Abstract: A pyroelectric detector includes a first electrode, a second electrode, a pyroelectric body that is disposed between the first electrode and the second electrode, and a first gas barrier layer that covers the pyroelectric body. The first electrode includes a first layer and a second layer. The second layer is disposed between the first layer and the pyroelectric body, and the first layer is a second gas barrier layer.

Abstract: Provide is an infrared detector that has a simple configuration, has a high amplification factor, and is configured to operate at low voltage. An NMOS transistor at an output stage of a pyroelectric infrared detection element serves as a common source amplifier circuit in which a source is connected to GND via a resistor and a capacitor that are connected in parallel.

Abstract: The present application provides a non-dispersive infrared gas sensor. The non-dispersive infrared gas sensor may include an infrared source, an infrared detector, and a waveguide extending about the infrared source and the infrared detector. The waveguide may include a reflective diffuser thereon.

Abstract: A pyroelectric-type infrared sensor is provided with: a sensor element; a shield case for covering the sensor element; an infrared transmission filter; an output circuit, which performs impedance conversion to output signals of the sensor element and outputs the signals; and at least one reflecting film. In the pyroelectric-type infrared sensor, the at least one reflecting film, which reflects infrared, is provided between the infrared transmission filter attached to the shield case and surface electrodes, and the infrared transmission filter is disposed extremely close to the surface electrodes.

Abstract: An infrared light sensor for an infrared light detector (1), including a substrate membrane section (2) and at least two sensor chips (7 to 10), which are fastened next to each other on the substrate membrane section (2) and each comprise a layer element (11) which is produced from pyroelectrically sensitive material and is electrically contacted by a base electrode (12) and a head electrode (13) and is arranged in such that there is a voltage difference in each case between the head electrode (13) and the base electrode (12) of each layer element (11) when the layer elements (11) are irradiated with infrared light; and a coupling line (14 to 16) in each case for two adjacently arranged sensor chips (7 to 10), the coupling line coupling the head electrode (13) of the one sensor chip (7 to 9) and the base electrode (12) of the other sensor chip (8 to 10) to each other in an electrically conductive manner so that the layer elements (11) of the sensor chips (7 to 10) are connected in a series circuit, which has

Abstract: The infrared detecting element has a base plate; an insulating film that is provided on the base plate and has a recessed portion surrounding a hollow space; a supporting section that is held by a beam, one end of the beam being fixed to the insulating film, and is located in an area that opposes the hollow space; and an infrared detecting section that is provided on the supporting section and detects infrared rays, in which the recessed portion is covered with a water repellent film that includes polysilicon, and the beam and the supporting section include silicon nitride or silicon carbonitride.

Abstract: A thermal detector includes a substrate; a support member supported on the substrate interposed by a cavity; a heat-detecting element formed on the support member; a light-reflecting layer formed at a position spaced apart from the heat-detecting element in at least a portion of a peripheral region of the heat-detecting element on the support member; a light-absorbing layer formed on the heat-detecting element and the light-reflecting layer; and a thermal transfer member that is connected to the heat-detecting element by a connector, the thermal transfer member including a connecting portion connected to the heat-detecting element and a thermal collecting portion disposed inside the light-absorbing layer and having a surface area larger than a surface area of the connecting portion as seen in plan view, the thermal collecting portion being optically transmissive at least with respect to light of a prescribed wavelength.

Abstract: A kit for detecting the presence of an explosive includes a pulsed focused energy source located at a target distance away from a substrate, the energy having a magnitude sufficient to release the internal energy of an explosive if present on the substrate and thereby generate an acoustic wave. The kit also includes a detector adapted to detect the acoustic wave at a detection distance away from the substrate.

Abstract: A thermal infrared sensor includes an infrared ray absorbing film that is thermally separated from a semiconductor substrate by a hollow part; and a temperature sensor configured to detect temperature changes of the infrared ray absorbing film. The infrared ray absorbing film includes an infrared ray antireflection structure configured with a sub wavelength structure, the infrared ray antireflection structure being provided on a surface of the infrared ray absorbing film facing the semiconductor substrate.

Abstract: Provided is an infrared ray sensor that can conduct a plurality of different types of detection such as temperature detection and gas detection in a simple structure and that is small size and low cost. The infrared ray sensor (1) includes, on one base (10), a first infrared ray detection unit (31) including at least one infrared ray detection element (20) including an infrared ray detection material (22) with physical properties changing depending on properties of incident infrared rays and receives and detects ambient infrared rays, and a second infrared ray detection unit (32) including at least one infrared ray detection element (20) having an identical element structure to the infrared ray detection element of the first infrared ray detection unit (31), is irradiated with infrared rays X for measurement having specific physical properties, and detects a change in the physical properties of the infrared rays X for measurement.

