Rotating Work Patents (Class 118/320)
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Patent number: 8518480Abstract: The present invention is a method of developing a resist film on a substrate using a developing solution at a predetermined temperature lower than room temperature, including a first cooling step of mounting and cooling the substrate on a cooling plate at a temperature lower than room temperature and higher than the predetermined temperature in a cooling apparatus; a second cooling step of then carrying the substrate into a developing apparatus and supplying a rinse solution at the predetermined temperature or lower onto the substrate to cool the substrate in the developing apparatus; a developing step of then supplying the developing solution onto the substrate and developing the resist film on the substrate to form a resist pattern in the resist film; and a cleaning step of then supplying a rinse solution at the predetermined temperature onto the substrate to clean a front surface of the substrate.Type: GrantFiled: January 11, 2011Date of Patent: August 27, 2013Assignee: Tokyo Electron LimitedInventors: Norifumi Sato, Yukio Kiba, Tetsushi Miyamoto, Kazuhisa Hasebe
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Patent number: 8516974Abstract: A wet masking system for applying a maskant to a portion of a workpiece includes one or more pressurized mixing vessels with agitators for continuously blending the ingredients of the maskant, a dispensing system connected to the vessels for supplying metered volumes of maskant to injection valves. An electronic controller operable for controlling the system to coat the portion. A fixture for holding the workpiece with just the portion inside a cavity of the fixture includes one or more inlet ports alignable with injection ports of the injection valves injecting the maskant into the cavity. Heaters are positioned for drying or flash drying the maskant on the portion of the workpiece. Recirculation lines from the injection valves to at least one of the mixing vessels operated by the controller to flow the maskant through the recirculation lines after a period of time when no maskant is flowing through masking system.Type: GrantFiled: August 29, 2011Date of Patent: August 27, 2013Assignee: General Electric CompanyInventors: Nicholas Shawn Woodard, Albert Dean King
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Publication number: 20130216730Abstract: An optical recording medium production device of the invention include: a rotary table on which a substrate of an optical recording medium is placed; and dropping unit for dropping resin for forming a light transmissive film layer during rotation of the rotary table, wherein the dropping unit drops the resin onto an inside of the substrate and a side surface of the substrate. By applying the production device of the invention, in the spin coat method, a UV curable resin layer can be formed a cross-sectional shape of which is uniform in a whole circumference of the optical recording medium side surface.Type: ApplicationFiled: July 22, 2011Publication date: August 22, 2013Applicant: PANASONIC CORPORATIONInventors: Yuuji Takatori, Takehiko Toyota, Tatsuyuki Harada
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Publication number: 20130209662Abstract: Methods and apparatus for coating a medical device are provided. In one embodiment, the method for preparing a substantially uniform coated medical device includes (1) preparing a coating solution comprising a solvent, a therapeutic agent, and an additive; (2) loading a metering dispenser with the coating solution; (3) rotating the medical device about the longitudinal axis of the device and/or moving the medical device along the longitudinal or transverse axis of the device; (4) dispensing the coating solution from the metering dispenser onto a surface of the medical device and flowing the coating solution on the surface of the medical device while the medical device is rotating and/or linearly moving; and (5) evaporating the solvent, forming a substantially uniform coating layer on the medical device.Type: ApplicationFiled: March 18, 2013Publication date: August 15, 2013Applicant: Lutonix, Inc.Inventor: Lutonix, Inc.
