Abstract: A microscope apparatus includes an objective and an automatic focusing device. The automatic focusing device is an automatic focusing device of an active type that irradiates a specimen with automatic focusing light via the objective, and the automatic focusing device is configured in such away that an illumination light axis of the automatic focusing light passes through a position distant from an optical axis of the objective.

Abstract: Scanned illumination allows for capturing 3-dimensional information about an object. A conventional reflection (or transmission) bright field (or fluorescence, darkfield, polarizing, phase contrast or interference) microscope is configured to use laterally scanned illumination (for example by moving an array in front of the light source) to scan an extended object. A pixelated detector may capture a series of images at the exit pupil of a microscope objective, and this series of images may be processed to form a Light Field image of the object. Or, a microscope is configured to provide scanned illumination to an extended object, while applying extended depth of field and 3D depth localization encoding to the resulting set of images. Thus multiple encoded images are generated. These images are decoded and combined, with custom digital signal processing algorithms, to form a 3D volume rendering or animation.

Abstract: A method for autofocusing a microscope at a correct autofocus position in a sample includes the steps: generating a reference pattern by an autofocus light device, projecting the reference pattern towards a sample, whereby the reference pattern is backscattered by at least two interfaces being located at or close to the sample, projecting the backscattered reference pattern towards a detector which provides spatial resolution, obtaining a superposition of a number of detection patterns, each detection pattern related to one of the interfaces, on the detector, analyzing the superposition of detection patterns to identify at least one autofocus detection pattern related to at least one of the interfaces, and analyzing the at least one autofocus detection pattern to determine the direction and/or magnitude of deviation of the microscope's current focus position from the correct focus position.

Abstract: One or more devices, systems, methods and storage mediums for performing continuously, full range optical coherence tomography (OCT) without losing A-lines are provided. Examples of such applications include imaging, evaluating and diagnosing biological objects, such as, but not limited to, for cardio and/or ophthalmic applications, and being obtained via one or more optical instruments, such as, but not limited to, optical probes (e.g., common path probes), catheters, endoscopes, phase shift units (e.g., galvanometer scanner) and bench top systems. Preferably, the OCT devices, systems methods and storage mediums include or involve a phase shift device including at least a galvanometer scanner. The galvanometer scanner is preferably applied with or to a voltage with a triangle shape, the voltage having continuity or absolute constant frequency to obtain continuous images without losing any A-lines.

Abstract: The invention relates to a top-cover for a controlled environmental system (CES) for use with a measurement technique that requires introducing a probe to a sample placed on a sample holder, a CES and a procedure to control the environment for a sample in a system in particular a CES during a measurement with a probe based technique.

Abstract: Methods and systems for acquiring and/or projecting images from and/or to a target area are provided. Such a method or system can includes an optical fiber assembly which may be driven to scan the target area in a scan pattern. The optical fiber assembly may provide multiple effective light sources (e.g., via a plurality of optical fibers) that are axially staggered with respect to an optical system located between the optical fiber and the target area. The optical system may be operable to focus and/or redirect the light from the multiple light sources onto separate focal planes. A composite image may be generated based on light reflected from and/or projected onto the separate focal planes. The composite image may have an extended depth of focus or field spanning over a distance between the separate focal planes while maintaining or improving image resolution.

Abstract: An imaging system is provided, which includes: a microscope; a field diaphragm; a one-dimensional beam-splitting grating, configured to duplicate a beam after passing through the first 4f system into beams with different angles; a phase modulation component, configured to perform different phase modulations to the beams with different angles respectively; a blazed grating, configured to perform dispersion to the beams with different angles passing through the phase modulation component at a dimension orthogonal to the beam-splitting grating; a micro lens array, configured to make the beams with different angles passing through the blazed grating to map to different locations on a back focal plane of the micro lens array; an image sensor, configured to image the back focal plane of the micro lens array. The system may recover three-dimensional information and multispectral information of the sample simultaneously from a single image.