Abstract: A pyroelectric light detector has a base unit, a support member, and a plurality of pyroelectric capacitors containing pyroelectric bodies. The support member includes a first surface and a second surface facing opposite the first surface, and has a hollow space section formed between the second surface and the base unit. The plurality of pyroelectric capacitors are supported by the support member. The plurality of pyroelectric capacitors supported by the support member are electrically connected in series in a direction matching the polarization direction. The position of the projection point for which the center of gravity of the light absorption region corresponding to the pyroelectric capacitor is projected two dimensionally with a plan view can be made to exist inside the region in which the contour line of the pyroelectric body of the pyroelectric capacitor is projected two dimensionally.

Abstract: A terahertz wave detecting device which includes a substrate and a plurality of detection elements arranged above the substrate, wherein the detection element includes a first metal layer that is provided on the substrate, a support substrate that is provided to be spaced from the first metal layer, an absorbing section that is provided above the support substrate and which absorbs a terahertz wave to generate heat, and a converting section that includes a second metal layer, a pyroelectric layer, and a third metal layer layered on the absorbing section, and which converts the heat generated in the absorbing section into an electric signal.

Abstract: A terahertz wave detecting device includes: a substrate; and a plurality of detection elements that is arranged above the substrate, wherein the detection element includes a first metal layer that is provided on the substrate, an absorbing section that is provided to be spaced from the first metal layer and absorbs a terahertz wave to generate heat, and a converting section that includes a second metal layer, a pyroelectric layer and a third metal layer layered on the absorbing section on a side opposite to the first metal layer, and converts the heat generated in the absorbing section into an electric signal.

Abstract: A pyroelectric detector includes a pyroelectric detection element, a support member, a fixing part and a first reducing gas barrier layer. A first side of the support member faces a cavity and the pyroelectric detection element is mounted and supported on a second side opposite from the first side. An opening part communicated with the cavity is formed on a periphery of the support member in plan view from the second side of the support member. The fixing part supports the support member. The first reducing gas barrier layer covers a first surface of the support member on the first side, a side surface of the support member facing the opening part, and a part of a second surface of the support member on the second side and the pyroelectric detection element exposed as viewed from the second side of the support member.

Abstract: A detection device includes a plurality of pyroelectric elements and a detection circuit. The pyroelectric elements includes a first pyroelectric element through an n-th pyroelectric element serially provided between a detection node and a first power supply node with n being an integer equal to or greater than 2. Each of the first pyroelectric element through the n-th pyroelectric element has a direction of polarization that is set to the same direction. The detection circuit is connected to the detection node.

Abstract: An infrared sensor element according to the present invention includes a substrate, and a lower electrode layer, a pyroelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the pyroelectric layer, and the pyroelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the infrared sensor element realizes the pyroelectric layer having a high orientation in a polarization axis direction, an excellent pyroelectric property.

Abstract: A motion detector comprising a substrate on a surface of which a plurality of pyroelectric elements for 5 detecting infrared light emitted from an object are placed at intervals, a detection circuit for converting an input signal from each pyroelectric element into a voltage signal to output the voltage signal, and a determination means for comparing the output signal of the detection circuit with a preset reference value to determine whether or not there is a motion of the object in detection regions that are set within 10 predetermined detection distances from the pyroelectric elements, wherein the output signal of the detection circuit is configured to be constant in a set frequency band, and the motion detector further comprises a movement information calculating means for calculating movement information containing information on a distance to the object and a direction of movement of the object determined by the 15 determination means.

Abstract: A method for manufacturing a sensor apparatus including forming a first conductive section in the first region, forming a pyroelectric body above the first conductive section, forming a second conductive body above the pyroelectric body, forming a first insulating film both above the second conductive body and in the second region, forming a first opening section with the second conductive section as the bottom surface in the first region by removing a portion of the first insulating film and for forming a second opening section in the second region, filling a third conductive section into both the first opening section and the second opening section, forming a second insulating film which covers the pyroelectric body in the first region and covers the third conductive section in the second region, and forming a third opening section with the third conductive section as the bottom surface by removing a portion of the second insulating film.