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Patent number: 8505479Abstract: A resist coating apparatus supplies a resist solution to substantially the center of a target substrate to be processed while rotating the target substrate at a first rotational speed, then decelerates the rotation of the substrate to a second rotational speed lower than the first rotational speed, or until rotational halt, makes the deceleration smaller in the deceleration step as the rotational speed becomes closer to the second rotational speed or the rotational halt, and accelerates the rotation of the substrate to a third rotational speed higher than the second rotational speed to spin off a residue of the resist solution.Type: GrantFiled: September 8, 2010Date of Patent: August 13, 2013Assignee: Tokyo Electron LimitedInventors: Kousuke Yoshihara, Tomohiro Iseki
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Patent number: 8499715Abstract: A coating apparatus includes a first coating device, a number of second coating devices and a number of substrate holders. Each of the substrate holders is rotatable relative to the first coating device and the second coating devices such that one of two opposite holding surfaces of the substrate holder alternately faces the first coating device and the second coating devices.Type: GrantFiled: March 31, 2011Date of Patent: August 6, 2013Assignee: Hon Hai Precision Industry Co., Ltd.Inventor: Shao-Kai Pei
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Patent number: 8501274Abstract: A substrate is rotated at a first rotation number (first step). The rotation of the substrate is decelerated to 1500 rpm that is a second rotation number and the substrate is rotated at the second rotation number for 0.5 seconds (second step). The rotation of the substrate is further decelerated to a third rotation number and the substrate is rotated at the third rotation number (third step). The rotation of the substrate is accelerated to a fourth rotation number and the substrate is rotated at the fourth rotation number (fourth step). A resist solution is continuously supplied to a center portion of the substrate from a middle of the first step to a middle of the third step.Type: GrantFiled: August 12, 2010Date of Patent: August 6, 2013Assignee: Tokyo Electron LimitedInventors: Katsunori Ichino, Koji Takayanagi, Tomohiro Noda
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Patent number: 8496991Abstract: The present invention supplies a solvent to a front surface of a substrate while rotating the substrate. The substrate is acceleratingly rotated to a first number of rotations, and a resist solution is supplied to a central portion of the substrate during the accelerating rotation and the rotation at a first number of rotations. The substrate is deceleratingly rotated to a second number of rotations, and after the number of rotations of the substrate reaches the second number of rotations, the resist solution is discharged to the substrate. The substrate is then acceleratingly rotated to a third number of rotations higher than the second number of rotations so that the substrate is rotated at the third number of rotations. According to the present invention, consumption of the resist solution can be suppressed and a high in-plane uniformity can be obtained for the film thickness of the resist film.Type: GrantFiled: September 20, 2011Date of Patent: July 30, 2013Assignee: Tokyo Electron LimitedInventors: Kousuke Yoshihara, Tomohiro Iseki
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Patent number: 8485124Abstract: Disclosed is a silver thin film spread apparatus by means of deposition of nano metallic silver, the apparatus comprising: a treatment booth formed at one side with an inlet for inputting a substrate, and formed at the other side with an outlet for discharging the substrate; a transfer device formed at a lower side of the treatment booth for transferring the substrate; a spray device formed at an upper side of the treatment booth for spraying silver solution on a surface of the substrate; a moving device for linearly reciprocating the spray device; and a rotation device formed at the lower side of the treatment booth for rotating the substrate, whereby reflectivity can be enhanced by increasing film compactness and coating uniformity of thin film, where the substrate is rotated at a predetermined constant speed to allow the spray guns to linearly reciprocate and to allow the nano silver thin film to be uniformly spread and deposited on the surface of the substrate at a predetermined constant frequency.Type: GrantFiled: November 30, 2010Date of Patent: July 16, 2013Assignee: NANO CMS Co., Ltd.Inventors: Shi Surk Kim, Seong Uk Lee, Si Doo Kim
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Patent number: 8474396Abstract: Provided is a developing apparatus configured to slim the resist pattern while reducing the number of developing modules. A room temperature developing liquid and a high temperature developing liquid to modify the surface layer of a resist pattern can be supplied from a common nozzle to a substrate disposed on a mount table. Although both developing liquids may be sequentially discharged by switching between the supply line for the room temperature developing liquid and the supply line for the high temperature developing liquid, it is also possible to join these supply lines for supplying the room temperature developing liquid from the former supply line, and then adjust the ratio of the flow rates between both supply lines, and then supply the mixed liquid of the developing liquids as a high temperature developing liquid.Type: GrantFiled: July 14, 2010Date of Patent: July 2, 2013Assignee: Tokyo Electron LimitedInventors: Masahiro Fukuda, Atsushi Ookouchi, Taro Yamamoto
