Abstract: In accordance with some embodiments, a semiconductor fabricating system is provided. The semiconductor fabricating system includes a wafer stage and a brush assembly moveable located below the wafer stage. The brush assembly includes a base plate, an inner brush member and an outer brush member. The inner brush member is positioned on the base plate, and the outer brush member surrounds the inner brush member. Inner grooves in the inner brush member are shallower than outer grooves in the outer brush member. The semiconductor fabricating system also includes a shaft and an actuator. The shaft is connected to the base plate, and the actuator is connected to shaft. The semiconductor fabricating system further include a controller programmed to send electric signals to the actuator to drive the base plate to rotate around a rotation axis.

Abstract: Disclosed herein is a cleaning device for orthokeratology lens, comprising a housing, a cap, a gear module, two cleaning shaft, two cleaning head, and a rotating shaft. The housing comprises two orthokeratology lens bases and an opening. The cap is disposed on the opening. The cleaning shaft comprises a first end connecting to the gear module and a second end. The cleaning head is disposed on the second end of the cleaning shaft. The rotating shaft connects to the gear module.

Abstract: Substrate cleaning equipment includes a substrate holder which supports a substrate, a swing body, a head, a first cleaning liquid supply structure, and a second cleaning liquid supply structure. The swing body moves along a sweep line on a main surface of the substrate. The head is coupled to the swing body and includes a pad attachment surface facing the substrate holder. The first cleaning liquid supply structure is coupled to the swing body and sprays a first cleaning liquid onto the main surface of the substrate. The second cleaning liquid supply structure sprays a second cleaning liquid onto the main surface of the substrate. A buffing pad is attached to the pad attachment surface.

Abstract: A substrate cleaning device may include a chamber body configured to hold a substrate and a brush assembly. The brush assembly may include a first roller, a second roller, and a belt extending between the first roller and the second roller. At least one of the first roller and the second roller may be movable between a first position where the belt contacts a first surface of a substrate disposed in the chamber body and a second position where the belt is spaced from the first surface. Other substrate cleaning devices and methods of cleaning substrates are disclosed.

Abstract: The present disclosure relates to a grinding head (1) for a floor grinding machine for grinding floor surfaces of stone or stone-like material. Such a grinding head (1) comprises a lower casing member (3), comprising a lower support (31) and an upwardly extending edge portion (32), and an upper casing number (2), comprising an upper cover (21) and a downwardly extending edge portion (22), wherein the upper casing member (2) is joinable to the lower casing member (3) by causing axially distal portions of the edge portions to bear on each other.

Abstract: A cleaning device includes a housing, a cleaning blade, a toner conveyance path, a conveyance screw, and a first flicker. The conveyance screw includes a rotary shaft and a helical vane. The first flicker includes a first base portion and first contact pieces and uses the first contact pieces to press the conveyance screw in a first direction away from a bottom part of the toner conveyance path. The first base portion includes a secured portion and a blade opposed portion. A reinforcement member is stacked on the blade opposed portion.

Abstract: The present disclosure, in some embodiments, relates to a brush cleaning apparatus. The brush cleaning apparatus includes a wafer support configured to support a wafer. The brush cleaning apparatus also includes a cleaning brush including a porous material coupled to a core material. An uppermost surface of the porous material defines a planar cleaning surface. A first nozzle is configured to apply a first cleaning liquid directly between the wafer and the planar cleaning surface of the cleaning brush.

Abstract: The skin therapy device combines the mechanical stimulation and cleansing in the form of vibration with optical stimulation from LEDs. The device combines these two elements without sacrificing the effectiveness of either the mechanical cleansing/stimulation or optical stimulation by passing the light through the mechanical elements that are in contact with the skin. The light from the LEDs does not pass around the mechanical elements, such as around opaque brush fibers, but passes through the mechanical elements.

Abstract: The invention relates to a skin treatment device comprising a housing (10) with a handle section (11), a disc-shaped skin treatment element (21), a drive mechanism incorporated in said housing and coupled to said skin treatment element for driving said skin treatment element into rotational movement about a rotational axis, wherein said skin treatment element has a first skin treatment surface (22) and a second skin treatment surface (25), said first skin treatment surface (22) being oriented axially with respect to said rotational axis, said second skin treatment surface (25) being oriented radially with respect to said rotational axis and extending along a circumference of the skin treatment element.

