With Translucent Material Patents (Class 250/559.28)
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Patent number: 11745528Abstract: There is provided a tape drive. The tape drive comprises first and second spool supports on which spools of tape may be mounted. The tape drive further comprises an optical sensing system. The optical sensing system comprises a radiation emitter and a radiation detector, said radiation emitter and radiation detector having a fixed positional relationship in use with respect to said first and second spool supports. The tape drive further comprises a controller. The controller is operative to, energise the radiation emitter to emit radiation, and determine a diameter data indicative of a diameter of a spool mounted on one of the first and second spool supports based on a radiation signal generated by the detector.Type: GrantFiled: June 29, 2018Date of Patent: September 5, 2023Inventors: Gareth Walley, Martin McNestry, Gary Pfeffer, Philip Hart
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Patent number: 11255659Abstract: Non-contacting caliper measurements of free-standing sheets detect mid-IR interferometric fringes created by the reflection of light from the top and bottom surfaces of the sheet. The technique includes directing a laser beam at a selected angle of incidence onto a single spot on the exposed outer surface and scanning the laser beam through a selected wavelength range as the laser beam is directed onto the exposed outer surface and measuring the intensity of an interference pattern that forms from the superposition of radiation that is reflected from the exposed outer surface and from the inner surface. Alternatively, the intensity of an interference pattern formed from the superposition of radiation that is directly transmitted through the web and radiation that is transmitted through the web after internal reflections from the internal surfaces of the web. Thickness can be extracted from the fringe separation in the interference pattern.Type: GrantFiled: February 20, 2018Date of Patent: February 22, 2022Assignee: Honeywell ASCaInventors: Michael Kon Yew Hughes, Sebastien Tixier, Stephane Savard
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Patent number: 10982949Abstract: A measurement apparatus includes a detection unit to detect a first light intensity of a light obtained by making a first light having a first wavelength transmitted through a measurement object, a second light intensity of a light obtained by making a second light having a second wavelength transmitted through the object, the second wavelength having a lower rate of absorption by a material of the object than the first wavelength, and a third light intensity of a light obtained by making a third light having a third wavelength transmitted through the object, the third wavelength having a lower rate of absorption by the material of the object than the first wavelength and having a lower rate of absorption by the object containing a fluid than the second wavelength, and a calculation unit to calculate the thickness of the object by using the first, second, and third light intensities.Type: GrantFiled: November 27, 2019Date of Patent: April 20, 2021Assignee: YOKOGAWA ELECTRIC CORPORATIONInventors: Kazufumi Nishida, Hitoshi Hara, Kazuki Setsuda
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Patent number: 10876922Abstract: Methods and systems for determining optical properties for light transmitted mediums are provided. One method includes acquiring one or more measured values indicative of a reflectance for a material, acquiring one or more measured values indicative of a transmittance for the material, and determining a set of calculated values for an index of refraction coefficient and an extinction coefficient from the one or more measured values indicative of reflectance and transmittance, respectively. The method includes identifying a calculated value from the set of calculated values for the index of refraction coefficient and a calculated value from the set of calculated values for the extinction coefficient that are within a threshold determined by the difference between the one or more measured values indicative of the reflectance or transmittance and a predicted reflectance or transmittance, respectively. The method includes determining a reflectance and transmittance for the material using the calculated values.Type: GrantFiled: June 11, 2014Date of Patent: December 29, 2020Assignee: The Boeing CompanyInventors: Sahrudine Apdalhaliem, Kimberly D. Meredith
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Patent number: 10753728Abstract: Methods and apparatus for measuring a thickness of a coating on an object are provided. Light is directed toward the object at a predetermined location on the object such that a portion of the light interacts with the object. An image having at least two wavelength channels (e.g., color channels) is captured that is produced by the portion of the light interacting with the object. A relative shift is determined between each of the at least two wavelength channels, based on a histogram of each wavelength channel of the at least two wavelength channels. At least one of the thickness or an acceptability of the coating on the object is determined based on the determined relative shift.Type: GrantFiled: January 4, 2017Date of Patent: August 25, 2020Assignee: Arkema Inc.Inventor: Gunter E. Moeller