Abstract: Terahertz spectrometer having a wider range of terahertz radiation source, high temporal resolution of scanning (<0.0.099 ?m or ˜0.3 pico second) over a wider range of scanning (up to ˜100 pico seconds). Also disclosed are exemplary applications of the spectrometer in biomedical, biological, pharmaceutical, and security areas.

Abstract: A vision system for a vehicle includes a camera disposed at or proximate to an in-cabin portion of a windshield of the vehicle. The camera has a forward field of view to the exterior of the vehicle through the windshield of the vehicle. The camera is operable to capture image data. A control includes an image processor that is operable to process captured image data to determine lane delimiters present in the field of view of the camera. The control connects to a vehicle communication bus of the vehicle and receives vehicle data via the vehicle communication bus. Responsive at least in part to processing of captured image data by the image processor and to vehicle data received via the vehicle communication bus, the control determines a yaw rate. The control provides the determined yaw rate to a driver assistance system of the vehicle.

Abstract: In an infrared detection element 15, a first substrate 36 is bonded to a front side of a pyroelectric substrate 20. Since the thermal expansion coefficient of the first substrate 36 is lower than that of the pyroelectric substrate 20, deformation of the pyroelectric substrate 20 due to thermal expansion can be suppressed by the first substrate 36. Further, since a thermal expansion coefficient difference D is 8.9 ppm/K or less, the thermal expansion coefficient between the first substrate 36 and the pyroelectric substrate 20 is not excessively large, and this can suppress deformation of the infrared detection element 15 due to the thermal expansion coefficient difference between the first substrate 36 and the pyroelectric substrate 20.

Abstract: A terahertz wave detection device which includes an absorption portion which absorbs a terahertz wave and generates heat and a conversion portion which converts the heat generated by the absorption portion into an electric signal, wherein the absorption portion includes a dielectric layer, a plurality of metal structures which are provided on one surface of the dielectric layer and are arranged to be separated from one another by an interval having a predetermined length; and a metal layer which is provided on the other surface of the dielectric layer, and wherein the interval is shorter than a wavelength of the terahertz wave which is absorbed by the absorption portion.

Abstract: A human body sensing device being mounted on an object comprises: a first and second sensor being mounted on a vertical plane of the object and each having a pair of a positive and negative electrode; and a lens covering over the first and second sensors, wherein: the lens forms a sensing block in a sensing area constituting a plane perpendicular to the vertical plane, the sensing block including the positive and negative electrodes of the first sensor, and the positive and negative electrodes of the second sensor; either a first virtual line or an extended part thereof and either a second virtual line or an extended part thereof have a point of intersection in the sensing area; and the first and second virtual lines are symmetric with respect to a line perpendicular to the vertical plane of the object and passing through the point of intersection.

Abstract: A method and system for detecting targets comprising at least one first receiver for receiving radiation, the radiation comprises beams of radiation spaced horizontally; at least one second receiver for receiving radiation, the radiation comprises beams of radiation spaced horizontally and vertically such that the beams of radiation received by the second receiver travel through different predetermined heights from the horizontal plane; at least one processor for receiving data from the first and second receivers, the at least one receiver operating to locate a target passing in the vicinity of the first and second receivers and determine the height of the target based upon the recordation of certain of the beams at a predetermined heights relative to the horizontal plane and the width of a target based upon the horizontal spacing of the beams.

Abstract: A microbolometer detector has an improved support structure. The microbolometer detector includes a substrate and a support structure including at least one post connected to and projecting substantially vertically from the substrate. The microbolometer detector also includes a platform held above the substrate and including a central region substantially vertically aligned with the at least one post of the support structure and a peripheral region surrounding the central region, the platform being supported by the support structure from the central region thereof. The microbolometer further includes at least one thermistor located in the peripheral region of the platform. A microbolometer focal plane array may also include multiple microbolometer detectors arranged in a two-dimensional array. The support structures are particularly well suited for supporting relatively large platforms of microbolometer detectors, particularly for far-infrared and terahertz detection and spectroscopy applications.

Abstract: A system to detect occupants is provided. The system may rotate the field of views of multiple sensors in order to scan an area. The system may scan the area multiple times. The system may determine the number of occupants in the area based on a comparison of a scan of the area with a scan of the area when the area is determined to be unoccupied. The system may determine the number of occupants in the area based on a maximum number of occupants detected by any of the sensors. The system may also determine a location of an object or an occupant from scans of the area obtained from multiple sensors.

