Diaphragm Patents (Class 251/331)
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Patent number: 7458560Abstract: A diaphragm valve includes a valve body defining a passageway constructed to form a valve seat, and a diaphragm. A compressor moves the diaphragm between a closing position in which a flow of fluid through the passageway is barred as the diaphragm is caused by the compressor to seal the valve seat, and an open position in which at least part of a cross section of the passageway is bounded by the diaphragm to thereby enable a flow of fluid through the passageway substantially without narrowing the cross section of the passageway.Type: GrantFiled: April 10, 2006Date of Patent: December 2, 2008Assignee: GEMÜ Gebrüder Müller Apparatebau GmbH & Co. KGInventor: Fritz Müller
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Publication number: 20080290311Abstract: A flush valve diaphragm of a flush valve includes a body having a segmented insert within a flexible body portion and a central passageway. The body further includes a peripheral sealing portion with the flexible body portion within the peripheral sealing portion. The peripheral sealing portion can include an integral filter, an exit chamber and a bypass arrangement, such that water flowing through the filter flows through the bypass arrangement. The integral filter version will retard clogging of the bypass arrangement. The segmented insert includes a plurality of trapezoidal members with outward protrusions. The plurality of trapezoidal members are connected to each other on their outermost edge by a runner.Type: ApplicationFiled: December 27, 2007Publication date: November 27, 2008Applicant: Zurn Industries, LLCInventors: J. Timothy O'Connor, Michael A. Funari
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Patent number: 7455279Abstract: The dual actuator valve of the present invention deploys both the primary and secondary actuator elements in a single, common control chamber. Therefore, the present invention provides a dual actuator valve having dimensions that are the same as, or similar to, the dimensions of a single actuator control valve. It will be appreciated that the actuator elements may be of diaphragm type or piston type actuator elements. The primary actuator element is mechanically linked to the valve plug and regulates the flow though the valve, while the secondary actuator element remains in a fully open position. Should the primary actuator element fail to operate the valve due, for example, to diaphragm rupture, failure of the primary control system, or any other reason, the secondary control system activates the secondary actuator element, which then effects movement of the primary actuator element thereby resuming flow regulation or closure of the valve as necessary.Type: GrantFiled: June 23, 2005Date of Patent: November 25, 2008Assignee: Bermad CS, LtdInventor: Zvi Weingarten
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Patent number: 7445017Abstract: A mesovalve having a diaphragm situated between a first chamber and a second chamber. There may be an inlet and an outlet in the first chamber. The diaphragm may provide an orifice between the first and second chambers. There may be a first electrode on the diaphragm and a second electrode on an inside surface of the second chamber. The diaphragm may have first and second positions, or numerous variable positions. Applying a voltage across the electrodes may electrostatically move the diaphragm to the second position during which the outlet is at least partially opened for fluid communication with the inlet, the orifice is closed and the diaphragm is stopped in the second position by a cushioning fluid pressure in the second cavity to prevent pull-in. Removing the voltage from the electrodes may let the diaphragm return to the first position, open the orifice and close the outlet.Type: GrantFiled: January 28, 2005Date of Patent: November 4, 2008Assignee: Honeywell International Inc.Inventors: Eugen I. Cabuz, Cleopatra Cabuz, Virgil Claudiu Banu
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Patent number: 7445163Abstract: A suck back valve comprises an ON/OFF valve, a suck back mechanism which includes a second piston connected to a second diaphragm to make displacement integrally and a second spring member fastened to the second piston, a load sensor which detects a load applied by a resilient force of the second spring member corresponding to a pressure of a pilot pressure to be supplied, and a second control unit which detects loads before and after displacement of the second diaphragm by using the load sensor to calculate a displacement amount of the second diaphragm based on a difference between the detected loads.Type: GrantFiled: June 28, 2005Date of Patent: November 4, 2008Assignee: SMC Kabushiki KaishaInventors: Yoshihiro Fukano, Tadashi Uchino
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Publication number: 20080224081Abstract: The present invention has an object to improve the flow property so as to increase the gas flow amount, to inhibit the gas from staying within a valve chamber, and to enhance the gas-replacement property such as evacuation performance and purge performance. A housing (2) is provided with a first flow passage (7), a valve chamber (9) of a shut-off valve (8) and a second flow passage (10) in the mentioned order. A diaphragm (13) is arranged so that it hermetically covers the valve chamber (9). The first flow passage (7) has an inner end opened into an inner surface of the valve chamber (9) to which a mid portion of the diaphragm (13) is opposed. A valve seat (15) is formed around this opening. The shut-off valve (8) is opened and closed by allowing the diaphragm (13) to approach and separate from the valve seat (15). A groove portion (18) is formed in the inner surface of the valve chamber (9) around the valve seat (15).Type: ApplicationFiled: December 14, 2004Publication date: September 18, 2008Inventors: Koji Miyazaki, Kouichi Kaminaga, Kouichi Saji
