Avalanche Photodetection Structure Patents (Class 257/186)
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Patent number: 9105790Abstract: An apparatus comprises a substrate having a type of conductivity, an intrinsic region above the substrate, and a metal layer on a portion of the surface of the intrinsic region. The intrinsic region has a surface. The metal layer may have a thickness that is configured to allow a plurality of photons to pass through the metal layer into the intrinsic region and form a rectifying contact with the intrinsic region.Type: GrantFiled: November 5, 2009Date of Patent: August 11, 2015Assignee: THE BOEING COMPANYInventor: Eric Yuen-Jun Chan
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Patent number: 9105804Abstract: A method for manufacturing a light-receiving device includes the steps of forming a stacked semiconductor layer including a non-doped light-receiving layer, the light-receiving layer having an n-type conductivity; forming a selective growth mask made of an insulating film on the stacked semiconductor layer, the selective growth mask having a pattern including a plurality of openings; selectively growing a selective growth layer doped with a p-type impurity on each portion of the stacked semiconductor layer by using the selective growth mask; and forming a p-n junction in each of plural regions of the light-receiving layer by diffusing the p-type impurity doped in each selective growth layer into the light-receiving layer during growing the selective growth layers. Each of the regions including one of the p-n junctions corresponds to one of the selective growth layers. The p-n junction in one of the regions is formed separately from the p-n junctions in the other regions.Type: GrantFiled: December 20, 2013Date of Patent: August 11, 2015Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventor: Yasuhiro Iguchi
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Patent number: 9082892Abstract: A device having a carrier, a light-emitting structure, and first and second electrodes is disclosed. The light-emitting structure includes an active layer sandwiched between a p-type GaN layer and an n-type GaN layer, the active layer emitting light of a predetermined wavelength in the active layer when electrons and holes from the n-type GaN layer and the p-type GaN layer, respectively, combine therein. The first and second electrodes are bonded to the surfaces of the p-type and n-type GaN layers that are not adjacent to the active layer. The n-type GaN layer has a thickness less than 1.25 ?m. The carrier is bonded to the light emitting structure during the thinning of the n-type GaN layer. The thinned light-emitting structure can be transferred to a second carrier to provide a device that is analogous to conventional LEDs having contacts on the top surface of the LED.Type: GrantFiled: January 30, 2013Date of Patent: July 14, 2015Assignee: Manulius IP, Inc.Inventors: Steven D. Lester, Frank T. Shum
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Patent number: 9024402Abstract: Devices comprised of end-on waveguide-coupled photodetectors are described. In embodiments of the invention, the photodetectors are avalanche photodiodes coupled end-on to a waveguide. The waveguide includes an insulating trench proximate to the coupled photodetector. In embodiments of the invention, the avalanche photodiodes are silicon/germanium avalanche photodiodes.Type: GrantFiled: November 2, 2011Date of Patent: May 5, 2015Assignee: Intel CorporationInventors: Yimin Kang, Zhihong Connie Huang, Han-Din Dean Liu, Yuval Saado, Yun-Chung Neil Na
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Patent number: 9024362Abstract: An organic image sensor includes a first organic photoelectric conversion pixel circuit on an active region of a substrate and a second organic photoelectric conversion pixel circuit on an optical black region of the substrate. The first organic photoelectric conversion pixel circuit includes a first organic photoelectric conversion element configured to generate charges responding to incident light and a first readout circuit configured to receive a first input signal including the charges generated in the first organic photoelectric conversion element. The second organic photoelectric conversion pixel circuit includes a second organic photoelectric conversion element and a second readout circuit configured to receive a second input signal generated irrespective of the incident light.Type: GrantFiled: February 12, 2013Date of Patent: May 5, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Sae-Young Kim, Ji-Yong Park, Sang-Chul Sul
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Publication number: 20150115319Abstract: An avalanche photodiode includes a first semiconductor layer, a multiplication layer, a charge control layer, a second semiconductor layer, a graded absorption layer, a blocking layer and a second contact layer. The multiplication layer is located between the charge control layer and the first semiconductor layer. The charge control layer is located between the second semiconductor layer and the multiplication layer. The second semiconductor layer is located between the charge control later and the graded absorption layer. The graded absorption layer is located between the second semiconductor layer and the blocking layer.Type: ApplicationFiled: May 17, 2013Publication date: April 30, 2015Inventor: Barry Levine
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Patent number: 8987724Abstract: A photodiode including at least one active zone located between a first electrode and a second electrode, the active zone including elongated conducting or semiconducting elements extending between the electrodes and configured to promote collection and transport of charge carriers in the active zone.Type: GrantFiled: June 19, 2012Date of Patent: March 24, 2015Assignees: Commissariat à l'énergie atomique et aux énergies alternatives, ISORGInventor: Mohammed Benwadih