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Patent number: 10675764Abstract: Provided is an excellent robot device capable of preferably detecting difference between dirt and a scratch on a lens of a camera and difference between dirt and a scratch on a hand. A robot device detects a site in which there is the dirt or the scratch using an image of the hand taken by a camera as a reference image. Further, this determines whether the detected dirt or scratch is due to the lens of the camera or the hand by moving the hand. The robot device performs cleaning work assuming that the dirt is detected, and then this detects the difference between the dirt and the scratch depending on whether the dirt is removed.Type: GrantFiled: August 19, 2019Date of Patent: June 9, 2020Assignee: Sony CorporationInventor: Tsutomu Sawada
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Patent number: 9741122Abstract: A method is provided for determining the distance between two optical boundary surfaces spaced apart from each other in a first direction. A first image is ascertained wherein the plane into which the pattern acquired coincides with a first of two optical boundary surfaces or has the smallest distance to the first optical boundary surface in a first direction. A position of the first image in the first direction is determined. A second image is ascertained wherein the plane into which the pattern acquired coincides with a second of two optical boundary surfaces or has the smallest distance to the second optical boundary surface in the first direction. The position of the second image in the first direction is determined. The distance is calculated by means of determined positions of the first and second image.Type: GrantFiled: August 14, 2015Date of Patent: August 22, 2017Assignee: Carl Zeiss Microscopy GmbHInventors: Reiner Mitzkus, Matthias Pospiech, Anke Vogelgsang
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Patent number: 9255792Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. The bottom surface forms a surface where, of the light reflected from the work piece, light following a direct reflection direction is reflected in a direction moving away from the incidence region, from a position where light emitted from the emitting region is emitted at the work piece. Accordingly, an amount of second order reflected light striking the incidence region can be suppressed and, therefore, an occurrence of an erroneous value in received light distribution can be suppressed.Type: GrantFiled: February 3, 2015Date of Patent: February 9, 2016Assignee: MITUTOYO CORPORATIONInventors: Kentaro Nemoto, Masaoki Yamagata, Eisuke Moriuchi, Tadashi Iwamoto
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Patent number: 9217715Abstract: Provided herein are apparatuses and methods related thereto, wherein at least one apparatus includes: a photon emitting means configured to emit photons, wherein the photons are scattered from magnetic features of an article; a photon detector array configured to receive scattered photons; and a processing means configured to differentiate the magnetic features from the scattered photons.Type: GrantFiled: February 28, 2014Date of Patent: December 22, 2015Assignee: Seagate Technology LLCInventors: Joachim Walter Ahner, David M. Tung, Stephen Keith McLaurin
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Patent number: 8723149Abstract: Systems and methods for advanced monitoring and control using an LED driver in an optical processor are described. In an embodiment, a monitoring and control circuit may include a light-emitting diode (LED) driver including a control input, an output, and a node, wherein the output is coupled to an LED. The circuit may also include a multiplexer coupled to the node of the LED driver, an analog-to-digital converter coupled to the multiplexer, and a controller coupled to the analog-to-digital converter and to the control input of the LED driver, wherein the LED driver is coupled to drive the output with a first voltage supply that is independent from a second voltage supply that is coupled to drive the controller.Type: GrantFiled: November 10, 2010Date of Patent: May 13, 2014Assignee: Silicon Laboratories Inc.Inventors: Miroslav Svajda, Wayne T. Holcombe
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Patent number: 8674331Abstract: According to one embodiment, an electronic apparatus includes a proximity sensor, a control module and an adjustment module. The proximity sensor is configured to emit light and to detect reflection of the emitted light. The control module is configured to control an operation of the electronic apparatus, based on an output signal of the proximity sensor. The adjustment module is configured to adjust an intensity of the emitted light by monitoring the output signal of the proximity sensor while varying the intensity of the emitted light, when an event indicating that a detection distance of the proximity sensor is to be adjusted has occurred.Type: GrantFiled: December 3, 2010Date of Patent: March 18, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Takashi Iwai
