With Housing Surrounding Or Engaging Coating Means Patents (Class 118/64)
  • Patent number: 6573031
    Abstract: A substrate coated with a coating solution is placed on a heating plate in a processing chamber in which an inert gas is circulating. The substrate is heated on the heating plate while the inert gas is circulating at an extremely small first circulating amount. The substrate is heated further on the heating plate while the inert gas is circulating at a second circulating amount larger than the first circulating amount. Detected is the density of the solvent in the processing chamber. The supply and exhaust amounts of the inert gas are controlled based on the density detected after the start of heating, so that an exhaust amount of the inert gas becomes a predetermined amount for a predetermined period until the solvent density reaches a predetermined density. A necessary control process is performed so that the solvent density reaches the predetermined density when the solvent density has not reached or exceeded the predetermined density after the predetermined period has elapsed.
    Type: Grant
    Filed: December 18, 2001
    Date of Patent: June 3, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Hiroshi Shinya, Kazuyoshi Mizumoto, Kazuhisa Hayashida, Eiichi Sekimoto
  • Patent number: 6565656
    Abstract: A coating processing apparatus is structured by a rotating cup having an opening portion on the top thereof for housing a substrate, a spin chuck for rotating the substrate in the rotating cup, a lid body having an opening and attached to the rotating cup, a resist solution discharge nozzle for discharging a resist solution onto the substrate through the opening of the lid body, a small lid for blocking up the opening of the lid body, and a protrusion member provided on the underneath surface of the small lid to be positioned inside the rotating cup when the small lid is attached into the opening of the lid body. Thus, adjustment of a film thickness of a coating film after a coating solution is coated can be effectively performed.
    Type: Grant
    Filed: December 15, 2000
    Date of Patent: May 20, 2003
    Assignee: Toyko Electron Limited
    Inventors: Tetsuya Sada, Hiroshi Hashimoto, Yuji Shimomura
  • Patent number: 6527860
    Abstract: A spin chuck for holding a wafer to the front face of which a resist solution is supplied, a cup for housing the spin chuck and forcibly exhausting an atmosphere around the wafer by exhaust from the bottom thereof, and an air flow control plate, provided in the cup to surround the outer periphery of the wafer, for controlling an air flow in the vicinity of the wafer are provided. Accordingly, a state of a special air flow at an outer edge portion of a substrate to be processed can be eliminated, thereby preventing an increase in film thickness at the outer edge portion.
    Type: Grant
    Filed: October 10, 2000
    Date of Patent: March 4, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Kousuke Yoshihara, Akihiro Fujimoto
  • Patent number: 6524389
    Abstract: In a processing chamber for performing heat processing for a substrate, gas for purge, for example, N2 is supplied nearly parallel to the substrate placed on a hot plate with a gap forming member between them and toward both the front and rear faces of the substrate. Thus, an atmosphere around the substrate can be exchanged for the gas for purge efficiently, and moreover the atmosphere around the substrate can be exchanged uniformly. Accordingly, heat processing in a low oxygen atmosphere can be performed in a short time, and moreover the total time required for substrate processing can be shortened. Besides, heat processing in the low oxygen atmosphere can be performed uniformly.
    Type: Grant
    Filed: May 22, 2000
    Date of Patent: February 25, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Kyoshige Katayama, Yuta Yoshimura, Takeshi Tamura
  • Patent number: 6508259
    Abstract: A pressure vessel for use in production processes requiring elevating and ranging of temperatures and pressures during the process cycle, readily adaptable to production line operation, suitable for wafer processing in the semiconductor industry and for other industries and processes. The pressure vessel is configured within an open support frame with a stationary, preferably inverted, orientation. The cover or closing plate is vertically movable towards the mouth of the pressure vessel and functions as the platform by which the object under process is transferred into the vessel. The moving and locking mechanism for the cover is isolated and shielded from the process environment.
    Type: Grant
    Filed: August 4, 2000
    Date of Patent: January 21, 2003
    Assignee: S.C. Fluids, Inc.
    Inventors: James A. Tseronis, Heiko D. Mortiz, Mohan Chandra, Robert B. Farmer, Ijaz H. Jafri, Jonathan Talbott
  • Patent number: 6485568
    Abstract: In an apparatus for coating substrates with materials, particularly for lacquering Si-wafers (9) with photosensitive material, comprising a treating chamber (1,16) holding a carrier (10) (chuck) for the substrate to be treated and at least one atomizing nozzle (2) generating a spray jet of the coating material, which may be dosed and which is directed towards the substrate, and a propellant gas, additional guiding and, respectively or, processing devices (6) are arranged between the atomizing nozzle or nozzles (2) and the substrate carrier (10) in the treating chamber (1, 16), which devices comprise nozzles or swirl generators charged with compressed gas or compressed gas and a solvent, and/or centrifugal disks, small turbines, or the like, and produce the spray jet directed towards the substrate from the spray mist generated by the atomizing nozzle or nozzles, for additionally influencing and controlling the spray jet and thereby to improve the quality of the material application.