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Patent number: 8963169Abstract: Photonic devices monolithically integrated with CMOS are disclosed, including sub-100 nm CMOS, with active layers comprising acceleration regions, light emission and absorption layers, and optional energy filtering regions. Light emission or absorption is controlled by an applied voltage to deposited films on a pre-defined CMOS active area of a substrate, such as bulk Si, bulk Ge, Thick-Film SOI, Thin-Film SOI, Thin-Film GOI.Type: GrantFiled: July 28, 2005Date of Patent: February 24, 2015Assignee: Quantum Semiconductor LLCInventor: Carlos J. R. P. Augusto
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Patent number: 8928036Abstract: A barrier infrared detector with absorber materials having selectable cutoff wavelengths and its method of manufacture is described. A GaInAsSb absorber layer may be grown on a GaSb substrate layer formed by mixing GaSb and InAsSb by an absorber mixing ratio. A GaAlAsSb barrier layer may then be grown on the barrier layer formed by mixing GaSb and AlSbAs by a barrier mixing ratio. The absorber mixing ratio may be selected to adjust a band gap of the absorber layer and thereby determine a cutoff wavelength for the barrier infrared detector. The absorber mixing ratio may vary along an absorber layer growth direction. Various contact layer architectures may be used. In addition, a top contact layer may be isolated into an array of elements electrically isolated as individual functional detectors that may be used in a detector array, imaging array, or focal plane array.Type: GrantFiled: September 25, 2009Date of Patent: January 6, 2015Assignee: California Institute of TechnologyInventors: David Z. Ting, Cory J. Hill, Alexander Seibel, Sumith Y. Bandara, Sarath D. Gunapala
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Publication number: 20150001581Abstract: An APD in which a first undoped semiconductor region and a second undoped semiconductor region having different semiconductor materials and arranged on an insulating film configure a photo-absorption layer and a multiplying layer, respectively, is employed, whereby crystalline of an interface between the photo-absorption layer and the multiplying layer becomes favorable, and a dark current caused by crystal defects can be decreased. Accordingly, light-receiving sensitivity of an avalanche photodiode can be improved. Further, doping concentration of the light-receiving layer and the multiplying layer can be made small. Therefore, a junction capacitance of the diode can be decreased, and a high-speed operation becomes possible.Type: ApplicationFiled: January 23, 2012Publication date: January 1, 2015Applicant: HITACHI, LTD.Inventors: Katsuya Oda, Shinichi Saito, Kazuki Tani
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Patent number: 8916947Abstract: In various embodiments, a photodetector includes a semiconductor substrate and a plurality of pixel regions. Each of the plurality of pixel regions comprises an optically sensitive layer over the semiconductor substrate. A pixel circuit is formed for each of the plurality of pixel regions. Each pixel circuit includes a pinned photodiode, a charge store, and a read out circuit for each of the plurality pixel regions. The optically sensitive layer is in electrical communication with a portion of a silicon diode to form the pinned photodiode. A potential difference between two electrodes in communication with the optically sensitive layer associated with a pixel region exhibits a time-dependent bias; a biasing during a first film reset period being different from a biasing during a second integration period.Type: GrantFiled: June 8, 2011Date of Patent: December 23, 2014Assignee: InVisage Technologies, Inc.Inventors: Edward Hartley Sargent, Rajsapan Jain, Igor Constantin Ivanov, Michael R. Malone, Michael Charles Brading, Hui Tian, Pierre Henri Rene Della Nave, Jess Jan Young Lee
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Patent number: 8916905Abstract: It is an object to provide a photoelectric conversion device with high photoelectric conversion efficiency that improves reliability by increasing contact force between a light absorbing layer and an electrode layer. The photoelectric conversion device includes an electrode layer, and a light absorbing layer located on the electrode layer. The light absorbing layer contains a compound semiconductor. The light absorbing layer comprises a first layer close to the electrode layer and a second layer located on the first layer. The first layer has a void ratio lower than that of the second layer.Type: GrantFiled: April 22, 2011Date of Patent: December 23, 2014Assignee: KYOCERA CorporationInventors: Shintaro Kubo, Shuji Nakazawa, Rui Kamada, Seiji Oguri, Shinnosuke Ushio, Shuichi Kasai, Seiichiro Inai
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Publication number: 20140367740Abstract: A semiconductor waveguide based optical receiver is disclosed. An apparatus according to aspects of the present invention includes an absorption region including a first type of semiconductor region proximate to a second type of semiconductor region. The first type of semiconductor is to absorb light in a first range of wavelengths and the second type of semiconductor to absorb light in a second range of wavelengths. A multiplication region is defined proximate to and separate from the absorption region. The multiplication region includes an intrinsic semiconductor region in which there is an electric field to multiply the electrons created in the absorption region.Type: ApplicationFiled: August 28, 2014Publication date: December 18, 2014Inventors: Micheal T. Morse, Olufemi I. Dosunmu, Ansheng Liu, Mario J. Paniccia