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Publication number: 20080224082Abstract: A valve (10) for use with a dispensing container. The valve comprises a valve stem (11), a valve body (14) and one or more seals (17, 18), the valve stem being slidable within the valve body, the one or more seals co-operating with the valve stem for regulating discharge of fluid. The vale further comprises a sealing gasket (16) for sealing the valve (10) to a dispensing container, in which the one or more seals is/are formed from a first material and the sealing gasket is formed from a second material different from the first material, wherein the sealing gasket is formed from a material comprising butyl or EPDM and the one or more seals is/are formed from a material comprising EPDM or Butyl.Type: ApplicationFiled: December 15, 2005Publication date: September 18, 2008Inventor: Richard Warby
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Publication number: 20080210312Abstract: A flow control device having a control member for forming a seal with another part of the flow control device. The control member having a base material and a portion or surface that is a softer or more deformable than the base material or the portion of the control device that the control member forms a seal with. The differences in hardness and/or the ability of the control member portion to deform, aids in forming the seal.Type: ApplicationFiled: May 9, 2008Publication date: September 4, 2008Applicant: SWAGELOK COMPANYInventor: William H. Glime
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Patent number: 7416165Abstract: A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body 2 to allow the diaphragm 3 to rest on and move away from the valve seat 8, wherein synthetic resin films 5 of predetermined thickness are coated on fluid-contacting parts 25 of the afore-mentioned body 2 and diaphragm 3. A diaphragm valve in accordance with the present invention prevents corrosion of the valve members caused by accumulation and adherence of substances produced by thermal decomposition, and prevents clogging caused by substances produced, and prevents seat leakage when applied in the vacuum exhaust system of a semiconductor manufacturing facility.Type: GrantFiled: February 9, 2004Date of Patent: August 26, 2008Assignees: Fujikin IncorporatedInventors: Tadahiro Ohmi, Nobukazu Ikeda, Michio Yamaji, Masafumi Kitano, Akihiro Morimoto
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Publication number: 20080169444Abstract: A check valve for medical infusion lines and the like, includes a diaphragm made of elastic material set between a first tubular connector and a second tubular connector. The diaphram includes an end wall of a cup-shaped element, having an outer peripheral edge of which is normally pressed in seal contact against an annular valve seat with a conical surface of the first tubular connector under an axial thrust exerted by a side wall of the cup-shaped element. A free edge of the side wall of the cup-shaped element is set resting against a transverse surface of the second tubular connector only in regions corresponding to angular portions of the latter separated by non-resting angular portions.Type: ApplicationFiled: January 16, 2008Publication date: July 17, 2008Applicant: INDUSTRIE BORLA S.p.AInventor: Gianni GUALA
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Patent number: 7398954Abstract: A faucet adapter including an inlet assembly that includes a connecting portion configured for connection to a fluid source. A handle remote from the connecting portion is operably connected thereto such that actuation of the handle results in actuation of the connecting portion, independent of a fluid flow through the adapter.Type: GrantFiled: May 12, 2005Date of Patent: July 15, 2008Assignee: L. R. Nelson CorporationInventors: Lawrence P. Heren, Michael Breedlove, Timothy R. Casica
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Publication number: 20080157015Abstract: To provide a handle equipped with a torque limiter capable of preventing application of excessive torque, and a fluid controller provided with the same. An elastic body (7) has a minimum-urging force capable of developing a function desired when the handle is lowered to the lowest position. Disposed in the handle are a transmitting member (8) urged by the elastic body and a transmitted material (10) against which the lower surface of the transmitting material is pressed. The surface of the transmitted material opposed to the transmitting material or the surface of the transmitting material opposed to the transmitted material is formed with serrations along the periphery having inclined surfaces (81, 101) and vertical surfaces (82, 102) which alternately appear. The inclined surfaces of the serrations are upwardly tapered along the direction of rotation in which the cover body descends.Type: ApplicationFiled: December 22, 2004Publication date: July 3, 2008Inventors: Kunihiko Daido, Hideyuki Miyagawa
