Abstract: A cassette for accommodating substrates may include a cassette body for accommodating the substrates; a door for selectively sealing the cassette body; magnetic units for primarily coupling the door to the cassette body; and latch units for secondarily coupling the door to the cassette body. Since the door completely contacts the cassette body, penetration of a contamination source from an external environment may be fundamentally prevented. Also, since the door is double coupled to the cassette body by the magnetic units and the latch units, firm coupling may be achieved.

Abstract: A cassette for accommodating substrates may include a cassette body for accommodating the substrates; a door for selectively sealing the cassette body; magnetic units for primarily coupling the door to the cassette body; and latch units for secondarily coupling the door to the cassette body. Since the door completely contacts the cassette body, penetration of a contamination source from an external environment may be fundamentally prevented. Also, since the door is double coupled to the cassette body by the magnetic units and the latch units, firm coupling may be achieved.

Abstract: A substrate storage container includes: a container body molded of molding material in a front open box type for storing substrates; a door element fitted to an opening at the front of the container body; and a compressively deformable gasket for sealing between the container body and the door element. The opening of the container body is projected sidewards and outwards forming a rim portion. A sealing surface for the gasket is formed on an inner surface of the rim portion. The container body is formed with a reinforcing rib directed toward the rim portion. An opposing portion of the reinforcing rib that opposes the rim portion of the container body is reduced in thickness so as to prevent a depression from forming in the sealing surface of the rim portion during molding the container body.

Abstract: In a substrate storage container, a container body for storing semiconductor wafers has an attachment structure on a roof so that a robotic flange as a transport component is removably attached to attachment structure. Attachment structure includes multiple pairs of supporting rails opposing each other, disposed on roof, a multiple number of guide pieces provided on roof and interference/engagement parts each formed with guide piece. Guide piece and interference/engagement part are combined forming a forked portion in the front part. Transport component includes a main part member supported between multiple pairs of supporting rails. Main part member is formed with circulation openings for fluids and incorporates an elastic engagement piece that is elastically deformable so as to interfere with forked portion.

Abstract: Packaging device (10, 10?, 10?) for packaging at least one object (12, 12?, 12?), that is essentially flat, in particular a valuable technical object, such as a lithium-ion cell, including: a bottom plate (14) having at least one first side rim (42), which is linear in regard to at least a part thereof, and at least one first cover plate (20) having at least one first side rim (46) which is linear in regard to at least one part thereof, which is hingeably linked to the first side rim (42) of the bottom plate (14) such that the cover plate (20) can be hinged between a closed position in which the cover plate at least partially covers the bottom plate, and an open position in which the cover plate is not opposite to the bottom plate, characterized in that the bottom plate (14) or the at least one cover plate (20) comprises on one side a cushioning layer (16, respectively 22), wherein the cushioned side faces the object (12, 12?, 12?) when said object is in the packaging and the at least one cover plate (20) is

Abstract: A multicolor molding article is integrally formed of first and second molding materials in combination. At least part of the peripheral portion in the boundary between a first molding part of the first molding material and a second molding part of the second molding material is formed with a thin projected piece. The tapering inclined angle of the thin projected piece is specified to range from 5° to 40°.

Abstract: A semiconductor chip holding tray, includes: a base substrate; a first projection provided on the front surface of the base substrate, and disposed on a short edge side of the perimeter of a holding area, has a depression; a first raised portion provided on the front surface, and is disposed on a long edge side of the perimeter; a triangular cross-section second projection provided on the rear surface of the base substrate, and is disposed on a short edge side of the perimeter of a holding area; and a second raised portion provided on the rear surface, and is disposed on a long edge side of the perimeter of the holding area. The tray is arranged such that when two trays are stacked the second projection is fitted in the depression of the first projection.

Abstract: Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism and an improved bottom holding mechanism for automation. The side protection to the wafers is with multiple staggered inner and outer walls. The improved cover design improves alignment of the top and bottom housings and minimizes rotation of the housings in transit or motion. The housings have a recessed tab ramp feature with bi-directional locking that also increases the rigidity of the containment device when the two housings are assembled. The improved bottom holding mechanism for automation is an integrated feature that is molded into the bottom housing and not assembled in a secondary operation. The molded integration reduces tolerance errors that are present in assembling multiple pieces and joining multiple pieces.