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Patent number: 8860164Abstract: A light receiving element includes a core configured to propagate a signal light, a first semiconductor layer having a first conductivity type, the first semiconductor layer being configured to receive the signal light from the core along a first direction in which the core extends, an absorbing layer configured to absorb the signal light received by the first semiconductor layer, and a second semiconductor layer having a second conductivity type opposite to the first conductivity type.Type: GrantFiled: February 27, 2014Date of Patent: October 14, 2014Assignee: Fujitsu LimitedInventor: Kazumasa Takabayashi
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Patent number: 8859944Abstract: A method and apparatus of coordinated in-pixel light detection is provided. In one aspect, the method includes implementing an N-number of avalanche photodiodes inside a pixel circuit of a light detection circuit. The method also includes coordinating an output of the N-number of avalanche photodiodes through a counter circuit. The method further includes reducing a deadtime of the light detection circuit by a factor of ‘N’ through the N-number of avalanche photodiodes and the counter circuit operating in concert. The method furthermore includes measuring an intensity of a light through the light detection circuit. N-number of avalanche photodiodes is in a common well of a semiconductor technology. N-number of avalanche photodiodes is fabricated on a deep submicron semiconductor technology. A fill factor of the pixel circuit improves and a deadtime reduces through fabrication of the avalanche photodiodes in a common well. Also, a photon count rate increases through reducing the deadtime.Type: GrantFiled: September 7, 2010Date of Patent: October 14, 2014Assignee: King Abdulaziz City Science and TechnologyInventors: Munir Eldesouki, Mohamed Jamal Deen, Qiyin Fang
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Publication number: 20140252411Abstract: A low voltage APD is disposed at an end of a waveguide extending laterally within a silicon device layer of a PIC chip. The APD is disposed over an inverted re-entrant mirror co-located at the end of the waveguide to couple light by internal reflection from the waveguide to an under side of the APD. In exemplary embodiments, a 45°-55° facet is formed in the silicon device layer by crystallographic etch. In embodiments, the APD includes a silicon multiplication layer, a germanium absorption layer over the multiplication layer, and a plurality of ohmic contacts disposed over the absorption layer. An overlying optically reflective metal film interconnects the plurality of ohmic contacts and returns light transmitted around the ohmic contacts to the absorption layer for greater detector responsivity.Type: ApplicationFiled: March 11, 2013Publication date: September 11, 2014Inventors: Yimin Kang, Han-Din D. Liu, Ansheng Liu
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Patent number: 8829566Abstract: A semiconductor waveguide based optical receiver is disclosed. An apparatus according to aspects of the present invention includes an absorption region including a first type of semiconductor region proximate to a second type of semiconductor region. The first type of semiconductor is to absorb light in a first range of wavelengths and the second type of semiconductor to absorb light in a second range of wavelengths. A multiplication region is defined proximate to and separate from the absorption region. The multiplication region includes an intrinsic semiconductor region in which there is an electric field to multiply the electrons created in the absorption region.Type: GrantFiled: March 15, 2007Date of Patent: September 9, 2014Assignee: Intel CorporationInventors: Michael T. Morse, Olufemi I. Dosunmu, Ansheng Liu, Mario J. Paniccia
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Publication number: 20140239301Abstract: A GeSi avalanche photodiode (APD includes an anti-reflection structure, a Ge absorption region, and a resonance cavity enhanced (RCE) reflector. The anti-reflection structure includes one or more dielectric layers and a top contact layer which is heavily doped with dopants of a first polarity. The RCE reflector includes: an intrinsic or lightly doped Si multiplication layer, a Si contact layer which is heavily doped with dopants of a second polarity opposite the first polarity, a Si cavity length compensation layer, a buried oxide (BOX) layer, and a Si substrate.Type: ApplicationFiled: February 28, 2014Publication date: August 28, 2014Applicant: SiFotonics Technologies Co., Ltd.Inventors: Mengyuan Huang, Tuo Shi, Pengfei Cai, Dong Pan
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Patent number: 8781028Abstract: Integrated receiving circuit for radiofrequency signals an amplifying element using the multiplication zone of a reverse biased semiconductor junction operating in Geiger mode for amplifying an input radiofrequency signal (Vin) and converting it into a digital signal. And a digital part for digitally processing the digital signal.Type: GrantFiled: March 16, 2010Date of Patent: July 15, 2014Assignee: Ecole Polytechnique Federale de Lausanne (EPFL)Inventors: Edoardo Charbon, Marek Gersbach, Maximilian Sergio