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Patent number: 8475870Abstract: A resin layer formation method and device for making a resin layer uniform on a substrate before lamination or on a substrate is provided. Adhesive is coated at an inner circumference side while rotating a substrate at low speed. A first adhesive layer is formed on the surface of the substrate by rotating at high speed. A step difference section is formed around a rotation center of the substrate by irradiating ultraviolet on an area in the inner circumference side of the first adhesive layer to hardening the area. Adhesive is coated at the rotation center side from the step difference section on the substrate, and a second adhesive layer is formed on the first adhesive layer by rotating the substrate at high speed. The first adhesive layer and the second adhesive layer are integrated to form a uniform adhesive layer.Type: GrantFiled: December 2, 2011Date of Patent: July 2, 2013Assignee: Shibaura Mechatronics CorporationInventors: Tomokazu Ito, Hisashi Nishigaki, Tsukasa Kawakami, Haruka Narita, Yoji Takizawa, Takumi Hanada, Munenori Iwami
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Patent number: 8474402Abstract: Apparatus and method for electrostatic charging of a container for an electrostatic coating operation includes a support member for supporting a container during an electrostatic coating operation with the support member comprising a non-metallic conductive material or electrically semiconductive portion that directly contacts a surface of the container. The electrically semiconductive portion comprises non-metallic, resistive or low conductivity material and is coupled to a source of electrical energy such that the container is electrostatically charged to an opposite polarity to offset or reduce electrostatic charge build up produced by the electrostatic coating operation.Type: GrantFiled: December 9, 2009Date of Patent: July 2, 2013Assignee: Nordson CorporationInventors: Terrence M. Fulkerson, Timothy E. Wilson, Michael A. Bordner, Jon Davisson, Brad M. Syrowski
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Publication number: 20130160706Abstract: The invention relates to a device for coating a surface of a wafer. The device includes a retaining system for placing the wafer on a retaining surface, a nozzle system for coating the wafer in a Z-direction, and a ring having an inside periphery that surrounds a side periphery of the wafer (2), wherein the ring can be arranged for expanding a coating surface when coating the wafer.Type: ApplicationFiled: October 19, 2010Publication date: June 27, 2013Inventors: Johanna Bartel, Ronald Holzleitner, Raimund Hoffmann, Franz Schrank, Jordi Teva-MeroƱo
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Publication number: 20130160705Abstract: Methods and systems for reinforcing the periphery of a semiconductor wafer bonded to a carrier are disclosed. In one embodiment, additional adhesive is applied to the semiconductor wafer prior to bonding. The additional adhesive seeps into a crevice between the carrier and wafer and provides reinforcement. In another embodiment, adhesive is applied to the crevice by a dispenser after the wafer is bonded to the glass carrier.Type: ApplicationFiled: February 22, 2013Publication date: June 27, 2013Applicant: International Business Machines CorporationInventor: International Business Machines Corporation
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Patent number: 8465789Abstract: Various embodiments of methods and devices for coating stents are described herein.Type: GrantFiled: July 18, 2011Date of Patent: June 18, 2013Assignee: Advanced Cardiovascular Systems, Inc.Inventor: Jason Van Sciver
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Patent number: 8430055Abstract: Embodiments of the invention relate to a method and apparatus for coating a medical device. In one embodiment, the method for preparing a substantially uniform coated medical device includes (1) preparing a coating solution comprising a solvent, a therapeutic agent, and an additive; (2) loading a metering dispenser with the coating solution; (3) rotating the medical device about the longitudinal axis of the device and/or moving the medical device along the longitudinal or transverse axis of the device; (4) dispensing the coating solution from the metering dispenser onto a surface of the medical device and flowing the coating solution on the surface of the medical device while the medical device is rotating and/or linearly moving; and (5) evaporating the solvent, forming a substantially uniform coating layer on the medical device.Type: GrantFiled: August 27, 2009Date of Patent: April 30, 2013Assignee: Lutonix, Inc.Inventors: Jeffrey Wang, Harrison Malinoff, Lixiao Wang, Christopher M. Barry, Dennis W. Wahr, Scott R. Naisbitt
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Publication number: 20130092082Abstract: The instant invention relates to a method for changing characteristics of a plastic component, wherein a medium is introduced into the plastic component, which encompasses a porosity and wherein the medium forms a homogenous compound with the plastic component by at least partially dissolving the plastic component.Type: ApplicationFiled: December 6, 2012Publication date: April 18, 2013Applicant: VOXELJET TECHNOLOGY GHBHInventor: VOXELJET TECHNOLOGY GHBH
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Patent number: 8414972Abstract: In a coating step, a substrate is rotated at a high speed, and in that state a resist solution is discharged from a first nozzle to a central portion of the substrate to apply the resist solution over the substrate. Subsequently, in a flattening step, the rotation of the substrate is decelerated and the substrate is rotated at a low speed to flatten the resist solution on the substrate. In this event, the discharge of the resist solution by the first nozzle in the coating step is performed until a middle of the flattening step, and when the discharge of the resist solution is finished in the flattening step, the first nozzle is moved to move a discharge position of the resist solution from the central portion of the substrate. According to the present invention, the resist solution can be applied uniformly within the substrate.Type: GrantFiled: February 28, 2008Date of Patent: April 9, 2013Assignee: Tokyo Electron LimitedInventors: Kousuke Yoshihara, Tomohiro Iseki, Koji Takayanagi
