Responsive To Condition Of Coating Material Patents (Class 118/688)
  • Publication number: 20030084847
    Abstract: A slurry loading apparatus for automatically loading a slurry into a substrate. The apparatus includes a pasting head. The pasting head includes a cavity that fills with slurry creating a pressure that forces the slurry onto the surface of the substrate and into the voids of the substrate. The slurry loading apparatus may include a feedback control loop that controls the rate in which slurry is delivered to the pasting head.
    Type: Application
    Filed: November 7, 2001
    Publication date: May 8, 2003
    Inventors: Edward F. Wood, Eric Willison, Jeffrey Key
  • Publication number: 20030082298
    Abstract: A method for coating substrates (10) for optical components with essentially rotationally symmetric coatings employs a coating system equipped with a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (&bgr;max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.
    Type: Application
    Filed: September 17, 2002
    Publication date: May 1, 2003
    Applicant: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
    Inventors: Harry Bauer, Matthias Heller, Hans-Jochen Paul, Jens Ullmann, Patrick Scheible, Christoph Zaczek
  • Publication number: 20030072875
    Abstract: Systems and methods are provided for delivering solid precursors in deposition processes. A flow monitor is used to measure and regulate the flow of vaporized solid precursor material from a vaporization chamber to a deposition chamber. The flow monitor chokes the supply of vapor into deposition chamber to regulate vapor flow. To avoid condensation of the solid precursor material in the delivery lines or flow monitor, a controller is placed in a feed back loop to monitor the flow rate make adjustments to the amount of vapor available at the inlet of the flow monitor.
    Type: Application
    Filed: October 11, 2001
    Publication date: April 17, 2003
    Inventor: Gurtej S. Sandhu
  • Patent number: 6540836
    Abstract: A process and apparatus for processing a monolayer film and transferring the monolayer film to a substrate are provided.
    Type: Grant
    Filed: June 3, 2002
    Date of Patent: April 1, 2003
    Assignee: Micron Technology, Inc.
    Inventor: Timothy A. Strodtbeck
  • Patent number: 6537606
    Abstract: The present invention provides apparatus and methods to carry out the task of both reducing the surface roughness (smoothing) and improving the thickness uniformity of, preferably, but not limited thereto, the top silicon film of a silicon-on-insulator (SOI) wafer or similar thin-film electronic and photonic materials (workpiece). It also provides a method and apparatus for smoothing the surface of a (preferably) SOI wafer (workpiece) and for making the surface of the silicon film of a (preferably) SOI wafer cleaner and more free from contaminants.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: March 25, 2003
    Assignee: Epion Corporation
    Inventors: Lisa P. Allen, David B. Fenner
  • Publication number: 20030041969
    Abstract: A particle measurement configuration measures the particle concentration in a liquid or gaseous medium by way of a particle measuring instrument. In order to avoid erroneous measurements or damage to the particle measuring instrument, a measuring cell is provided which measures temperature or pressure or pH of the medium. A system controller shuts off a valve if threshold values are exceeded and it prevents the particle measuring instrument from being operated outside a predefined specification.
    Type: Application
    Filed: September 3, 2002
    Publication date: March 6, 2003
    Inventors: Claus Schneider, Ralph Trunk, Lothar Pfitzner, Heinz Schmid
  • Patent number: 6527862
    Abstract: A control system for digitally monitoring and/or controlling pressure to a pneumatic load such as a stop/suckback valve. Pressure is sensed in the pneumatic fluid input lines to the pneumatic load, and a closed loop control is used to maintain the pressure at a predetermined level. In an alternative embodiment, the control system is used to ensure equal dispensing in multi-point dispense apparatus. Thus, pressure is sensed downstream of each valve in fluid communication with a respective nozzle. Any pressure differential detected is corrected by appropriate valve adjustment.
    Type: Grant
    Filed: November 16, 2001
    Date of Patent: March 4, 2003
    Assignee: Mykrolis Corporation
    Inventors: Robert F. McLoughlin, George L. Gonnella
  • Patent number: 6524659
    Abstract: The invention relates to a method for electrically controlling a flow of material, wherein a single- or multi-component, essentially polymer-based material (1), such as plastics, elastomer or the like, is charged electrically (I) and sprayed (II) in an electrical field (E) to a three-dimensional mould (2)/target (3). The method of the invention makes use of the mould (2)/target (3) set at an electric potential and provided with two or more treatment blocks (Li) to be set at voltage levels different from each other, especially for coordinating the courses of sprayed material particles and the electrical field (E) affecting the same, in such a manner that each section/area of the mould/target surface forms a material layer of desirable thickness in the spraying cycle (II). The invention relates also to an apparatus operating in accordance with the method.
    Type: Grant
    Filed: November 15, 2000
    Date of Patent: February 25, 2003
    Assignee: Oy OMS Optomedical Systems Ltd.