Abstract: According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers (300) of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane (301) suspended above said supporting substrate, said membrane consisting of an element (305) for absorbing the incident radiation and a thermometric element (304) in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (311), a dielectric film (310), and a second metallic film (309), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band.

Abstract: A detection circuit includes a current mirror circuit, a pyroelectric element, a capacitor element and a charging circuit. The pyroelectric element is disposed between a first power supply node and a first node connected to the current mirror circuit. The capacitor element is disposed between the first power supply node and a second node connected to the current mirror circuit. The charging circuit is connected to the current mirror circuit to charge the pyroelectric element and the capacitor element though the current mirror circuit.

Abstract: A measurement system including a reference resistive sensor traversed by a reference current, with a reference arm having a reference resistance and being traversed by the reference current in order to produce a reference voltage between its ends, at least one measurement resistive sensor traversed by a measurement current that depends on a measurement taken by the measurement resistive sensor, a measurement mirror arm traversed by a current, and a device for measuring the difference between the measurement current and the current traversing the measurement mirror arm. The resistance of the measurement mirror arm of each measurement resistive sensor is equal to the reference resistance and the measurement system further includes a device for applying, to each measurement mirror arm, the reference voltage. The device for applying the reference voltage being designed to the isolated to a current of the measurement mirror arm when the reference voltage is applied.

Abstract: A sensing range selectable image sensor module includes a lens defining a first light-sensing area, which allows a relatively larger amount of light to pass, and a second light-sensing area, which allows a relatively smaller amount of light to pass, two sensors respectively arranged at one side relative to the lens corresponding to the first light-sensing area and the second light-sensing area and electrically coupled to a controller for receiving light from the first or second light-sensing area and generating a respective trigger signal selectively receivable by the controller.

Abstract: A Fresnel lens and a pyroelectricity sensor module are provided. The Fresnel lens includes unit lens groups having different refractive indexes, and each of the unit lens groups includes unit lenses. Between two unit lenses of the same unit lens group at least one unit lens included in a different lens group is arranged. The pyroelectricity sensor module includes a Fresnel lens which condenses infrared light; a detecting sensor disposed to receive the condensed infrared light and detect the infrared light; and a signal processing board on which the detecting sensor is mounted and configured to control an output signal of the detecting sensor. The Fresnel lens includes unit lens groups having different refractive indexes, and each of the unit lens groups includes unit lenses, and between two unit lenses of the same unit lens group, at least one unit lens included in a different lens group is arranged.

Abstract: Methods and systems may include a system including a first passive motion sensor having a lateral field of view with a first edge and a second passive motion sensor having a lateral field of view with a second edge that is substantially parallel to the first edge. The first and second edges can define a virtual beam. The system may also include logic to receive signals from the first and second passive motion sensors and determine a gait velocity and level of activity based on the signals from the first and second passive motion sensors.

Abstract: Disclosed is a temperature sensor using a work-function-difference-based radiant-ray detecting element that outputs, as a detecting signal of radiant rays, a work function difference between gate electrodes of first and second field-effect transistors sensing the radiant rays. The temperature sensor includes at least a pair of a first work-function-difference-based radiant-ray detecting element having a positive output temperature coefficient; and a second work-function-difference-based radiant-ray detecting element having a negative output temperature coefficient of which an absolute value is equal to an absolute value of the output temperature coefficient of the first work-function-difference-based radiant-ray detecting element.

Abstract: Sensors, systems including sensors, and methods of using such sensors and systems are provided. In one aspect, a sensor includes a sensor element at least partially positioned within the housing. The sensor element includes a plurality of interconnected segments with each segment comprising a pyroelectric crystal and wherein the sensor may generate a single, unitary signal upon exposure of any segment to infrared radiation.

Abstract: A pyroelectric sensor array is attachable on a circuit board. The pyroelectric sensor array comprises a pyroelectric board and a plurality of pyroelectric elements formed on the pyroelectric board. The pyroelectric board has a connection surface configured to be placed on the circuit board. The pyroelectric elements contains a peripheral pyroelectric element arranged at a peripheral portion of the pyroelectric board in a predetermined arranging direction and a central pyroelectric element arranged at a central portion of the pyroelectric board. Each of the pyroelectric elements has two adjacent connection electrodes formed on the connection surface. An electrostatic capacity between the two connection electrodes of the peripheral pyroelectric element is larger than an electrostatic capacity between the two connection electrodes of the central pyroelectric element.