Abstract: A wafer container includes a container body and a door joined with opening of the container body for protecting wafers therein. At least one latch component is disposed in the door, and each latch component includes an oval cam and a pair of moving bars, a first end of each moving bar connecting to one of the two opposite sides of the oval cam and a second end of each moving bar having a guiding structure, a pair of moving grooves being disposed between the first end and the second end of each moving bar, at least a pair of rollers being disposed on the door and each roller being embedded in each moving groove of moving bar, and a locating spring being formed as an integral part of the moving bars.

Abstract: A packing structure includes a housing and a cushion portion. The housing includes a bottom plate and a sidewall while the cushion portion is disposed on the bottom plate of the housing. A groove and a jaw portion are formed on an end portion of the cushion portion. The jaw portion is located on a side of the groove facing the sidewall and extends away from the bottom plate. A first tongue plate is formed on the sidewall of the housing and bends inward. A free end of the first tongue plate enters the groove through an opening of the groove, wherein a backside of the jaw portion interferes with the first tongue plate to restrict the first tongue plate from leaving the groove. When the cushion portion is under external forces and moves away from the bottom plate, the first tongue plate will support a bottom inner surface within the groove to restrict a displacement of the cushion portion away from the bottom plate.

Abstract: A mask transport system is configured to transport a mask into and out of a lithographic apparatus. The mask transport system includes a first container configured to shield a top side and a bottom side of the mask. At least a portion of the container is at least partially translucent for radiation having a predetermined wavelength used to detect contamination on the top side or the bottom side of the mask when the mask is shielded by the first container. The mask transport system also includes a second container configured to enclose the first container. The second container includes a first part defining a first opening and an openable cover that covers the first opening. The cover is configured to open and release the first container within the lithographic apparatus or at an interface with the lithographic apparatus.

Abstract: A corrugated paper sheet buffer article for package comprising two tubular upper corner columns arranged in parallel, two tubular lower corner columns arranged below and in parallel with the two upper corner columns, and a plurality of spacing members arranged in parallel between the upper and lower corner columns. A plurality of first insertion grooves are provided along lengthwise directions of the upper and lower corner columns, respectively, and four corner ends of each of spacing members are inserted into the first insertion grooves on the upper and lower corner columns, respectively.

Abstract: A container having a top cover and a bottom cover is provided, which includes a canopy disposed on the bottom cover to form therewith a space to accommodate an article. A plurality of locators is disposed on a surface of the bottom cover so that when the bottom cover is tightly combined with the top cover, the locators are clipped between the bottom cover and the top cover to orient the canopy in a fixed position.

Abstract: An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

Abstract: An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

Abstract: A box for transporting is suitable for preserving a plurality of substrates. The box for transporting includes a box body and at least one partition plate. The box body has a bottom part and a plurality of first sidewalls. A plurality of first bumps arranged in array is disposed on the bottom part, and the first bumps define a plurality of supporting regions. The first sidewalls are connected to the bottom part, and a plurality of major grooves is disposed in inner surfaces of the first sidewalls, wherein a first preserving space is surrounded by the bottom part and the first sidewalls. The partition plate is leant against the supporting regions and inlayed into the major grooves, so as to divide the first preserving space into a plurality of preserving sub-spaces.

Abstract: A container for transporting glass sheets includes a bottom structure, a back wall and first and second side walls coupled to the back wall, all three walls extending upwardly from the bottom structure. The container also includes a back support structure coupled to the back wall that is configured to constrain a plurality of glass sheets. The back support structure includes at least one back support member that extends in a substantially vertical direction and includes at least one offset member that includes a first/second side defining a first/second length extending inwardly a first/second distance from the back support member. The second length is greater than the first length. The back support structure also includes at least one foam rail coupled to a foam rail support member. The foam rail support member is coupled to the offset member.