    Inventors: Leo Hatjasalo, Jarkko Valtanen
  • Publication number: 20030029380
    Abstract: There is described a medical image recording apparatus, which records a medical image on a recording medium based on image data. The apparatus includes an ink-jetting head to emit ink particles onto the recording medium and a controlling section to control the ink-jetting head, so that a total amount of the ink particles per unit area, emitted by the ink-jetting head and adhered onto the recording medium, is maintained at substantially a constant value even if density of a solid-tone image area varies within density range D. With respect to at least one of combinations of values k1, k2 selected under conditions of 0≦k1<1, 0<k2<1.0, and k1<k2, the density range D fulfils the equation of Dmin+k1(Dmax−Dmin)≦D≦Dmin+k2(Dmax−Dmin), where, Dmax is a recordable maximum-density, and Dmin is a recordable minimum-density.
    Type: Application
    Filed: June 28, 2002
    Publication date: February 13, 2003
    Inventors: Masayuki Nakazawa, Akira Yamano, Chika Honda
  • Patent number: 6511545
    Abstract: A method of producing an electron-emitting device includes the steps of forming a pair of electrodes and an electrically-conductive thin film on a substrate in such a manner that the pair of electrodes are in contact with the electrically-conductive thin film and forming an electron emission region using the electrically-conductive thin film, wherein that a solution containing a metal element is supplied in a droplet form onto the substrate thereby forming the electrically-conductive thin film.
    Type: Grant
    Filed: April 9, 1999
    Date of Patent: January 28, 2003
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yoshikazu Banno, Etsuro Kishi, Mitsutoshi Hasegawa, Kazuhiro Sando, Kazuya Shigeoka, Masahiko Miyamoto
  • Patent number: 6508881
    Abstract: A device for maintaining constant a certain viscosity of an adhesive, that is used for pasting a spine of an inner book or a book cover, by adding a diluent has an adhesive container filled with an adhesive. A rotating conveyor roll is immersed in the adhesive. An applicator roll is positioned downstream of the conveyor roll. It receives the adhesive from the conveyor roll and applies the adhesive onto a spine of an inner book or a book cover passing by the applicator roll. A stirring apparatus is arranged on the container and has a stirrer immersed in the adhesive. The stirring apparatus stirs the adhesive received in the container and also measures the viscosity of the adhesive received in the container. A control unit with a computer is connected to the stirring apparatus. The control unit compares a measured value of the viscosity with a set-point value of the viscosity and meters the diluent to the adhesive in order to regulate the viscosity.
    Type: Grant
    Filed: August 30, 2000
    Date of Patent: January 21, 2003
    Assignee: Grapha-Holding AG
    Inventors: Hans Müller, Karl Zweig
  • Publication number: 20030010287
    Abstract: A method of producing an electron-emitting device includes the steps of forming a pair of electrodes and an electrically-conductive thin film on a substrate in such a manner that the pair of electrodes are in contact with the electrically-conductive thin film and forming an electron emission region using the electrically-conductive thin film, wherein the method is characterized in that a solution containing a metal element is supplied in a droplet form onto the substrate thereby forming the electrically-conductive thin film.
    Type: Application
    Filed: September 6, 2002
    Publication date: January 16, 2003
    Inventors: Yoshikazu Banno, Etsuro Kishi, Mitsutoshi Hasegawa, Kazuhiro Sando, Kazuya Shigeoka, Masahiko Miyamoto
  • Publication number: 20020197391
    Abstract: Systems, devices and methods for applying solution to a filament include an applicator for applying at least a partial coating of a solution to a filament, comprising: an applicator surface operable to at least partially coat a filament with a solution; a first container operable to supply the solution to the applicator surface, a volume of the solution in the first container corresponding to a solution level in the first container; a second container operable to contain a supply of solution in fluid communication with the solution in the first container such that the solution in the second container has a solution level indicative of the solution level of the solution in the first container; and a detector for determining the solution level within the second container, the detector operable to control an adjustment of the volume of the solution in the first container such that the solution level in the first container is maintained within a predetermined range of levels.
    Type: Application
    Filed: June 25, 2001
    Publication date: December 26, 2002
    Inventors: Mitchell V. Bruce, Thomas V. Thimons, Dominic E. Verdini, Songhao Wang, Paul A. Westbrook
  • Publication number: 20020189540
    Abstract: A process controller and method employing a machine vision system for automatically and continuously monitoring and controlling the processing of coated fasteners, and for separating the fasteners into three groups of “good”, “rejected” and “purge”/recyclable parts.