Abstract: This invention relates to a device (1) for detecting energy generated by non-radiative decay generated in a substance (2) on irradiation with electromagnetic radiation. The device (1) comprises a radiation source (6) adapted to generate a series of pulses of electromagnetic radiation, a transducer (3) having a pyroelectric or piezoelectric element and electrodes (4, 5) which is capable of transducing the energy generated by the substance (2) into an electrical signal, and a detector (7) which is capable of detecting the electrical signal generated by the transducer (3). The detector (7) is adapted to determine the time delay between each pulse of electromagnetic radiation from the radiation source (6) and the generation of the electric signal. The device (1) has a wide applicability in the fields of assays and monitoring.

Abstract: A pyroelectric element includes a pyroelectric substrate; a light-receiving section composed of a front-side electrode, a back-side electrode, and a light-receiving portion; and a light-receiving section composed of a front-side electrode, a back-side electrode, and a light-receiving portion. Since the pyroelectric substrate warps in a cavity-facing region opposite a cavity, the light-receiving area of the light-receiving sections is greater than that in the case where there is no warp. It is thus possible to improve detection sensitivity of the pyroelectric element without making the size of the pyroelectric element larger than that in the case where there is no warp.

Abstract: Embodiments of the present invention comprise different equipment for efficiently and relatively inexpensively producing Casimir cavities for use in quantum vacuum energy extraction. The equipment includes without limitation, sintered materials; submicron porous filter materials; web roll-to-roll produced mesh or foil layers; nanotube arrays; web roll-to-roll produced porous membranes such as graphene, metallically doped; web roll-to-roll produced metallic crystals with self assembling arrays of nano-channels; materials produced by three-dimensional prototyping; materials produced by charged particle deposition; metal wire bundles; metal tube bundles; and metallically doped or metallically coated glass or polymer wire bundles.

Abstract: A radiation sensing device for sensing first radiation (15) comprises a radiation sensor (11) for sensing the first radiation and at least one first radiation guiding member (13) forming at least a part of a first radiation path for guiding, and preferably converging or focusing, the first radiation towards the sensor. The first radiation guiding member (13) also forms at least a part of a second radiation path for guiding second radiation emitted by an illumination device (12). A control circuit (20) comprises a first sensor circuit (21) for operating one or more radiation sensors (11), an illumination circuit (22) for operating one or more illumination devices (22), and at least one connection (26) amongst said circuits (21, 22).

Abstract: A thermal detector includes a substrate, a support member, a heat-detecting element, a thermal transfer member, a first light-absorbing layer and a second light-absorbing layer. The support member is supported on the substrate so that a cavity is formed between the substrate and the support member. The heat-detecting element is supported on the support member. The thermal transfer member includes a connecting portion connected to the heat-detecting element and a thermal collecting portion formed over the heat-detecting element and having a surface area larger than a surface area of the connecting portion as seen in plan view. The first light-absorbing layer contacts the thermal transfer member and disposed between the thermal transfer member and the support member. The second light-absorbing layer contacts the thermal transfer member and disposed on the thermal transfer member.

Abstract: A pyroelectric detector includes a substrate, a support member, a spacer member, and a pyroelectric detecting element. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The pyroelectric detecting element includes a first electrode mounted on the support member, a second electrode, and a pyroelectric body between the first and second electrodes. The support member includes an insulating layer, a first wiring layer disposed on a side of the second surface of the support member with respect to the insulating layer, and a first plug passing through the insulating layer at a position where the pyroelectric body and the first wiring layer overlap in plan view to connect the first wiring layer with the first electrode.

Abstract: A microbolometer detector has an improved support structure. The microbolometer detector includes a substrate and a support structure including at least one post connected to and projecting substantially vertically from the substrate. The microbolometer detector also includes a platform held above the substrate and including a central region substantially vertically aligned with the at least one post of the support structure and a peripheral region surrounding the central region, the platform being supported by the support structure from the central region thereof. The microbolometer further includes at least one thermistor located in the peripheral region of the platform. A microbolometer focal plane array may also include multiple microbolometer detectors arranged in a two-dimensional array. The support structures are particularly well suited for supporting relatively large platforms of microbolometer detectors, particularly for far-infrared and terahertz detection and spectroscopy applications.

Abstract: An image forming apparatus includes an image forming section that forms an image on a recording material, a human detecting device that detects a person including an optical sensing unit that converts only an upward light of incident light to the optical sensing unit to an electric signal, and a controller unit that controls the image forming section based on the electric signal.