    Type: Grant
    Filed: April 18, 2000
    Date of Patent: November 26, 2002
    Inventor: Erich Thallner
  • Patent number: 6458209
    Abstract: A powder coating booth containment structure including first and second canopy halves, each of which is a substantially nonconductive, seamless, structural composite to substantially reduce oversprayed powder particle adhesion to the booth inner surfaces. The composite canopy halves, when assembled into a spray booth additionally including either a floor or a utility base and one or a pair of end units in the form of aperture bulkheads, vestibules, or a combination of both, are structurally sufficiently strong that no external support frame is required. The composite canopy halves can each include sidewall and ceiling portions, in an embodiment, that can be connected to a floor. In another embodiment, the canopy halves each additionally include a floor portion such that they may be connected together at a floor edge and placed atop a utility base. They may be connected to the utility base.
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: October 1, 2002
    Assignee: Nordson Corporation
    Inventor: Jeffrey R. Shutic
  • Patent number: 6455097
    Abstract: A method of applying a treating liquid to a porous body (11), in particular a pre-baked carbon component of an aluminium production cell, such as an anode block, a cathode block or a sidewall. In this method first the body (11) to be treated is inserted, with its part to be treated facing up, in the treating chamber (12). At least one sealing member (13) is then applied to the body so as to isolate a space (14) in an upper part of the treating chamber (12) around the part of the body to be treated from a lower part (15) of the treating chamber around a bottom part of the body which is not to be treated. Next, treating liquid (10) is supplied to the upper part (14) of the treating chamber to cover the part of the body to be treated with the treating liquid and applying a vacuum to intake an amount of the treating liquid into pores in the part of the body to be treated. Then the body (11) is freed from the sealing member(s) (13), and removed from the treating chamber (12).
    Type: Grant
    Filed: September 16, 2000
    Date of Patent: September 24, 2002
    Assignee: Moltech Invent S.A.
    Inventors: Georges Berclaz, Gaynor Johnston, Vittorio de Nora
  • Publication number: 20010020444
    Abstract: A reactor of the staged adiabatic reactor type, comprises at least one heat exchanger panel, preferably a printed circuit heat exchange (PCHE) panel, interposes between adiabatic beds of catalyst, wherein the facial area of the panels and the superficial facial area of the corresponding catalyst are substantially similar, and the panels include means defining discrete passages for handling of reactants and heat transfer media, wherein the means defining passages for heat transfer media provide for at least two differing flow path directions for the heat transfer media through the heat exchanger panel whereby the occurrence of temperature bias or differentials is reduced.
    Type: Application
    Filed: January 25, 2001
    Publication date: September 13, 2001
    Applicant: Meggitt (UK) Limited
    Inventor: Anthony Johnston
  • Patent number: 6281145
    Abstract: A process solution applying apparatus comprising a substrate holding mechanism for holding a substrate, a process solution supplying system for applying process solution in a prescribed amount to the substrate held by the substrate holding mechanism, the process solution supplying system having a supplying mechanism for changing a rate at which the process solution is supplied, and a substrate rotating mechanism for rotating the substrate holding mechanism, thus rotating the substrate at a predetermined speed to spread the process solution by virtue of centrifugal force and to coat the substrate with the process solution.
    Type: Grant
    Filed: May 14, 1999
    Date of Patent: August 28, 2001
    Assignee: Tokyo Electron Limited
    Inventors: Masatoshi Deguchi, Kosuke Yoshihara
  • Patent number: 6261365
    Abstract: When a substrate coated with a coating solution which oxidizes at high temperatures is heat-treated, an oxygen concentration of a treatment atmosphere is lowered when the temperature is low. Next, the substrate is heat-treated in the treatment atmosphere of which the oxygen concentration is lowered. Sequentially, the treatment atmosphere is returned to that with the original oxygen concentration after the passage of a predetermined time after completing the heat treatment. Thereby, the substrate can be heat-treated, with the oxidization of the coating solution being controlled.
    Type: Grant
    Filed: March 19, 1999
    Date of Patent: July 17, 2001
    Assignee: Tokyo Electron Limited
    Inventors: Yuji Matsuyama, Yoji Mizutani, Shinji Nagashima, Akira Yonemizu
  • Patent number: 6245148
    Abstract: The present invention relates to a SOG (Spin-On-Glass) dispensing system and its controlling sequences and, more particularly, to a SOG dispensing system allowing for continuous production and its controlling sequences According to the present invention, a buffer tank, whose wall is set a plurality of level sensors at different level heights, is connected between a source tank with a SOG bottle inside and a coating unit of prior art and then SOG is supplied for a time interval from the source tank into the buffer tank by control signals from these level sensors. Besides, the buffer tank is surrounded with a cooling unit to provide a low temperature enviroment allowing for prolonging life time of SOG and preventing organic solvent inside SOG from evaporating and then crystallizing to form contamination particles at wall of the SOG dispensing system.
    Type: Grant
    Filed: April 28, 1999
    Date of Patent: June 12, 2001
    Assignee: Mosel Vitelic Inc.