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Patent number: 8610048Abstract: A method for producing a photosensitive integrated circuit including producing circuit control transistors, producing, above the control transistors, and between at least one upper electrode and at least one lower electrode, at least one photodiode, by amorphous silicon layers into which photons from incident electromagnetic radiation are absorbed, producing at least one passivation layer, between the lower electrode and the control transistors, and producing, between the control transistors and the external surface of the integrated circuit, a reflective layer capable of reflecting photons not absorbed by the amorphous silicon layers.Type: GrantFiled: September 22, 2011Date of Patent: December 17, 2013Assignee: STMicroelectronics S.A.Inventors: Jerome Alieu, Simon Guillaumet, Christophe Legendre, Hughes Leininger, Jean-Pierre Oddou, Marc Vincent
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Patent number: 8223326Abstract: The present invention relates to a dark-field examination device.Type: GrantFiled: January 16, 2009Date of Patent: July 17, 2012Assignee: Snu Precision Co., Ltd.Inventors: Tai-Wook Kim, Heui-Jae Park, Il-Hwan Lee
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Patent number: 8059282Abstract: A reflective film thickness measurement method includes reading an original spectral image of a thin film measured by a broadband light source passing through a measurement system, transforming the original spectral image into a broadband reflectance wavelength function and then into a broadband frequency-domain function, dividing the broadband frequency-domain function by a single-wavelength frequency-domain function to obtain an ideal frequency-domain function, inverse-transforming the ideal frequency-domain function into an ideal reflectance wavelength function, and performing a curve fitting on the ideal reflectance wavelength function and a reflectance wavelength thickness general expression, so as to obtain a thickness of the thin film. A spectral image spatial axis direction processing method is performed to eliminate optical aberration in a deconvolution manner, so as to obtain spectral images of high spatial resolution.Type: GrantFiled: August 27, 2008Date of Patent: November 15, 2011Assignee: Industrial Technology Research InstituteInventor: Fu-Shiang Yang
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Patent number: 7663769Abstract: A sheet thickness measuring device includes: an illumination unit that outputs a light that is illuminated into a stack of sheets from a first area defined on one of faces including a top face, a bottom face, and side faces of the stack of sheets; a detection unit that detects a light amount distribution of light entered into the stack of sheets and propagated to a second area through the stack of sheets, the second area defined on one of the side faces of the stack of sheets; and a calculation unit that calculates a thickness of a sheet in the stack of sheets based on the light amount distribution detected by the detection unit.Type: GrantFiled: September 23, 2008Date of Patent: February 16, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Hiromichi Hayashihara, Masataka Shiratsuchi, Yoshinori Honguh, Takeshi Morino, Hiroshi Ohno
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Patent number: 7385174Abstract: An apparatus for inspecting sidewall thickness of non-round transparent containers includes a conveyor for holding a container in stationary position and rotating the container around an axis. A light source directs light energy onto a sidewall of the container on the conveyor. An anamorphic lens system having a lens system axis directs onto a light sensor energy reflected from portions of the inside and outside surfaces of the container sidewall that are substantially parallel to the lens system axis. An information processor is responsive to the sensor for determining sidewall thickness at increments of container rotation as a function of separation at the sensor between light energies reflected from the inside and outside surfaces of the container sidewall.Type: GrantFiled: June 26, 2006Date of Patent: June 10, 2008Assignee: Owens-Brockway Glass Container Inc.Inventor: James A. Ringlien
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Patent number: 7208749Abstract: The invention is directed to an ultrasonic testing system. The system tests a manufactured part for various physical attributes, including specific flaws, defects, or composition of materials. The part can be housed in a gantry system that holds the part stable. An energy generator illuminates the part within energy and the part emanates energy from that illumination. Based on the emanations from the part, the system can determined precisely where the part is in free space. The energy illumination device and the receptor have a predetermined relationship in free space. This means the location of the illumination mechanism and the reception mechanism is known. Additionally, the coordinates of the actual testing device also have a predetermined relationship to the illumination device, the reception device, or both.Type: GrantFiled: August 21, 2003Date of Patent: April 24, 2007Assignee: Lockheed Martin CorporationInventor: Thomas E. Drake, Jr.