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Patent number: 8409671Abstract: A method for forming a resin film is provided in which a liquid material is cured by shifting irradiation of light from a central side to an outer circumferential side of a substrate during or after spreading a liquid material on the substrate by rotation, in which the light is annular, and an inner diameter and an outer diameter of the annular light are increased concentrically in relation to a central axis of rotation as irradiation time progresses, so that the annular light shifts from the central side to the outer circumferential side of the substrate.Type: GrantFiled: August 22, 2007Date of Patent: April 2, 2013Assignee: Origin Electric Company, LimitedInventors: Naoto Ozawa, Takayuki Suzuki
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Publication number: 20130078381Abstract: A substrate processing apparatus comprising a substrate holding rotating mechanism, a process liquid supply mechanism having a nozzle for dispensing a process liquid toward a principal face of the substrate, a processing liquid reservoir for holding sufficient process liquid to form a liquid film covering the whole principal face of the substrate, a liquid film forming unit for forming the liquid film by supplying the process liquid onto the principal face of the substrate in a single burst, and a control unit for controlling the liquid film forming unit and the process liquid supply mechanism such that the process liquid is dispensed from the process liquid nozzle toward the principal face of the substrate after formation of the liquid film covering the whole area of the principal face of the substrate by the liquid film forming unit.Type: ApplicationFiled: August 28, 2012Publication date: March 28, 2013Inventors: Masahiro MIYAGI, Koji HASHIMOTO, Toru ENDO
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Patent number: 8397666Abstract: Mandrel coating assemblies are provided, as well as methods for coating endoluminal medical devices with a therapeutic agent using the mandrel coating assembly. The endoluminal medical device may be a stent, valve or other medical device, and may include a plurality of interconnected members defining a lumen and plurality of openings positioned along the abluminal surface in communication with the lumen. The mandrel coating assembly may be configured to minimize the coating penetration on the luminal surface of the medical device and/or incidence of webbing or agglomerations of the coating within the openings between the struts.Type: GrantFiled: December 4, 2008Date of Patent: March 19, 2013Assignee: Cook Medical Technologies LLCInventor: Dennis J. Delap
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Patent number: 8397662Abstract: A coating device for coating parts, in particular body components for automobiles, has at least one piece of application equipment for applying a coating to the components and has a feed device for feeding the components into a suitable coating position relative to the coating equipment. It is proposed that the feed device has at least one handling robot which brings the components into the coating position. Furthermore, a corresponding method is disclosed.Type: GrantFiled: May 30, 2007Date of Patent: March 19, 2013Assignee: DĆ¼rr Systems Inc.Inventors: Frank Herre, Rainer Laufer
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Patent number: 8387553Abstract: A sleeve is positioned over a radially-expandable rod assembly and a stent is positioned over the sleeve. A mandrel is inserted into the rod assembly to thereby press the sleeve against the inner surface of the stent and expand the stent. A coating (such as a solvent, a polymer and/or a therapeutic substance) is then applied to the outer (abluminal) surfaces of the stent, by spraying, for example. The sleeve advantageously prevents the coating material from being applied to inner (luminal) surfaces of the stent and also allows the coating material to be efficiently applied to the abluminal surfaces.Type: GrantFiled: July 8, 2010Date of Patent: March 5, 2013Assignee: Advanced Cardiovascular Systems Inc.Inventors: Yung Ming Chen, Jeff H. Smith, Celenia Gutierrez
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Patent number: 8387556Abstract: A coating device includes a coating mechanism which includes nozzles for ejecting a liquid material onto front and rear surfaces of the substrate while rotating a substrate in an upright state at a predetermined coating position, a carrying mechanism which carries the substrate between a substrate loading position, the coating position, and a substrate unloading position, and a dummy substrate holding mechanism which holds a dummy substrate at a holding position which is a position different from the substrate loading position, the coating position, and the substrate unloading position, and at which the carrying mechanism is allowed to connect with the dummy substrate.Type: GrantFiled: June 25, 2010Date of Patent: March 5, 2013Assignee: Tokyo Ohka Kogyo Co., Ltd.Inventors: Tsutomu Sahoda, Futoshi Shimai, Akihiko Sato