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Publication number: 20080149877Abstract: Apparatus to seal a shaft to a diaphragm in a diaphragm actuator are disclosed. An example apparatus for use in a diaphragm actuator has a central aperture and an integral sealing protrusion disposed about a circumference of the central aperture. The sealing protrusion is configured to sealingly engage a shaft of the diaphragm actuator.Type: ApplicationFiled: December 22, 2006Publication date: June 26, 2008Inventor: John Carl Bessman
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Patent number: 7389969Abstract: A chemical liquid valve is arranged such that a diaphragm coupled to a piston rod is brought into/out of contact with a valve seat provided between an inlet port and an outlet port. To achieve a chemical liquid valve providing stable sealing strength, the diaphragm includes an engagement part whose top end is formed in semispherical shape, which is inserted and engaged in a recess of the piston rod so that the engagement part of the diaphragm comes into point contact with an inner wall of the recess of the piston rod. Thus, the piston rod swingably holds the diaphragm.Type: GrantFiled: March 1, 2006Date of Patent: June 24, 2008Assignee: CKD CorporationInventors: Akinori Masamura, Shigeru Osugi
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Publication number: 20080121834Abstract: A tensioning system (18) is provided, which interacts with a traction element of a traction element drive via a tensioning rail. The construction of the tensioning system (18) includes a pot-shaped housing (19), which forms a pressure space (20), in which a piston (21) is guided so that it can move longitudinally. For an adjustment movement of the piston (21) in a direction of the pressure space (20), the hydraulic fluid enclosed in the pressure space (20) is regulated by a leakage gap (24). An opposite adjustment movement of the piston (21) causes a return flow of the hydraulic fluid into the pressure space (20) via a one-way valve (1a) integrated in the piston (21). The construction of the one-way valve (1a) includes a cage (2), in which a valve body (3a) constructed as a disk is inserted captively and is guided between a valve seat (5) and a rim (8) so that it can move axially.Type: ApplicationFiled: November 26, 2007Publication date: May 29, 2008Applicant: SCHAEFFLER KGInventor: Roman Kern
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Patent number: 7377483Abstract: A diaphragm valve for opening or closing itself through making direct contact of or through breaking the direct contract of a metal diaphragm with a valve seat disposed inside a body provided with an inlet port and an outlet port. The diaphragm valve includes an elevating member which serves to make or break the direct contact of the metal diaphragm with the valve seat and which is fusion-bonded to the metal diaphragm.Type: GrantFiled: August 23, 2005Date of Patent: May 27, 2008Assignee: Kitz SCT CorporationInventors: Toshiaki Iwabuchi, Katsuhiko Honma
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Publication number: 20080116411Abstract: A valve comprises a valve seat and a movable diaphragm. The valve seat defines a fluid orifice and is formed at least partially of polybenzimidazole. The diaphragm is sized and configured to bear against the fluid orifice to substantially block fluid flow through the orifice. The valve is advantageously used in a hot zone of a semiconductor processing system.Type: ApplicationFiled: November 16, 2006Publication date: May 22, 2008Applicant: ASM AMERICA, INC.Inventors: Carl L. White, Paul G. Curry
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Publication number: 20080116412Abstract: The present invention is made to prevent stress concentration on or around a boundary between a valve element body and a web portion of a diaphragm even in controlling supply of high-pressure fluid, thereby improving durability of the diaphragm. A diaphragm valve 1 of the present invention comprises a diaphragm valve element 20 including a valve element body 21 movable into contact with a valve seat 13, a web portion 22 extending outward from the valve element body 21, and a fixed portion 23 formed at an outer peripheral edge of the web portion 22. The web portion 22 includes a vertical portion 22a vertically formed continuous with the valve element body 21, a horizontal portion 22c horizontally formed continuous with the fixed portion 23, and a connecting portion 22b of a circular arc shape (an upward protruding shape) in section to connect the vertical portion 22a with the horizontal portion 22c, thereby holding the vertical portion 22a in constant contact with an outer surface of a backup 40.Type: ApplicationFiled: November 21, 2005Publication date: May 22, 2008Applicant: CKD CORPORATIONInventors: Akinori Masamura, Toshiyuki Nagao, Hiroki Iwata
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Patent number: 7370667Abstract: A fluid pressure regulator includes a regulator housing having an inlet end and an outlet end; a flexible flow tube extending between the inlet end and the outlet end; a hollow piston located at a downstream location relative to a mid-portion of the flow tube in a direction of flow of fluid through the regulator housing; a first chamber above the piston and a second chamber below the piston; a passage establishing fluid communication between the outlet end and the first chamber; and at least one pinch arm pivotally mounted at one end within the regulator housing and movable in response to movement of the piston by an increase in fluid pressure in the first chamber so that an opposite end of the at least one pinch arm will pinch a portion of the flow tube and thereby restrict flow through the flow tube.Type: GrantFiled: August 30, 2006Date of Patent: May 13, 2008Assignee: Nelson Irrigation CorporationInventors: George L. Sesser, Craig Nelson, Cliff P. Ungerecht, Michael Youngberg