Abstract: A self-contained, compact camera wash system 1000 for a drone 800 or as an automotive aftermarket kit 1101 uses a pressurized container 1002 similar to a common aerosol can to supply washer fluid to a washer nozzle 1020 via actuable valving. The fluid supply container is small for use with drone cameras (e.g., ˜15 ml in volume) and is readily packaged in a compact assembly. For the automotive aftermarket kit 1101 a larger volume container volume is provided and configured to be easily replaced as needed.

Abstract: A nail polish application apparatus, comprising a mounting element comprising a capsule compartment adapted to receive one or more capsules containing a nail polish fluid wherein the mounting element is moveable by actuator(s) in longitudinal axis crossing a nail polish applying space and in lateral axis perpendicular to the longitudinal axis and is rotatable by the actuator(s) around the longitudinal axis, a pressure applying element adapted to apply pressure on a body portion of the capsule(s) installed in the capsule compartment wherein the body portion defines a reservoir containing a nail polish fluid, the pressure builds an internal pressure in the reservoir forcing extrusion of the nail polish fluid to a nail polish applying element integrated with the capsule(s), sensor(s) adapted to generate sensory data depicting the nail polish applying space and a control unit adapted to operate the actuator(s) and the pressure according to analysis of the sensory data.

Abstract: A floor sweeper includes a housing which has a garbage cavity for containing garbage. The garbage cavity has an inlet allowing the garbage to enter the garbage cavity. A sweeping roller is disposed at the inlet of the garbage cavity, is rotatably connected to the housing and is able to sweep outside garbage into the garbage cavity. A sealing plate for opening/closing the inlet is disposed at the inlet of the garbage cavity. An ejector rod is vertically and movably connected to the housing, has an upper end connected to the sealing plate and is able to move vertically to drive the sealing plate to move. When floor sweeper cleans a floor, the ejector rod abuts against the floor and moves upwards to drive the sealing plate to move to open the inlet of the garbage cavity.

Abstract: The present invention relates in general to the field of cleaning devices, and more specifically, to a cleaning device and method of cleaning bathrooms. The cleaning device and method of cleaning bathrooms is inexpensive and environmentally friendly in that it utilizes a removable, washable and reusable cleaning head to thereby reduce unnecessary waste and cost. The cleaning device and method of cleaning bathrooms is sturdy and allows a user to clean an entire bathroom including showers, bathtubs, sinks, counters and toilets. The cleaning head may also be used separate from the cleaning device to clean easy to reach places such as countertops, sinks and toilets. The cleaning head may be reversible wherein opposite sides of the cleaning head may utilize certain materials to better clean different areas of the bathroom.

Abstract: Provided is an inductive therapeutical instrument generating electric current and a skin care method, which relates to the field of skin care apparatuses. The above inductive therapeutical instrument is mainly used for applying a material body to the skin and massaging and maintaining the skin. The inductive therapeutical instrument mainly includes a material storage container and a massage head. The material body is stored in the material storage container, and the material body is squeezed into the massage head by squeezing the material storage container, and is applied to the skin through a material discharging hole on the massage head. Moreover, during use, the inductive therapeutical instrument can generate a microcurrent that acts on the skin so as to improve the skin condition.

Abstract: An imaging device for a vehicle and a vehicle are disclosed. The imaging device includes: a casing, a camera, a wiping member, and a drive device. The casing includes a casing body and a transparent cover disposed to the casing body, and the transparent cover is rotatable relative to the casing body. The camera is disposed in the casing and configured to obtain image information outside the transparent cover through the transparent cover. The wiping member is disposed to the casing and is stationary relative to the camera. The drive device is connected with the transparent cover and configured to drive the transparent cover to rotate to enable the wiping member to wipe an outer surface of the transparent cover.

Abstract: An optical connector is disclosed. The optical connector includes a rear housing, an inner housing, and an outer housing. The inner housing includes a retaining hole to accommodate a ferrule. The outer housing is disposed on an outer periphery of the inner housing to cover a front portion of the inner housing. The outer housing rotates about the central axis with respect to the inner housing by a rotation guiding mechanism cooperating with an adapter for connecting the optical connector to another optical connector. The outer housing includes a front wall covering the distal end of the inner housing. The front wall includes at least one opening region. The opening region corresponds to a fiber exposed surface of the ferrule when the outer housing is rotated with respect to the inner housing from an initial position to a connected position by the rotation guiding mechanism.