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Patent number: 7187456Abstract: A method for measuring at least one desired parameter of a patterned structure having a plurality of features defined by a certain process of its manufacturing. The structure represents a grid having at least one cycle formed of at least two metal-containing regions spaced by substantially transparent regions with respect to incident light defining a waveguide. An optical model is provided, which is based on at least some of the features of the structure defined by a certain process of its manufacturing, and on the relation between a range of the wavelengths of incident radiation to be used for measurements and a space size between the two metal-containing regions in the grid cycle, and a skin depth of said metal. The model is capable of determining theoretical data representative of photometric intensities of light components of different wavelengths specularly reflected from the structure and of calculating said at least one desired parameter of the structure.Type: GrantFiled: February 8, 2005Date of Patent: March 6, 2007Assignee: Nova Measuring Instruments Ltd.Inventors: David Scheiner, Vladimir Machavariani
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Patent number: 7088456Abstract: A system and method for analyzing the characteristics of a thin film is provided. The current invention extends the capability of IR sensors to measure thin films through configuring a plurality of detection channels with appropriately chosen filters. With the multichannel infrared sensor, the characteristic signature of interference fringes can be detected simultaneously with, or instead, of absorption-based measurements.Type: GrantFiled: April 24, 2004Date of Patent: August 8, 2006Assignee: Honeywell International Inc.Inventors: Igor N. Germanenko, Steve Axelrod
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Patent number: 7012699Abstract: The present invention provides a method of measuring the thickness of a thin film or thin layer by a spectroscopic measurement, which is applicable to the measurement of a multiple layered film whose layers have different refractive indices. According to the method, an interference light from the film is measured to create a measured spectrum. The waveform of the measured spectrum can be approximately represented by a linear sum of base spectrums. Accordingly, various constructed spectrums are created using base spectrums each having a cycle interval as a parameter. Then, the constructed spectrum that minimizes the square error against the measured spectrum is identified. The least square error is calculated for each of predetermined cycle intervals. A graph is drawn to represent the relation between the least square error and the cycle interval. The correspondence between the layers and the plural minimum points of the least square error appearing on the graph is determined.Type: GrantFiled: August 20, 2003Date of Patent: March 14, 2006Assignee: Shimadzu CorporationInventors: Kazunari Shinya, Takashi Nishimura
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Patent number: 6984839Abstract: A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a detector forming a slot therebetween. The emitter and the detector are moved toward the opening in the pod and are plunged into the interior of the pod after a door is opened by the door unit, and the slot between the emitter and the detector crosses an end portion of a wafer to thereby detect the presence or absence of the wafer. Thereby, a mechanism portion liable to produce dust which may adhere to the wafer and cause the contamination thereof can be disposed separately from the pod.Type: GrantFiled: November 22, 2002Date of Patent: January 10, 2006Assignee: TDK CorporationInventors: Hiroshi Igarashi, Tsutomu Okabe, Toshihiko Miyajima
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Patent number: 6849859Abstract: The figure of a substrate is very precisely measured and a figured-correcting layer is provided on the substrate. The thickness of the figure-correcting layer is locally measured and compared to the first measurement. The local measurement of the figure-correcting layer is accomplished through a variety of methods, including interferometry and fluorescence or ultrasound measurements. Adjustments in the thickness of the figure-correcting layer are made until the top of the figure-correcting layer matches a desired figure specification.Type: GrantFiled: March 21, 2001Date of Patent: February 1, 2005Assignee: Euv Limited Liability CorporationInventors: James A. Folta, Eberhard Spiller
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Patent number: 6806459Abstract: Apparatus for measuring sidewall thickness of a container includes a conveyor for moving the container transversely of its axis through an inspection station and simultaneously rotating the container about its axis. A light source and an illumination lens system direct onto the sidewall of the container a line-shaped light beam having a long dimension perpendicular to the axis of the container and parallel to the direction of movement of the container through the inspection station. A light sensor and an imaging lens system direct onto the sensor light energy reflected from portions of the outer and inner sidewall surfaces that are perpendicular to the illumination light energy. An information processor is responsive to light energy directed onto the light sensor by the imaging lens system for determining the thickness of the container between the outer and inner sidewall surfaces.Type: GrantFiled: August 30, 2001Date of Patent: October 19, 2004Assignee: Owens-Brockway Glass Container Inc.Inventors: James A. Ringlien, John W. Juvinall
