other, and the second pad and second redundancy pad are electrically connected to each other.
    Type: Grant
    Filed: April 1, 2021
    Date of Patent: March 28, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang-Sick Park, Un-Byoung Kang, Seon Gyo Kim, Joon Ho Jun
  • Patent number: 11616040
    Abstract: Semiconductor dies including ultra-thin wafer backmetal systems, microelectronic devices containing such semiconductor dies, and associated fabrication methods are disclosed. In one embodiment, a method for processing a device wafer includes obtaining a device wafer having a wafer frontside and a wafer backside opposite the wafer frontside. A wafer-level gold-based ohmic bond layer, which has a first average grain size and which is predominately composed of gold, by weight, is sputter deposited onto the wafer backside. An electroplating process is utilized to deposit a wafer-level silicon ingress-resistant plated layer over the wafer-level Au-based ohmic bond layer, while imparting the plated layer with a second average grain size exceeding the first average grain size. The device wafer is singulated to separate the device wafer into a plurality of semiconductor die each having a die frontside, an Au-based ohmic bond layer, and a silicon ingress-resistant plated layer.
    Type: Grant
    Filed: January 18, 2021
    Date of Patent: March 28, 2023
    Assignee: NXP USA, Inc.
    Inventors: Tianwei Sun, Jaynal A. Molla
  • Patent number: 11616041
    Abstract: A mounting apparatus includes: a bonding stage; a base; a mounting head for performing a temporary press-attachment process in which semiconductor chips are suction-held and temporarily press-attached to a mounted object and a final press-attachment process in which the temporarily press-attached semiconductor chips are finally press-attached; a film arrangement mechanism arranged on the bonding stage or the base; and a controller which controls driving of the mounting head and the film arrangement mechanism. The film arrangement mechanism includes: a film feed-out mechanism which has a pair of feed rollers with a cover film extended there-between and successively feeds out a new cover film; and a film movement mechanism which moves the cover film in a horizontal direction with respect to a substrate.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: March 28, 2023
    Assignee: SHINKAWA LTD.
    Inventors: Kohei Seyama, Tetsuya Utano
  • Patent number: 11616042
    Abstract: A bonding system for bonding a semiconductor element to a substrate is provided. The bonding system includes a substrate oxide reduction chamber configured to receive a substrate. The substrate includes a plurality of first electrically conductive structures. The substrate oxide reduction chamber is configured to receive a reducing gas to contact each of the plurality of first electrically conductive structures. The bonding system also includes a substrate oxide prevention chamber for receiving the substrate after the reducing gas contacts the plurality of first electrically conductive structures. The substrate oxide prevention chamber has an inert environment when receiving the substrate. The bonding system also includes a reducing gas delivery system for providing a reducing gas environment during bonding of a semiconductor element to the substrate.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: March 28, 2023
    Assignee: Kulicke and Soffa Industries, Inc.
    Inventors: Adeel Ahmad Bajwa, Thomas J. Colosimo, Jr.
  • Patent number: 11616043
    Abstract: A chip transfer method including: disposing a target substrate in a closed cavity, the target substrate including a first alignment bonding structure and a second alignment bonding structure; applying a charge of a first polarity to the first alignment bonding structure of the target substrate; applying a charge of a second polarity to a first chip bonding structure of a chip; injecting an insulating fluid into the closed cavity to suspend the chip in the insulating fluid within the closed cavity; and applying a bonding force to the chip.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: March 28, 2023
    Assignee: BOE Technology Group Co., Ltd.
    Inventors: Liang Chen, Lei Wang, Minghua Xuan, Li Xiao, Dongni Liu, Detao Zhao, Hao Chen
  • Patent number: 11616044
    Abstract: A method for packaging chips includes: providing a filter wafer and a plurality of substrates to be packaged, each substrate to be packaged being provided with one or more first pads; flip-chip bonding the substrates to be packaged on the filter wafer; molding the substrates to be packaged to form a molded layer on the substrates to be packaged, the substrates to be packaged, the molded layer, and the filter wafer forming a molded structure, each substrate to be packaged, a portion of the molded layer formed on the substrate to be packaged, and the filter wafer together enclosing a cavity; exposing the first pads out of the molded layer; and cutting the molded structure into a plurality of particle chips.