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Patent number: 8772896Abstract: In order to improve reliability by preventing an edge breakdown in a semiconductor photodetector having a mesa structure such as a mesa APD, the semiconductor photodetector includes a mesa structure formed on a first semiconductor layer of the first conduction type formed on a semiconductor substrate, the mesa structure including a light absorbing layer for absorbing light, an electric field buffer layer for dropping an electric field intensity, an avalanche multiplication layer for causing avalanche multiplication to occur, and a second semiconductor layer of the second conduction type, wherein the thickness of the avalanche multiplication layer at the portion in the vicinity of the side face of the mesa structure is made thinner than the thickness at the central portion of the mesa structure.Type: GrantFiled: November 22, 2010Date of Patent: July 8, 2014Assignees: Fujitsu Limited, Sumitomo Electric Device Innovations, Inc.Inventors: Nami Yasuoka, Haruhiko Kuwatsuka, Toru Uchida, Yoshihiro Yoneda
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Publication number: 20140175511Abstract: An avalanche photodiode according to the inventive concept includes a substrate, light absorption layers on the substrate, clad layers on the light absorption layers, and active regions in the clad layers. The light absorption layers, the clad layers, and the active regions constitute unit cells. Each of the unit cells has a fan-shape.Type: ApplicationFiled: July 25, 2013Publication date: June 26, 2014Applicant: Electronics and Telecommunications Research InstituteInventors: Jae-Sik SIM, Bongki Mheen, Kisoo Kim, Myoungsook Oh
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Patent number: 8754445Abstract: A layer in which the potential level difference normally unrequired for device operation is generated is positively inserted in a device structure. The potential level difference has such a function that even if a semiconductor having a small bandgap is exposed on a mesa side surface, a potential drop amount of the portion is suppressed, and a leakage current inconvenient for device operation can be reduced. This effect can be commonly obtained for a heterostructure bipolar transistor, a photodiode, an electroabsorption modulator, and so on. In the photodiode, since the leakage current is alleviated, the device size can be reduced, so that in addition to improvement of operating speed with a reduction in series resistance, it is advantageous that the device can be densely disposed in an array.Type: GrantFiled: January 20, 2012Date of Patent: June 17, 2014Assignees: NTT Electronics Corporation, Nippon Telegraph and Telephone CorporationInventors: Tadao Ishibashi, Seigo Ando, Yoshifumi Muramoto, Toshihide Yoshimatsu, Haruki Yokoyama
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Patent number: 8729602Abstract: An APD is provided with a semi-insulating substrate, a first mesa having a first laminate constitution in which a p-type electrode layer, a p-type light absorbing layer, a light absorbing layer with a low impurity concentration, a band gap inclined layer, a p-type electric field control layer, an avalanche multiplier layer, an n-type electric field control layer, and an electron transit layer with a low impurity concentration are stacked in this order on a surface of the semi-insulating substrate, a second mesa having an outer circumference provided inside an outer circumference of the first mesa as viewed from the laminating direction and having a second laminate constitution in which an n-type electrode buffer layer and an n-type electrode layer are stacked in this order on a surface on the electron transit layer side of the first mesa, and in the APD, a total donor concentration of the n-type electric field control layer is lower than a total acceptor concentration of the p-type electric field control layeType: GrantFiled: September 1, 2011Date of Patent: May 20, 2014Assignees: NTT Electronics Corporation, Nippon Telegraph and Telephone CorporationInventors: Tadao Ishibashi, Seigo Ando, Masahiro Nada, Yoshifumi Muramoto, Haruki Yokoyama
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Patent number: 8723221Abstract: Photodetectors operable to achieve multiplication of photogenerated carriers at ultralow voltages. Embodiments include a first p-i-n semiconductor junction combined with a second p-i-n semiconductor junction to form a monolithic photodetector having at least three terminals. The two p-i-n structures may share either the p-type region or the n-type region as a first terminal. Regions of the two p-i-n structures doped complementary to that of the shared terminal form second and third terminals so that the first and second p-i-n structures are operable in parallel. A multiplication region of the first p-i-n structure is to multiply charge carriers photogenerated within an absorption region of the second p-i-n structure with voltage drops between the shared first terminal and each of the second and third terminals being noncumulative.Type: GrantFiled: May 22, 2013Date of Patent: May 13, 2014Assignee: Intel CorporationInventors: Yun-chung N. Na, Yimin Kang
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Patent number: 8716722Abstract: A photosensor chip package structure comprises a substrate, a light-emitting chip and a photosensor chip including an ambient light sensing unit and a proximity sensing unit. The substrate has a first basin, a second basin and a light-guiding channel. The openings of the first and second basins respectively face different directions. One opening of the light-guiding channel and the opening of the first basin face the same direction. The other opening of the light-guiding channel interconnects with the second basin. The light-emitting chip is arranged in the first basin. The photosensor chip is arranged in the second basin. The light-guiding channel conducts the light generated by the light-emitting chip and the ambient light to the photosensor chip. The photosensor chip operates as soon as it receives the light generated by the light-emitting chip and/or the ambient light.Type: GrantFiled: July 9, 2012Date of Patent: May 6, 2014Assignee: TXC CorporationInventor: Yin-Ming Peng
