Abstract: A sterilizing apparatus is disclosed. A sterilizing apparatus according to one embodiment comprises: a cover main body unit having an accommodation space formed therein so as to accommodate a device to be sterilized, wherein the accommodation space is open toward a bottom surface on which the device to be sterilized is disposed; an ultraviolet light emitting diode provided on a surface facing the bottom surface of the cover main body unit, and turned on so as to emit ultraviolet rays toward the accommodation space; a power supply unit for supplying power to the ultraviolet light emitting diode so as to turn on the ultraviolet light emitting diode; and a control unit for controlling an operation of the power supply unit.

Abstract: An ultraviolet (“UV”) emission device may emit energy towards a movable surface of a conveyor system. A housing of the UV emission device may attach to a frame of the conveyor system. A lateral edge of the housing may extend across the moveable surface. The housing and a portion of the moveable surface may be inclined with respect to the frame. A barrier bracket of the UV emission device may support an absorptive barrier along the lateral edge, the absorptive barrier configured to contact the moveable surface. In a first position of the barrier bracket, the absorptive barrier contacts the moveable surface and the barrier bracket activates an interlock switch. In a second position of the barrier bracket, the barrier bracket deactivates the interlock switch. Responsive to deactivation of the interlock switch, a controller may provide a control signal to decrease power to the UV energy emission element.

Abstract: A paper money sanitation apparatus for preventing the transmission of viruses includes a housing having an input slot and an output slot extending through to a housing cavity. A plurality of roller pairs is coupled within the housing cavity. Each roller pair has an upper roller bar and a lower roller bar positioned to have sufficient space to receive a banknote. A drive system is coupled to the plurality of roller pairs and powered by a motor to pull the banknote from the input slot and out the output slot. A battery is coupled to the housing and is in operational communication with the motor. A plurality of ultraviolet lights is coupled within the housing cavity to disinfect the banknote as it passes through.

Abstract: An apparatus for sanitising products comprising a housing comprising a bottom portion, interior walls an external portion and doors a pair of support beams, a plurality of internal conveyor belts, at least one UV-C light connected inside the housing, a first opening adapted to allow products to enter the housing for sanitisation and a second opening adapted to allow products to exit the housing after sanitisation.

Abstract: An ultraviolet (“UV”) emission device may emit energy towards a movable surface of a conveyor system, A housing of the UV emission device may attach to a frame of the conveyor system. A lateral edge of the housing may extend across the moveable surface. The housing and a portion of the moveable surface may be inclined with respect to the frame. A barrier bracket of the UV emission device may support an absorptive barrier along the lateral edge, the absorptive barrier configured to contact the moveable surface. In a first position of the barrier bracket, the absorptive barrier contacts the moveable surface and the barrier bracket activates an interlock switch. In a second position of the barrier bracket, the barrier bracket deactivates the interlock switch. Responsive to deactivation of the interlock switch, a controller may provide a control signal to decrease power to the UV energy emission element.

Abstract: A method of monitoring light output from at least one solid-state light source involves sensing any light produced by the at least one solid-state light source and reflected, by at least one surface spaced apart from the at least one solid-state light source, to at least one reference location spaced apart from the at least one surface. Apparatuses and uses of the apparatuses are also disclosed.

Abstract: Systems and methods for the construction of a disinfection and/or sanitizing device that provides for individual users the ability to disinfect utilizing ultraviolet (UV) light. The device is designed to be in the form of a tool that can attach to and be readily carried in conjunction with a smart device such as a smartphone and to utilize the battery of the smart device so that it is unnecessary to obtain separate batteries.

Abstract: A sterilizing media cassette is described for docking with a self-service terminal or a docking terminal. The sterilizing media cassette has a body having a lower portion and four sides. The body is adapted to hold a stack of media items such as banknotes on support members positioned above the lower portion of the body. A lid is provided that couples to the body. The lid forms an enclosed inner space when coupled to the body. An ozone gas source and/or a heat source is mounted on an inner surface of the body or the inner surface of the lid. A controller activates the ozone gas source and/or a heat source to sterilize the stack of media items. This may be done for a predetermined fixed period of time after the sterilizing media cassette is docked with a self-service terminal or a docking terminal.