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Patent number: 7370664Abstract: A flow control device having a control member for forming a seal with another part of the flow control device. The control member having a base material and a portion or surface that is a softer or more deformable than the base material or the portion of the control device that the control member forms a seal with. The differences in hardness and/or the ability of the control member portion to deform, aids in forming the seal.Type: GrantFiled: January 30, 2006Date of Patent: May 13, 2008Assignee: Swagelok CompanyInventor: William H. Glime
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Patent number: 7364132Abstract: A sanitary diaphragm valve is provided that includes a generally dome shaped diaphragm having a central boss that can be connected to or driven by a valve actuator. The diaphragm includes an outer peripheral edge and a relatively thin web portion that connects the boss to the outer edge. In one embodiment, the web portion is arcuate or dome shaped. The thinner web portion permits the diaphragm to have an extended cycle life and to permit the valve to operate at higher fluid pressures. The thin web may be defined by two different contoured surfaces, one convex and the other concave, such as formed by two radiuses. A valve body is provided that includes a bowl shaped valve cavity. This valve cavity includes an outer vertical edge to permit more thorough cleaning and to eliminate entrapment areas. The valve assembly provides support surfaces for the diaphragm that reduces stress on the diaphragm particularly at higher operating pressures.Type: GrantFiled: March 28, 2002Date of Patent: April 29, 2008Assignee: Swagelok CompanyInventors: Ronnie A. Browne, David C. Kerg
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Patent number: 7357368Abstract: A combined valve is constructed by integrating a manual valve operating as a safety mechanism and a pilot valve. When a handle of a knob of the manual valve is in a safety mechanism release position, a valve mechanism can be opened and closed depending on whether or not there is air supply to an operation port. When the handle is in the safety mechanism release position and the valve mechanism is even in a valve open state, the valve mechanism can be forcibly brought to a valve closed state by rotating the handle to a safety mechanism set position. Further, when the handle is in the safety mechanism set position, the valve mechanism can always be kept in the valve closed state irrespective of air supply to the operation port.Type: GrantFiled: March 20, 2006Date of Patent: April 15, 2008Assignee: CKD CorporationInventors: Hideyuki Takeda, Takahisa Toho, Yasushi Hirako
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Patent number: 7332040Abstract: A vaporizer can efficiently vaporize a liquid material under a depressurized atmosphere. The liquid material is temporarily stored in a liquid storing chamber, and is supplied to a vaporizing chamber set in the depressurized atmosphere via a small aperture. An inlet of the liquid storing chamber is opened or closed by a valve body, which is moved by an actuator controlling a degree of opening of the valve body.Type: GrantFiled: September 8, 2000Date of Patent: February 19, 2008Assignees: Tokyo Electron Limited, Lintec Co., Ltd.Inventors: Yasuhiko Kojima, Hiroyuki Mori, Hirofumi Ono
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Patent number: 7328882Abstract: A valve is provided that can selectively change the size of a flow channel in a valve in order to modulate the fluid flow through the valve. In one illustrative embodiment, the valve includes a housing that defines a cavity, with an inlet and an outlet extending into the cavity. A diaphragm is positioned in the cavity, where at least part of the diaphragm defines at least part of the fluid path. One or more electrodes are fixed relative to the diaphragm, and one or more electrodes are fixed relative to the housing such that the diaphragm can be electrostatically actuated to modulate the fluid flow through the valve.Type: GrantFiled: January 6, 2005Date of Patent: February 12, 2008Assignee: Honeywell International Inc.Inventors: Tzu-Yu Wang, Eugen Cabuz
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Patent number: 7314208Abstract: An apparatus for selectively channeling a high temperature fluid without chemically reacting with the fluid. The apparatus includes an inlet and a membrane positioned adjacent to the inlet, each composed of a chemically inert material. The membrane is formed by compressive preloading techniques. The apparatus further includes a seat disposed on the inlet adjacent to the membrane. The seat is composed of a heat resistant and chemically inert material. Operation of the apparatus requires that the temperature of the fluid remains below the chemical characteristic melting point of the seat. The apparatus further includes an actuator coupled to the membrane for rendering the membrane in an open and a closed position with respect to the seat. Specifically, the actuator supplies a load in the normal direction to the membrane to selectively engage the membrane in a plurality of predetermined configurations. Operatively, the apparatus receives the fluid at the inlet.Type: GrantFiled: September 30, 2004Date of Patent: January 1, 2008Assignee: Sandia CorporationInventor: Michael Joseph Rightley