Abstract: A versatile cleaning device including a top cleaning assembly that includes a top cleaning means and a mount; a first shaft constructed to be fixedly or removably coupled to the top cleaning assembly; a side cleaning assembly that includes a side cleaning means, a body, and a first shaft receiving hole; and a second shaft constructed to be fixedly or removably coupled to the side cleaning assembly. The second shaft is constructed to be attached to the handle for electrically rotating the versatile cleaning device.

Abstract: A cleaning module adapted to clean a socket style ferrule or a pin style ferrule of a connector includes a tip assembly extending from a housing comprising a tip adapted to receive a cleaning media. A retractable alignment sleeve sized to surround the pin style ferrule has a larger outer diameter than an inner diameter of a socket opening and moves along the tip assembly when the first end presses against a surface of the connector. A sleeve spring engages with a portion of the tip assembly and a first end of the retractable alignment sleeve. The tip assembly includes a block movably secured within a portion of the housing. A main spring may be engaged with the housing and engaged with an end portion of the block, wherein the sleeve spring has both a spring constant and total compressive force that are lower than that of the main spring.

Abstract: An optical connector cleaning tool includes a cleaning head that faces the lens (cleaning target portion) of an optical connector, and a cleaning cloth (3) that moves with respect to the cleaning head in a state in which the cleaning cloth is in contact with the lens. The cleaning cloth (3) is formed into a strip shape by a fabric (25) including a plurality of warps (28) in which a longitudinal direction thereof is a moving direction of the cleaning cloth moving with respect to the cleaning head. The warp (28) includes a first chemical fiber (31) and a second chemical fiber (32). One chemical fiber of the first chemical fiber (31) and the second chemical fiber (32) is in a stretched state, and the other chemical fiber is in a slack state. It is possible to provide an optical connector cleaning tool capable of cleaning a lens-type optical connector.

Abstract: A camera lens includes a cover adapted to at least partially enclose at least one camera having at least one camera lens, drive means adapted to rotationally move the cover relative to the camera, and a housing adapted to hold the cover and the drive means, where the housing at least partially encloses the cover and includes at least one opening for allowing electromagnetic radiation to pass through the cover to the lens. A rear view display for a vehicle includes such a cleaning system, and a vehicle includes such a rear view display.

Abstract: A body scrubbing device is controllable by a user's fingers such that the curvature of body contacting portion of the device may be made to conform to curved portions of the body. The device includes a motor, a power output shaft connected to the motor, a driven member and a flexible non-driven member adjacent the flexible driven member. The flexible non-driven member includes a bearing surface for contact with the driven member and a non bearing surface configured for contact with a user's fingers in permitting deformation the driven member into a curved disposition and the application of plural localized regions of pressure against the driven member and the contacting portion. Some implementations may include a wall mountable construction which may support the device for hands-free operation.

Abstract: An optical connector is disclosed. The optical connector includes a rear housing, an inner housing, an arm and an outer housing. The inner housing includes at least one retaining hole to house a ferrule. The rear housing moves linearly with respect to the inner housing and rotates with respect to the inner housing. The arm moves linearly together with the rear housing with respect to the inner housing. The outer housing is disposed on an outer periphery of the inner housing so as to cover a front portion of the inner housing. The outer housing rotates with respect to the inner housing by a rotation guiding mechanism cooperating with the arm. The outer housing includes a forward wall covering the distal end of the inner housing. An opening area of the forward wall can be aligned with the retaining hole or a fiber exposure face of the ferrule when the outer housing is rotated with respect to the inner housing from an initial position to a connected position.

Abstract: The disclosure is directed at a method and apparatus for cleaning a surface having multiple protruding studs. The apparatus includes a top plate portion and a bottom plate portion along with a drive assembly which assists in moving the bottom plate portion with respect to the top plate portion. The drive assembly also translates rotational forces applied by a rotary tool to linear forces which are then applied to the bottom plate portion to clean the surface.

Abstract: A cleaning module adapted to clean a socket or a pin of a ferrule includes a tip assembly comprising a tip, the tip adapted to receive a cleaning media, a retractable alignment sleeve spring-mounted on a retractable alignment sleeve spring, wherein the sleeve retracts when a flange of an opening of the tip assembly presses against a surface of the ferrule, and wherein the retractable alignment sleeve is sized to surround the pin, and a main spring that extends the tip assembly, wherein the retractable alignment sleeve spring has both a spring constant and total compressive force that are lower than that of the main spring.