Abstract: An ultraviolet disinfection apparatus being integral to existing pipe system is provided, comprising a hollow body with at least two open ends and an arbitrary cross-section, a UV module and a control module. The hollow body is configured for receiving the UV module, and to communicate with at least one end of a pipe structure such that a medium passing therethrough will not leak. The hollow body has an inner surface and an outer surface; the inner surface includes one or more interior structures defined by one or more partition walls for sub-dividing hollow space of the hollow body into at least two relatively smaller hollow spaces. The UV module comprises one or more UV LED arrays arranged independently or severally on the inner surface and/or the interior structures to increase UV exposure to the medium. The control module is remotely connected to the UV module outside the hollow body.

Abstract: Methods, systems, and apparatuses involving devices with disinfecting illumination are provided. An example apparatus comprises a container comprising a first side and a second side, a first array of light emitters disposed on the first side and configured to emit a first light within a wavelength range of 380-420 nanometers (nm) and having a first intensity, and a second array of light emitters disposed on the second side and configured to emit a second light within the wavelength range of 380-420 nm and having a second intensity, wherein the first intensity comprises an intensity sufficient to initiate inactivation of micro-organisms, and wherein the first array of light emitters and the second array of light emitters are configured to collectively create a multi-dimensional space of disinfection.

Abstract: A light source module including a fixing plate configured to extend in a first direction; a circuit board disposed on the fixing plate; a plurality of ultraviolet light emitting elements disposed on the circuit board in the first direction; a first reflection plate disposed at one side of the fixing plate; and a second reflection plate disposed at the other side of the fixing plate. Further, the plurality of ultraviolet light emitting elements are disposed between the first reflection plate and the second reflection plate in the first direction.

Abstract: Embodiments of the present disclosure provide a sterilization apparatus. The sterilization apparatus includes a housing. A drawer is slidably secured to the housing and adapted to receive input devices. The drawer is configured to operate between a retracted position, an intermediate position and an extended position. A plurality of ultraviolet (UV) lights is mounted within the housing and configured to emit UV radiation for a pre-determined time for sterilizing the input devices. A closure member is movably coupled to the housing. The closure member is operated between an open position and a closed position by manually applying force on the closure member, thereby causing the closure member to be pushed down by a distance within the housing. The closure member pushed down within the housing collectively operates a hinge mechanism, a cam and lever mechanism and a rotary mechanism, thereby configuring the closure member to the open and position positions.

Abstract: A method for unloading a substrate from a support table configured to support the substrate, the method including: supplying gas to a gap between a base surface of the support table and the substrate via a plurality of gas flow openings in the support table, wherein during an initial phase of unloading the gas is supplied through at least one gas flow opening in an outer region of the support table and not through any gas flow opening in a central region of the support table radially inward of the outer region, and during a subsequent phase of unloading the gas is supplied through at least one gas flow opening in the outer region and at least one gas flow opening in the central region.

Abstract: To provide an ultraviolet ray irradiation device by preventing leakage of ultraviolet rays from an insertion opening through which a hand on which a glove is mounted is inserted into a sterilization chamber. The device includes: an ultraviolet ray blocking balloon disposed in an insertion opening; a pressurized gas supplying and discharging device which supplies a gas under pressure to the balloon and discharges from it; an insertion depth detection unit which outputs an insertion hand depth detection signal; a controller of an ultraviolet ray irradiation and a pressurized gas supplying and discharging, wherein the balloon forms an opening which allows an insertion and a removal of the hand before the gas is supplied, and it is inflated with the supply of the gas so as to be brought into close contact with a wrist portion of the glove, and it is deflated with a discharge of the gas.

Abstract: To provide an ultraviolet ray irradiation device which, when an operator inserts a glove to the device, prevents irradiation of ultraviolet rays to the outside thus further enhancing safety. An ultraviolet ray irradiation device includes: a sterilization chamber housing having an insertion opening through which a hand on which a glove is mounted is inserted into a sterilization chamber; an ultraviolet ray irradiating unit which irradiates ultraviolet rays to the chamber; ultraviolet ray blocking elastic bodies disposed so as to traverse an insertion direction of the hand, and allowing the hand to penetrate the elastic bodies; and a frame body supporting peripheral edge portions of the stacked elastic bodies. A plurality of cuts are radially formed in the elastic bodies. A plurality of elastic members are formed between the cuts. The respective elastic bodies are mounted on the frame body such that the cuts are displaced from each other.