    Type: Application
    Filed: June 14, 2001
    Publication date: December 19, 2002
    Inventors: Gregory Alaimo, Raymond Oleskie
  • Publication number: 20020192716
    Abstract: A method for holding samples for analysis and an apparatus thereof includes a testing plate with a pair of opposing surfaces and a plurality of holes. Each of the holes extends from one of the opposing surfaces to the other one of the opposing surfaces. The holes are arranged in groups, where each group has at least two rows and two columns of holes. The groups are arranged in sets, where each set has at least two rows and two columns of groups. To analyze samples, at least one of the opposing surfaces of the testing plate is immersed in a solution to be analyzed. A portion of the solution enters openings for each of the holes in the immersed opposing surface. Once the holes are filled with solution, the testing plate is removed and is held above a supporting surface. Surface tension holds the solution in each of the holes. The solution in one or more of the holes is then analyzed and the solution in one of these holes is identified for further study.
    Type: Application
    Filed: August 20, 2002
    Publication date: December 19, 2002
    Inventors: Volker Schellenberger, Amy Deming Liu
  • Publication number: 20020192358
    Abstract: A substrate processing apparatus is provided with five inspection devices that perform inspections of different kinds to a substrate. Among the five kinds of inspections, the film quality is measured after resist coating, and before post-coating heat-treatment. As the film quality, the amount of solvent remaining in a resist film is measured. The film thickness is measured after heat-treatment following resist coating and before exposure. Meanwhile, the line width and the superposition precision are measured and macroscopic defect inspection is performed after post-development heat-treatment and before the substrate is returned to an indexer.
    Type: Application
    Filed: June 12, 2002
    Publication date: December 19, 2002
    Applicant: Dainippon Screen Mfg. co., Ltd.
    Inventors: Koji Kaneyama, Akihiro Hisai
  • Publication number: 20020182323
    Abstract: A method for painting a panel using a paint applicator defines a painting pattern with a plurality of points on a surface of a panel to be painted, the pattern extending in a predetermined direction and the points defining opposite edges of the pattern extending in a predetermined direction, with at least one edge of the pattern being adjacent an edge of the panel. The applicator is moved relative to the panel to apply the paint in the painting pattern having a desired film thickness. The pattern including a first plurality of pattern segments and a second plurality of reinforcing segments, the pattern segments being connected together each extending between an associated pair of the points on the opposite edges of the pattern, and the reinforcing segments each extending between an associated pair of the points adjacent the edge of the panel. A plurality of different painting patterns can be stored in a memory for selecting the one pattern to be used.
    Type: Application
    Filed: May 23, 2002
    Publication date: December 5, 2002
    Inventors: Scott J. Clifford, Matthew R. Sikowski
  • Publication number: 20020172757
    Abstract: An automated system for dip coating a superconducting material on a substrate is disclosed. The system includes an actuator, a pick up station, a dip coating station that comprises a reservoir of a dip coating formulation, a drying station that includes a source of heated air and a conveyor for moving the actuator from the pick up station to the dip coating station and from the dip coating station to the drying station. The actuator includes an arm for carrying a substrate. The arm is capable of being moved vertically downward to submerse the substrate in the dip coating reservoir and the arm is also capable of being moved vertically upward to lift the substrate out of the dip coating reservoir. A method for automatically dip coating a substrate with a superconducting material is also disclosed.
    Type: Application
    Filed: March 6, 2001
    Publication date: November 21, 2002
    Inventors: Christine L. Vrtis, James Sharp
  • Patent number: 6482264
    Abstract: Systems and methods for high throughput fabrication and analysis of an array of coated materials. The systems include a movable substrate having a plurality of predefined regions, where a plurality of materials are provided for coating the substrate. A delivery mechanism associated with the plurality of materials delivers a continuously varying mixture of the plurality of materials onto the surface of the substrate. The methods include delivering a continuously varying mixture of a plurality of materials onto the surface of a movable substrate having a plurality of predefined regions to form a predefined coating on each of the regions.
    Type: Grant
    Filed: October 26, 2000
    Date of Patent: November 19, 2002
    Assignee: General Electric Company
    Inventor: Xiao-Dong Sun
  • Publication number: 20020155389
    Abstract: The invention provides systems and processes that form the inverse (photographic negative) of a patterned first coating. The patterned first coating is usually provided by a resist. After the first coating is patterned, a coating of a second material is provided thereover. The uppermost layer of the second coating is removed, where appropriate, to expose the patterned first coating. The patterned first coating is subsequently removed, leaving the second coating material in the form of a pattern that is the inverse pattern of the first coating pattern. The process may be repeated with a third coating material to reproduce the pattern of the first coating in a different material. Prior to applying the second coating, the patterned first coating may be trimmed by etching, thereby reducing the feature size and producing sublithographic features. In addition to providing sublithographic features, the invention gives a simple, efficient, and high fidelity method of obtaining inverse coating patterns.