    Inventors: Mike Liang, Peter Baw, John Chiu, Bryan Chang
  • Patent number: 6244276
    Abstract: Apparatus and a method for the direct recovery of residual quantities of an aqueous solution adhering to pourable mass parts following an electrolytic and/or chemical surface treatment on the parts, in the course of which the parts are carried in a perforated immersion barrel supported on a movable carriage of a barrel treatment installation. A compressed-air chamber is provided on the carriage, into which the barrel is moved, the chamber being provided with a compressed air source to cause a current of air to flow transversely through the chamber. The compressed-air chamber essentially comprises a horizontal, upwardly cylindrically convex upper half-shell which is fixed on the carriage and which encompasses in a substantially air-tight manner the upper half of the immersion barrel when the barrel has been positioned within the chamber, and a pair of horizontal, lateral, lower, outwardly cylindrically convex quarter-shells which are capable of movement towards and away from one another.
    Type: Grant
    Filed: September 24, 1997
    Date of Patent: June 12, 2001
    Inventor: Hans Henig
  • Publication number: 20010001946
    Abstract: A rotary atomizer applies particulate paints with good color matching by reducing paint droplet size deviation and then optimizing the other paint spraying parameters. Paint droplet size parameters are reduced by using a bell cup having reduced flow deviations, including an overflow surface having a generally constant angle between a deflector and an atomizing edge.
    Type: Application
    Filed: January 25, 2001
    Publication date: May 31, 2001
    Inventors: Kurt Vetter, Rolf Schneider, Andreas Fischer, Robert F. Heldt
  • Patent number: 6228424
    Abstract: An open-pored body (11), in particular a carbon component of an aluminum production cell, which is to be exposed to oxidizing conditions or chemical attack at high temperatures is treated to protect the body against oxidation or corrosion at high temperature by impregnating the surface of the body at about ambient temperature with a hot non-saturated liquid (10). This liquid contains a treating agent at a temperature above the temperature of the body. The concentration of treating agent in the hot liquid is such that when the liquid is cooled, before it reaches the temperature of the body, the liquid saturates and treating agent precipitates. A pressure differential is applied to cause the liquid to impregnate into the surface pores of the body (11) and precipitate a layer of the treating agent from the liquid inside the body by cooling as it impregnates the pores of the body.
    Type: Grant
    Filed: July 9, 1998
    Date of Patent: May 8, 2001
    Assignee: Moltech Invent S.A.
    Inventors: Vittorio de Nora, Jean-Jacques Duruz, Georges Berclaz
  • Patent number: 6142095
    Abstract: A machine for coating particulate material is provided with a housing and a cylindrical drum rotatably mounted within the housing. The drum includes a frame having opposite end rings and rails extending longitudinal between the end rings. A plurality of screen panels are slidably mounted on the rails to form a perforated drum side wall for holding particulate material. One or more spray nozzles are positioned within the drum for spraying a liquid solution onto the particulate material. An air inlet and outlet is provided to supply heated air for drying the solution on the particulate material.
    Type: Grant
    Filed: June 3, 1998
    Date of Patent: November 7, 2000
    Assignee: Coating Machinery Systems, Inc.
    Inventor: Richard L. Long
  • Patent number: 6132509
    Abstract: A self-contained, trailer-mounted, portable wash and paint facility particularly useful to retrieve a grease disposal container having a removable lid, wash dirt and grease from the container, repaint the container, and return it to service. The facility contains an extendable boom and winch to handle the container and bring it into the facility. A vat agitated with compressed air is provided containing a heated caustic solution wherein lids are soaked as part of the cleaning process. A trolley mounted winch is provided which assists in removing the container lid and moving it to and from the soaking vat. A circulating high pressure wash system is provided for high pressure spraying of heated soapy cleaning solution. The cleaning system has a high-pressure washer and tank with a delivery hose and nozzle for the operator to employ when washing the grease container. The floor of the facility contains a grate where used cleaning solution is collected in a catch tank.
    Type: Grant
    Filed: August 12, 1998
    Date of Patent: October 17, 2000
    Inventor: Gene L. Kuschnereit
  • Patent number: 6126749
    Abstract: A method and an apparatus for manufacturing a reaction bonded silicon carbide by the infiltration of molten metal by using a porous silicon carbide/carbon or carbon preform in which the molten metal is supplied to the carbon preform by capillary action through a pyro-carbon coated dense graphite feeder on which a transfer path of molten metal is defined from a molten metal supplier under an inert atmosphere, and a carbon woven fabric on which the carbon preform is placed transfers continuously the carbon preform at a constant speed and thereby infiltrates the carbon preform.The apparatus and method for manufacturing a reaction bonded silicon carbide which enable mass production of goods of various sizes and characteristics by continuously transferring the carbon preform on the carbon woven fabric and supplying the molten metal through the pyro-carbon coated graphite feeder.
    Type: Grant
    Filed: April 3, 1998
    Date of Patent: October 3, 2000
    Assignee: Korea Institute of Science and Technology
    Inventors: Sang-Whan Park, Huesup Song, Sang-Dong Kim, Jo-Woong Ha
  • Patent number: 6117237
    Abstract: The coater apparatus enclosure encloses the entire die of a coating apparatus includes an enclosure structure, a saturation station which saturates a supply gas with solvent, a device which supplies solvent-saturated gas to the enclosure to continuously purge the enclosure, and a device which controls the gas flow to the enclosure. The saturation station could include a heated jacketed vessel and a porous metal bubbler, or it could include a series of heat exchangers. No streaks can form due to coating fluid drying on the die lip because the gas supplied to the die enclosure is saturated with the solvent.