Abstract: An automatic focus system for an optical microscope that facilitates faster focusing by using at least two cameras. The first camera can be positioned in a first image forming conjugate plane and receives light from a first illumination source that transmits light in a first wavelength range. The second camera can be positioned at an offset distance from the first image forming conjugate plane and receives light from a second illumination source that transmits light in a second wavelength range.

Abstract: To provide a confocal displacement sensor capable of reducing a measurement error. Light having a plurality of wavelengths is emitted by a light processing section 120. A chromatic aberration along an optical axis direction is caused by a lens unit 220 in the light emitted by the light projecting section 120. The light having the chromatic aberration converged and irradiated on a measurement object S by the lens unit 220. In the light irradiated on the measurement object S by the lens unit 220, light having a wavelength reflected while focusing on the surface of the measurement object S passes through a plurality of pinholes. Displacement of the measurement object S is calculated by an arithmetic processing section 150 on the basis of signal intensity for each wavelength of an average signal corresponding to an average of intensities for each wavelength concerning a plurality of lights passed through the plurality of pinholes.

Abstract: A diagnosis system and a diagnosis method are provided. More specifically, embodiments of the present disclosure relate to a diagnosis system for detection of corneal degeneration impacting the biomechanical stability of the human cornea and a diagnosis method for detection of corneal degeneration impacting the biomechanical stability of the human cornea. Still more specifically, embodiments of the present disclosure relate to a diagnosis system for early detection of corneal degeneration impacting the biomechanical stability of the human cornea and a diagnosis method for early detection of corneal degeneration impacting the biomechanical stability of the human cornea.

Abstract: The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, identifying a location of a feature-of-interest present in the full optical image with an additional sources, acquiring an SEM image of a portion of the sample that includes the feature at the identified location with a SEM tool, acquiring an optical image portion at the location identified by the additional source, the image portions including a reference structure, correlating the image portion and the SEM image based on the presence of the feature-of-interest and the reference structure in both the image portions and the SEM image, and transferring a location of the feature-of-interest in the SEM image into the coordinate system of the image portion of the full optical image to form a corrected optical image.

Abstract: Defect detection on transparent or translucent wafers can be performed on a die using references from the same die. A first calculated value based on a kernel size, such as a moving mean, is determined. A first difference is determined by subtracting the first calculated value from a pixel intensity. Candidate pixels with a first difference above a threshold are classified. A second calculated value based on a kernel size, such as a local median, is determined. A second difference is determined by subtracting the second calculated value from the pixel intensity. Pixels that include a defect are classified when the second difference is above the threshold.

Abstract: A digital microscope apparatus includes a first imaging unit including a first imaging device and a first optical system including an objective lens configured to enlarge first and second images of a preparation that holds a sample, the first image being formed on the first device through the first system, a second imaging unit including a second optical system that is branched from the first system and has a depth of field larger than the first system and a second imaging device on which the second image is formed through the second system, and a controller configured to calculate a provisional in-focus position of the lens based on the second image, determine an area of the first device, from which the first image is read, and search for, based on the read image, an in-focus position of the lens in a predetermined range based on the provisional in-focus position.

Abstract: Presented are techniques for processing medical images. The techniques can include accessing a stored medical image and electronically representing a plurality of overlapping tiles that cover the medical image, each overlapping tile including a non-overlapping inner portion and an overlapping marginal portion. The techniques can also include in parallel, and individually for each of a plurality of the overlapping tiles: applying a segmentation process to identify objects in the at least one medical image, identifying inner object data representing at least one inner object that is contained within an inner portion of at least one tile, and identifying marginal object data representing at least one marginal object that overlaps a marginal portion of at least one tile. The techniques can also include merging at least some of the marginal object data to produce merged data, and outputting object data including the inner object data and the merged data.

Abstract: A method for focusing may include receiving a first image stack of a first field of view, the first image stack including images captured with different focus from the first field of view; determining, from the first image stack, a first spatial distribution of focus depths in which different areas in the first field of view are in focus; determining a first local sample thickness and a first sample tilt in the first field of view based on the first spatial distribution of focus depths; and estimating, based on the first local sample thickness and the first sample tilt, a focus setting for capturing a second image stack from a second field of view.