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Patent number: 8710547Abstract: The inventive concept provides avalanche photo diodes and methods of manufacturing the same. The avalanche photo diode may include a substrate, a light absorption layer formed on the substrate, a clad layer formed on the light absorption layer, an active region formed in the clad layer, a guard ring region formed around the active region, and an insulating region formed between the guard ring region and the active region.Type: GrantFiled: September 6, 2012Date of Patent: April 29, 2014Assignee: Electronics and Telecommunications Research InstituteInventors: Jae-Sik Sim, Kisoo Kim, Bongki Mheen, MyoungSook Oh, Yong-Hwan Kwon, Eun Soo Nam
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Patent number: 8710546Abstract: Provided are an avalanche photodiode and a method of fabricating the same. The method of fabricating the avalanche photodiode includes sequentially forming a compound semiconductor absorption layer, a compound semiconductor grading layer, a charge sheet layer, a compound semiconductor amplification layer, a selective wet etch layer, and a p-type conductive layer on an n-type substrate through a metal organic chemical vapor deposition process.Type: GrantFiled: July 27, 2011Date of Patent: April 29, 2014Assignee: Electronics and Telecommunications Research InstituteInventors: Mi-Ran Park, O-Kyun Kwon
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Patent number: 8704272Abstract: Avalanche photodiodes having special lateral doping concentration that reduces dark current without causing any loss of optical signals and method for the fabrication thereof are described. In one aspect, an avalanche photodiode comprises: a substrate, a first contact layer coupled to at least one metal contract of a first electrical polarity, an absorption layer, a doped electric control layer having a central region and a circumferential region surrounding the central region, a multiplication layer having a partially doped central region, and a second contract layer coupled to at least one metal contract of a second electrical polarity. Doping concentration in the central section is lower than that of the circumferential region. The absorption layer can be formed by selective epitaxial growth.Type: GrantFiled: October 25, 2011Date of Patent: April 22, 2014Assignee: SiFotonics Technologies Co, Ltd.Inventors: Mengyuan Huang, Pengfei Cai, Dong Pan
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Patent number: 8698268Abstract: An avalanche photodiode including a first electrode; and a substrate including a first semiconductor layer of a first conduction type electrically connected to the first electrode, in which at least an avalanche multiplication layer, a light absorption layer, and a second semiconductor layer of a second conduction type with a larger band gap than the light absorption layer are deposited on the substrate. The second semiconductor layer is separated into inner and outer regions by a groove formed therein, the inner region electrically connected to a second. With the configuration, the avalanche photodiode has a low dark current and high long-term reliability. In addition, the outer region includes an outer trench, and at least the light absorption layer is removed by the outer trench to form a side face of the light absorption layer. With the configuration, the dark current can be further reduced.Type: GrantFiled: June 14, 2011Date of Patent: April 15, 2014Assignee: Mitsubishi Electric CorporationInventors: Eiji Yagyu, Eitaro Ishimura, Masaharu Nakaji
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Patent number: 8682116Abstract: One embodiment provides an integrated circuit including a first non-planar structure and a waveguide configured to provide electromagnetic waves to the first non-planar structure. The first non-planar structure provides a first signal in response to at least some of the electromagnetic waves.Type: GrantFiled: August 8, 2007Date of Patent: March 25, 2014Assignee: Infineon Technologies AGInventor: Thomas Schulz
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Patent number: 8680640Abstract: A solid-state imaging device includes semiconductor substrate; a plurality of photoelectric conversion sections of n-type that are formed at an upper part of semiconductor substrate and arranged in a matrix; output circuit that is formed on a charge detection surface that is one surface of semiconductor substrate and detects charges stored in photoelectric conversion sections; a plurality of isolating diffusion layers of a p-type that are formed under output circuit and include high concentration p-type layers adjacent to respective photoelectric conversion sections; and color filters formed on a light incident surface that is the other surface opposing the one surface of semiconductor substrate and transmit light with different wavelengths. Shapes of respective photoelectric conversion sections correspond to color filters and differ depending on the high concentration p-type layer configuring isolating diffusion layer.Type: GrantFiled: May 3, 2012Date of Patent: March 25, 2014Assignee: Panasonic CorporationInventors: Mitsuyoshi Mori, Toru Okino, Yutaka Hirose, Yoshihisa Kato
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Patent number: 8674382Abstract: A semiconductor light emitting device (10) comprises a semiconductor structure (12) comprising a first body (14) of a first semiconductor material (in this case Ge) comprising a first region of a first doping kind (in this case n) and a second body (18) of a second semiconductor material (in this case Si) comprising a first region of a second doping kind (in this case p). The structure comprises a junction region (15) comprising a first heterojunction (16) formed between the first body (14) and the second body (18) and a pn junction (17) formed between regions of the structure of the first and second doping kinds respectively. A biasing arrangement (20) is connected to the structure for, in use, reverse biasing the pn junction, thereby to cause emission of light.Type: GrantFiled: January 30, 2009Date of Patent: March 18, 2014Assignee: Insiava (Pty) LimitedInventors: Lukas Willem Snyman, Monuko Du Plessis