    Type: Grant
    Filed: January 4, 1994
    Date of Patent: September 12, 2000
    Assignee: 3M Innovative Properties Company
    Inventors: Robert A. Yapel, Kent D. Nelson, Thomas M. Milbourn, Richard J. Foss
  • Patent number: 6113694
    Abstract: Apparatus for coating a surface of a semiconductor wafer includes at least one treatment module, a handling device that may access each of the treatment modules, and a host controller connected to the handling device and to each of the treatment modules. The treatment modules may include a coating assembly for coating the semiconductor wafer surface and may also include at least one thermal conditioning module. The host controller may control the handling device to move a semiconductor wafer relative to the treatment modules. The treatment modules may be disposed within opposing assemblies and may be removed from the assemblies without disabling the treatment modules remaining within the opposing assemblies.
    Type: Grant
    Filed: July 13, 1998
    Date of Patent: September 5, 2000
    Assignee: Micron Technology, Inc.
    Inventor: Shawn D. Davis
  • Patent number: 6056821
    Abstract: A chemically washed workpiece is heated and degreased by a heating and degreasing section in a process for delivering the workpiece in a base which is then cooled down in a cooling section. The workpiece is then delivered onto the base by a lift-up unit and is coated by the adhesion of the powder coat and the curing operation during the passage of pipes of an electrostic coater, a curing section and the like. Furthermore, the workpiece is again delivered into the base by a lift-down unit and discharged after being cooled down during the passage of pipes of the cooling section i.e., the units of each step being arranged separately into a lower mechanism group and an upper mechanism group, and the cooling section also serving to cool the workpiece after the heating, degreasing and curing. Accordingly, the overall length of the apparatus is shortened.
    Type: Grant
    Filed: October 7, 1997
    Date of Patent: May 2, 2000
    Assignee: Aphe Co., Ltd.
    Inventor: Susumu Nihongi
  • Patent number: 5993556
    Abstract: A vacuum treatment system for depositing thin coatings on substrates, with several stationary treating chambers that are held by the annular or frame-like side wall of the vacuum chamber and display the treatment tools and with treatment chamber openings aligned peripherally inward on the center of the vacuum chamber and extending in planes parallel to each other, a shaft, extending parallel to the opening planes and mounted in the vacuum chamber lid and/or in the vacuum chamber bottom plate of the vacuum chamber, is provided that moves the plates for closing the treatment chamber openings and is supplied with actuators for moving the closing plates from a radially inner opening position to a radially outer closing position, whereby the actuators working together with the shaft are designed as lever pinions.
    Type: Grant
    Filed: April 9, 1998
    Date of Patent: November 30, 1999
    Assignee: Leybold Systems GmbH
    Inventors: Hans Maidhof, Hans Schussler, Stefan Kunkel, Johannes Beul
  • Patent number: 5972113
    Abstract: Sheets to be coated with water-based coating material, for example a primer and a low adhesion backsize, are supplied from a feeder (1), in end-to-end overlapping relationship, to a dual coater (3) in which the sheets are coated individually on both sides. A sheet inserter (2) is provided, upstream of the dual coater, to insert sheets from a second supply into the sheets from the feeder (1). The dual coated sheets are dried as individual sheets or as a pseudo-web of overlapped sheets. The sheets are then overlapped, unless previously overlapped, and the direction of overlap changed, if necessary, to provide the trailing edge of each sheet on top of the leading edge of each succeeding sheet. The overlapped sheets are conveyed through an adhesive transfer station (7) where stripes (236) of at least partially dried adhesive are coated onto the dual coated sheets from a transfer belt (71).
    Type: Grant
    Filed: October 14, 1997
    Date of Patent: October 26, 1999
    Assignee: Minnesota Mining and Manufacturing Company
    Inventors: Frederic Pierre Alain Le Riche, Bernard Raymond Pierre, Kim Kiyoko Tsujimoto, Mark Steven Vogel
  • Patent number: 5970625
    Abstract: An automated air filtration and drying system including an energy and environmental management system for controlling, monitoring and supervising the operation and performance of the air filtration and drying system, a capture apparatus for capturing and controlling overspray, and a drying/curing control module for rapidly drying a painted article using a continuously filtered and dehumidified flow of recycled air.
    Type: Grant
    Filed: June 24, 1997
    Date of Patent: October 26, 1999
    Assignee: Optimum Air Corporation
    Inventors: Fred G. Scheufler, Richard D. Scheufler, William H. Bayard
  • Patent number: 5942035
    Abstract: An apparatus for forming a coating film, comprises a spin chuck for supporting a substrate with one surface facing upward and rotating the substrate about a vertical axis, a first nozzle for supplying a solvent of a coating solution on the substrate, and a second nozzle for supplying the coating solution on a central portion of the substrate. The first and second nozzles are supported by a head such that the supported nozzle moves between a dropping position above the substrate and a waiting position offset from the substrate. The solvent and coating solution are diffused along the surface of the substrate by rotating the spin chuck.