Abstract: A microscope apparatus includes an objective and an automatic focusing device. The automatic focusing device is an automatic focusing device of an active type that irradiates a specimen with automatic focusing light via the objective, and the automatic focusing device is configured in such away that an illumination light axis of the automatic focusing light passes through a position distant from an optical axis of the objective.

Abstract: In the image capturing apparatus, the optical path difference producing member is disposed on the second optical path. Thereby, the amount of light for imaging an optical image which is focused at the front of an optical image made incident into the first imaging device (front focus) and an optical image which is focused at the rear thereof (rear focus) by the second imaging device can be suppressed to secure the amount of light on image pickup by the first imaging device. Further, in the image capturing apparatus, at least one of a position of the first imaging region and a position of the second imaging region on the imaging area is changed, thus making it possible to easily adjust an interval between the front focus and the rear focus. It is, thereby, possible to detect a focus position of the sample at high accuracy.

Abstract: An automatic focus system for an optical microscope that facilitates faster focusing by using at least two cameras. The first camera can be positioned in a first image forming conjugate plane and receives light from a first illumination source that transmits light in a first wavelength range. The second camera can be positioned at an offset distance from the first image forming conjugate plane and receives light from a second illumination source that transmits light in a second wavelength range.

Abstract: A spatial filter is made by forming a structure comprising a focusing element and an opaque surface, the opaque surface being disposed remotely from the focusing element in substantially the same plane as a focal plane of the focusing element; and by forming a pinhole in the opaque surface at or adjacent to a focal point of the focusing element by transmitting a substantially collimated laser beam through the focusing element so that a point optimally corresponding to the focal point is identified on the opaque surface and imperfection of the focusing element, if any, is reflected on the shape and position of the pinhole so formed.

Abstract: An image capturing apparatus capable of interchanging a lens unit includes a processing unit configured to perform image correction processing based on data acquired by an acquisition unit. In the image capturing apparatus, the acquired data includes information of a first shooting condition, configured in a discrete manner, information of a plurality of second shooting conditions provided for each information of the first shooting condition, and correction information corresponding to a combination of the information of the first shooting condition and the information of the second shooting condition.

Abstract: A confocal microscope apparatus includes an image acquisition unit configured to obtain a first all-in-focus image of each of a plurality of measurement visual field areas constituting a measurement target area in a brightness setting in accordance with the corresponding measurement visual field area, and a stitched image constructor configured to construct a stitched image on the basis of a plurality of second all-in-focus images. The second all-in-focus images are obtained through conversion of the plurality of first all-in-focus images obtained by the image acquisition unit so that the images become closer to a plurality of reference all-in-focus images. The plurality of reference all-in-focus images are obtained when the plurality of measurement visual field area are captured in a brightness setting serving as a reference.

Abstract: A medical optical observation instrument including an illumination system, which provides an illumination beam path for illuminating an observation object with illumination light, an observation system, which provides an observation beam path for observing the observation object and at least one camera for recording a digital image of the observation object, and a device for contrasting polarization-rotating tissue in the observation object. The device for contrasting polarization-rotating tissue in the observation object includes at least one illumination apparatus, arranged in the illumination system, including a polarization portion, at least one linear analyzer, arranged in the observation system and rotatable about the optical axis of the observation beam path, an image processing apparatus connected to the at least one camera, and an optimization apparatus connected to the image processing apparatus and to the at least one rotatable linear analyzer and the polarization portion.

Abstract: One embodiment relates to a method of automated inspection of scattered hot spot areas on a manufactured substrate using an electron beam apparatus. A stage holding the substrate is moved along a swath path so as to move a field of view of the electron beam apparatus such that the moving field of view covers a target area on the substrate. Off-axis imaging of the hot spot areas within the moving field of view is performed. A number of hot spot areas within the moving field of view may be determined, and the speed of the stage movement may be adjusted based on the number of hot spot areas within the moving field of view. Another embodiment relates to an electron beam apparatus for inspecting scattered areas on a manufactured substrate. Other embodiments, aspects and features are also disclosed.