    Type: Application
    Filed: October 9, 2001
    Publication date: October 24, 2002
    Inventors: Bharath Rangarajan, Michael K. Templeton, Ramkumar Subramanian
  • Publication number: 20020155213
    Abstract: The optical thickness of a film formed on a substrate is controlled precisely to manufacture an optical filter having an accurate optical thickness. Time is counted during a film (4) is being formed on a substrate (3) so as to note time points t with respect to a reference time that is set in advance. At least one of two optical characteristics consisting of energy transmittance and energy reflectance when the film being formed on the substrate (3) is irradiated with monitoring light is expressed by a function f(t) of the time points t on the basis of the theoretical formula of the optical characteristic. The function f(t) has a theoretical constant ak (k is an integer equal to or greater than 0). The optical characteristic is measured by irradiating the film (4) with the monitoring light at the time points t. A theoretical value of the optical characteristic is calculated from the function f(t).
    Type: Application
    Filed: January 14, 2002
    Publication date: October 24, 2002
    Inventors: Abe Hiroyuki, Yu Mimura, Kazuyou Mizuno
  • Patent number: 6461433
    Abstract: A method and apparatus for precisely applying radioactive material to a substrate such as a brachytherapy device is disclosed. A radioactive fluid adapted to cure rapidly is deposited as discrete dots onto a surface with a fluid-jet printhead. The apparatus comprises a fluid-jet printhead in communication with a chamber containing radioactive fluid to be applied by the printhead. The printhead is microprocessor driven, and the microprocessor may be provided with feedback from a station where the radioactivity deposited on a preceding substrate in a batch is measured, permitting the system to be recalibrated on an ongoing basis as the batch of printed devices is produced. Compensation for attenuation of radiation by a casing may also be made part of the feedback technique. Also disclosed is a brachytherapy device having printed on a surface dots of radiation-emitting material, in a pattern comprising various bands, dots or areas.
    Type: Grant
    Filed: July 5, 2000
    Date of Patent: October 8, 2002
    Assignee: International Brachytherapy, S.A.
    Inventors: John L. Carden, Jr., John L. Russell, Jr., James Edward Fox, Alan Lionel Hudd, Michael Willis
  • Publication number: 20020136822
    Abstract: In method of monitoring the formation of a coating on a singe particle (P), an apparatus is used which comprises means (2,5,6,9) for arranging said particle (P) at a given spatial location, and a fluid supply unit (3) adapted to apply a coating fluid to the particle (P) such that the coating is formed. Further, the a has a measurement unit (4) which is adapted to perform a spectrometric measurement on the coating during formation thereof, and to derive at value of at least one principle parameter related to the coating. This, such principle parameters, for example the thickness, thickness growth rate and physical and/or chemical properties related to the quality of the coating, as well as heat, mass and momentum transfer, can be continuously and non-abrasive monitored during the coating process on the single particle (P).
    Type: Application
    Filed: April 4, 2001
    Publication date: September 26, 2002
    Inventors: Staffan Folestad, Ingela Niklasson Bjorn, Anders Rasmuson, Daniel Strom
  • Patent number: 6447836
    Abstract: The present invention relates to a method of and a device for optimizing at least one coating material at at least one point of a substrate surface to which the coating material is applied. The method, which is carried out with the corresponding device, comprises at least the following steps: a) applying said at least one coating material to said at least one point of the substrate surface, b) curing said at least one coating material at said at least one point of the substrate surface, and c) determining the state, especially the curing and/or yellowing and/or gloss, of said coating material at said at least one point of the substrate surface, possessed by said coating material as a consequence of steps a) and b).
    Type: Grant
    Filed: January 24, 2001
    Date of Patent: September 10, 2002
    Assignee: BASF Aktiengesellschaft
    Inventors: Wolfgang Schrof, Dieter Horn, Reinhold Schwalm, Uwe Meisenburg, Andreas Pfau
  • Patent number: 6425988
    Abstract: A method and system for producing a film (preferably a thin film with highly uniform or highly accurate custom graded thickness) on a flat or graded substrate (such as concave or convex optics), by sweeping the substrate across a vapor deposition source operated with time-varying flux distribution. In preferred embodiments, the source is operated with time-varying power applied thereto during each sweep of the substrate to achieve the time-varying flux distribution as a function of time. A user selects a source flux modulation recipe for achieving a predetermined desired thickness profile of the deposited film. The method relies on precise modulation of the deposition flux to which a substrate is exposed to provide a desired coating thickness distribution.
    Type: Grant
    Filed: November 13, 2000
    Date of Patent: July 30, 2002
    Inventors: Claude Montcalm, James Allen Folta, Swie-In Tan, Ira Reiss
  • Patent number: 6419803
    Abstract: A system and method for manufacturing thin-film structures disposed on a substrate. The thin-film structures have different respective thicknesses that vary along a radius of the substrate. A substrate rotates about an axis of rotation and a source of deposited material is directed at the rotating substrate. A mask having a stepped profile is positioned between the rotating substrate and the source. The stepped mask selectively blocks material emanating from the source from reaching the substrate. Each step of the profile of the mask corresponds to one of the respective thicknesses of the thin-film structures. The radius along which the different respective thicknesses of the film-thin structures vary is measured from the axis of rotation of the rotating substrate.