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Patent number: 8669588Abstract: A unit cell for use in an imaging system may include an absorber layer of semiconductor material formed on a semiconductor substrate, at least one contact including semiconductor material formed on the semiconductor substrate and electrically coupled to the absorber layer, and a cap layer of semiconductor material formed on the semiconductor substrate and electrically coupled to and formed between the absorber layer and the at least one contact. The absorber layer may be configured to absorb incident photons such that the absorbed photons excite electrons in the absorber layer to generate a photocurrent. The at least one contact may be configured to conduct the photocurrent to one or more electrical components external to the unit cell. The cap layer may be configured to conduct the photocurrent between the absorber layer and the at least one contact.Type: GrantFiled: July 6, 2009Date of Patent: March 11, 2014Assignee: Raytheon CompanyInventors: Edward Peter Gordon Smith, Gregory Mark Venzor, Eric J. Beuville
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Patent number: 8664739Abstract: In accordance with the invention, an improved image sensor includes an array of germanium photosensitive elements integrated with a silicon substrate and integrated with silicon readout circuits. The silicon transistors are formed first on a silicon substrate, using well known silicon wafer fabrication techniques. The germanium elements are subsequently formed overlying the silicon by epitaxial growth. The germanium elements are advantageously grown within surface openings of a dielectric cladding. Wafer fabrication techniques are applied to the elements to form isolated germanium photodiodes. Since temperatures needed for germanium processing are lower than those for silicon processing, the formation of the germanium devices need not affect the previously formed silicon devices. Insulating and metallic layers are then deposited and patterned to interconnect the silicon devices and to connect the germanium devices to the silicon circuits.Type: GrantFiled: May 26, 2011Date of Patent: March 4, 2014Assignee: Infrared Newco, Inc.Inventors: Clifford A. King, Conor S. Rafferty
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Patent number: 8659053Abstract: A semiconductor light detecting element includes: an InP substrate; and a semiconductor stacked structure on the InP substrate and including at least a light absorbing layer, wherein the light absorbing layer includes an InGaAsBi layer lattice-matched to the InP substrate.Type: GrantFiled: August 28, 2012Date of Patent: February 25, 2014Assignee: Mitsubishi Electric CorporationInventors: Yoshifumi Sasahata, Eitaro Ishimura
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Patent number: 8637875Abstract: Apparatuses and systems for photon detection can include a first optical sensing structure structured to absorb light at a first optical wavelength; and a second optical sensing structure engaged with the first optical sensing structure to allow optical communication between the first and the second optical sensing structures. The second optical sensing structure can be structured to absorb light at a second optical wavelength longer than the first optical wavelength and to emit light at the first optical wavelength which is absorbed by the first optical sensing structure. Apparatuses and systems can include a bandgap grading region.Type: GrantFiled: July 13, 2009Date of Patent: January 28, 2014Assignee: The Regents of the University of CaliforniaInventors: Hod Finkelstein, Sadik C. Esener, Yu-Hwa Lo, Kai Zhao, James Cheng, Sifang You
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Patent number: 8592863Abstract: A photodetector with internal gain comprising a semiconductor structure in which impact ionization events are produced mostly by minority charge carriers; a first biasing contact and a second biasing contact located in the semiconductor structure; a means of defining, in the semiconductor structure, a photon collection region close to first biasing contact; a P-N type junction formed in the semiconductor structure between the two biasing contacts and close to the second biasing contact; and a collector contact which is located in the P-N junction and used to collect current in the P-N junction.Type: GrantFiled: November 5, 2009Date of Patent: November 26, 2013Assignee: Commissariat a l'Energie AtomiqueInventors: Johan Rothman, Jean-Paul Chamonal
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Publication number: 20130292741Abstract: Avalanche photodiodes (APDs) having at least one top stressor layer disposed on a germanium (Ge)-containing absorption layer are described herein. The top stressor layer can increase the tensile strain of the Ge-containing absorption layer, thus extending the absorption of APDs to longer wavelengths beyond 1550 nm. In one embodiment, the top stressor layer has a four-layer structure, including an amorphous silicon (Si) layer disposed on the Ge-containing absorption layer; a first silicon dioxide (SiO2) layer disposed on the amorphous Si layer, a silicon nitride (SiN) layer disposed on the first SiO2 layer, and a second SiO2 layer disposed on the SiN layer. The Ge-containing absorption layer can be further doped by p-type dopants. The doping concentration of p-type dopants is controlled such that a graded doping profile is formed within the Ge-containing absorption layer to decrease the dark currents in APDs.Type: ApplicationFiled: September 6, 2012Publication date: November 7, 2013Applicant: SIFOTONICS TECHNOLOGIES CO., LTD.Inventors: Mengyuan Huang, Pengfei Cai, Dong Pan