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Patent number: 8381676Abstract: A method and apparatus for controlling coating material deposition on to a medical device. Images of material drops in flight are captured and an average single drop volume value is calculated by conversion of the captured drop images to a volume measurement. The average single drop volume value is used to calculate a total number of drops necessary to apply a desired amount of coating. Alternately, material is applied and the amount of material deposited is accumulated and adjustments are made to deposit only a desired amount of coating material. A drop volume is determined for either every drop or a sampling of drops as the drops are being applied. Adjustments to the coating process include changing drop size and changing a number of drops to be deposited.Type: GrantFiled: June 29, 2010Date of Patent: February 26, 2013Assignee: Boston Scientific Scimed, Inc.Inventors: Eyal Teichman, Avner Schrift
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Publication number: 20130042596Abstract: Embodiments of the invention relate to systems and methods for fabricating hybrid rocket motor fuel grains. In one embodiment, a method for fabricating a rocket motor fuel grain can be provided. The method can include providing a platform operable to support a rocket motor fuel grain during fabrication. The method can also include disposing at least one fuel material onto the platform to form a material layer. Further, the method can include successively disposing additional fuel material onto the material layer in small amounts, wherein the rocket motor fuel grain is formed on the platform.Type: ApplicationFiled: August 1, 2012Publication date: February 21, 2013Applicant: THE AEROSPACE CORPORATIONInventor: Jerome Keith Fuller
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Patent number: 8375884Abstract: A substrate processing apparatus including: a heating part for heating a wafer; a transport part through which a wafer is transported; a first transfer arm that receives a wafer from the heating part and places the wafer on the transport part; and a second transfer arm including a pair of plate-like tweezers that receives the wafer placed on the transport part from the transport part and transfers the wafer. The transport part includes a cooling plate having a cooling surface on which a wafer is placed. The cooling plate includes a temperature-adjusting channel through which a temperature-adjusting water is circulated for cooling the cooling plate to a temperature lower than a temperature of the heating process of the heating part. The cooling surface is provided with a recess that is similar in shape to and slightly larger than a planar shape of the pair of tweezers.Type: GrantFiled: January 6, 2010Date of Patent: February 19, 2013Assignee: Tokyo Electron LimitedInventor: Kouichi Mizunaga
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Patent number: 8375887Abstract: The invention includes a lower guide unit which obliquely extends downward to an outside from a position closely opposed to a peripheral edge portion of a rear surface of the substrate held on the substrate holding unit, and is formed in an annular shape in a circumferential direction of the substrate; and an upper guide unit which has an upper end surface located at a substantially same height as a front surface of the substrate held on the substrate holding unit, forms a lower annular flow path between the upper guide unit and the lower guide unit for guiding downward together with a gas flow a treatment solution scattering from the substrate, is formed in an annular shape opposed to the lower guide unit to surround an outside lower region of the substrate, and has an inner peripheral surface having a longitudinal-sectional shape curved to bulge outward and extending downward.Type: GrantFiled: February 23, 2010Date of Patent: February 19, 2013Assignee: Tokyo Electron LimitedInventors: Koji Takayanagi, Naofumi Kishita
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Patent number: 8371241Abstract: An electric circuit is applied to an object having a curved surface. The curved surface of the object is divided into sections, and the circuit is applied one section at a time. The circuit is formed between layers of dielectric material. The dielectric is applied by a computer-controlled device, which controls the position of a spray head and the rotation of the object, such that the spray head is held substantially perpendicular to the surface of the object at all times, and such that a controlled thickness of dielectric material can be deposited. The fine-featured circuits formed by the invention are rugged, and can be used on objects intended to be exposed to harsh environments.Type: GrantFiled: April 29, 2010Date of Patent: February 12, 2013Assignee: Max Levy Autograph, Inc.Inventors: Donald C. Sedberry, Derek S. Rollins, David S. Metzger
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Patent number: 8354141Abstract: A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.Type: GrantFiled: May 24, 2011Date of Patent: January 15, 2013Assignee: Tokyo Electron LimitedInventors: Tsunenaga Nakashima, Gouichi Iwao, Naofumi Kishita, Nobuhiro Ogata
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Patent number: 8347810Abstract: A protective member (14) and a nozzle assembly (11) incorporating the protective member (14) are provided. The protective member (14) is for use with a nozzle (12) having a strand guide passageway (18) for receiving a strand (16) of material. Protective member (14) comprises a body (60) configured to be received in the strand guide passageway (18) of the nozzle (12). The body (60) of the protective member (14) has a passageway (63) for the strand (16) and is disposed between the strand guide passageway (18) and the moving strand (16). The body (60) of the protective member (14) is composed, at least in part, of a material having a wear resistance sufficient to resist wear caused by the strand (16) being guided thereby. Alternatively, a portion of the body (60) may be coated with a material having a wear resistance sufficient to resist wear caused by the strand (16).Type: GrantFiled: April 3, 2008Date of Patent: January 8, 2013Assignee: Nordson CorporationInventors: Joel E. Saine, Paul Schmidt