    Type: Grant
    Filed: March 16, 2001
    Date of Patent: July 16, 2002
    Assignee: 4Wave, Inc.
    Inventors: David Alan Baldwin, Todd Lanier Hylton
  • Patent number: 6413319
    Abstract: A process and apparatus for processing a monolayer film and transferring the monolayer film to a substrate are provided.
    Type: Grant
    Filed: December 7, 2000
    Date of Patent: July 2, 2002
    Assignee: Micron Technology, Inc.
    Inventor: Timothy A. Strodtbeck
  • Patent number: 6402905
    Abstract: A system and method for controlling a deposition thickness distribution on a substrate includes a motor that rotates the substrate and at least one deposition thickness sensor that senses the deposition thickness on the rotating substrate at two or more radii. At least one actuator varies a shadow of a mask that is disposed over the rotating substrate, wherein the shadow has a surface area that is less than an unmasked surface area of the rotating substrate. A vapor source deposits material on the rotating substrate. A process controller is coupled to the thickness deposition sensor and the at least one actuator. In response to an output of the deposition thickness sensor, the process controller varies the shadow of the mask along a radius of the substrate to control the deposition thickness distribution.
    Type: Grant
    Filed: March 16, 2001
    Date of Patent: June 11, 2002
    Assignee: 4 Wave, Inc
    Inventors: David Alan Baldwin, Todd Lanier Hylton
  • Publication number: 20020066407
    Abstract: An optical fiber coating device that recoats a coating removed portion of an optical fiber with light-curing resin has an observation window through which a mold inside of a shielding lid that covers the mold can be confirmed in a state where the shielding lid remains closed. There is provided an open/close lid that can open/close the observation window. An optical shielding guard plate is provided around the observation window. A filter that cuts off the external light having a specific wavelength is provided on the observation window. There is provided a photo sensor that can detect the amount of light of a light source that irradiates a light onto the light-curing resin, and the amount of light can be automatically adjusted on the basis of the detected result of the photo sensor. An alarm that urges to exchange the light source is raised on the basis of the detected result of the photo sensor. There is provided a TV camera that can capture the interior of the mold and other portions to be observed.
    Type: Application
    Filed: August 21, 2001
    Publication date: June 6, 2002
    Inventors: Toshio Shibata, Hideki Watanabe, Hidekazu Kojima
  • Patent number: 6383297
    Abstract: Disclosed is a method for joint oxydation and heat treatment of workpieces at temperatures ≦1300° in the treatment chamber of an oven containing a neutral or reactive gas in a temperature range above 570°. In order for the process to be reproducible and to produce homogeneous oxide layers, the PH2O/PH2 ratio is adjusted after transformation of the workpiece structure such as found at the ambient temperature into the structure wanted during the heat treatment in such a way that the line FeO+H2=Fe+H2O is exceeded and an oxide layer is formed from FEO<10 &mgr;m.
    Type: Grant
    Filed: February 22, 2000
    Date of Patent: May 7, 2002
    Assignee: Messer Griesheim GmbH
    Inventor: Hans-Peter Schmidt
  • Patent number: 6383572
    Abstract: The invention relates to an apparatus for applying multi-component coating compositions comprising at least two dosing devices, an air-assisted spray gun, and a controlling device, each dosing device comprising a supply container comprising one component of the multi-component coating composition, a motoring device, and a metering device, the supply container being connected to the metering device, the metering device being connected to the motoring device and to the air-assisted spray gun, the connecting line between at least one metering device and the air-assisted spray gun being fitted with a pressure transducer for measuring a decrease in pressure in the connecting line, the pressure transducer being connected to the controlling device, and the controlling device being connected to the motoring devices, the controlling device capable of comparing the decrease in pressure in the connecting line with a set value, for starting up the motoring devices, and controlling the power of the motoring devices to kee
    Type: Grant
    Filed: September 17, 1999
    Date of Patent: May 7, 2002
    Assignee: Akzo Nobel N.V.
    Inventors: Daniel De Graaf, Johannes Anthonius Jansen, Herman Ligtvoet, Josef Pancratius Maria Jonker
  • Patent number: 6379464
    Abstract: A method and apparatus for selectively applying, a material to a target moving along a path is disclosed. The apparatus includes at least one detector for identifying an upstream position of the target; a dispenser spaced downstream from the detector by an offset distance, the dispenser configured for selectively releasing material to contact the target; a velocity sensor for creating a velocity signal proportional to a velocity of the target; and a controller for selectively varying the offset distance in response to the velocity signal.