Abstract: A focus monitoring arrangement (1000) is provided for a scatterometer or other optical system. A first focus sensor (510) provides a first focus signal (S1-S2) indicating focus relative to a first reference distance (z1). A second focus sensor (1510) for providing a second focus signal (C1-C2) indicating focus relative to a second reference distance (z2). A processor (1530) calculates a third focus signal by combining the first focus signal and the second focus signal. By varying the proportions of the first and second focus signals in calculating the third focus signal, an effective focus offset can be varied electronically, without moving elements.

Abstract: The present invention concerns a method for generating a pattern of light, this method comprising the following steps: a) emitting an input laser pulse (P1), b) deflecting the input laser pulse (P1) by a first deflector (22) to obtain a first laser pulse, c) deflecting the first laser pulse (P3) by a second deflector (24) to obtain a second laser pulse (P4), and d) focusing the pulse (P4) by an optical element characterized in that: —the first deflector (22) shapes the first laser pulse (P3) according to a first function, —the second deflector (24) shapes the second laser pulse (P4) according to a second function, and—the first function f(x) and the second function g(y) are computed and/or optimized to obtain the desired pattern of light.

Abstract: An image processing apparatus includes a number-of-target-cells estimating unit for estimating, on the basis of a feature of a target sample, the number of target cells included in the target sample, and a detection parameter setting unit for setting, on the basis of the estimated number of target cells, a detection parameter regarding a process of detecting target cells in a captured image of the target sample.

Abstract: An imaging section of a microscope apparatus captures a plurality of microscope images each having the focal position which differs in the field being same with a light flux having passed through a microscopic optical system. A region separating section separates a cellular region from a non-cellular region by using the plurality of the microscope images. A focusing position calculating section finds a focusing position in a target pixel included in the cellular region based on a brightness change in the position being same in the plurality of the microscope images. A three dimensional information generating section generates three dimensional information of a cultured cell based on a position of the cellular region and the focusing position in the target pixel.

Abstract: A microscope including an objective having a focal plane in a sample space, and an autofocus device comprising a light modulator for generating a luminous modulation object that is intensity-modulated periodically along one direction, an autofocus illumination optical unit that images the modulation object such that its image arises in the sample space, an autofocus camera, an autofocus imaging optical unit that images the image of the modulation object in the sample space onto the autofocus camera, a control device, which receives signals of the autofocus camera and determines an intensity distribution of the image of the modulation object and generates a focus control signal therefrom. The control device determines an intensity distribution of the image of a luminous comparison object imaged by the optical unit to correct the intensity distribution of the image of the modulation object with regard to reflectivity variations in the sample space.

Abstract: A cell observation apparatus includes an imaging device capable of imaging a vessel containing cells while varying a focal position, an illuminating device for irradiating the vessel with illuminating light; and a controller for controlling the imaging device. The controller includes: a z-stack imaging controller for causing the imaging device to take a plurality of z-stack images while varying the focal position; a variance value calculation part for calculating a variance value of pixels values for each of the z-stack images; an edge index value calculation part for calculating an edge index value indicative of edge strength for each of the z-stack images; a focus evaluation value calculation part for calculating a focus evaluation value having a minimum value in an in-focus position, based on the variance value and the edge index value; and an in-focus position estimation part for calculating the focal position where the focus evaluation value has a minimum value to estimate the in-focus position.

Abstract: Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.

Abstract: A scanning microscope includes: a varifocal lens that scans an object in an optical-axis direction of an objective; a scanner that scans the object in a direction orthogonal to the optical axis of the objective; and a controller configured to control the varifocal lens and the scanner.

Abstract: A microscope apparatus according to the present invention includes a bright-field illumination optical system and a fluorescence illumination optical system that respectively radiate illumination light and excitation light onto a sample, an observation optical system that observes observation light from the sample, and a controller that controls the fluorescence illumination optical system so that the excitation light is radiated onto the sample when the irradiation of the illumination light on the sample is prevented by an irradiation preventing portion of the bright-field illumination optical system and so that the irradiation of the excitation light on the sample is prevented when the irradiation of the illumination light on the sample is not prevented by the irradiation preventing portion.