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Patent number: 7311292Abstract: The invention relates to a valve intended in particular for sanitary applications, comprising a body in which there are a first and a second perpendicular duct for the flow of a fluid to be shut off; a closure member acts in the valve body to close and open the first duct. The closure member is constituted by a central core with a flexible, circular ring extending around it and has a head having a diverging profile which closes and opens the first duct as a result of the action of the actuator means.Type: GrantFiled: August 6, 2002Date of Patent: December 25, 2007Assignee: Fedegari Autoclavi SPAInventor: Fortunato Fedegari
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Patent number: 7299818Abstract: An integrated microvalve has a substrate, a first function layer applied to the substrate, and a second function layer applied to the first function layer, the first function layer being designed as a diaphragm in at least one valve area, the second function layer being removed in the valve area and in a fluid discharge area, and an anvil connected essentially only to the diaphragm being exposed from the substrate in the valve area, a plate being applied to the second function area to form a valve space.Type: GrantFiled: December 23, 2004Date of Patent: November 27, 2007Assignee: Robert Bosch GmbHInventors: Stefan Pinter, Tjalf Pirk
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Patent number: 7296780Abstract: A control valve assembly structure for spray guns comprises a pistol body made up of water inlet and outlet conduits in fluid communication with a valve chamber having a control valve assembly mounted therein wherein the water inlet and outlet conduits and the valve chamber are respectively equipped with a first aperture, a second aperture, and a third aperture having a narrowed opening to form a stop seat for the abutting location of an end cover. The end cover has a receiving section and an actuating groove disposed therein for the accommodation of a valve seat and a spring element respectively, permitting a valve sleeve and a plunger flexibly pushed by the spring element to abut tight against a flexible valve whose water-sealing portion is stretched to tightly seal off the third aperture thereby, facilitating an even application of force thereon as well as an easier and economical processing thereof.Type: GrantFiled: July 8, 2005Date of Patent: November 20, 2007Assignee: Ruey Ryh Enterprise Co., Ltd.Inventor: Shih Yuan Hung
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Patent number: 7290753Abstract: This invention relates to pressure torque sanitary diaphragm valves and methods of using torque sensitive sanitary valves in the production of chemical and biological therapeutics to obtain procedural reproducibility in the production pharmaceutical compounds and intermediates related thereto.Type: GrantFiled: September 12, 2005Date of Patent: November 6, 2007Inventor: Scott Christopher Meyers
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Patent number: 7267669Abstract: An apparatus for use in delivering pain medication to separate locations from a single source of pressurized medication includes a valve housing, a cap, and a flexible diaphragm. The valve housing includes a first end and a second end and an inlet passage. The first end includes first and second outlet orifices. The cap has a closed end and an open end and is removably coupled to the valve housing at the open end. The flexible diaphragm is coupled between the cap and the valve housing and is movable from a closed position to an open position. The flexible diaphragm seals a pressure chamber from the first and second outlet orifices when in the closed position and opens the first and second outlet orifices to the pressure chamber when in the open position.Type: GrantFiled: January 26, 2004Date of Patent: September 11, 2007Assignee: Stryker CorporationInventors: Doug Staunton, Jason Toman
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Patent number: 7264223Abstract: A flow rate control valve comprises a rotary driving source which is rotated by a control signal, a movable member which is displaceable by the aid of a transmitting shaft under a rotary action of the rotary driving source, a valve mechanism which is connected to the end of the movable member and which is capable of being seated on and separated from a valve seat of a valve body, and a balance mechanism which is integrally connected underneath the valve mechanism with a connecting shaft intervening therebetween. When the valve opening degree is changed in a state in which pressure fluid is supplied into the valve body, the balance mechanism maintains an equilibrium state with respect to the valve mechanism.Type: GrantFiled: June 17, 2005Date of Patent: September 4, 2007Assignee: SMC Kabushiki KaishaInventors: Yoshihiro Fukano, Hideaki Yashiro
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Patent number: 7255324Abstract: A quarter-turn valve includes a valve body having an inlet, an outlet, and a diaphragm adjacent arranged in said valve body for movement between a closed and opened position for restricting and controlling fluid flow. The valve further includes an input shaft for receiving a torsional input load in a closing direction and a torsional input load in an opposite opening direction. A cam is mounted on the input shaft. The cam transforms input loads to linear output loads that flex the diaphragm between its closed and opened positions.Type: GrantFiled: March 1, 2005Date of Patent: August 14, 2007Assignee: ITT Manufacturing Enterprises, Inc.Inventor: Richard D. Schlude