Abstract: In general, a Buffing Pad Centering System (“BPCS”) for centering a back plate having an edge and a front surface is described. In an example of an implementation of the BPCS, the BPCS may include a centering ring having a top boundary and a bottom boundary and a buffing pad attached to the bottom boundary of the centering ring, where the centering ring is centered on the buffing pad. The centering ring may include a cylindrical vertical member extending between the top boundary and bottom boundary, where the cylindrical vertical member has an inner cylindrical surface and an outer cylindrical surface, and where the inner cylindrical surface is capable of snuggly receiving the back plate.

Abstract: A cleaning tool includes: a tool body; and an insertion part provided projecting from the tool body, the insertion part being configured to be movable in a predetermined direction with respect to the tool body, the insertion part including a head unit, the head unit being configured to press a cleaning element against a cleaning target with a pressing surface, wherein by relatively moving the tool body and the insertion part, the cleaning element is supplied and recovered, and the head unit is rotated in a rotation direction with the predetermined direction as an axis, the head unit includes a head member and a tubular member, the head member including the pressing surface, the head member being inserted into the tubular member with the pressing surface in a projected state, the cleaning element is stretched around the pressing surface.

Abstract: An optical connector cleaning tool includes a supply reel (11) having a belt-like cleaning cloth (3), and a winding bobbin (12) for winding the cleaning cloth (3). The optical connector cleaning tool also includes a housing (7) which rotatably supports the supply reel (11) and winding bobbin (12), a cleaning head (13) which comes in contact with the cleaning cloth (3), and a pressing member (5) which supports the cleaning head (13) and moves in a longitudinal direction with respect to the housing (7). The optical connector cleaning tool further includes a slide spring (53) which biases the pressing member (5) forward, and a transmission mechanism (33) which transmits an action of the pressing member (5) to the winding bobbin (12). The transmission mechanism (33) includes a rack (32) on the side of the pressing member (5), and a pinion on the side of the winding bobbin (12).

Abstract: A fiber optic component cleaning device includes a body, a feed spool mounted for rotation in the body, a take-up spool mounted for one-way rotation in the body and a central support assembly. A plunger is mounted for movement in the central support assembly and a drive is operably connected to the take-up spool and to the plunger. A cleaning material is wound onto and fed from the feed spool and to the take-up spool. A reservoir assembly is mountable to the body to apply a cleaning solution to the cleaning material.

Abstract: An electric power tool is disclosed. In an embodiment, the electric power tool includes a tool, a tool holder part and a main body with a plurality of rivets integrated with the main body. The rivets include rivet shafts of a cross section for producing a positive-locking rivet joint of the tool with the tool holder part, wherein the tool and the tool holder part have circular openings which are aligned with each other, and wherein the rivet shafts are positioned aligned with the openings on the main body and protrude through the aligned openings.

Abstract: The subject invention is directed to a class of electric hybrid drives that can be retrofit easily to cars and trucks to reduce transportation costs. Certain embodiments include mechanisms for attachment to an existing powertrain, regenerative braking, on-the-road optimization of transportation costs depending on road and route conditions, or an operational mode in which motive power for a vehicle is solely derived from electric energy stored in a battery.

Abstract: A game ball feeder for delivering balls to a game ball throwing machine. The game ball feeder includes a base, a support frame attached to the base, a drive mechanism attached to the support frame, and a support rod attached to the support frame. A rotatable ball housing operatively engages the support rod, is mounted in a substantially horizontal configuration, and includes a plurality of cylindrical shaped ball holding sections. Each ball holding section can include a wall defining an entry opening and an exit opening with the entry opening positioned vertically higher than the exit opening. A transfer path can be operatively attached to a support frame and aligned to accept a ball from one of the exit openings. Further, a ball indexing element can be shaped and positioned to control the movement of the balls within at least one of the ball holding sections.

Abstract: An apparatus for treating skin has a console with a user input device and a handpiece assembly. The handpiece assembly is configured to treat skin. A fluid line provides fluid communication between the console and the handpiece assembly. A manifold system is coupled to the console and controlled by the user input device. The manifold system is configured to hold releasably a plurality of fluid sources and deliver fluid from at least one of the plurality of fluid sources to the handpiece assembly.

Abstract: The invention comprises an outer sphere, an inner sphere located within and movable relative to the outer sphere, a shaft attached to the inner sphere, jet impulse devices operatively connected to the equator of the inner sphere, and springs located to transmit the impulses via the shaft to the outer sphere. Both spheres are partially filled with liquid, and partially filled with compressed air.