    Type: Grant
    Filed: July 30, 1999
    Date of Patent: April 30, 2002
    Assignee: K-G Devices Corporation
    Inventor: Thomas J. Martel
  • Patent number: 6376006
    Abstract: A system is disclosed for detecting or inspecting for a lining of a container closure that is formed of a sheet metal and has a panel on an inside surface of the closure. The panel of the closure has a lining formed thereon. The system according to the present invention includes a conveyor for moving plural closures longitudinally and substantially through the system, a color sensor that inspects the panel of each one of the closures on the conveyor for a predetermined color, and a separator that is capable of removing closures that lack the predetermined color. The system may include an oven downstream from the sensor to bake the lining. Thus, the system automatically identifies and removes the closure having the deficient color from the conveyor. A corresponding method for identifying and removing a closure having a deficient color is also disclosed.
    Type: Grant
    Filed: January 7, 2000
    Date of Patent: April 23, 2002
    Assignee: Crown Cork & Seal Technologies Corporation
    Inventors: Gerald M. Gresko, Daniel L. Brant
  • Patent number: 6355105
    Abstract: The invention disclosed herein is related to a photoresist coating system that significantly prevents performance of the system being degraded by any bubble in, liquid photoresist. The proposed system comprises a pump, a series of pipelines, a reactor, a tank, a capacitor sensor, a photochopper sensor and a controller, where the capacitor sensor is coupled to the pipeline and the photochopper sensor is coupled to the pipeline. Thus, any bubble inside the pipeline is detected by the capacitor sensor or the photochopper sensor. In other words, any bubble in the photoresist is detected. The operation of the present photoresist coating system is terminated by the controller to protect any wafer inside the reactor, and a warning alarm is activated by the controller.
    Type: Grant
    Filed: October 12, 1999
    Date of Patent: March 12, 2002
    Assignee: United Microelectronics Corp.
    Inventor: Roger Tuan
  • Patent number: 6348098
    Abstract: A control system for digitally monitoring and/or controlling pressure to a pneumatic load such as a stop/suckback valve. Pressure is sensed in the pneumatic fluid input lines to the pneumatic load, and a closed loop control is used to maintain the pressure at a predetermined level. In an alternative embodiment, the control system is used to ensure equal dispensing in multi-point dispense apparatus. Thus, pressure is sensed downstream of each valve in fluid communication with a respective nozzle. Any pressure differential detected is corrected by appropriate valve adjustment.
    Type: Grant
    Filed: January 20, 2000
    Date of Patent: February 19, 2002
    Assignee: Mykrolis Corporation
    Inventors: Robert F. McLoughlin, George L. Gonnella, Timothy J. King
  • Publication number: 20020007786
    Abstract: A method of producing an electron-emitting device includes the steps of forming a pair of electrodes and an electrically-conductive thin film on a substrate in such a manner that the pair of electrodes are in contact with the electrically-conductive thin film and forming an electron emission region using the electrically-conductive thin film, wherein the method is characterized in that a solution containing a metal element is supplied in a droplet form onto the substrate thereby forming the electrically-conductive thin film.
    Type: Application
    Filed: April 9, 1999
    Publication date: January 24, 2002
    Inventors: YOSHIKAZU BANNO, ETSURO KISHI, MITSUTOSHI HASEGAWA, KAZUHIRO SANDO, KAZUYA SHIGEOKA, MASAHIKO MIYAMOTO
  • Patent number: 6338775
    Abstract: A thin film deposition apparatus and method are disclosed in this invention. The method includes a step of providing a vacuum chamber for containing a thin-film particle source for generating thin-film particles to deposit a thin-film on the substrates. The method further includes a step of containing a substrate holder in the vacuum chamber for holding a plurality of substrates having a thin-film deposition surface facing the thin-film particle source. The method further includes a step of providing a rotational means for rotating the substrate holder to rotate each of the substrates exposed to the thin-film particles for depositing a thin film thereon. And, the method further includes a step of providing a lateral moving means for laterally moving and controlling a duration of exposure time across a radial direction for each of the substrates for controlling thickness uniformity of the thin-film deposited on each of the substrates.
    Type: Grant
    Filed: August 7, 2000
    Date of Patent: January 15, 2002
    Assignee: Advanced Ion Beam Technology, Inc.
    Inventor: Jiong Chen
  • Patent number: 6328801
    Abstract: Provided is a novel method of and system for recovering and recirculating a deuterium-containing gas. According to the inventive method, a deuterium-containing feed gas is introduced into a chamber. An exhaust gas containing deuterium is removed from the chamber. The deuterium concentration of the exhaust gas is adjusted to a predetermined value, thereby producing a concentration-adjusted gas stream. Finally, the concentration-adjusted gas stream is introduced into the chamber as the deuterium-containing feed gas. The invention makes the use of deuterium, for example, in the mass production of semiconductor devices, commercially feasible.