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Patent number: 7243903Abstract: A valve has a body, a bonnet, an actuator mechanism, and a flexible diaphragm adapted to be positioned between the bonnet and the body. The flexible diaphragm has a central portion and a peripheral portion, and the central portion is covered with a thin alloy layer.Type: GrantFiled: July 15, 2005Date of Patent: July 17, 2007Inventor: Christopher P. Wincek
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Patent number: 7201187Abstract: A low-flow diaphragm valve is disclosed having a flexible diaphragm that cooperates with a portion of the valve body to open and close the valve. The diaphragm may have a portion for seating in a passage between the inlet and outlet of the valve and may have one or more ribs for seating against other portions of the body located around the passage. While the valve body may include openings or interruptions to permit fluid and small particulate matter to flow through the valve, the ribs and openings block or restrict particulate matter of relatively large size from flowing to the passage between the diaphragm and the valve body. With this structure, the valve will function even when particulate matter is trapped between one or more of the diaphragm portion that sits in the passage and ribs, on the one hand, and the body on the other hand.Type: GrantFiled: July 23, 2004Date of Patent: April 10, 2007Assignee: Rain Bird CorporationInventors: Kevin M. Irwin, Philip G. Roper, Matthew M. Salviano, John E. Thompson, Clint Haas, Victor Olivas
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Patent number: 7201363Abstract: A valve body (12) has an inlet opening (22) and an outlet opening (24) interconnected by a fluid passageway (28, 30) having a flow aperture (34). The valve comprises a diaphragm (14) (typically of the duckbill type) that is located across the flow aperture (34) and has slits in a collapsible aperture (39). This prevents backflow from the outlet to the inlet. The valve has an actuator (16) in the form of a plunger for influencing the fluid flow. Also disclosed is a pressure release valve whereby a high pressure on the outlet side can partially collapse the aperture (39) to temporality vent fluid from the high pressure outlet side.Type: GrantFiled: January 30, 2003Date of Patent: April 10, 2007Assignee: Global Valve Technology Pty Ltd.Inventor: David R. Horton
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Patent number: 7195393Abstract: A valve which has a structure with at least one opening and a member which has a fixed static charge and also has a first position exposing the opening and a second position sealing the opening. A method for making the valve includes providing a structure with at least one opening and providing a member having a fixed static charge where the member has a first position exposing the opening and a second position sealing the opening. An agitator includes a base with at least one trench, a structure with at least one opening, and a membrane with a fixed static charge. The structure is connected to the base over the trench with the opening in the structure extending through to the trench in the base. The membrane is connected to the base across at least a portion of the trench. A pump includes a base with at least one trench, a structure with at least two openings, a membrane with a fixed static charge, a first cantilever arm having a fixed static charge, and a second cantilever arm having a fixed static charge.Type: GrantFiled: May 31, 2002Date of Patent: March 27, 2007Assignee: Rochester Institute of TechnologyInventor: Michael D. Potter
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Patent number: 7191793Abstract: A shut-off type diaphragm valve adapted for use in an atomic layer deposition system includes a flexible diaphragm operable to flex between an open position whereby a valve passage is at least partially open and a closed position whereby a substantial portion of a first side of the diaphragm is pressed against a valve seat to thereby block the valve passage and facilitate heat transfer between the valve seat and the diaphragm. In some embodiments, a heating body thermally contacts the valve body and extends proximal to a second side of the diaphragm opposite the first side thereof to form a thermally conductive pathway that facilitates maintaining an operating temperature at the diaphragm. A thermally resistive member may be interposed between the valve passage and an actuator, such as a solenoid, for attenuating heat transfer between the valve passage and the actuator.Type: GrantFiled: April 3, 2006Date of Patent: March 20, 2007Assignee: Planar Systems, Inc.Inventors: Jarmo Ilmari Maula, Hannu Leskinen, Teemu Lang, Pekka Kuosmanen, Kari Härkönen, Bradley J. Aitchison
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Patent number: 7192003Abstract: Aseptic sampling valve having a valve body with a generally cylindrical side wall and a relatively thin, generally planar end wall, an inlet opening in the end wall, a valve seat surrounding the inlet opening, a port opening through the side wall and extending toward the inlet opening at an acute angle relative to the axis of the valve body, and a valve member movable axially within the valve body between open and closed positions relative to the valve seat for controlling communication between the inlet opening and the port.Type: GrantFiled: September 21, 2004Date of Patent: March 20, 2007Assignee: Aseptic Controls Investment Co.Inventors: Luther Thomas Hoobyar, Walter L. Connolly, Loyd C. Sindel