Abstract: A system for detecting an optimal timing for cleaning duty solar panels is provided herein. The system includes: a simulation sensor and a reference sensor which include photovoltaic cells identical to the photovoltaic cells of the duty solar panels, wherein the simulation sensor is configured to generate a simulation electrical signal which simulates electricity signal generated by the duty solar panels; and wherein the reference sensor is configured to generate a reference electrical signal which simulates electricity signal generated by the duty solar panels in a clean condition; and protection means configured to selectively expose the reference sensor for a specified period of time, wherein the system is configured to compare the simulation signal and the reference signal when the reference sensor is uncovered and provide an indication that the duty solar panels should be cleaned if a difference between the simulation and the reference signals exceeds a predefined level.

Abstract: On a workpiece there are first longitudinal portions which are rotationally symmetrical with respect to the continuous longitudinal axis and are intended to be ground by way of centerless grinding. The workpiece also has a second longitudinal portion, which is not rotationally symmetrical with respect to the longitudinal axis and would lead to imbalance in the event of rotation. Therefore, a balancing weight having a radially extending recess is placed on the second longitudinal portion. The balancing weight contributes largely to uniform distribution of the rotating masses, thus reduces the imbalance to a very low residual imbalance and allows reliable and precise centerless grinding.

Abstract: A non-welding device powered by a welding power supply is provided. One device, a power tool, includes a connector configured to be coupled to a trigger receptacle of a welding power supply and to receive power from the trigger receptacle. The power tool also includes control circuitry electrically coupled to the connector and configured to receive power from the welding power supply and to use the power to operate the power tool.

Abstract: A cleaning attachment configured for mounting a conventional household sponge to the chuck of a cordless electric screwdriver. The cleaning attachment relieves a person of the manual labor involved in scrubbing a surface with a sponge by hand. The cleaning attachment also eliminates the need to purchase a specialized sponge that is designed and sold specifically to operate in conjunction with a rotary tool. The sponge can be easily dismounted, flipped over, and reattached for continued use.

Abstract: The present invention provides a cleaning apparatus including at least one dust particulate absorber device(s) and a wiper device. The at least one dust particulate absorber device(s) is used for absorbing foreign matters, the wiper device is used for wiping and cleaning, and the dust particulate absorber device(s) and the wiper device are arranged in the horizontal direction.

Abstract: In some embodiments, an apparatus for cleaning a substrate is provided that includes (1) a substrate chuck configured to support a substrate with a front side of the substrate accessible; (2) a buff pad assembly configured to support a buff pad having a diameter smaller than a diameter of the substrate; and (3) a swing arm coupled to the buff pad and configured to position and rotate the buff pad along the front side of the substrate, and control an amount of force applied by the buff pad against the front side of the substrate during cleaning. The substrate chuck, buff pad assembly and swing arm are configured to buff clean the substrate. Numerous additional aspects are disclosed.

Abstract: A cleaning device includes a cleaning portion and a driving portion. One end of the cleaning portion includes a cleaning head configured to clean an object to be cleaned. A spiral shaped guide groove is defined in an outside surface of the cleaning head. The driving portion includes a protruding portion. The protruding portion is movably received in the spiral shaped guide groove. When the cleaning head is resisted to the object to be cleaned, and the driving portion moves toward the object to be cleaned, the protruding portion slides along the spiral shaped guide groove to drive the cleaning head to rotate to clean the object to be cleaned.

Abstract: A substrate cleaning apparatus for reducing a limitation of a layout of a chemical liquid nozzle and a rinsing liquid nozzle, while enabling a load cell to be installed at an optimal location and achieving a larger adjustment range, is disclosed. The substrate cleaning apparatus includes a roll assembly including at least a roll cleaning member to be brought into contact with a substrate and a roll arm that rotatably supports the roll cleaning member, a support arm for supporting the roll assembly; an adjustment screw extending through the support arm and screwed into the roll assembly; and a screw support that fixes a relative position of the adjustment screw in a vertical direction with respect to the support arm and rotatably supports the adjustment screw.

Abstract: A hand held dusting apparatus for use with a motor provided with a rotating axle, such as a variable speed drill, includes an elongated extension member attachable at one end to the rotating axle and a dusting member having a body section attachable to the opposite end of the elongated extension member and a dusting section constructed having multiple strands of synthetic fiber materials extending from the body section. In a preferred embodiment the apparatus further includes a tubular hand guide member fitted about the extension member and constructed to slide along the extension member. In another preferred embodiment the body of dusting section has a mid-section that can be pivoted to allow the dusting elements to rotate about an axis set at an angle to the axis of the extension member.