Abstract: A system for a sanitizing machine including a housing assembly and a sterilizing assembly is disclosed. The housing assembly includes a housing with a feeding tray and a catch tray attached. The housing assembly further includes rollers within. Importantly, the sterilizing assembly including ultraviolet lights are secured within the housing. The ultraviolet lights are used to cleanse and sanitize menus that get inserted into the housing with radiation. The menus are received on the feeding tray, then the menus are inserted into the housing in which the ultraviolet lights eliminate germs, diseases or viruses from the surface of the menus. Once the menus are completely sanitized, the menus exit housing and are received on the catch tray ready for usage again. Sanitation of the menus is done without the use of harsh chemicals.

Abstract: A sterilizing media cassette is described for docking with a self-service terminal or a docking terminal. The sterilizing media cassette has a body having a lower portion and four sides. The body is adapted to hold a stack of media items such as banknotes on support members positioned above the lower portion of the body. A lid is provided that couples to the body. The lid forms an enclosed inner space when coupled to the body. UV light sources are mounted on each an inner surface of the body and the inner surface of the lid. A controller activates the UV light source to sterilize the stack of media items. This may be done for a predetermined fixed period of time after the sterilizing media cassette is docked with a self-service terminal or a docking terminal. Ozone and/or heat may also be used for sterilization of the media items.

Abstract: A method of generating a treatment plan for treating a patient with radiotherapy, the method includes obtaining a plurality of sample plans, which are generated by use of a knowledge base comprising historical treatment plans and patient data. The method also includes performing a multi-criteria optimization based on the plurality of sample plans to construct a Pareto frontier, where the plurality of sample plans are evaluated with at least two objectives measuring qualities of the plurality of sample plans such that treatment plans on the constructed Pareto frontier are Pareto optimal with respect to the objectives. The method further includes identifying a treatment plan by use of the constructed Pareto frontier.

Abstract: A display apparatus includes: a display panel; a housing configured to support and protect the display panel; a support, the support being arranged between the display panel and the housing; a plurality of sensors, the plurality of sensors being fixed on the support; a window, the window being located in the display panel or the housing and being configured to expose at least one sensor; and a driver, the driver being configured to control the support to move along a plane parallel to the display panel, and to control the support to stop moving when a required sensor moves to a position of the window.

Abstract: Sterilization assemblies and self-sterilizing systems using the same include a support housing, a plurality of light-emitting diodes coupled to the support housing to selectively emit UV radiation to sterilize contaminants on a door handle, and a controller coupled to a power source and being configured to operate the plurality of light-emitting diodes by selectively providing power to the plurality of light-emitting diodes based on motion detection within a proximity of the door handle.

Abstract: Methods and systems for reducing acrylamide concentration in heat-processed products, and products produced by such methods and systems are provided. The baked products may be sprayed with a riboflavin solution and then irradiated with a UV light source to initiate monomer reactions of acrylamide and reduce the concentration of the acrylamide in the baked product. In addition, riboflavin may be dissolved in heat-processed products, followed by irradiation of the riboflavin-containing heat-processed products with a UV light source to initiate monomer reactions of acrylamide and reduce the concentration of the acrylamide in the baked product.

Abstract: A device for decontaminating a medical device, the device including a compartment adapted to contain a medical device and a solution, the solution comprising a photoactivatable substance; and a light system providing 360 degrees of exposure to the compartment. Also, a method for decontaminating a medical device, the method including placing a medical device in a compartment with a solution, the solution comprising a photoactivatable substance; incubating the medical device in the solution to allow the photoactivatable substance to attach to pathogens; and exposing the compartment to 360 degrees of light exposure to activate the photoactivatable substance.

Abstract: Systems, devices, and methods are disclosed herein for providing a sanitizing bottle. A sanitizing bottle includes a storage body to store liquid; a cap configured to removably attach to the storage body; a cap sensor disposed on the storage body to determine whether the cap is attached to the storage body; a UV emitter to emit UV light in the storage body; and a processor coupled to the cap sensor and the UV emitter. The processor is to activate the UV emitter responsive to determining, via the cap sensor, the cap is attached to the storage body. The processor is to deactivate the UV emitter responsive to determining, via the cap sensor, the cap is not attached to the storage body.

Abstract: An irradiation target for the production of radioisotopes, comprising at least one plate defining a central opening and an elongated central member passing through the central opening of the at least one plate so that the at least one plate is retained thereon, wherein the at least one plate and the elongated central member are both formed of materials that produce molybdenum-99 (Mo-99) by way of neutron capture.