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Patent number: 6791681Abstract: An apparatus for determining an existence range of a foreign substance which is present on a surface of an object, includes: an optical system including a light source for emitting a light beam on to the surface of the object; a movement section for relatively moving the object with respect to the light beam; a light detection section for detecting a light quantity of the light beam reflected by the surface of the object to generate a light detection signal which indicates the light quantity; a difference signal generation section for generating a difference signal; a perimeter signal generation section for comparing the difference signal with a reference value to generate a perimeter signal; and a foreign substance determination section for determining an existence range of the foreign substance using the perimeter signal.Type: GrantFiled: June 13, 2002Date of Patent: September 14, 2004Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Yasuhiro Gotoh, Seiji Nishiwaki
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Patent number: 6762838Abstract: The use of an intensity spectrum as a fingerprint to determine the layer structure of a semiconductor wafer product or partial product, thereby to determine the routing history of the product through a production line and prevent routing errors. Also, a production line having a plurality of successive stages for construction of a product such as a semiconductor wafer, and routers for transferring partly constructed product between the stages such that each stage receives a respective predefined partly constructed product as its input.Type: GrantFiled: July 2, 2001Date of Patent: July 13, 2004Assignee: Tevet Process Control Technologies Ltd.Inventor: Ofer Du-Nour
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Patent number: 6710890Abstract: An apparatus for measuring a thickness of a substrate having an upper surface, without contacting the upper surface of the substrate. A platen having a base surface receives the substrate, and a reference surface is disposed at a known first height from the platen surface. A non contact sensor senses the known first height of the reference surface without making physical contact with the reference surface. The non contact sensor further senses a relative difference between the known first height of the reference surface and a second height of the upper surface of the substrate without making physical contact with the upper surface of the substrate. A controller controls the sensor and determines the thickness of the substrate based at least in part on the known first height of the reference surface and the relative difference between the known first height of the reference surface and the second height of the upper surface of the substrate.Type: GrantFiled: February 26, 2003Date of Patent: March 23, 2004Assignee: KLA-Tencor Technologies CorporationInventors: Shankar Krishnan, Christopher M. Pohlhammer, Michael P. Green
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Patent number: 6693275Abstract: A method and apparatus (16) for inspecting the thickness of conveyed blow molded containers (18) utilizes a laser source (22) for directing a laser beam (24) upwardly from the exterior of the conveyed containers toward the container bottoms so as to be reflected downwardly at both outer and inner surfaces (28, 30) of the container bottom. The downwardly reflected laser beams are detected by a detector (32) so as to measure the thickness of each container bottom along a predetermined path. The inspected blow molded containers (10) are conveyed upright and the inspection path is along a bottom (34) of the container while the containers are conveyed by a rotary wheel (40) that is driven at a constant speed.Type: GrantFiled: March 23, 2000Date of Patent: February 17, 2004Assignee: Plastipak Packaging, Inc.Inventors: Wilmer D. Stork, Franklin C. McGauley
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Patent number: 6515293Abstract: A method of measuring the thickness of a thin layer, by which the thickness of a top layer formed on the surface of a wafer can be detected in real time, and an apparatus therefor. This method includes irradiating light onto a cell and obtaining luminance from reflected light, detecting the thickness of a thin layer in an oxide site which is adjacent to the cell, repeating the irradiating and detecting steps to obtain a plurality of luminance values from cells formed on the wafer and a plurality of thickness values of thin layers in oxide sites that are adjacent to the cells, and employing a thickness calculation formula for calculating the thickness of a top layer using the plurality of luminance values and plurality of thickness values obtained in the prior steps.Type: GrantFiled: September 28, 2000Date of Patent: February 4, 2003Assignee: Samsung Electronics Co., Ltd.Inventors: Chung-sam Jun, Sang-mun Chon, Sang-bong Choi, Hyun-suk Cho, Pil-sik Hyun
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Patent number: 6268919Abstract: A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above.Type: GrantFiled: August 17, 1999Date of Patent: July 31, 2001Assignee: Candela InstrumentsInventors: Steven W. Meeks, Rusmin Kudinar, Ronny Soetarman
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Patent number: 6229610Abstract: A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above.Type: GrantFiled: August 17, 1999Date of Patent: May 8, 2001Assignee: Candela InstrumentsInventors: Steven W. Meeks, Rusmin Kudinar, Ronny Soetarman
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Patent number: 6198533Abstract: A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness and debris on thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat in a high temperature environment. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The polarization switch can be accomplished using a temperature compensated quartz half plate. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness.Type: GrantFiled: August 17, 1999Date of Patent: March 6, 2001Assignee: Candela Instruments, Inc.Inventors: Steven W. Meeks, Rusmin Kudinar, Ronny Soetarman