    Type: Grant
    Filed: March 4, 2022
    Date of Patent: March 28, 2023
    Assignee: Shenzhen Newsonic Technologies Co., Ltd.
    Inventor: Jian Wang
  • Patent number: 11616045
    Abstract: Wire removal systems and methods for packaging applications. In some embodiments, a method of manufacturing a module can include receiving by an automated wire cutting apparatus a packaging substrate including a die mounted thereon and a defective wire coupled thereto, positioning one or both of a wire cutting instrument of the automated wire cutting apparatus and the packaging substrate relative to the other based on predetermined instructions, and detaching the defective wire from the packaging substrate using the wire cutting instrument.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: March 28, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventors: Cesar Melendrez, Miguel Camargo Soto, Aldrin Quinones Garing
  • Patent number: 11616046
    Abstract: A multi-chip package comprising an interconnection substrate; a first semiconductor IC chip over the interconnection substrate, wherein the first semiconductor IC chip comprises a first silicon substrate, a plurality of first metal vias passing through the first silicon substrate, a plurality of first transistors on a top surface of the first silicon substrate and a first interconnection scheme over the first silicon substrate, wherein the first interconnection scheme comprises a first interconnection metal layer over the first silicon substrate, a second interconnection metal layer over the first interconnection layer and the first silicon substrate and a first insulating dielectric layer over the first silicon substrate and between the first and second interconnection metal layers; a second semiconductor IC chip over and bonded to the first semiconductor IC chip; and a plurality of second metal vias over and coupling to the interconnection substrate, wherein the plurality of second metal vias are in a space
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: March 28, 2023
    Assignee: iCometrue Company Ltd.
    Inventors: Mou-Shiung Lin, Jin-Yuan Lee
  • Patent number: 11616047
    Abstract: Microelectronic assemblies, related devices and methods, are disclosed herein. In some embodiments, a microelectronic assembly may include a package substrate having a first surface and an opposing second surface; a first die having a first surface and an opposing second surface embedded in a first dielectric layer, where the first surface of the first die is coupled to the second surface of the package substrate by first interconnects; a second die having a first surface and an opposing second surface embedded in a second dielectric layer, where the first surface of the second die is coupled to the second surface of the first die by second interconnects; and a third die having a first surface and an opposing second surface embedded in a third dielectric layer, where the first surface of the third die is coupled to the second surface of the second die by third interconnects.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Adel A. Elsherbini, Feras Eid, Johanna M. Swan, Shawna M. Liff
  • Patent number: 11616048
    Abstract: An integrated circuit (IC) package includes a first die with a first surface overlaying a substrate. The first die includes a first metal pad at a second surface opposing the first surface. The IC package also includes a dielectric layer having a first surface contacting the second surface of the first die. The IC package further includes a second die with a surface that contacts a second surface of the dielectric layer. The second die includes a second metal pad aligned with the first metal pad of the first die. A plane perpendicular to the second surface of the first die intersects the first metal pad and the second metal pad.
    Type: Grant
    Filed: June 10, 2020
    Date of Patent: March 28, 2023
    Assignee: Texas Instruments Incorporated
    Inventor: Thomas Dyer Bonifield
  • Patent number: 11616050
    Abstract: A method for manufacturing a micro light emitting diode device is provided. A plurality of first type epitaxial structures are formed on a first substrate and the first type epitaxial structures are separated from each other. A first connection layer and a first adhesive layer are configured between the first type epitaxial structures and the first substrate. The first connection layer is connected to the first type epitaxial structures. The first adhesive layer is located between the first connection layer and the first type epitaxial substrate. The Young's modulus of the first connection layer is larger than the Young's modulus of the first adhesive layer. The first connection layer located between any two adjacent first type epitaxial structures is removed so as to form a plurality of first connection portions separated from each other. Each of the first connection portions is connected to the corresponding first type epitaxial structure.
    Type: Grant
    Filed: June 24, 2021
    Date of Patent: March 28, 2023
    Assignee: PlayNitride Inc.