Abstract: An X-ray CT apparatus of an embodiment includes an X-ray tube, an X-ray detector, a data processor, a battery, a rotating body, and processing circuitry. The X-ray detector is configured to detect X rays output from the X-ray tube. The data processor is configured to process a signal output from the X-ray detector. The battery is configured to supply electric power to the data processor. The rotating body is configured to rotatably support the X-ray tube and the X-ray detector, the X-ray tube facing the X-ray detector, and further to rotatably support the data processor and the battery. The processing circuitry is configured to monitor a remaining capacity of the battery, and determine a scanning condition on the basis of the remaining capacity.

Abstract: A portable light fastening assembly for use with the human interface of an electronic device includes a lamp housing and an adjustable attachment device extending from the lamp housing. An ultra-violet (UV) light source is at least partially enclosed in the lamp housing such that the adjustable attachment device includes an engagement member and a receptacle housing such that the engagement member can be removably fastened within the receptacle housing for holding the lamp housing in a fixed position.

Abstract: The disclosure relates to a method for producing a decorated wall panel or floor panel comprising the following method steps: a) providing a plate-shaped carrier; b) applying a decoration replicating a decorative pattern onto at least one partial region of the plate-shaped carrier; c) applying a covering layer onto the decoration, wherein the covering layer has a radiation-hardening compound; and d) hardening the covering layer. The covering layer is hardened by using a first radiator and a second radiator, wherein the first radiator emits radiation having a different wave length compared to the radiation of the second radiator, and wherein the first radiator and the second radiator are used in a common hardening step.

Abstract: A water disinfection system preferably includes a battery compartment, a control printed circuit board (PCB) to manage several parameters including timing, voltage rate, and user-interface. A high voltage power supply is coupled to a set of electrodes to cause an electric discharge. The electric discharge results in a series of reactions in the water that eliminate bacteria and viruses, dissolves organic material, and oxidizes inorganic compounds.

Abstract: Provided are devices for applying actinic radiation to a curable resin. The devices include a housing having a front face, an actinic radiation source arranged within the housing such that actinic radiation emerges from the housing through the front face, and a proximity detector. The proximity detector is functionally connected to the actinic radiation source such that the actinic radiation source is shut off unless the proximity detector detects the presence of a surface within a safe distance from the front face. Optionally, the device includes a surface temperature sensor functionally connected to the actinic radiation source such that the actinic radiation source is shut off if the surface temperature sensor senses a surface temperature exceeding a maximum safe surface temperature.

Abstract: A sanitization system for an amusement park includes a compartment disposed in a ride vehicle of an amusement park ride, where the compartment is configured to receive an article of the amusement park ride, an ultraviolet light source disposed in the compartment, where the ultraviolet light source is configured to transmit ultraviolet light toward a surface of the article when the article is positioned in the compartment, and a nozzle disposed in the compartment, wherein the nozzle is configured to direct a sanitizing fluid toward the surface of the article when the article is positioned in the compartment.

Abstract: A chuck table having a holding portion for holding a workpiece and a frame for supporting the holding portion. The holding portion includes a substrate having a plurality of fine holes arranged like a matrix at given intervals and a plurality of acoustic emission sensors arranged like a matrix on the substrate and spaced from each other so that each fine hole of the substrate is located between any adjacent ones of the acoustic emission sensors. The plurality of fine holes are connected through the frame to a vacuum source, thereby holding the workpiece on the acoustic emission sensors under suction. An elastic wave generated from the workpiece in processing the workpiece is collected at a plurality of positions by the plurality of acoustic emission sensors.

Abstract: Disclosed is an apparatus for supporting a substrate. The substrate support unit includes a support plate having a plurality of absorption holes, in which a vacuum pressure is formed, on an upper surface thereof to absorb the substrate, and a vacuum absorption unit configured to apply the vacuum pressure to the absorption holes, and the vacuum absorption unit includes a pressure measuring member configured to measure internal pressures of the absorption holes, an intake unit configured to intake and discharge gas in the absorption holes and adjust a suction force for suctioning the gas in the absorption holes, and a controller configured to control the intake unit to adjust the suction force according to the internal pressures measured by the pressure measuring member.