Abstract: A structure for racking substrates includes first to fourth main legs isolated from one another at intervals wider than widths of both long sides and both short sides of a substrate, first to fourth protrusions respectively protruded from the first to fourth main legs in a direction of the long sides or the short sides of the substrate, a first side support bar coupled to the first and second protrusions and supporting an edge of one long side or one short side of the substrate, a second side support bar coupled to the third and fourth protrusions and supporting an edge of the other long side or the other short side of the substrate, at least one auxiliary leg disposed between the first and second main legs, or the second and third main legs, or the third and fourth main legs, or the fourth and first main legs, and at least two central support bars coupled to the auxiliary leg, extended parallel to the long sides or the short sides of the substrate, and supporting a central portion of the substrate.

Abstract: When the position of a substrate is shifted, the substrate is made to return to an original position by enabling the position of the substrate to be controlled using an elastic piece which protrudes inside from a vertical direction part of a frame. Further, a coupling piece is provided extending in a vertical direction and having both ends thereof coupled to a horizontal direction part of the frame, and a protruding part protruding inside a substrate container is provided on the coupling piece. Then, this protruding part is configured to have an inclined face which is inclined in a direction intersecting the substrate and enabled to come into contact with the periphery of the substrate, and thereby this inclined face guides the substrate to reduce the friction of the substrate and to control the position of the substrate.

Abstract: The invention relates to a device having a first holding instrument (1) for a first wafer (5) and having a second holding instrument (7) for a second wafer (9) arrangeable parallel to the first wafer (5), the two holding instruments (1, 7) being fixable relative to one another. According to the invention, at least one of the holding instruments (1, 7), preferably both holding instruments (1, 7) respectively, comprises at least one gel film (2, 8) for holding the associated wafer (5, 9). The invention furthermore relates to the use of a gel film for holding integral wafers.

Abstract: Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism and an improved bottom holding mechanism for automation. The side protection to the wafers is with multiple staggered inner and outer walls. The improved cover design improves alignment of the top and bottom housings and minimizes rotation of the housings in transit or motion. The housings have a recessed tab ramp feature with bi-directional locking that also increases the rigidity of the containment device when the two housings are assembled. The improved bottom holding mechanism for automation is an integrated feature that is molded into the bottom housing and not assembled in a secondary operation. The molded integration reduces tolerance errors that are present in assembling multiple pieces and joining multiple pieces.

Abstract: A wafer container comprising a base and a cover that nest together. The base includes a staggered wall structure composed of inner and outer walls. The staggered wall structure is arranged so that forces from side impacts are absorbed principally by outer wall segments. A rib on the cover restrains the outer wall segments from flexing beyond the inner wall diameter. Reference tabs on the base facilitate alignment of the base to the cover.

Abstract: A slide glass storage device including: a supply tray which has a supply holding space determined by a longer edge upper limit allowed for a longer edge of a slide glass and a shorter edge upper limit allowed for a shorter edge of the slide glass and on which a slide glass to be supplied to a treatment unit operable to perform a predetermined treatment is mounted; a discharge tray which has a discharge holding space determined by a longer edge longer than the longer edge upper limit and a shorter edge longer than the shorter edge upper limit and on which a slide glass having been subjected to the treatment in the treatment unit and being to be discharged is mounted; and a support unit supporting the supply tray and the discharge tray.

Abstract: A cardholder for a card such as a gift debit card comprising an envelope and a folded-up sheet containing terms and conditions, the sheet being attached to the envelope, the envelope having a pocket adapted to receive and hold said card.

Abstract: A reticle POD, comprising a top cover, a bottom cover, and a plurality of supporting components deployed in the four corners of the bottom cover, the supporting component comprising: a base body perpendicularly assembled, on two sides of which being disposed with mounting blocks; a pair of elastic elements respectively placed on the base body; a pair of leading elements connecting respectively to the horizontal extension of the elastic elements and then extending lengthwise to form a tip, a first bevel and a second bevel being formed on the side of the tip located on the inner side of the base body; a supporting base plate, the first and the second ends of which being connected to the second bevel of the leading element and a supporting pillar being disposed on the third end of the supporting base plate.

Abstract: A container is disclosed including a plurality of seal blocks adapted to militate against the entry of a fluid into coolant channel headers formed in bipolar plates during a dip coating process, wherein the seal blocks are interconnected and include a fastening portion and a sealing portion, the sealing portion capable of being interchanged.