    Inventors: Yu-Yun Lo, Tzu-Yang Lin, Yu-Hung Lai
  • Patent number: 11616051
    Abstract: A semiconductor package device includes a first semiconductor package, a second semiconductor package, and first connection terminals between the first and second semiconductor packages. The first semiconductor package includes a lower redistribution substrate, a semiconductor chip, and an upper redistribution substrate vertically spaced apart from the lower redistribution substrate across the semiconductor chip. The upper redistribution substrate includes a dielectric layer, redistribution patterns vertically stacked in the dielectric layer and each including line and via parts, and bonding pads on uppermost redistribution patterns. The bonding pads are exposed from the dielectric layer and in contact with the first connection terminals. A diameter of each bonding pad decreases in a first direction from a central portion at a top surface of the upper redistribution substrate to an outer portion at the top surface thereof. A thickness of each bonding pad increases in the first direction.
    Type: Grant
    Filed: April 26, 2021
    Date of Patent: March 28, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dongkyu Kim, Seokhyun Lee, Yeonho Jang, Jaegwon Jang
  • Patent number: 11616052
    Abstract: A method for manufacturing an electronic device includes transferring a plurality of light emitting units from a carrier substrate to an object substrate through steps of: picking the plurality of light emitting units from the carrier substrate by a pick-and-place tool, and placing the plurality of light emitting units onto the object substrate. The steps are both performed under a protection by at least one electrostatic discharge protective unit.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: March 28, 2023
    Assignee: Innolux Corporation
    Inventors: Jia-Yuan Chen, Tsung-Han Tsai, Kuan-Feng Lee
  • Patent number: 11616053
    Abstract: A semiconductor device includes: a substrate having a surface, the surface being planar; a first logic gate provided on the substrate and comprising a first field effect transistor (FET) having a first channel, and a first pair of source-drain regions; a second logic gate stacked over the first logic gate along a vertical direction perpendicular to the surface of the substrate, the second logic gate comprising a second FET having a second channel, and a second pair of source-drain regions; and a contact electrically connecting a source-drain region of the first FET to a source-drain region of the second FET such that at least a portion of current flowing between the first and second logic gate will flow along said vertical direction.
    Type: Grant
    Filed: September 4, 2019
    Date of Patent: March 28, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Jeffrey Smith, Anton J. Devilliers, Kandabara Tapily
  • Patent number: 11616054
    Abstract: A semiconductor structure is disclosed, including a first gate and a second gate aligned with the first gate, a first gate via, a second gate via, multiple conductive segments, and a first conductive line. The first gate via is disposed on the first gate and the second gate via is disposed on the second gate. The first and second gates are configured to be a terminal of a first logic circuit, which is coupled to a terminal of a second logic circuit. The first conductive line is coupled to the first gate through a first connection via and the first gate via and is electrically coupled to the second gate through a second connection via and the second gate via.
    Type: Grant
    Filed: May 8, 2020
    Date of Patent: March 28, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kam-Tou Sio, Sang-Chi Huang
  • Patent number: 11616055
    Abstract: A method of forming an integrated circuit includes generating a first and second standard cell layout design, and manufacturing the integrated circuit based on at least the first or second standard cell layout design. The first standard cell layout design has a first height. The second standard cell layout design has a second height different from the first height. The second standard cell layout design is adjacent to the first standard cell layout design. Generating the first standard cell layout design includes generating a first set of pin layout patterns extending in a first direction, being on a first layout level, and having a first width. Generating the second standard cell layout design includes generating a second set of pin layout patterns extending in the first direction, being on the first layout level, and having a second width different from the first width.
    Type: Grant
    Filed: November 11, 2020
    Date of Patent: March 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yao Ku, Wen-Hao Chen, Kuan-Ting Chen, Ming-Tao Yu, Jyun-Hao Chang
  • Patent number: 11616056
    Abstract: An integrated circuit structure includes a first semiconductor fin extending horizontally in a length direction and including a bottom portion and a top portion above the bottom portion, a bottom transistor associated with the bottom portion of the first semiconductor fin, a top transistor above the bottom transistor and associated with the top portion of the first semiconductor fin, and a first vertical diode. The first vertical diode includes: a bottom region associated with at least the bottom portion of the first semiconductor fin, the bottom region including one of n-type and p-type dopant; a top region associated with at least the top portion of the first semiconductor fin, the top region including the other of n-type and p-type dopant; a bottom terminal electrically connected to the bottom region; and a top terminal electrically connected to the top region at the top portion of the first semiconductor fin.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Patrick Morrow, Anh Phan, Cheng-Ying Huang, Rishabh Mehandru, Gilbert Dewey, Willy Rachmady