Abstract: A surface disinfecting system utilizing UV radiation emitted from at least on UV lamp, the UV lamp positioned in a light fixture that is positioned in a room to be disinfected. The light fixture is provided with a shaft upon which the light fixture rotates according to a predetermined cycle. The cycle may be programmed to adjust the speed and direction of rotation and intensity of the UV lamps.

Abstract: The invention provides a vessel (1) comprising a hull (21) with a coating layer (100), the vessel (1) further comprising an anti-biofouling system (200) comprising an optical medium and a light source configured to provide UV radiation, wherein the optical medium (270) is transmissive for light, wherein the optical medium comprises a radiation escape surface and a second optical medium surface with at least part of the transmissive optical medium material configured between said radiation escape surface and said second optical medium surface, wherein the optical medium is configured adjacent to at least part of the coating layer with the second optical medium surface configured closer to the hull (21) than the radiation escape surface, wherein the anti-biofouling system (200) is configured to provide said UV-radiation downstream from said radiation escape surface in a direction away from said hull (21), and wherein the vessel (1) further comprises a pattern comprising colored segments and UV reflective segmen

Abstract: A solution for irradiating a surface with ultraviolet radiation is provided. A movable optical element is utilized to form a beam of ultraviolet radiation having a characteristic cross-sectional area smaller than an area of the surface to be irradiated. The movable optical element can be moved as necessary to directly irradiate any portion of the surface with radiation within the characteristic cross-sectional area of the beam of ultraviolet radiation. The movement can include, for example, rotational movement and/or repositioning the movable ultraviolet source with respect to the surface.

Abstract: Biomass feedstocks (e.g., plant biomass, animal biomass, and municipal waste biomass) are processed to produce useful products, such as fuels. For example, novel systems, methods and equipment for conveying and/or cooling treated biomass are described.

Abstract: A substrate is alignable for ion beam milling or other inspection or processing by obtaining an electron channeling pattern (ECP) or other electron beam backscatter pattern from the substrate based on electron beam backscatter from the substrate. The ECP is a function of substrate crystal orientation and tilt angles associated with ECP pattern values at or near a maximum, minimum, or midpoint are used to determine substrate tilt. Such tilt is then compensated or eliminated using a tilt stage coupled the substrate, or by adjusting an ion beam axis. In typical examples, circuit substrate “chunks” are aligned for ion beam milling to reveal circuit features for evaluation of circuit processing.

Abstract: A plurality of light sources are provided and are able to be independently turned on and turned off. The light sources have directionality in directions of shot regions. The light sources, which are turned on so as to correspond to the shape of the shot region, are selected, thereby preventing an imprint material outside the shot region from being cured when an imprint pattern in the shot region is cured.

Abstract: A system includes a head supporting device, an alignment checker and a scanning device. The head supporting device is disposed on a first surface of an examination table for supporting a patient. The head supporting device includes an adjustable headrest platform for supporting a head of the patient. The adjustable headrest platform is configured to be movable along a direction perpendicular to the first surface of the examination table. The alignment checker is disposed on the examination table. The alignment checker is located corresponding to the head of the patient. The alignment checker is configured to verify a location or an orientation of the head of the patient. The scanning device is configured for capturing a scan image corresponding to a mandible of the patient.

Abstract: A holding device for holding a substrate includes a base including an intake hole and an exhaust flow path communicating with the intake hole, a moving member which is movable in a gravity direction by coming into contact with a substrate, and a determination unit configured to determine whether a moving member holds a substrate on the basis of changes in pressure of the exhaust flow path exhausted by an exhaust unit.

Abstract: One or more techniques and/or systems are described for generating power on a rotating unit of a system, such as a radiation system (e.g., CT system). The rotating unit comprises a generator that comprises a drive wheel. The drive wheel interfaces with a drive mechanism of a stationary unit. As the rotating unit is moved relative to the stationary unit, the drive wheel rotates along the drive mechanism causing power to be generated by the generator. The power may be supplied to one or more electronic components of the rotating unit.

Abstract: An apparatus for fixing a wafer, including a chuck having a surface, a plurality of through bores in the chuck extending through the surface of the chuck, a fixed vacuum bellows, and a plurality of floating air bearings, wherein the fixed vacuum bellows and a respective floating air bearing of the plurality of floating air bearings are each individually arranged in separate through bores of the plurality of through bores and elevationally above the surface of the chuck.