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Patent number: 8575650Abstract: An electron injected APD with an embedded n electrode structure in which edge breakdown can be suppressed without controlling the doping profile of an n-type region of the embedded n electrode structure with high precision. The APD comprising a buffer layer with a low ionization rate is inserted between an n electrode connecting layer and an avalanche multiplication layer. Specifically, the APD is an electron injected APD in which an n electrode layer, the n electrode connecting layer, the buffer layer, the avalanche multiplication layer, an electric field control layer, a band gap gradient layer, a low-concentration light absorbing layer, a p-type light absorbing layer, and a p electrode layer are sequentially stacked, and a light absorbing portion that includes at least the low-concentration light absorbing layer and the p-type light absorbing layer forms a mesa shape.Type: GrantFiled: December 11, 2009Date of Patent: November 5, 2013Assignees: NTT Electronics Corporation, Nippon Telegraph and Telephone CorporationInventors: Tadao Ishibashi, Seigo Ando, Yoshifumi Muramoto, Fumito Nakajima, Haruki Yokoyama
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Patent number: 8564026Abstract: In various embodiments, a chip may include a substrate; a coating, the coating covering the substrate at least partially and the coating being designed for being stripped at least partially by means of laser ablation; wherein between the substrate and the coating, a laser detector layer is arranged at least partially, the laser detector layer being designed for generating a detector signal for ending the laser ablation.Type: GrantFiled: September 29, 2011Date of Patent: October 22, 2013Assignee: Infineon Technologies AGInventor: Franz-Peter Kalz
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Patent number: 8513704Abstract: A photodiode capable of interacting with incident photons includes at least: a stack of three layers including an intermediate layer placed between a first semiconductor layer and a second semiconductor layer having a first conductivity type; and a region that is in contact with at least the intermediate layer and the second layer and extends transversely relative to the planes of the three layers, the region having a conductivity type that is opposite to the first conductivity type. The intermediate layer is made of a semiconductor material having a second conductivity type and is capable of having a conductivity type that is opposite to the second conductivity type so as to form a P-N junction with the region, inversion of the conductivity type of the intermediate layer being induced by dopants of the first conductivity type that are present in the first and second layers.Type: GrantFiled: June 30, 2011Date of Patent: August 20, 2013Assignee: Commissariat a l'Energie Automique et aux Energies AlternativesInventor: Johan Rothman
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Publication number: 20130207160Abstract: A semiconductor light detecting element includes: an InP substrate; and a semiconductor stacked structure on the InP substrate and including at least a light absorbing layer, wherein the light absorbing layer includes an InGaAsBi layer lattice-matched to the InP substrate.Type: ApplicationFiled: August 28, 2012Publication date: August 15, 2013Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Yoshifumi SASAHATA, Eitaro ISHIMURA
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Patent number: 8502204Abstract: An optoelectronic module includes a layer structure having a plurality of semiconductor layers including a substrate layer, a first layer arrangement and a second layer arrangement, wherein 1) the first layer arrangement has a light-emitting layer arranged on the substrate layer, 2) the second layer arrangement contains at least one circuit that controls an operating state of the light-emitting layer, and 3) the second layer arrangement is arranged on the substrate layer and/or surrounded by the substrate layer.Type: GrantFiled: May 13, 2009Date of Patent: August 6, 2013Assignee: OSRAM Opto Semiconductors GmbHInventors: Dieter Eissler, Siegfried Herrmann
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Patent number: 8482108Abstract: A wafer-scale x-ray detector and a method of manufacturing the same are provided. The wafer-scale x-ray detector includes: a seamless silicon substrate electrically connected to a printed circuit substrate; a chip array having a plurality of pixel pads formed on a central region thereof and a plurality of pin pads formed at edges thereof on the seamless silicon substrate; a plurality of pixel electrodes formed to correspond to the pixel pads; vertical wirings and horizontal wirings formed to compensate a difference of regions expanded towards the pixel electrodes from the pixel pads between the chip array and the pixel electrodes; a redistribution layer having an insulating layer to separate the vertical wirings and the horizontal wirings; and a photoconductor layer and a common electrode which cover the pixel electrodes on the redistribution layer.Type: GrantFiled: May 17, 2011Date of Patent: July 9, 2013Assignee: Samsung Electronics Co., LtdInventors: Jae-chul Park, Chang-jung Kim, Sang-wook Kim, Sun-il Kim