    Type: Grant
    Filed: July 26, 1996
    Date of Patent: August 24, 1999
    Assignees: Tokyo Electron Limited, Tokyo Electron Kyushu Limited
    Inventors: Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi, Mitsuhiro Nambu
  • Patent number: 5939139
    Abstract: A method of removing a coated film from an edge surface of a substrate comprising the steps of (a) forming an insulating film for protecting a circuit pattern of a substrate by pouring an insulating resin solution on a circuit-pattern formation surface of the substrate, (b) rotating the substrate having the insulating film coated thereon, (c) removing the insulating film by pouring a solvent on the edge surface of the substrate, while the substrate is being rotated, and (d) accelerating dehydration of the insulating film by taking at least one action of spraying a gas to the edge surface of the substrate and performing a local evacuation of a region in the proximity of the edge surface of the substrate while the substrate is being rotated.
    Type: Grant
    Filed: January 23, 1998
    Date of Patent: August 17, 1999
    Assignee: Tokyo Electron Limited
    Inventor: Akihiro Fujimoto
  • Patent number: 5922399
    Abstract: A coating line system has a main coating line including at least a main coating booth for coating a workpiece, and a coating repairing line branched from the main coating line downstream of an inspecting section for inspecting the coated workpiece for a coating defect thereof. The coating repairing line has a coating repairing booth for repairing a coating defect of the workpiece which is caused in the main coating line, and a drying furnace disposed downstream of the coating repairing booth along the coating repairing line, for drying the workpiece which has been repaired in the coating repairing booth.
    Type: Grant
    Filed: May 24, 1996
    Date of Patent: July 13, 1999
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventor: Mikio Kobayashi
  • Patent number: 5902402
    Abstract: A device for chemical wet treatment of substrates has a tank containing a treatment fluid for treating the substrates. At least one substrate carrier for supporting the substrates within the tank is provided. At least one substrate lifting device for lifting the substrates off the substrate carrier is provided. A lifting apparatus for lifting and lowering the substrate carrier is positioned in the tank. The lifting apparatus has a first transport carriage connected to the substrate lifting device and a second transport carriage connected to a holder of the substrate carrier. The first and second transport carriages are connected to one another by a jointed connection.
    Type: Grant
    Filed: July 3, 1997
    Date of Patent: May 11, 1999
    Assignee: Steag Microtech GmbH
    Inventors: Johann Durst, Holger Sigel, Werner Schulz
  • Patent number: 5882405
    Abstract: A method and apparatus for providing a coating on the exterior surfaces of a plurality of elongate members, such as wires, including positioning a plurality of elongate members substantially parallel to each other, coating the exterior surfaces of each member with a coating, removing any excess coating from desired portions of each member and curing the coating to adhere the coating to each member.
    Type: Grant
    Filed: August 30, 1996
    Date of Patent: March 16, 1999
    Assignee: Illinois Tool Works Inc.
    Inventors: Frederick A Kish, Parimal M Vadhar, Robert W Wright, William L Gabriel, Geronimo E Lat
  • Patent number: 5876498
    Abstract: A device for preserving solder paste in the manufacturing of printed circuit board assemblies. In one embodiment, the preserving device has a frame adapted to be positioned on a stencil plate of a solder paste stenciling machine and a cover coupled to the frame. The frame has a wall that is configured to substantially surround at least a portion of the solder paste on the stencil plate between printing cycles. In a preferred embodiment, the wall is configured to surround a working region on the stencil plate defined by the area on the stencil plate that the solder paste contacts during a printing cycle. The cover is coupled to the frame to form a protective compartment that substantially houses the solder paste between printing cycles. As a result, the preserving device restricts the airflow across the solder paste to protect the solder paste from environmental elements within the stenciling machine.
    Type: Grant
    Filed: December 20, 1996
    Date of Patent: March 2, 1999
    Assignee: MOMS, Inc.
    Inventor: Curtis C. Thompson, Sr.
  • Patent number: 5863333
    Abstract: Four sets of shower heads 100, 200, 300, 400 are located in a surface modifying chamber of a surface modifying apparatus, and each shower head 100, 200, 300, 400 has surface modifier piping including a plurality of spray nozzles. The nozzles are arranged such that showers of an aqueous ozone solution injected from every adjacent two nozzles will contact the resin molded product and partly overlap one another. The phases in position of the nozzles can be offset a half-pitch or staggered with the staggered arrangement of the nozzles serving to compensate for any insufficient oxidation reaction to achieve uniform surface modification over the entire surface of the resin molded product 2. Further, the time required for the surface modification treatment can be reduced.
    Type: Grant
    Filed: February 16, 1996
    Date of Patent: January 26, 1999
    Assignee: Toyoda Gosei Co., Ltd.