Abstract: A photomask cleaning device includes a stage, a fluid dispenser, a scrubbing unit, a cover and a fixing unit. The fluid dispenser includes a direct dispensing unit disposed correspondingly to the scrubbing unit, and an oblique dispensing unit obliquely spraying water onto a photomask. Majority of the particles can be removed with the combined application of the oblique dispensing unit and the scrubbing unit.

Abstract: A cleaning tool for cleaning internal optical components of a fiber optic connector includes a cleaning strip that is advanced past one or more optical surfaces of the connector to wipe the connector free of contaminants. The cleaning tool includes a drive mechanism that is operated by rotating a drive, thereby advancing the cleaning strip along a cleaning strip path and into contact with the one or more optical surfaces. The cleaning tool comprises a cleaning tip that functions to place the cleaning strip in proper alignment within the connector in order to clean the optical surfaces that are not available for cleaning at the endface of the connector. Alignment features are provided in the cleaning tip to properly position the cleaning strip relative the optical surfaces.

Abstract: A device for removing impurities from shredded plastic has a first and second cleaning disk with first and second cleaning surfaces, the cleaning surfaces are opposite each other and delimit a cleaning gap. A drive device rotates the cleaning disks, and shredded plastic is fed between the cleaning disks. The cleaning surfaces have a plurality of cleaning ribs extending between an inner and outer edge of the cleaning surfaces, wherein at least one flank of the cleaning ribs is angled or curved relative to the axial direction of the respective cleaning disk, and a plurality of cleaning bars running transversally to the direction of extension of the cleaning ribs are arranged between at least some cleaning ribs neighboring each other.

Abstract: A method for cleaning a substrate is provided. The method initiates with disposing a fluid layer having solid components therein to a surface of the substrate. A shear force directed substantially parallel to the surface of the substrate and toward an outer edge of the substrate is then created. The shear force may result from a normal or tangential component of a force applied to a solid body in contact with the fluid layer in one embodiment. The surface of the substrate is rinsed to remove the fluid layer. A cleaning system and apparatus are also provided.

Abstract: A powered hand tool is adapted to use a variety of interchangeable rotary tools to assist in outdoor activities. Either of two basic tool designs can be utilized for activities including garden tilling, brushing and cleaning, auguring or post hole digging, and auto finishing and polishing. In one embodiment, an adjustable shroud is utilized along with a tiller construction to change the viewing angle of the working tiller tines to facilitate use by operators of different heights, including a kneeling position. The ability to utilize tow torque and low speed assists in avoiding accidental damage to underground wires and, if encountered, the reversibility of the drive assists in untangling the wires.

Abstract: Multi-directional wiping elements are disclosed. The wiping elements comprise intersecting squeegee segments that provide top wiping squeegee edges and side wiping squeegee edges. Devices utilizing the multi-directional wiping elements of the present invention can include bristles that are configured to simultaneously wipe a working surface with the wiping elements. In accordance with the embodiments of the invention, the multi-directional wiping elements are utilized in a toothbrush cleaning head that is configured to be operated manually or, alternatively, is motorized and is configured to rotate, oscillate, vibrate and/or move according to a combination thereof.

Abstract: A substrate cleaning device 1 includes a substrate holding unit 10 configured to hold a substrate W, a first cleaning unit 11 having a first cleaning member 11a caused to come into contact with a first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, a second cleaning unit 12 having a second cleaning member 12a caused to come into contact with the first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, and a controller 50 configured to control the first and second cleaning units 11, 12 so that, when any one of the first cleaning member 11a and the second cleaning member 12a cleans the first surface WA of the substrate W held by the substrate holding unit 10, the other cleaning member is at a position apart from the substrate W held by the substrate holding unit 10.

Abstract: There is disclosed a substrate processing apparatus which is capable of detecting whether a substrate, such as a wafer, supported by a fluid is properly present in a predetermined processing position or not. The substrate processing apparatus includes at least one distance sensor configured to measure a distance between a scrubber and a hydrostatic support structure; and a processing controller configured to calculate a gap between the hydrostatic support structure and the surface of the substrate from a measured value of the distance and determine whether the gap falls within a predetermined range or not.