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Publication number: 20130004653Abstract: An alignment film coating method for spraying alignment film droplets on a glass substrate provided with color filters is disclosed. The color filters include a plurality of groups of cuboidal R, G, B trichromatic color filters having an equal area but different thicknesses and arranged in rows and columns, and the R, G, B trichromatic color filters are disposed at intervals with a groove being formed between every two adjacent color filters. A plurality of spray nozzles for spraying the alignment film droplets are arranged in a direction parallel to an arrangement direction of the color filters of a same color. An alignment film coating apparatus is further disclosed. By using the alignment film coating method and the alignment film coating apparatus of the present disclosure to coat an alignment film, the alignment film can be made more uniform and flat.Type: ApplicationFiled: July 18, 2011Publication date: January 3, 2013Applicant: Shenzhen China Star Optoelectronics Technology Co.,Ltd.Inventors: Hsiang-Yin Shih, Cheng-Chuan Chan, Bing-Jei Liao
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Patent number: 8337937Abstract: A method is disclosed for spin coating a stent. The method comprises conducting the following acts at the same time: applying a coating substance to the stent; rotating the stent about a first axis of rotation; and rotating the stent about a second axis of rotation.Type: GrantFiled: June 6, 2008Date of Patent: December 25, 2012Assignee: Abbott Cardiovascular Systems Inc.Inventor: Stephen D. Pacetti
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Patent number: 8336484Abstract: A gluing mechanism comprising a platform, a plurality of turn tables set on the platform for workpieces, a motor for driving the turn tables and a gluing device firmly set up on the platform. The gluing device comprises a forward assembly, an elevator, a panning assembly and a plurality of glue applicators. The forward assembly is set on the platform and moves along a shorter side of the platform. The elevator is set on the forward assembly and moves relative to the platform vertically. The panning assembly is set on the elevator and moves along a longer side of the platform. The glue applicators are installed on the panning assembly. The motor drives the turn tables simultaneously. The gluing mechanism of the present invention has benefits of simple structure, a high working efficiency and proceeds a precise rotary gluing process to workpieces. Therefore, an excellent gluing quality can be realized.Type: GrantFiled: August 4, 2010Date of Patent: December 25, 2012Assignee: Cheng UEI Precision Industry Co., Ltd.Inventors: Pei-cheng Wu, Feng-chi Lee, Kuo-chuan Chiu, Chia-hsin Liao
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Patent number: 8318247Abstract: The present invention includes: a first step of discharging a coating solution from a nozzle to a center portion of the substrate to apply the coating solution on a surface of the substrate while rotating the substrate; a second step of decelerating, after the first step, the rotation of the substrate and continuously rotating the substrate; and a third step of accelerating, after the second step, the rotation of the substrate to dry the coating solution on the substrate, wherein: the substrate is rotated at a fixed speed of a first speed immediately before the first step; and in the first step, the rotation of the substrate which is at the first speed before start of the first step is gradually accelerated after the start of the first step so as to make the speed continuously change, and the acceleration of the rotation of the substrate is gradually decreased so as to make the speed of the rotation of the substrate converge in a second speed higher than the first speed at end of the first step.Type: GrantFiled: September 8, 2008Date of Patent: November 27, 2012Assignee: Tokyo Electron LimitedInventors: Kousuke Yoshihara, Tomohiro Iseki, Koji Takayanagi
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Patent number: 8312837Abstract: A support assembly for a stent and a method of using the same to coat a stent are provided. The support assembly provides for minimum contact between the stent and the support assembly so as to reduce or eliminate coating defects.Type: GrantFiled: July 28, 2008Date of Patent: November 20, 2012Assignee: Advanced Cardiovascular Systems, Inc.Inventors: Domingo S. Madriaga, Anh Tran, Arthur J. Wen
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Patent number: 8313803Abstract: Spin coating method for a recording medium having a hole in the center, including moving a tip of a feeding nozzle to an initial position at a distance X above a recording surface and a distance A radially apart from a periphery of the hole, feeding a coating liquid onto the recording surface for a predetermined period of time while rotating the recording medium at a predetermined speed, and moving the tip from the initial position along a radial direction towards an outer periphery of the recording medium while keeping the tip above the recording surface at the distance X. X satisfies X?2 [3 r ?/(2 g C)]1/3, where ? and C respectively are surface tension and density of the coating liquid, r is the outer radius of the feeding nozzle, and g is the acceleration of gravity. A satisfies A?r+X/3.Type: GrantFiled: November 6, 2009Date of Patent: November 20, 2012Assignee: Fuji Electric Co., Ltd.Inventor: Shinji Uchida
