Abstract: A method of forming an integrated circuit (IC) includes forming a first and second plurality of spacers on a substrate, wherein the substrate includes a silicon layer, and wherein the first plurality of spacers have a thickness that is different from a thickness of the second plurality of spacers; and etching the silicon layer in the substrate using the first and second plurality of spacers as a mask, wherein the etched silicon layer forms a first plurality and a second plurality of fin field effect transistor (FINFET) channel regions, and wherein the first plurality of FINFET channel regions each have a respective thickness that corresponds to the thickness of the first plurality of spacers, and wherein the second plurality of FINFET channel regions each have a respective thickness that corresponds to the thickness of the second plurality of spacers.
March 17, 2011
Date of Patent:
August 20, 2013
International Business Machines Corporation
Ming Cai, Dechao Guo, Chung-hsun Lin, Chun-chen Yeh
Abstract: An environmental control system includes sensors in a room for sensing the environment and a sensor which may be a sound sensor, for detecting the presence or absence of a person in the room. With the aid of a digital computer, the presence or absence of a person in the room as determined by the sound sensor enables the computer to control the environment and also to actuate an alarm when a presence is sensed during an unauthorized time period. The system is applicable to one or more rooms.