Abstract: Certain example embodiments relate to glass racks that are suitable for both autoclaving and shipping. In certain example embodiments, a glass rack may include a metal base having a grooved bottom connected thereto and a metal upright support substantially parallel to the base. The upright support may include a plurality of fingers covered in a protective material (e.g., rubber tubing) that extend therefrom. The spaces between the fingers may correspond with grooves of the grooved bottom, thereby cooperating to accommodate a plurality of panels (e.g., assemblies prior to autoclaving, laminated glass panels formed by autoclaving, etc.). The grooved bottom may be connected to the base so as to allow for expansion and/or contraction of the metal base relative to the grooved bottom. The rack, as a whole, may be capable of withstanding the temperature and pressure conditions of an autoclave, while also providing sufficient protection for the panels during shipping.

Abstract: A device for transporting various articles has a container with a bottom portion and two opposing sidewall portions extending vertically from the bottom portion. A plurality of locating features may be placed within the container, upon a pair of opposing sidewalls. Securing sheets are adapted to fit within the locating features to accommodate a number of different articles. The securing sheets may be flexible so that they can expand to accommodate an article and to provide a compressive-type securing force to keep the article in place once inserted. Some embodiments contain securing sheets which have less vertical height than the sidewall portions of the container so that articles attached to a pedestal can be securely held within the device. A means for rolling the device may be attached to the bottom portion.

Abstract: A container having a top cover and a bottom cover is provided, which includes a canopy disposed on the bottom cover to form therewith a space to accommodate an article. A plurality of locators is disposed on a surface of the bottom cover so that when the bottom cover is tightly combined with the top cover, the locators are clipped between the bottom cover and the top cover to orient the canopy in a fixed position.

Abstract: A panel receiving device enables anti-electrostatic ions to contact surfaces of panels. The panel receiving device includes at least three panel guides arranged at inner sides within an exterior case. Each panel guide includes support plates for supporting and securing the panels, wherein the support plates contact a minimal area of each of the panels.

Abstract: A substrate storage container includes a container body capable of storing a plurality of substrates in array, a lidding body, and a retainer for retaining substrates therebetween. The retainer includes a plurality of flexible and elastic pieces that are extended from the interior side of the lidding body in the direction of substrates stored in the container body and arranged in the direction of the array of the plurality of substrates, and holding groove pieces each formed with the elastic piece for touching and holding the rim of the substrate. The elastic piece with holding groove piece is gradually curved outwardly with respect to the width direction of the substrate from the interior side of the lidding body toward the substrate, so as to reduce the contact-holding area of the holding groove piece with the rim of the substrate.

Abstract: A pallet for packing a glass plate include a base part which is disposed at a bottommost portion, for supporting from below a plurality of glass plates piled one upon another in an upright posture, and has a fork insertion portion for insertion of forks of a forklift. The pallet also has a backside part rising from a rear side of the base part, for supporting the glass plates from a rear thereof, and a pedestal part mounted in engagement with at least one of the base part and the backside part so as to receive bottom side portions of the glass plates, in which a lowermost portion of the pedestal part is set lower than a substantial top surface of the base part.

Abstract: This invention is related to a carrier of reticle pod. The carrier of reticle pod comprises an upper cover and a lower cover, and the upper cover is configured to be coupled to the lower cover to form an interior space for accommodation. The lower cover includes several pairs of guide tracks disposed on two opposite lateral sides of inner surface of the lower cover. Clapboards are set into the lower cover via the guide tracks to separate the space for accommodation into a plurality of spaces for accommodation for storing reticle pod. Fixing elements including a clipping portion and a resisting portion are disposed on the top surface of the inner surface of upper cover. When the upper cover closes the lower cover, each fixing element of the upper cover is configured to be coupled to each reticle pod stored in the carrier.

Abstract: An improved substrate transport pod for storing or transporting semiconductor wafer substrates during semiconductor wafer processing has a main body defined by a plurality of side panels. A substantial portion of at least one of the side panels being formed of a semi-permeable membrane allowing any corrosive gas molecules introduced to the interior of the pod to diffuse out of the transport pod through the semi-permeable membrane while preventing particulate contaminants from entering the transport pod.

