With Lattice Constant Mismatch (e.g., With Buffer Layer To Accommodate Mismatch) Patents (Class 257/190)
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Patent number: 9293550Abstract: The present invention discloses a semiconductor device and a method for manufacturing the semiconductor device. The semiconductor device includes a gate insulating layer formed on an inner wall of a substrate recess, a work function material layer formed on the gate insulating layer so as to apply a tensile stress or a compressive stress to a channel of a MOS field-effect transistor, and a gate metal formed on the work function material layer. The method for manufacturing the semiconductor device includes forming a work function material layer on a gate insulating layer so as to apply a tensile stress or a compressive stress to a channel of a MOS field-effect transistor, wherein the gate insulating layer is formed on an inner wall of a substrate recess, and depositing a gate metal on the work function material layer.Type: GrantFiled: July 11, 2013Date of Patent: March 22, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Mieno Fumitake
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Patent number: 9293523Abstract: Embodiments of the present disclosure relate to semiconductor devices such as transistors used for amplifying or switching electronic signals. In one embodiment, a first trench is formed in a dielectric layer formed on a substrate to expose a surface of the substrate, a multi-stack layer structure is formed within the first trench, and a third semiconductor compound layer is formed on the second semiconductor compound layer, wherein the second semiconductor compound layer has an etching resistance against an etchant lower than that of the first and third semiconductor compound layers, a second trench is formed in the dielectric layer to partially expose at least the second semiconductor compound layer and the third semiconductor compound layer, and the second semiconductor compound layer is selectively removed so that the first semiconductor compound layer is isolated from the third semiconductor compound layer by an air gap.Type: GrantFiled: June 24, 2014Date of Patent: March 22, 2016Assignee: APPLIED MATERIALS, INC.Inventors: Xinyu Bao, Errol Antonio C. Sanchez
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Patent number: 9287369Abstract: According to one embodiment, a nitride semiconductor element includes a foundation layer, a functional layer and a stacked body. The stacked body is provided between the foundation layer and the functional layer. The stacked body includes a first stacked intermediate layer including a first GaN intermediate layer, a first high Al composition layer of Alx1Ga1-x1N (0<x1?1) and a first low Al composition layer. A compressive strain is applied to the first low Al composition layer. Unstrained GaN has a first lattice spacing. The Alx1Ga1-x1N (0<x1?1) when unstrained has a second lattice spacing. The first high Al composition layer has a third lattice spacing. An Al composition ratio of the first low Al composition layer is not more than a ratio of a difference between the first and third lattice spacings to a difference between the first and second lattice spacings.Type: GrantFiled: January 14, 2014Date of Patent: March 15, 2016Assignee: Kabushiki Kaisha ToshibaInventors: Toshiki Hikosaka, Yoshiyuki Harada, Hisashi Yoshida, Naoharu Sugiyama, Shinya Nunoue
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Patent number: 9263248Abstract: A pseudo-substrate (1, 11) for use in the production of semiconductor components, having a carrier substrate (2, 12) with a crystalline structure and a first buffer (3, 13), which is arranged on a surface of the carrier substrate (2, 12), if appropriate on further intervening intermediate layers, wherein the first buffer (3, 13) is embodied as a single layer or as a multilayer system and includes, at least at the surface facing away from the carrier substrate (2, 12), arsenic (As) and at least one of the elements aluminum (Al) and indium (In).Type: GrantFiled: August 10, 2011Date of Patent: February 16, 2016Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.Inventors: Arnulf Leuther, Axel Tessmann, Rainer Losch
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Patent number: 9263454Abstract: Embodiments for the present invention provide a semiconductor device and methods for fabrication. In an embodiment of the present invention, a semiconductor structure comprises a first conductor horizontally formed on a semiconductor substrate. A second conductor is vertically formed in a semiconductor stack that includes the semiconductor substrate. An oxidized region is formed proximate to the first conductor. The second conductor is formed in a manner to be in electrical communication with the first conductor. The first conductor is formed in a manner to be laterally connected to the second conductor. The first conductor is formed in a manner to not traverse beneath the oxidized region. The first conductor is formed in a manner to have a reduced link-up resistance with adjacent epitaxial material included in the semiconductor structure.Type: GrantFiled: August 27, 2015Date of Patent: February 16, 2016Assignee: International Business Machines CorporationInventors: Emre Alptekin, Pooja R. Batra, Kangguo Cheng, Ramachandra Divakaruni, Johnathan E. Faltermeier, Reinaldo A. Vega