    Type: Grant
    Filed: February 6, 1998
    Date of Patent: December 11, 2001
    Assignee: L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventors: Daniel Gary, Jean-Marc Girard, Jean-Christophe Rostaing, Jean-Marie Friedt
  • Patent number: 6312523
    Abstract: The present invention relates to methods and apparatus for the controlled placement of a shear-thinnable polymer composition into a moving web. The controlled placement is preferably performed by applying the polymer composition onto a surface of a moving web, shear thinning the composition and placing it into the web, and curing the polymer composition. A preferred apparatus includes one or more process heads that has mounted thereto a rigid knife blade for engagement with the moving web. The knife blade is movable vertically and rotationally. The process head is also movable horizontally along the path of the moving web. A plurality of macro and micro tension zones are established and are monitored for controlling the apparatus and process.
    Type: Grant
    Filed: September 27, 1999
    Date of Patent: November 6, 2001
    Assignee: Nextec Applications, Inc.
    Inventors: James Michael Caldwell, George Schmermund
  • Patent number: 6278809
    Abstract: A fiber optic reflectometer employs an optical fiber near a target substrate in a deposition chamber. The optical fiber is positioned within the chamber so that deposition of a thin film on the substrate also occurs on a portion of the optical fiber. A combination of monochromatic and broadband white light is transmitted through the optical fiber to the film deposited on it, and light reflectance measurements are made to determine, in situ and substantially in real time, such characteristics of the film as its growth rate, thickness, composition, surface roughness and refractive index. Such measurements can be made without bulk optics and without the precise alignment requirements of ellipsometry techniques and apparatus.
    Type: Grant
    Filed: May 29, 1998
    Date of Patent: August 21, 2001
    Assignees: Ion Optics, Inc., Brown University Research Foundation
    Inventors: Edward A. Johnson, Theodore F. Morse
  • Patent number: 6268013
    Abstract: Disclosed herein is a method and an apparatus for applying a coating liquid to an object from a liquid-applying member at a first prescribed position, thereby forming a film on the object. Before the coating liquid at the first position, the coating liquid is applied at a second predetermined position. An impurity-detecting device detects the impurities contained in the coating liquid applied at the second position. A particle-counting device is provided, and a switching device is provided on a liquid-supplying pipe extending from a source of the coating liquid to the liquid-applying member. The switching device switches the supply of the coating liquid between the liquid-applying member and the impurity-detecting device. The impurities in the coating liquid can thereby monitored.
    Type: Grant
    Filed: April 27, 1999
    Date of Patent: July 31, 2001
    Assignee: Tokyo Electron Limited
    Inventors: Masami Akimoto, Kazutoshi Yoshioka, Kazuo Sakamoto, Norio Semba
  • Patent number: 6258168
    Abstract: A paster for the application of a film of water-containing adhesive to a running substrate of cigarette paper or the like automatically replaces the evaporated percentage of water when the substrate-processing machine is idle but the paster continues to circulate adhesive in order to prevent a rise in the viscosity of the then circulating and water releasing adhesive. The quantity of water in the circulating adhesive and other parameters (such as the temperature) of the adhesive are monitored by several sensors, and signals which are transmitted by such sensors are processed to regulate the admission of water in order to maintain the percentage of water, and hence the consistency, of the circulating adhesive within a range not appreciably departing from that when the paster is in actual use to apply one or more films of adhesive to the running substrate.
    Type: Grant
    Filed: August 6, 1999
    Date of Patent: July 10, 2001
    Assignee: Hauni Maschinenbau AG
    Inventors: Karl-Heinz Pawelko, Franz Rottmann
  • Patent number: 6248175
    Abstract: A system and method is provided that facilitates the application of a uniform layer of developer material on a photoresist material layer. The system includes a nozzle adapted to apply a predetermined volume of developer material on a photoresist material layer along a linear path having a length approximately equal to the diameter of the photoresist material layer. A movement system moves the nozzle to a first position offset from a central region of the photoresist material layer for applying a first predetermined volume of developer material to the photoresist material layer while the developer material is spin coated. The movement system also moves the nozzle to a second position offset from the central region for applying a second predetermined volume of developer material to the photoresist material layer while the developer is spin coated. The first position is located on an opposite side of the central region with respect to the second position.
    Type: Grant
    Filed: October 29, 1999
    Date of Patent: June 19, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton, Sanjay K. Yedur
  • Patent number: 6248174
    Abstract: An apparatus for direct or indirect application of liquid or pasty coating medium onto a traveling material web, notably of paper or cardboard, includes a paint curtain applicator mechanism and at least one sensor unit to register the flow quantity of the coating medium layer applied onto the material web and to provide a corresponding flow quantity signal. At least one regulation device regulates at least one manipulated variable of the paint curtain applicator mechanism upon which the flow quantity of the coating medium layer applied onto the material web depends. A control unit, which receives the flow quantity signal provided by the at least one sensor device, determines at least one face value for the at least one manipulated variable and controls the at least one regulation device on the basis of the at least one manipulated variable-face value.