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Patent number: 7192001Abstract: A microvalve device includes a semiconductor-based valve housing that defines a flow passage, and a valve face disposed within the valve housing and in fluid communication with the flow passage. The microvalve device further includes a thermal expansion actuator that drives movement of the valve face from a first position to a second position relative to the flow passage, and a capacitor that holds the valve face in the second position. The microvalve may also include an insulating layer disposed on portions of the semiconductor-based valve housing, and a capacitance sensor for monitoring a capacitance level to determine when the valve face reaches the second position. Once the sensor indicates that the second position has been reached, power is no longer applied to the thermal expansion actuator such that power is only substantially consumed during the transition from the first position to the second position.Type: GrantFiled: May 10, 2004Date of Patent: March 20, 2007Assignee: The Regents of the University of Michigan Office of Technology TransferInventors: Kensall D. Wise, Joseph A. Potkay
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Patent number: 7188731Abstract: An apparatus and method for filtering particles from a fluid comprises a fluid inlet, a fluid outlet, a variable size passage between the fluid inlet and the fluid outlet, and means for adjusting the size of the variable size passage for filtering the particles from the fluid. An inlet fluid flow stream is introduced to a fixture with a variable size passage. The size of the variable size passage is set so that the fluid passes through the variable size passage but the particles do not pass through the variable size passage.Type: GrantFiled: August 25, 2003Date of Patent: March 13, 2007Assignee: The Regents of the University of CaliforniaInventors: Steve B. Brown, Billy W. Colston, Jr., Graham Marshall, Duane Wolcott
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Patent number: 7175157Abstract: A fluid controller, wherein the recessed port (25) of a body (22) is formed of larger diameter part (25a) near an opening and a small diameter part (25c) continued to the lower part of the large diameter part (25a) through a step part (25b). A flow passage forming disk (26) is fitted to the recessed portion (25). The fluid passage forming disk (26) comprises a large diameter cylindrical part (31) fitted to the large diameter part (25a) in the recessed portion, a connection part (32) supported by the step part (25b) in the recessed portion, and a small diameter cylindrical part (33) having an outer diameter smaller than the inner diameter of the small diameter part (25c) in the recessed portion and having a lower end supported by the bottom surface of the recessed portion (25).Type: GrantFiled: December 7, 2004Date of Patent: February 13, 2007Assignee: Fujikin IncorporatedInventors: Tsuyoshi Tanikawa, Shigeru Itoi, Tadayuki Yakushijin
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Patent number: 7174882Abstract: Known pressure regulating valves have a valve closing body, which cooperates with a valve seat, and a restoring spring, which acts on a valve closing body in the direction facing away from the valve seat. It is disadvantageous that the restoring spring is disposed in a pressure chamber, which has the valve seat and through which aggressive blowby gases flow out of the crankcase. The blowby gases for instance have a corrosive, etching effect on the material of the restoring spring, shortening the service life and lessening the spring force of the restoring spring. This has a highly adverse effect on the regulation of the pressure in the crankcase. In the pressure regulating valve of the invention, the service life of the restoring spring is increased. According to the invention, the restoring spring (31) is embodied as a tension spring and is located on the side of the valve closing body (15) facing away from the valve seat (12).Type: GrantFiled: April 12, 2005Date of Patent: February 13, 2007Assignee: Robert Bosch GmbHInventors: Bruno Hezel, Markus Christen, Markus Ulrich
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Patent number: 7150444Abstract: A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.Type: GrantFiled: December 15, 2004Date of Patent: December 19, 2006Assignees: Fujikin IncorporatedInventors: Tadahiro Ohmi, Kouji Nishino, Nobukazu Ikeda, Michio Yamaji, Ryousuke Dohi, Eiji Ideta, Takashi Hirose
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Patent number: 7147208Abstract: A valve and concomitant method of controlling flow of a fluid with a valve comprising isolating a fluid path from a valve stem with a diaphragm in a valve body, blocking the fluid path with a plunger having a stroke of less than approximately 500 micrometers, driving the plunger with an actuator, and operating the valve at a frequency of at least approximately 20 Hz but with a flow of at least approximately 5.0E-04 kg/sec.Type: GrantFiled: March 25, 2005Date of Patent: December 12, 2006Assignee: Lockheed Martin CorporationInventors: Renato Guida, Stanton Weaver