Abstract: At least first and second digital images of the sample are acquired having different focal heights relative to a platform on which the cells are disposed. A contrast matrix is produced having elements computed in dependence upon the difference between the values of the corresponding pixels in the first and second images. A phase matrix is produced by convolution of the contrast matrix with a predetermined distance matrix. The phase matrix is used to assess characteristics of the sample, such as the presence of cells in the sample or the heights of cells in the sample.

Abstract: At least first and second digital images of the sample are acquired having different focal heights relative to a platform on which the cells are disposed. A contrast matrix is produced having elements computed in dependence upon the difference between the values of the corresponding pixels in the first and second images. A phase matrix is produced by convolution of the contrast matrix with a predetermined distance matrix. The phase matrix is used to assess characteristics of the sample, such as the presence of cells in the sample or the heights of cells in the sample.

Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.

Abstract: Optical analytical devices and their methods of use are provided. The devices are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The devices include optical waveguides for illumination of the optical reactions. The devices further provide for the efficient coupling of optical excitation energy from the waveguides to the optical reactions. Optical signals emitted from the reactions can thus be measured with high sensitivity and discrimination using features such as spectra, amplitude, and time resolution, or combinations thereof. The devices of the invention are well suited for miniaturization and high throughput.

Abstract: A laser microscope apparatus including: a scanning unit that scans laser light on a sample; an objective lens that collects observation light from the sample; a photo-detection unit that has a light-receiving surface formed of an array of a plurality of detecting elements capable of detecting a single photon, that receives the observation light incident on the light-receiving surface, and that outputs intensity signals having intensities corresponding to the amounts of the received observation light; an image generating unit that generates an image on the basis of the intensities of the intensity signals and scanning positions of the laser light; a processor for notifying a user when the intensity signals used to generate the image include intensity signals having intensities equal to or larger than a predetermined threshold that is set according to the beam diameter of the observation light incident on the light-receiving surface.

Abstract: A scanning microscope includes a collecting lens that takes in a detection light, a focal position adjustment unit that moves in an optical axis direction of the collecting lens to make the collecting lens move in the optical axis direction, a detector positioned at a location that is optically conjugate to a pupil of the collecting lens, and a relay optical system that relays the pupil to the detector. The relay optical system includes a first optical element with a positive power, the first optical element being positioned in the focal position adjustment unit and converting the detection light that was converted by the collecting lens into a parallel light flux, into a convergent light flux to be emitted outside of the focal position adjustment unit, and a second optical element that is positioned outside of the focal position adjustment unit and between the detector and the first optical element.

Abstract: Methods and apparatuses for detecting mode hopping in a laser diode or other optical energy source in heat-assisted magnetic recording. An output power of the laser diode or other optical energy source is measured and the output power is differentiated over time to determine a rate of change. If it is determined that the rate of change exceeds a threshold value, a fault signal is asserted indicating a potential mode hopping event.

Abstract: A photographing method for use in a device includes: monitoring a current time and determining whether the current time reaches a preset shooting time; taking a first picture of an object when it is determined that the current time reaches the preset shooting time; determining a difference between a first image in a preset area of the first picture and a second image in the preset area of a second picture taken at a previous preset shooting time, the preset area corresponding to the object; and saving the first picture if the determined difference is equal to or greater than a preset threshold value.

Abstract: A method for porating one or more cells comprising positioning a particle near each cell; and causing laser-induced breakdown of the particle to create one or more cavitations, wherein the cavitation(s) causes poration of the cell.

Abstract: Microscope system for, and methods of, imaging a sample including biological cells. In an exemplary method, light transmitted through the sample may be detected for a first set of focal positions to collect a first stack of images. Values of a focus metric may be calculated for the first stack of images. A candidate focal position may be determined based on the values. Photoluminescence may be detected from the sample for a second set of focal positions to collect a second stack of images. The second set of focal positions may define a smaller range than the first set of focal positions. At least one focal position of the second set of focal positions may be based on the candidate focal position. In other words, the candidate focal position may serve as a guide for finding a suitable photoluminescence focal position.