    Inventors: Mamoru Kato, Yasuhiko Ogisu, Nobuyoshi Tanaka
  • Patent number: 5851450
    Abstract: Apparatus for use in applying particles to an external layer of uncured resin material of a coating of an optical fibre unit with at least one optical fibre, said apparatus including means (50) defining an axially extending through-passage (52) through which, in use, such an optical fibre unit is passed, said passage defining means having an inlet (62) for admitting fluidized particles into said through-passage, and said through-passage being provided with means (64) for generating turbulence in such fluidized particles in said through-passage.
    Type: Grant
    Filed: July 30, 1996
    Date of Patent: December 22, 1998
    Assignee: Pirelli General plc
    Inventors: Andrew James Rennie, Thomas Curley
  • Patent number: 5833751
    Abstract: A powder coating booth comprising a pair of identical polycarbonate shells disposed opposite each other to define a coating chamber having smooth, curvilinear internal surfaces to facilitate the recovery and recycle of excess coating powder. Narrowed down end openings are provided to help confine the excess powder. A thermoplastic material such as polyvinyl carbonate or polycarbonate is formed in a large thermoforming machine with vacuum and pressure to fabricate the components of the coating chamber, which may be up to ten feet wide, ten feet tall, and thirty feet long or longer.
    Type: Grant
    Filed: October 18, 1996
    Date of Patent: November 10, 1998
    Assignee: Hoosier Fiberglass Industries, Inc
    Inventor: Richard R. Tucker
  • Patent number: 5779799
    Abstract: An apparatus is provided for coating a surface of a plate-like material, or substrate, specifically a semiconductor wafer, with a coating material. The apparatus includes a plurality of self-controlled removable modules including a coating assembly, at least one thermal conditioning module, and a substrate handling device, and a host controller. The coating assembly is used to dispense coating material from a coating source onto the surface of the substrate material positioned in the coating assembly. The material handling device is positioned to access and move substrates between the coating assembly, the at least one thermal conditioning module and other modules included in the apparatus. The host controller provides substrate thermal conditioning, coating and handling information to the corresponding modules and tracks the location of each substrate in the apparatus.
    Type: Grant
    Filed: June 21, 1996
    Date of Patent: July 14, 1998
    Assignee: Micron Technology, Inc.
    Inventor: Shawn D. Davis
  • Patent number: 5776554
    Abstract: An electrostatic powder coating system usable for coating articles transported along a substantially non-conductive article transport conveyor belt supported by a substantially non-conductive slide member. The system includes a substantially non-conductive coating booth with an open side portion supported by an upright support member disposed on a movable base member. The coating booth is laterally movable toward and away from the conveyor, and the coating booth is movable along the upright support member so as to position the coating booth downwardly toward and upwardly away from the conveyor. An electrostatic coating applicator is directed into the coating booth for applying powder coating to articles transported along the conveyor. A coating collector includes a coating booth exhaust duct coupled to the coating booth, and a conveyor exhaust duct laterally movable toward and away from the conveyor.
    Type: Grant
    Filed: January 3, 1997
    Date of Patent: July 7, 1998
    Assignee: Illinois Tool Works Inc.
    Inventors: Christopher R. Merritt, Robert M. Thorn
  • Patent number: 5755882
    Abstract: A closed loop controllable fluid application system is provided, comprising a substantially enclosed housing, having horizontal and vertical surfaces, with an inlet and an outlet slot formed in opposing vertical surfaces allowing passage of a work piece through the housing; and a mist outlet and a sump drain each formed in one of a horizontal and a vertical surface. Fluid circulation lines communicate with the housing and an application fluid source, terminating inside the housing with a connection to one or more controllable spray devices for delivering atomized application fluid to coat passing work pieces. A mist collector evacuates air through the mist outlet and extracts application fluid from the evacuated air. The mist collector and the sump drain are connected to fluid circulation lines for recycling excess liquid and air-borne application fluid.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: May 26, 1998
    Inventor: Dennis A. Patrick
  • Patent number: 5725665
    Abstract: The present invention provides an enclosure for a coating apparatus, the coating apparatus being of the type comprising a coater face adapted for the flow of a fluid thereover. The fluid flows over the coater face in the form of a film having one or more edges contacting the coating apparatus at one or more "edge contact surfaces." The enclosure defines a partially enclosed space above one or more of the edge contact surfaces. The atmosphere within the partially enclosed space can be at least partially saturated with solvent vapor to prevent or inhibit drying of coating fluid at the edge contact surfaces. Also, the enclosure has a shape that allows visibility of and access to a substantial portion of the coater face of the coating apparatus.
    Type: Grant
    Filed: May 1, 1996
    Date of Patent: March 10, 1998
    Assignee: Minnesota Mining and Manufacturing Company
    Inventors: Robert A. Yapel, Thomas M. Milbourn, Aparna V. Bhave, Lawrence B. Wallace
  • Patent number: 5721012
    Abstract: An apparatus is provided for continuously coating particulate material, such as seeds. The apparatus includes a frame, a cylindrical drum rotatable about an axis tilted with respect to a horizontal plane, and a series of spray nozzles extending into the drum so as to spray one or more coating solutions onto the particulate material which tumbles within the rotating drum. The drum includes a rifling with flighting which carries the material upwardly from approximately 6 o'clock position to a 9 o'clock position, wherein the material falls from the flighting in a curtain spaced apart from the sidewall of the drum. Perforations in the sidewall of the drum allow a flow of air through the drum and curtain of material so as to dry the coating solution on the material substantially instantaneously as the material is coated with solution in the drum. The drum is maintained at a negative pressure during the coating process.