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Patent number: 7147205Abstract: A low energy high pressure screw valve having a valve body having an upper portion and a lower portion, said lower portion of said valve body defining an inlet flow passage and an outlet flow passage traversing said valve body to a valve seat, said upper portion of said valve body defining a cavity at said valve seat, a diaphragm restricting flow between said upper portion of said valve body and said lower portion, said diaphragm capable of engaging said valve seat to restrict fluid communication between said inlet passage and said outlet passage, a plunger within said cavity supporting said diaphragm, said plunger being capable of engaging said diaphragm with said valve seat at said inlet and outlet fluid passages, said plunger being in point contact with a drive screw having threads engaged with opposing threads within said upper portion of said valve body such engagement allowing motion of said drive screw within said valve body.Type: GrantFiled: June 16, 2004Date of Patent: December 12, 2006Assignee: Sandia CorporationInventors: Gary J. Fischer, Barry L. Spletzer
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Patent number: 7137405Abstract: A check valve for preventing backflow of media including a valve movably coupled to a carrier body, the valve including a flexible membrane disposed therein such that the flexible membrane flexibly engages an aperture in the carrier body to prevent backflow of media through the aperture.Type: GrantFiled: May 5, 2004Date of Patent: November 21, 2006Assignee: SEH America, Inc.Inventors: Richard F. Barrows, Mike Hamilton
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Patent number: 7134445Abstract: The invention concerns the technical field of micro-actuators used for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical functions such as microfluidics integrating cards. The invention concerns a micro-actuator comprising a so-called main chamber, made in a solid support and containing a so-called main pyrotechnic charge, the main chamber being sealed and delimited by solid support walls and by a deformable membrane, such that the gases emitted by the combustion of the main pyrotechnic charge, enable the volume of the chamber to be increased by deforming the membrane while maintaining intact the solid walls of the main chamber. The invention is characterized in that it comprises means for evacuating the gases from the main chamber.Type: GrantFiled: November 18, 2003Date of Patent: November 14, 2006Assignees: bioMerieux, SNPE Materiaux EnergetiquesInventors: Patrick Broyer, Bruno Colin, Denis Roller
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Patent number: 7124773Abstract: A valve including a fluid inlet and a fluid outlet coupled by a fluid channel, all of which are defined by walls and structures produced by micromachining of glass and/or silicon. An actuator can be set to at least two different positions in order to vary the flow cross section of the fluid channel. The geometries of the fluid inlet, outlet and channel are adapted for preventing the flow from changing its direction so sharply that a significant portion of contaminating droplets and or particles in the flow hit the walls of structures, as given in any arrangement according to or between the following two extremes: i) flow outlet is perpendicular to the flow inlet and the outlet dimension is larger than a critical dimension, Lcrit estimated according to a given formula and/or as simulated in a Computational Fluid Dynamics tool, and ii) flow outlet and flow channel is generally parallel to flow inlet giving a substantially unidirectional flow pattern.Type: GrantFiled: June 6, 2003Date of Patent: October 24, 2006Assignee: ABB Research Ltd.Inventors: Ole-Morten Midtgård, Knut Asskildt, Arne Nysveen
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Patent number: 7100894Abstract: A valve body for a valve includes a body having an internal cavity formed therein. An inlet passage and an outlet passage are formed in the body. The inlet passage has an inlet opening in communication with the internal cavity, and the outlet passage has an outlet opening in communication with the internal cavity. A circumferential sealing surface is formed on a wall of the internal cavity. The circumferential sealing surface extends between the inlet opening and the outlet opening and circumferentially around the internal cavity. Furthermore, a bottom line extending through the inlet passage, the internal cavity and the outlet passage forms a coplanar surface to allow for free-drainage of the body.Type: GrantFiled: August 20, 2004Date of Patent: September 5, 2006Assignee: Pharmenta, Inc.Inventor: Douglas A. Newberg
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Patent number: 7080657Abstract: A fuel tank venting system includes a fuel cap, a vent diaphragm and a vent disc. A valve cavity with a substantially concave bottom is formed in a bottom of the fuel cap. At least one air passage is formed through the vent disc. A substantially convex surface is formed on a top of the diaphragm projection. The vent diaphragm is retained between the substantially concave bottom and the substantially convex surface. When air is needed for fuel flow, a vacuum within the fuel tank pulls the perimeter of the vent diaphragm downward, which breaks a seal with the substantially concave bottom to allow air flow. In a second embodiment, the fuel tank venting system is contained in a wall of the fuel tank. In a third embodiment, the fuel tank venting system is contained in a fuel vent body, which is attached to the fuel tank.Type: GrantFiled: December 3, 2004Date of Patent: July 25, 2006Inventor: William A. Scott