Abstract: Disclosed is a protective film-integrated pouch wherein a protective film to protect a display panel and a bag to cover and package the display panel are integrally formed. The protective film-integrated pouch includes a rectangular body, including upper and lower layers, the body having three sealed edges and one opened edge to define an opening, allowing insertion of a display panel into the pouch, wherein each of the upper layer and the lower layer includes a base layer made of a metallic material, an outer surface layer disposed on the base layer, and an inner surface layer disposed on the outer surface layer, wherein the inner surface layer contacts the display panel and is made of a mixed polyethylene resin.

Abstract: An embodiment of the invention provides a cassette comprising a top plate, a base plate, a plurality of posts arranged between the top plate and the base plate and defining an operation space, a securing device comprising a stop mechanism and a clamping mechanism and arranged along with one post. The stop mechanism comprises a stop projection provided on an outer side of the one of posts, a stop bar parallel to the one post and slidable disposed through the stop projection, and a stop block disposed on a side of the stop bar. A lower end of the stop bar extends beyond a plane of the base plate when the stop block is bearing against an upper surface of the stop projection.

Abstract: The present invention relates to a photomask case structure, and more particularly to a photomask case able to firmly fix position of a photomask, which includes an upper cover, a lower cover, supporters and position fixing pieces. Accordingly, when a photomask is retained within the photomask case, then elastic holding portions of the position fixing pieces are used to elastically hold one side of the photomask, beveled edges of the position fixing pieces are used to hold another side of the photomask, and finally press portions of the elastic holding portions are used to elastically press down on the surface of the photomask, thereby firmly retaining the photomask within the photomask case, and preventing impact damage to the photomask from occurring.

Abstract: A thin plate container includes: a tray stack for holding and housing semiconductor wafers in spaces between a plurality of stacked, removable loading trays; and an external container for housing the tray stack. At opposite ends of each of the loading trays, a pair of grips for engagement by a processing arm of an external apparatus is provided. The external container includes: a container body; a lid; a sealing material provided between the lid and the container body to seal the inside; a pair of tray stack supporters for supporting the tray stack; and tray stack retainers for holding and supporting the tray stack housed in the container body from above and below.

Abstract: A wafer container comprising a base and a cover that nest together. The base includes a staggered wall structure composed of inner and outer walls. The staggered wall structure is arranged so that forces from side impacts are absorbed principally by outer wall segments. A rib on the cover restrains the outer wall segments from flexing beyond the inner wall diameter. Reference tabs on the base facilitate alignment of the base to the cover.

Abstract: A method and apparatus for installing a solar array on the roof of a residence or the like which uses a pan in the installation of the solar modules that make up the array. The pan may also be used as part of the packaging of the solar modules. The pan is comprised of a length of material having a trough-like cross-section. For packaging, shipping inserts are fitted into the trough of each pan. Opposite edges of a solar module are fitted into respective slots in the inserts of two facing pans and a protector is fitted over each end thereof to form a package for shipping. Once on site, the packages are disassembled, the pans are mounted on the roof, and the modules are connected to the pans to form the array.

Abstract: The wafer container includes a container body, which is disposed with a plurality of slots for receiving a plurality of wafers therein and an opening is formed by one sidewall of which for importing and exporting the plurality of wafers, and a door includes an outer surface and an inner surface, which is joined with the opening of the container body via the inner surface for protecting the plurality of wafers within the container body. A latch component is disposed in a platform of the inner surface of the door, which includes an oval cam, a pair of moving bars contacting two ends of the oval cam, at least a pair of roller disposed in the platform and each of roller fixed in a slide groove of each moving bar, and a locating spring being an integral part of each moving bar for controlling the turning of the oval cam to drive the each moving bar.

Abstract: In some aspects, a method is provided for mapping contents of a substrate carrier. The method includes (1) moving a carrier to a sensor; and (2) determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier. Numerous other aspects are provided.