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Patent number: 8312833Abstract: A pneumatic nozzle for roller coating is revealed. A workpiece to be coated is fixed on a rotating power source of a machine. A high-pressure pneumatic nozzle and a material supply nozzle, both corresponding to the workpiece, are arranged at the machine. The workpiece is driven to rotate by the rotating power source while the material supply nozzle applies coating material to the workpiece and the high-pressure pneumatic nozzle releases high pressure gas. The coating material attached on the surface of the workpiece is pushed by the high pressure gas and spread uniformly on the workpiece by rotating workpiece. Thereby the material is coated smoothly in a non-contact way and the thickness of the coating material is controlled in micron scale. This helps following manufacturing of three-dimensional microstructures on rolls for producing roll dies and increases the practical value.Type: GrantFiled: December 10, 2009Date of Patent: November 20, 2012Assignee: Southern Taiwan University of TechnologyInventors: Cheng-Hsin Chuang, Hsing-Sheng Wu, Deng-Maw Lu
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Publication number: 20120282453Abstract: In a method for fabricating a carbon nanotube (CNT) composite, an array of CNTs is provided. A CNT ribbon is pulled from the array and wound on a rotating mandrel. A polymer solution is applied to the ribbon to form a CNT composite laminate. The CNTs in the ribbon may be substantially aligned in a single direction. The ribbon may be attached to the mandrel such that the ribbon may be wound on the mandrel as the mandrel rotates. A CNT composite is provided that may include a polymer integrated with long, substantially straight CNTs that are highly aligned in a single direction. An apparatus for fabricating a CNT composite is provided that may include a rotatable mandrel and a spray gun. The spray gun may be configured for spraying a polymer solution on the CNT ribbon as the CNT ribbon is taken up on the rotating mandrel.Type: ApplicationFiled: May 4, 2012Publication date: November 8, 2012Applicant: NORTH CAROLINA STATE UNIVERSITYInventors: XIN WANG, YUNTIAN T. ZHU, PHILIP D. BRADFORD, WEI LIU
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Publication number: 20120282392Abstract: Methods for coating medical devices for implantation within a body vessel are provided comprising providing a cylindrical container, placing a medical device inside the cylindrical container, and applying a polymer in liquid form inside the container.Type: ApplicationFiled: June 28, 2012Publication date: November 8, 2012Applicant: Cook Medical Technologies LLCInventor: Jichao Sun
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Patent number: 8302556Abstract: Provided is a coating and developing apparatus composed of an assembly of plural unit blocks. A first unit-block stack and a second unit-block stack are arranged at different positions with respect to front-and-rear direction. Unit blocks for development, each of which comprises plural processing units including a developing unit that performs developing process after exposure and a transfer device that transfers a substrate among the processing units, are arranged at the lowermost level. Unit blocks for application, or coating, each of which comprises plural processing units including a coating unit that performs application process before exposure and a transfer device that transfers a substrate among the processing units, are arranged above the unit blocks for development. Unit blocks for application are arranged in both the first and second unit-block stacks.Type: GrantFiled: August 12, 2010Date of Patent: November 6, 2012Assignee: Tokyo Electron LimitedInventors: Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda, Hikaru Ito
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Patent number: 8304018Abstract: There is provided a coating method which can efficiently apply a coating liquid, such as a liquid resist, to the entire surface of a wafer even when the coating liquid is supplied in a smaller amount than a conventional one, and can therefore reduce the consumption of the coating liquid. The coating method includes: a first step of rotating the substrate at a first rotating speed while supplying the coating liquid onto approximately the center of the rotating substrate; a second step of rotating the substrate at a second rotating speed which is lower than the first rotating speed; a third step of rotating the substrate at a third rotating speed which is higher than the second rotating speed; and a fourth step of rotating the substrate at a fourth rotating speed which is higher than the second rotating speed and lower than the third rotating speed.Type: GrantFiled: February 10, 2010Date of Patent: November 6, 2012Assignee: Tokyo Electron LimitedInventors: Koji Takayanagi, Tomohiro Iseki, Katsunori Ichino, Kousuke Yoshihara
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Publication number: 20120276280Abstract: A coating system for coating an Insertable Medical Device (IMD) with one or more drugs is disclosed. The coating system includes a spray nozzle unit for coating the IMD with one or more drugs. The IMD includes a guiding member, a coating member and a supporting member. The IMD is passed through a protection tube such that the guiding member is located within the protection tube and an end of the supporting member is connected to a holder to expose the coating member of the IMD to the spray nozzle unit. The protection tube is received by a mandrel fixture which includes a circular disc for holding and rotating the protection tube and the IMD within the protection tube. When the protection tube along with the IMD is rotated, the spray nozzle unit coats the coating member of the IMD with the one or more drugs.Type: ApplicationFiled: May 21, 2010Publication date: November 1, 2012Applicants: Envision Scientific Private Limited, Concept Medical Research Private LimitedInventors: Manish Doshi, Divyesh Sherdiwala, Prakash Sojitra, Ashwin Vyas, Pankaj Gandhi, Bhavesh Chevli, Yavar Pothiawala