    Type: Grant
    Filed: July 17, 1995
    Date of Patent: February 24, 1998
    Assignee: Coating Machinery Systems, Inc.
    Inventors: Richard L. Long, Jr., Donald E. Barber
  • Patent number: 5720811
    Abstract: Apparatus for the wet-paint spray painting of articles having a device for catching the paint surplus which has an air-permeable dry filter, wherein the dry filter is arranged movably and there is provided a suction removal device which sucks the dried paint particles away from the dry filter.
    Type: Grant
    Filed: February 23, 1996
    Date of Patent: February 24, 1998
    Inventor: Michael Eder
  • Patent number: 5693145
    Abstract: A composition for negative type chemically amplified resist including, as main components, a random copolymer of vinyl phenol and vinyl cyclohexanol, a melamine resin having an enhanced hexamethoxymethylmelamine content, an acid generator for generating an acid upon irradiation by ionizing radiation, and a solvent. The resist pattern formation process and apparatus are also disclosed.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: December 2, 1997
    Assignee: Fujitsu Limited
    Inventors: Akira Oikawa, Hiroyuki Tanaka, Hideyuki Matsuda
  • Patent number: 5685908
    Abstract: An apparatus for coating a multifocal lens, lens blank, or lens mold is disclosed. The lens, lens blank, or mold is spun about an axis offset from the geometric center thereof. The lens, lens blank, or mold for the lens has at least two focal regions defined by at least one ledge line, and the axis of spinning passes perpendicularly through the ledge line or an extension thereof. Structure is provided to apply a coating, and spinning is continued until the coating is sufficiently dry that it has adhered with little risk of deformation to the coating on the lens, lens blank, or lens mold upon removal or movement.
    Type: Grant
    Filed: June 8, 1995
    Date of Patent: November 11, 1997
    Assignee: Essilor Of America, Inc.
    Inventors: Horst Hermann Brytsche, Emanuel Dean Farley, Sidney Shaw White, Jr.
  • Patent number: 5669974
    Abstract: A continuous spray coating apparatus and process generally comprises a housing defining a closed coating chamber, the coating chamber having inlet and outlet openings. Automatic doors are provided to cover the inlet and outlet openings, and the opening and closing of the doors is selectively controlled such that only one of the doors will be open at any one time during the spray coating operation. The introduction of the coating composition into the chamber creates a predetermined atmosphere within the chamber which is substantially saturated with constituents of the coating material, and by means of the automatic doors and control thereof, introduction of air from the outside atmosphere into the chamber is substantially prevented to maintain a predetermined atmosphere within the chamber.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: September 23, 1997
    Assignee: Dana Corporation
    Inventors: Salome J. Cueller, Robert J. Radawski, Michael R. Barth, Jack V. Jerraid, John A. Keyes, Earl V. Gleason
  • Patent number: 5665444
    Abstract: A tube-shaped film, made of fluorine resin, has a fold-free, smooth, and uniform inner peripheral surface formed thereon by a surface treatment. An apparatus for treating the inner peripheral surface of the tube-shaped film includes a holding device for holding the tube-shaped film on the inner peripheral surface of a cylindrical body with a cylindrical configuration of the tube-shaped film maintained. A treatment device is inserted into the cylindrical body to treat the inner peripheral surface of the tube-shaped film held on the inner peripheral surface of the cylindrical body. The holding device and the treatment device make a uniform linear motion relative to each other and a uniform rotary motion relative to each other.
    Type: Grant
    Filed: August 13, 1996
    Date of Patent: September 9, 1997
    Assignee: Kurashiki Boseki Kabushiki Kaisha
    Inventors: Yosuke Eguchi, Atsuki Wada, Tomohiro Nagase, Yoshiro Hirajima
  • Patent number: 5658383
    Abstract: Apparatus for applying a liquid coating to an irregularly shaped workpiece comprises a housing defining a coating chamber having an inlet and an exit. A conveyor system is adapted to convey the workpiece into the inlet, through the coating chamber, and out the exit. A plurality of sprayheads are mounted in the coating chamber, in generally surrounding relation to the workpiece, and arranged at various angles with respect to the workpiece, for spraying the liquid coating toward the workpiece. A plenum structure is connected to the housing and defines a plenum chamber communicating with the coating chamber. A vacuum system is associated with the plenum chamber for drawing a vacuum thereon. A blower system adjacent the exit of the coating chamber blows air into the coating chamber toward the workpiece.