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Patent number: 8471293Abstract: An embodiment of an array of Geiger-mode avalanche photodiodes, wherein each photodiode is formed by a body of semiconductor material, having a first conductivity type, housing a first cathode region, of the second conductivity type, and facing a surface of the body, an anode region, having the first conductivity type and a higher doping level than the body, extending inside the body, and facing the surface laterally to the first cathode region and at a distance therefrom, and an insulation region extending through the body and insulating an active area from the rest of the body, the active area housing the first cathode region and the anode region. The insulation region is formed by a mirror region of metal material, a channel-stopper region having the second conductivity type, surrounding the mirror region, and a coating region, of dielectric material, arranged between the mirror region and the channel-stopper region.Type: GrantFiled: January 20, 2009Date of Patent: June 25, 2013Assignee: STMicroelectronics S.r.l.Inventors: Delfo Nunziato Sanfilippo, Emilio Antonio Sciacca, Piero Giorgio Fallica, Salvatore Antonio Lombardo
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Publication number: 20130153962Abstract: The inventive concept provides avalanche photo diodes and methods of manufacturing the same. The avalanche photo diode may include a substrate, a light absorption layer formed on the substrate, a clad layer formed on the light absorption layer, an active region formed in the clad layer, a guard ring region formed around the active region, and an insulating region formed between the guard ring region and the active region.Type: ApplicationFiled: September 6, 2012Publication date: June 20, 2013Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Jae-Sik SIM, Kisoo Kim, Bongki Mheen, MyoungSook Oh, Yong-Hwan Kwon, Eun Soo Nam
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Patent number: 8461624Abstract: Photodetectors operable to achieve multiplication of photogenerated carriers at ultralow voltages. Embodiments include a first p-i-n semiconductor junction combined with a second p-i-n semiconductor junction to form a monolithic photodetector having at least three terminals. The two p-i-n structures may share either the p-type region or the n-type region as a first terminal. Regions of the two p-i-n structures doped complementary to that of the shared terminal form second and third terminals so that the first and second p-i-n structures are operable in parallel. A multiplication region of the first p-i-n structure is to multiply charge carriers photogenerated within an absorption region of the second p-i-n structure with voltage drops between the shared first terminal and each of the second and third terminals being noncumulative.Type: GrantFiled: November 22, 2010Date of Patent: June 11, 2013Assignee: Intel CorporationInventors: Yun-chung N Na, Yimin Kang
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Patent number: 8450720Abstract: A method of fabricating a frontside-illuminated inverted quantum well infrared photodetector may include providing a quantum well wafer having a bulk substrate layer and a quantum material layer, wherein the quantum material layer includes a plurality of alternating quantum well layers and barrier layers epitaxially grown on the bulk substrate layer. The method further includes applying at least one frontside common electrical contact to a frontside of the quantum well wafer, bonding a transparent substrate to the frontside of the quantum well wafer, thinning the bulk substrate layer of the quantum well wafer, and etching the quantum material layer to form quantum well facets that define at least one pyramidal quantum well stack. A backside electrical contact may be applied to the pyramidal quantum well stack. In one embodiment, a plurality of quantum well stacks is bonded to a read-out integrated circuit of a focal plane array.Type: GrantFiled: September 6, 2012Date of Patent: May 28, 2013Assignee: L-3 Communications Cincinnati Electronics CorporationInventors: David Forrai, Darrel Endres, Robert Jones, Michael James Garter
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Patent number: 8441032Abstract: A system and method providing for the detection of an input signal, either optical or electrical, by using a single independent discrete amplifier or by distributing the input signal into independent signal components that are independently amplified. The input signal can either be the result of photoabsorption process in the wavelengths greater than 950 nm or a low-level electrical signal. The discrete amplifier is an avalanche amplifier operable in a non-gated mode while biased in or above the breakdown region, and includes a composite dielectric feedback layer monolithically integrated with input signal detection and amplification semiconductor layers.Type: GrantFiled: June 28, 2010Date of Patent: May 14, 2013Assignee: Amplification Technologies, Inc.Inventor: Krishna Linga
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Patent number: 8357960Abstract: This invention relates to photodetector and its array in the form of a image sensor having multispectral detection capability covering the wavelengths from ultra-violet (UV) or near UV to shortwave infrared (over 1700 nm), ultra-violet (UV) or near UV to mid infrared (3500 nm), or ultra-violet (UV) or near UV to 5500 nm. More particularly, this invention is related to the multicolor detector, which can detect the light wavelengths ranges from as low as UV to the wavelengths over 1700 nm covering the most of the communication wavelength, and also from UV to as high as 5500 nm using of the single monolithic detector fabricated on the single wafer. This invention is also related to the multispectral photodetector arrays for multicolor imaging, sensing, and advanced communication.Type: GrantFiled: September 17, 2009Date of Patent: January 22, 2013Assignee: Banpil Photonics, Inc.Inventor: Achyut Kumar Dutta