Abstract: An infrared sensor comprises a circuit board, at least two support portions, an FET element and a pyroelectric element. The circuit board has an upper principal surface formed with a plurality of electrodes. Each of the support portions has an upper surface, a lower surface, an upper conductive pattern formed on the upper surface and a lower conductive pattern formed on the lower surface. The upper conductive pattern is electrically connected with the lower conductive pattern. The lower conductive pattern is connected to the electrode of the upper principal surface of the circuit board. The FET element is located between the at least two support portions and arranged on the upper principal surface of the circuit board. The pyroelectric element is electrically connected with the upper conductive patterns of the support portions. The pyroelectric element is supported by the support portions so as to be located above the FET element.

Abstract: A circuit for detecting electromagnetic radiation includes a pyroelectric sensor element connected to convert electromagnetic radiation into an electric signal. An n-channel junction field effect transistor is connected to receive the electric signal. A printed circuit board includes at least one low inductance low resistance area to provide a ground path for all alternating current components. A first capacitor is connected between the FET source terminal and a second capacitor is connected between the FET drain terminal and ground. A gate resistor is connected in parallel with the sensor element or a resistor is included in the sensor elements.

Abstract: A thermal detector manufacturing method includes: forming a sacrificial layer on a structure including an insulating layer; forming a support member on the sacrificial layer; forming on the support member a heat-detecting element; forming a first light-absorbing layer so as to cover the heat-detecting element, and planarizing the first light-absorbing layer; forming a contact hole in a portion of the first light-absorbing layer, subsequently forming a thermal transfer member having a connecting portion that connects to the heat-detecting element and a thermal collecting portion having a surface area greater than that of the connecting portion as seen in plan view; forming a second light-absorbing layer on the first light-absorbing layer; and removing the sacrificial layer to form a cavity between the support member and the structure including the insulating layer formed on the surface of the substrate.

Abstract: A thermal detector includes a substrate; a support member supported on the substrate with a cavity interposed therebetween; a heat-detecting element formed on the support member; a first light-absorbing layer formed on the heat-detecting element and the support member so as to be in contact with the heat-detecting element; and a second light-absorbing layer formed on the first light-absorbing layer so as to be in contact with the first light-absorbing layer. The second light-absorbing layer has a higher refractive index than the first light-absorbing layer. A first wavelength resonates between a surface of the support member and an upper surface of the second light-absorbing layer, and a second wavelength, which is different from the first wavelength, resonates between an interface, at which the first light-absorbing layer and the second light-absorbing layer are in contact with each other, and the upper surface of the second light-absorbing layer.

Abstract: An infrared light detector having a sensor chip (4), which includes a thin-film element (5) made from a pyroelectrically sensitive material, having an electrical insulator (27), at least one electronic component (17, 18) having a thin-film design, which forms part of a readout electronics unit, and a thin-film membrane (2), on which the sensor chip (4) and the electronic component (17, 18) are mounted side by side in an integrated manner such that the electronic component (17, 18) is electrically conductively coupled to the thin-film element (5). A signal amplifier (22), with which, in co-operation with the electronic component (17, 18), an electrical signal emitted from the sensor chip (4) can be amplified, can be connected to the electronic component (17, 18).

Abstract: A pyroelectric detector includes a pyroelectric detection element, a support member, a fixing part and a first reducing gas barrier layer. A first side of the support member faces a cavity and the pyroelectric detection element is mounted and supported on a second side opposite from the first side. An opening part communicated with the cavity is formed on a periphery of the support member in plan view from the second side of the support member. The fixing part supports the support member. The first reducing gas barrier layer covers a first surface of the support member on the first side, a side surface of the support member facing the opening part, and a part of a second surface of the support member on the second side and the pyroelectric detection element exposed as viewed from the second side of the support member.

Abstract: A thermal detector includes a substrate; a support member supported on the substrate interposed by a cavity; a heat-detecting element formed on the support member and having a pyroelectric material layer disposed between a lower electrode and an upper electrode; a light-absorbing layer formed on the heat-detecting element; and a thermal transfer member including a connecting portion connected to the heat-detecting element and a thermal collecting portion disposed inside the light-absorbing layer and having a surface area larger than that of the connecting portion in plan view, the thermal collecting portion being optically transmissive at least with respect to light of a prescribed wavelength. The lower electrode has an extending portion extending around the pyroelectric material layer in plan view, and the extending portion has light-reflecting properties by which at least a part of the light transmitted through the thermal collecting portion of the thermal transfer member is reflected.