    Type: Grant
    Filed: January 22, 1999
    Date of Patent: June 19, 2001
    Assignee: Voith Sulzer Papiertechnik Patent GmbH
    Inventor: Martin Kustermann
  • Patent number: 6190726
    Abstract: A method and assembly for coating a moving web of paper or paperboard by means of a coating mix jet which is directed to the surface of the web without mechanical support. The present invention is based on applying a desired amount of the coating mix to the web via a narrow-gap slit orifice, and by measuring the coat weight on the web, adjusting the position of at least one lip of the slit orifice to achieve the desired weight and cross-machine profile of the applied coat.
    Type: Grant
    Filed: October 24, 1997
    Date of Patent: February 20, 2001
    Assignee: Valmet Corporation
    Inventors: Jukka Koskinen, Jukka Linnonmaa
  • Patent number: 6183561
    Abstract: A sensor and a method for determining the basis weight of a coating material containing latex on a substrate is described. The determined basis weight is insensitive to changes in the amount of substrate material underlying the coating. Signals from the sensor may be used in the control of a coating mechanism to provide a coating having a uniform basis weight.
    Type: Grant
    Filed: December 15, 1998
    Date of Patent: February 6, 2001
    Assignee: Honeywell International Inc
    Inventor: Edward Belotserkovsky
  • Patent number: 6179918
    Abstract: A sensor and a method for determining the coating weight of a coating material containing silicone on a substrate is described. The determined coating weight is insensitive to changes in the amount of substrate material underlying the coating. Signals from the sensor may be used in the control of a coating mechanism to provide a coating having a uniform weight.
    Type: Grant
    Filed: November 20, 1998
    Date of Patent: January 30, 2001
    Assignee: Honeywell International Inc.
    Inventor: Edward Belotserkovsky
  • Patent number: 6159295
    Abstract: An apparatus and method for forming thin film aerogels on semiconductor substrates is disclosed. It has been found that in order to produce defect-free nanoporous dielectrics with a controllable high porosity, it is preferable to substantially limit evaporation and condensation of pore fluid in the wet gel thin film, e.g. during gelation, during aging, and at other points prior to obtaining a dried gel. The present invention simplifies the atmospheric control needed to prevent evaporation and condensation by restricting the atmosphere in contact with the wet gel thin film to an extremely small volume. In one embodiment, a substrate 26 is held between a substrate holder 36 and a parallel plate 22, such that a substantially sealed chamber 32 exists between substrate surface 28 and chamber surface 30. Preferably, the average clearance between surfaces 28 and 30 is less than 5 mm, or more preferably, less than 1 mm. Temperature control means 34 may optionally be used to control the temperature in chamber 32.
    Type: Grant
    Filed: April 22, 1999
    Date of Patent: December 12, 2000
    Assignee: Texas Instruments Incorporated
    Inventors: Alok Maskara, Teresa Ramos, Douglas M. Smith
  • Patent number: 6128087
    Abstract: A system for evaluating the reflectance of an object (e.g., a CRT) that is coated with an anti-reflective coating material is disclosed. The quality and/or uniformity of the coating is evaluated by a reflectometer. The reflectometer is positioned relative to the object by non-contact sensors. Reflectance data gathered by the reflectometer is analyzed to determine to what extent the actual coating differs from the optimal (i.e., ideal) coating. A feedback system modifies the coating process for subsequent objects in an attempt to fine-tune the coating process and achieve optimal anti-reflective coatings.
    Type: Grant
    Filed: May 8, 1998
    Date of Patent: October 3, 2000
    Inventors: William A. Meredith, Jr., Charles C. Gammans, Kelly R. Clayton, Erik J. Bjornard, Kim D. Powers
  • Patent number: 6120832
    Abstract: A method and apparatus for measuring the transfer efficiency during the electrostatic spraying of a coating material (e.g. powder coating) is provided. The transfer efficiency can be measured during the test cycle rather than measuring an average transfer efficiency for an electrostatic spray cycle. A cycle may include the initial time when the substrate is "uncoated or clean" and an end point of the test when electrical insulating effects caused by accumulated powder on the substrate lead to a reduction in the transfer efficiency. The method uses computer based calculation software and a computer. The computer is connected to load cells that measure weight changes of a target substrate and a vessel containing the coating material to be sprayed.
    Type: Grant
    Filed: November 25, 1998
    Date of Patent: September 19, 2000
    Assignee: The Lubrizol Corporation
    Inventors: Paul P. Walsh, Charles F. Williams