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Publication number: 20120272897Abstract: A pipe conditioning tool comprising a drive unit to move the tool along a pipe and a work head rotatable about an axis of the pipe to condition a surface of the pipe, the drive unit includes a frame extending to opposite sides of the pipe, the frame having legs extending radially beyond the work head to provide support for the tool upon removal from said pipe.Type: ApplicationFiled: January 16, 2012Publication date: November 1, 2012Inventor: Brad Bamford
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Patent number: 8287953Abstract: A method for spin coating a surface of an optical article, includes the steps of: selecting as the optical article an article (10) with a concave face (12) able to adopt a facing up position in which its uppermost portion is an edge (15) and selecting the concave face as the surface to be coated; dispensing a predetermined volume of a coating solution (18) on the concave face (12) along the edge (15), the concave face (12) facing up and the solution being dispensed in a top down manner; waiting with no motion of the article (10) for the solution to flow on the concave face (12) until it collects centrally; and spinning the article (10) to force the solution back to the edge (15) of the concave face (12).Type: GrantFiled: February 9, 2009Date of Patent: October 16, 2012Assignee: Essilor International (Compagnie Generale d'Optique)Inventors: James Hanson, Herbert Mosse
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Patent number: 8287954Abstract: There is provided an apparatus including: a processing cup having an opening opened upward to allow a substrate to be loaded and unloaded, an exhaust port for exhausting an unnecessary atmosphere produced in forming a film applied on the substrate, and an aspiration port for aspirating external air; and an aspiration device aspirating the unnecessary atmosphere through the exhaust port, wherein when the substrate is accommodated in the opening of the processing cup, the substrate has a perimeter spaced from the opening by a predetermined gap, and below the substrate accommodated in the processing cup there is formed an exhaust flow path extending from the aspiration port to the exhaust port.Type: GrantFiled: August 20, 2010Date of Patent: October 16, 2012Assignee: Tokyo Electron LimitedInventors: Kousuke Yoshihara, Hiroichi Inada
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Patent number: 8282980Abstract: A nozzle for use in a coating apparatus for the application of a coating substance to a stent is provided. Method for coating a stent can include discharging a coating composition out from a needle of a nozzle assembly, and atomizing the coating composition as the coating composition is discharged. The needle can be positioned in a chamber of the nozzle assembly, and gas can be introduced into the chamber for atomizing the coating composition.Type: GrantFiled: January 18, 2008Date of Patent: October 9, 2012Assignee: Advanced Cardiovascular Systems, Inc.Inventors: Yung-Ming Chen, Stephen James Guittard, Joe Broeckert
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Patent number: 8277884Abstract: There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.Type: GrantFiled: September 30, 2009Date of Patent: October 2, 2012Assignee: Tokyo Electron LimitedInventors: Shinji Kobayashi, Tetsushi Miyamoto, Masahito Hamada, Masatoshi Kaneda
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Patent number: 8267037Abstract: A substrate processing apparatus including a holder for rotatably holding a substrate; a coating solution supply nozzle for supplying a coating solution onto a front surface of the substrate to be processed held by the holder; a treatment chamber housing the holder and the coating solution supply nozzle; a cooling device which cools the substrate before the coating solution is supplied to the substrate, to a predetermined temperature; a heating devices which heats the substrate coated with the coating solution to a predetermined temperature; and a transferer that transfers the substrate between the treatment chamber, the cooling device and the heating device, wherein the treatment chamber, the cooling device and the heating device are partitioned from ambient air, and wherein at least the treatment chamber is connected to a gas supply mechanism having a supply source of a gas having a kinematic viscosity coefficient higher than that of air.Type: GrantFiled: July 2, 2008Date of Patent: September 18, 2012Assignee: Tokyo Electron LimitedInventor: Kazuo Sakamoto
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Patent number: 8268080Abstract: Disclosed herein is an apparatus for preparing composite particulates, including a rotary body having a bottom surface and a side wall and operative to contain particulates to which an adhering material is to be made to adhere; a centrifugal machine for rotating the rotary body so as to apply centrifugal forces to the particulates in the rotary body; and an inclination varying device operative to vary the inclination of the rotary body to an arbitrary inclination angle in the range from an angle at which the bottom surface of the rotary body forms a horizontal surface perpendicular to the direction of gravity to an angle at which the bottom surface forms a vertical surface parallel to the direction of gravity, and operative to support the rotary body at the arbitrary inclination angle.Type: GrantFiled: March 2, 2009Date of Patent: September 18, 2012Assignee: Sony CorporationInventors: Go Sudo, Kenji Katori, Hayato Hommura, Hiroshi Matsuki, Akio Kayanuma