Abstract: In one embodiment, a method can include providing first and second intermediate structures, each having first and second surfaces. Also, the method can include placing the first surface of the first intermediate structure adjacent to the first surface of the second intermediate structure, such that the first and second intermediate structures are in a stacked relationship. Additionally, the method can include simultaneously removing at least a portion of each of the second surfaces of the first and second intermediate structures while in the stacked relationship. Furthermore, the method can include forming a plating layer on each of the first and second surfaces of each of the first and second intermediate structures. Moreover, the method can include forming a magnetic layer on the second surface but not the first surface of each of the first and second intermediate structures.

Abstract: A motor vehicle window panel or windshield has a lower edge portion with an attached extruded plastic molding having a downwardly projecting portion defining a cavity with an inlet gap for receiving a projecting fin on a cowl panel. A shipping insert of extruded substantially rigid plastics material supports the windshield and attached molding during shipping and handling and includes a base portion adapted to seat on shipping container support members and a tongue portion spaced above the base portion and projecting through the inlet gap into the cavity to support the molding. The insert also has an upper portion supporting a solid locating flange of the molding attached to a bottom edge of the windshield. The base portion of the insert has inclined opposite edge surfaces to facilitate sliding on the support members, and also has an upwardly projecting hook rib for retaining the insert on the molding.

Abstract: A semiconductor wafer storage case is disclosed that includes plural support members that are spaced at predetermined intervals with respect to each other and are each configured to come into contact with a peripheral edge region of a first face of a semiconductor wafer, and an elastic member that elastically supports the support members with respect to each other and is configured to elastically deform to come into contact with a second face of the semiconductor wafer and press the semiconductor wafer onto a corresponding support member.

Abstract: A shipping carrier having a frame with an elongated tube and an elongated retainer attached to the tube. Dunnage made of a compressible material is attached to the retainer and that dunnage has a plurality of space for recesses, each of which has spaced-apart sides and are dimensioned to receive an edge of a component. A guard is attached to the dunnage so that the guard overlies at least a portion of one side of the dunnage recess. Additionally, a subcomponent may be attached to the dunnage with a screw anchor.

Abstract: Tubular silicon members advantageously formed by extrusion from a silicon melt or by fixing together silicon staves in a barrel shape. A silicon-based wafer support tower is particularly useful for batch-mode thermal chemical vapor deposition and other high-temperature processes, especially reflow of silicate glass at above 1200° C. The surfaces of the silicon tower are bead blasted to introduce sub-surface damage, which produces pits and cracks in the surface, which anchor subsequently deposited layer of, for example, silicon nitride, thereby inhibiting peeling of the nitride film. Wafer support portions of the tower are preferably composed of virgin polysilicon. The invention can be applied to other silicon parts in a deposition or other substrate processing reactor, such as tubular sleeves and reactor walls. The tower parts are preferably pre-coated with silicon nitride or polysilicon prior to chemical vapor deposition of these materials, or with silicon nitride prior to reflow of silica.

Abstract: A loading tray 13 supports at least one thin plate safely and reliably. It comprises a first loading portion 18, provided on one side thereof, on which at least one thin plate is loaded; a second loading portion 19, provided on the other side thereof, fitted to the first loading portion 18 of adjacent loading tray 13 to form a housing space sealed off from the external environment, for sandwiching the thin plate within the housing space, and for loading the thin plate on the loading tray when the loading tray is placed upside-down; a hook 30, provided on one side thereof, for coupling with an adjacent loading tray 13; and a hook locking mechanism 31, provided on the other side thereof, for coupling with the hook 30 of an adjacent loading tray 13. As many loading trays 13 as the number of the thin plate is stacked to constitute a thin plate container 11. The thin plate container 11 can support the thin plate from both upper and lower sides.

Abstract: A clean container having an elastic positioning structure includes a support element and a back positioning element on a base. A cover is disposed for covering the base, and a positioning part is disposed between the cover and the base, which has two elastic arms extended laterally, and each elastic arm extends with a pushing surface respectively. When a plate of brittle material is placed on the base, and the cover is closed, the pushing surfaces are elastically pressed against and push the plate respectively, so that the plate moves backwards and presses against the back positioning element. Therefore, the plate is prevented from being damaged. Additionally, the base, the cover, and the positioning part are made of a conductive material, so that the electrostatic charges for the plate is conducted out of the clean container, and has a protective function of an electrostatic discharge.

Abstract: A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.