Abstract: In one embodiment, an ion implantation apparatus includes an ion source configured to generate an ion beam. The apparatus further includes a scanner configured to change an irradiation position with the ion beam on an irradiation target. The apparatus further includes a first electrode configured to accelerate an ion in the ion beam. The apparatus further includes a controller configured to change at least any of energy and an irradiation angle of the ion beam according to the irradiation position by controlling the ion beam having been generated from the ion source.

Abstract: An apparatus for a chuck having particle recesses is provided. In some embodiments, the chuck includes a plurality of impressions and a particle recess. The impressions of the plurality of impressions are laterally spaced and extend into the chuck from a top surface of the chuck to a base surface of the chuck. The base surface of the chuck defines bottom surfaces respectively of the impressions and is spaced between the top surface of the chuck and a bottom surface of the chuck. The particle recess extends in to the chuck from the top surface of the chuck to a location spaced between the base surface of the chuck and the bottom surface of the chuck. In particular, the particle recess is configured to underlie a workpiece alignment mark of a workpiece.

Abstract: A sex toy storage, charging, and sanitization device having a base with an internal electrical compartment; at least one phallus support rack extending upwardly from the base forming a plurality of phallus storage compartments; at least one electrical outlet embedded in the base adjacent each of the phallus storage compartments; at least one USB port embedded in the base adjacent each of the at least one phallus storage compartments; a string of ultraviolet ‘C’ frequency lights attached to the underside of the cover for sanitization; a supercharger for storing electrical power for recharging sex toys; an electric bar for recharging sex toys connected to the electrical outlet; a USB component for recharging sex toys connected to the USB port; an electrical cord for electrical connection to an external power source; three hooks for hanging sex toys from the rack; and a cover.

Abstract: The present disclosure relates generally to systems, devices and methods for disinfection of space and equipment. In particular, the present disclosure relates to systems, devices and methods, such as rolling enclosures, which use light sources, such as ultraviolet (UV) light, and more specifically UV-C light, to disinfect larger scale equipment or spaces. Systems and methods of the present disclosure are particularly useful in medical facilities for treating medical equipment or spaces, where the prevalence of pathogens requires frequent disinfecting.

Abstract: An exposure apparatus includes a carrying device and a UV light generation device that irradiate a transparent substrate positioned on the carrying device. The carrying device includes a base, a linear electric machine, an exposure table, and a pneumatic lift device that is arranged between the exposure table and the base and supports the exposure table on the base. A stator of the linear electric machine is fixed to the base, and a rotor of the linear electric machine is fixedly coupled to the exposure table. The linear electric machine drives the exposure table to move relative to the base. A method for exposure of a transparent substrate is also provided. The linear electric machine only needs to drive the movement of the exposure table thereby helping increase exposure speed and exposure accuracy. The pneumatic lift device provides an additional function of cushioning.

Abstract: A semiconductor structure includes a first dielectric layer, a first conductive via, a second conductive via and an etch stop layer. The first conductive via and the second conductive via are respectively disposed in the first dielectric layer. The etch stop layer is disposed on the first dielectric layer and contacts the first and second conductive vias. The etch stop layer includes nitrogen-and-oxygen-doped silicon carbide (NODC).

Abstract: A tubular fluid purification apparatus includes a guide part provided with an inlet port into which fluid is drawn, a discharge part provided with an outlet port from which the fluid is discharged, a conduit part configured to provide a space for flow of the fluid between the guide part and the discharge part, and a purification of unit supported on an inner surface of the conduit part and disposed to face the fluid flowing from the guide part to the discharge part. The purification unit includes a vortex generation part including a support and an opening formed in the support, and a light emitting diode disposed on the support at a position adjacent to the opening and configured to provide ultraviolet light.

Abstract: A system and method is provided maintaining a temperature of a workpiece during an implantation of ions in an ion implantation system, where the ion implantation system is characterized with a predetermined set of parameters. A heated chuck is provided at a first temperature and heats the workpiece to the first temperature. Ions are implanted into the workpiece concurrent with the heating, and thermal energy is imparted into the workpiece by the ion implantation. A desired temperature of the workpiece is maintained within a desired accuracy during the implantation of ions by selectively heating the workpiece on the heated chuck to a second temperature. The desired temperature is maintained based, at least in part, on the characterization of the ion implantation system. Thermal energy imparted into the workpiece from the implantation is mitigated by the selective heating of the workpiece on the heated chuck at the second temperature.