    Type: Grant
    Filed: May 16, 1995
    Date of Patent: August 19, 1997
    Inventor: Taylor K. Cutshall
  • Patent number: 5658387
    Abstract: A semiconductor processor for spray coating wafers or other semiconductor articles. The processor has a compartment in which are mounted a wafer transfer, coating station and thermal treatment station. The coating station has a spray processing vessel in which a movable spray-head and rotatable wafer holder. The spray station has coating viscosity control features. An ultrasonic resonating spray-head is precisely supplied with coating from a metering pump. The heat treatment station heat cures the coating and then cools the wafer. The system allows coatings to be applied in relatively uniform conformational layers upon irregular surfaces.
    Type: Grant
    Filed: April 12, 1995
    Date of Patent: August 19, 1997
    Assignee: Semitool, Inc.
    Inventors: Timothy J. Reardon, Craig P. Meuchel, Thomas H. Oberlitner
  • Patent number: 5658382
    Abstract: An arrangement for painting all sides of an elongated rigid object comprises a closed container containing in its bottom portion a paint mixture of binder, monomer and pigment. The elongated object passes through the closed container above the surface of the paint mixture to be coated on all sides by the paint mixture, followed by passage through an apparatus for drying the bottom surface of the object. The object is freely suspended while passing through the closed container and the drying apparatus for the bottom surface, and then is passed to a drying apparatus for the top surface of the object.
    Type: Grant
    Filed: December 13, 1995
    Date of Patent: August 19, 1997
    Inventor: Anders Lindblad
  • Patent number: 5637148
    Abstract: A method and an apparatus for coating printed circuit boards on both sides are described in which the printed circuit boards are transported through several consecutive processing stations of a coating installation. In a first coating station, one side of the printed circuit boards is wet-coated with preferably UV-hardenable plastics and the printed circuit boards are subjected to vapour-removal and drying in a first vapour-removal and drying station. The printed circuit boards are turned and, in a second coating station, their second side is wet-coated with preferably UV-hardenable plastics and then are subjected to vapour-removal and drying in a second vapour-removal and drying station. The boards are finally transferred from the coating installation to other processing apparatuses for further processing. In the coating operation, the printed circuit boards are transported in opposite directions through the two coating stations which are arranged side by side in two parallel lines of apparatus.
    Type: Grant
    Filed: September 18, 1995
    Date of Patent: June 10, 1997
    Assignee: Ciba Specialty Chemicals Corporation
    Inventors: Kaspar Kuster, Anton Ruegge
  • Patent number: 5635241
    Abstract: A method and an apparatus for producing a thin film. The method includes the steps of placing a substrate having a surface for receiving the thin film on a substrate holder disposed within a thin film production chamber, the production chamber being connected by an arm to a rotatable member; charging into the thin film production chamber a material to be deposited on the surface of the substrate; rotating the rotatable member to generate a centrifugal force thereby creating a gravity field throughout the production chamber having a direction toward the surface of the substrate; heating the substrate; and evaporating the material to be deposited by heating thereby accelerating the material to be deposited toward the surface of the substrate in a direction of the gravity field, whereby the material to be deposited is deposited on the surface of the substrate.
    Type: Grant
    Filed: March 29, 1995
    Date of Patent: June 3, 1997
    Assignee: Agency of Industrial Science and Technology
    Inventor: Yoshiyuki Abe
  • Patent number: 5620513
    Abstract: A solid lubricant application procedure is combined in-line with a steel strip processing method which comprises processing steps upstream and downstream of the lubricant application procedure. The latter comprises applying the lubricant material in molten form or as a solution and may include temperature adjusting steps both upstream and downstream of the lubricant material-applying step. The space for incorporating the lubricant application procedure into the steel strip processing line is limited. The strip speed in the lubricant application procedure is synchronized with the strip speed normally attained in the steel strip processing method in the absence of an in-line lubricant application procedure. The steps of the lubricant application procedure are constrained to accommodate the space limits and strip speed synchronization requirement imposed on the lubricant application procedure when it is combined in-line with the steel strip processing method.
    Type: Grant
    Filed: May 8, 1995
    Date of Patent: April 15, 1997
    Assignee: Inland Steel Company
    Inventors: Elliott Y. Spearin, James C. Carney
  • Patent number: 5614265
    Abstract: A method and apparatus for applying a coating to a continuous length of tubing. A coating chamber having entry and exit ports substantially encloses a portion of the tubing while permitting the tubing to pass continuously therethrough. Airflow into the coating chamber through the exit port strips excess coating material from the tubing surface. Air is withdrawn from the coating chamber by vacuum pumps through one or more separation chambers which separate entrained particles or droplets of coating material from the air. The coating chamber is preferably disposed at a distance from the separation chamber(s). The vacuum line connecting the coating chamber with the separation chamber(s) is preferably flexible or breakable. The separation chambers are preferably capable of being operated in series or in parallel. Adjustable masks are preferably provided at the entry and exit ports of the coating chamber. A seal is preferably provided at the entry port.
    Type: Grant
    Filed: February 14, 1995
    Date of Patent: March 25, 1997
    Assignee: Allied Tube & Conduit Corporation
    Inventors: Manzoor A. Chaudhry, Jeffrey L. Lamber, Bruce E. Laumann, Edward E. Mild, Brian G. Muick, Stephen T. Norvilas, David S. Pliner, Stephen E. Seilheimer