Abstract: A surgical microscopy system includes a surgical microscope with a control device and with focusable imaging optics for observing an operation field. The microscope is arranged on a stand with a base unit. The stand is embodied with linear drives and/or rotary joints in such a way that the surgical microscope is displaceable along three direction axes and rotatable about three axes of rotation relative to the base unit. For renewed focusing to a desired point, position and/or rotational sensors are assigned to each of the drives and/or joints for each of the direction axes and position and/or rotary angle sensors are assigned to each of the drives and/or joints for each of the axes of rotation and a focusing sensor for a focal point is assigned to the focusing imaging optics. A position and alignment of the microscope relative to the base unit and the focal point are storable.

Abstract: An image capturing apparatus capable of interchanging a lens unit includes a processing unit configured to perform image correction processing based on data acquired by an acquisition unit. In the image capturing apparatus, the acquired data includes information of a first shooting condition, configured in a discrete manner, information of a plurality of second shooting conditions provided for each information of the first shooting condition, and correction information corresponding to a combination of the information of the first shooting condition and the information of the second shooting condition.

Abstract: To provide a microscopic imaging device in which a measuring object can be easily imaged using measurement light having a desired pattern, in which the pattern of measurement light can be changed and a phase of the pattern can be moved, without arranging a mechanical mechanism. An arbitrary pattern of a plurality of patterns of measurement light is instructed. The measurement light having an instructed pattern is generated by a light modulation element, and is applied on a measuring object. A spatial phase of the generated pattern is sequentially moved on the measuring object by a predetermined amount by the light modulation element. A plurality of pieces of pattern image data generated at a plurality of phases of the pattern is synthesized based on the light receiving signal output from the light receiving section to generate sectioning image data indicating an image of the measuring object.

Abstract: The present invention relates to the field of digital pathology and in particular to whole slide scanners. A tilted autofocus image sensor images an oblique cross-section of the slide. For focusing multiple sequential overlapping images, which have been taken by the tilted sensor, are compared. The axial position of the tissue layer can be determined from the polar error signal resulting from this differential measurement.

Abstract: A method and system are provided for focusing an imaging device on a liquid sample flowing through a field of view of the imaging device. Objects are segmented in the captured frames and used to account for the fact that the sample is flowing. Object velocities are calculated and used in selecting an appropriate focus value. The calculation of a focus measure takes account of the number of objects in captured frames in order to ensure a consistent calculation of the focus measure.

Abstract: Disclosed are a method and an apparatus for observing defects by using an SEM, wherein, in order to observe defects on a wafer at high speed and high sensitivity, positional information of defects on a sample, which has been optically inspected and detected by other inspecting apparatus, and information of the conditions of the optical inspection having been performed by other inspecting apparatus are obtained, and optically detecting the defects on the sample placed on a table, on the basis of the thus obtained information, and on the basis of the detected positional information of the defect on the sample placed on the table, the positional information of the defect having been inspected and detected by other inspecting apparatus is corrected, then, the defects on the sample placed on the table are observed by the SEM using the thus corrected positional information of the defects.

Abstract: To provide a microscopic imaging device capable of easily switching the imaging method. During sectioning observation and normal observation, a measuring object is irradiated with pattern measurement light and uniform measurement light generated by a light modulation element, respectively. The measuring object is irradiated with the pattern measurement light and the uniform measurement light through a common light path. During the sectioning observation, a spatial phase of the pattern is sequentially moved on the measuring object by a predetermined amount by the light modulation element, and sectioning image data indicating an image of the measuring object is generated based on a plurality of pieces of image data generated at a plurality of phases of the pattern based on the light receiving signal. During the normal observation, normal image data indicating an image of the measuring object is generated based on the light receiving signal.

Abstract: An imaging apparatus is such that in a case where an operation is instructed by an operation member, a mode changing unit changes operation modes or control amounts in the operation modes of at least two controllers from among a plurality of controllers.