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Patent number: 9257557Abstract: Embodiments of the present invention provide a semiconductor structure having a strain relaxed buffer, and method of fabrication. A strain relaxed buffer is disposed on a semiconductor substrate. A silicon region and silicon germanium region are disposed adjacent to each other on the strain relaxed buffer. An additional region of silicon or silicon germanium provides quantum well isolation.Type: GrantFiled: May 20, 2014Date of Patent: February 9, 2016Assignee: GLOBALFOUNDRIES INC.Inventor: David P. Brunco
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Patent number: 9245805Abstract: An integrated circuit structure includes an n-type fin field effect transistor (FinFET) and a p-type FinFET. The n-type FinFET includes a first germanium fin over a substrate; a first gate dielectric on a top surface and sidewalls of the first germanium fin; and a first gate electrode on the first gate dielectric. The p-type FinFET includes a second germanium fin over the substrate; a second gate dielectric on a top surface and sidewalls of the second germanium fin; and a second gate electrode on the second gate dielectric. The first gate electrode and the second gate electrode are formed of a same material having a work function close to an intrinsic energy level of germanium.Type: GrantFiled: July 7, 2010Date of Patent: January 26, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih Chieh Yeh, Chih-Sheng Chang, Clement Hsingjen Wann
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Patent number: 9245887Abstract: An integrated circuit layout includes a first active region, a second active region, a first PODE (poly on OD edge), a second PODE, a first transistor and a second transistor. The first transistor, on the first active region, includes a gate electrode, a source region and a drain region. The second transistor, on the second active region, includes a gate electrode, a source region and a drain region. The first active region and the second active region are adjacent and electrically disconnected with each other. The first PODE and the second PODE are on respective adjacent edges of the first active region and the second active region. The source regions of the first and second transistor are adjacent with the first PODE and the second PODE respectively. The first PODE and the second PODE are sandwiched between source regions of the first transistor and the second transistor.Type: GrantFiled: July 31, 2013Date of Patent: January 26, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ting-Wei Chiang, Chun-Fu Chen, Hsiang-Jen Tseng, Wei-Yu Chen, Hui-Zhong Zhuang, Shang-Chih Hsieh, Li-Chun Tien
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Patent number: 9236463Abstract: A semiconductor device including a first lattice dimension III-V semiconductor layer present on a semiconductor substrate, and a second lattice dimension III-V semiconductor layer that present on the first lattice dimension III-V semiconductor layer, wherein the second lattice dimension III-V semiconductor layer has a greater lattice dimension than the first lattice dimension III-V semiconductor layer, and the second lattice dimension III-V semiconductor layer has a compressive strain present therein. A gate structure is present on a channel portion of the second lattice dimension III-V semiconductor layer, wherein the channel portion of second lattice dimension III-V semiconductor layer has the compressive strain. A source region and a drain region are present on opposing sides of the channel portion of the second lattice dimension III-V semiconductor layer.Type: GrantFiled: September 16, 2013Date of Patent: January 12, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Thomas N. Adam, Kangguo Cheng, Bruce B. Doris, Pouya Hashemi, Ali Khakifirooz, Alexander Reznicek
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Patent number: 9231058Abstract: A method of fabricating a single crystal gallium nitride substrate the step of cutting an ingot of single crystal gallium nitride along predetermined planes to make one or more signal crystal gallium nitride substrates. The ingot of single crystal gallium nitride is grown by vapor phase epitaxy in a direction of a predetermined axis. Each predetermined plane is inclined to the predetermined axis. Each substrate has a minor polished primary surface. The primary surface has a first area and a second area. The first area is between an edge of the substrate and a line 3 millimeter away from the edge. The first area surrounds the second area. An axis perpendicular to the primary surface forms an off-angle with c-axis of the substrate. The off-angle takes a minimum value at a first position in the first area of the primary surface.Type: GrantFiled: December 9, 2014Date of Patent: January 5, 2016Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventor: Masaki Ueno
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Patent number: 9224827Abstract: Provided is a semiconductor device. The semiconductor device includes a resistor and a voltage protection device. The resistor has a spiral shape. The resistor has a first portion and a second portion. The voltage protection device includes a first doped region that is electrically coupled to the first portion of the resistor. The voltage protection device includes a second doped region that is electrically coupled to the second portion of the resistor. The first and second doped regions have opposite doping polarities.Type: GrantFiled: November 7, 2013Date of Patent: December 29, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai
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Patent number: 9224656Abstract: An integrated circuit containing PMOS transistors may be formed by forming a dual layer hard mask. A first layer of the hard mask is carbon-containing silicon nitride formed using a hydrocarbon reagent. A second layer of the hard mask is chlorine-containing silicon nitride formed on the first layer using a chlorinated silane reagent. After SiGe epitaxial source/drain regions are formed, the hard mask is removed using a wet etch which removes the second layer at a rate at least three times faster than the first layer.Type: GrantFiled: July 25, 2013Date of Patent: December 29, 2015Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Deborah Jean Riley, Seung-Chul Song
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Patent number: 9219152Abstract: A semiconductor device, such as a PMOS or NMOS device, having localized stressors is provided. Recesses are formed on opposing sides of a gate electrode. A stress-inducing region is formed along a bottom of the recess, and a stressed layer is formed over the stress-inducing region. By having a stress-inducing region with a larger lattice structure than the stressed layer, a tensile strain may be created in a channel region of the semiconductor device and may be suitable for an NMOS device. By having a stress-inducing region with a smaller lattice structure than the stressed layer, a compressive strain may be created in the channel region of the semiconductor device and may be suitable for a PMOS device. Embodiments may be applied to various types of substrates and semiconductor devices, such as planar transistors and finFETs.Type: GrantFiled: October 23, 2012Date of Patent: December 22, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Zhiqiang Wu, Jeffrey Junhao Xu, Chih-Hao Chang, Wen-Hsing Hsieh
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Patent number: 9202916Abstract: Embodiments for forming a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a gate stack structure formed on the substrate. The semiconductor device structure also includes gate spacers formed on sidewalls of the gate stack structure. The semiconductor device structure further includes an isolation structure formed in the substrate and a source/drain stressor structure formed adjacent to the isolation structure. The source/drain stressor structure includes a capping layer which is formed along the (311) and (111) crystal orientations.Type: GrantFiled: December 27, 2013Date of Patent: December 1, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shin-Yeh Huang, Kai-Hsiang Chang, Chih-Chen Jiang, Yi-Wei Peng, Kuan-Yu Lin, Ming-Shan Tsai, Ching-Lun Lai
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Patent number: 9202689Abstract: A method and structure of an embedded stressor in a semiconductor transistor device having a sigma-shaped channel sidewall and a vertical isolation sidewall. The embedded stressor structure is made by a first etch to form a recess in a substrate having a gate and first and second spacers. The second spacers are removed and a second etch creates a step in the recess on a channel sidewall. An anisotropic etch creates facets in the channel sidewall of the recess. Where the facets meet, a vertex is formed. The depth of the vertex is determined by the second etch depth (step depth). The lateral position of the vertex is determined by the thickness of the first spacers. A semiconductor material having a different lattice spacing than the substrate is formed in the recess to achieve the embedded stressor structure.Type: GrantFiled: June 23, 2014Date of Patent: December 1, 2015Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Thomas N Adam, Kangguo Cheng, Ali Khakifirooz, Alexander Reznicek
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Patent number: 9184244Abstract: A high voltage gallium nitride based semiconductor device includes an n-type gallium nitride freestanding substrate, and an n-type gallium nitride based semiconductor layer including a drift layer formed on the surface of the n-type gallium nitride freestanding substrate so as to have a reverse breakdown voltage of not less than 3000 V. The drift layer is configured such that a carbon concentration is not less than 3.0×1016/cm3 in a region which has an electric field intensity of not more than 1.5 MV/cm when a maximum allowable voltage where there occurs no breakdown phenomenon is applied as a reverse bias voltage.Type: GrantFiled: September 9, 2014Date of Patent: November 10, 2015Assignee: Sciocs Company LimitedInventor: Naoki Kaneda
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Patent number: 9184202Abstract: This invention relates to multiband detector and multiband image sensing devices, and their manufacturing technologies. The innovative detector (or image sensing) provides significant broadband capability covering the wavelengths from within ultra-violet (UV) to long-Infrared, and it is achieved in a single element. More particularly, this invention is related to the multiband or dual band detectors, which can not only detect the broad spectrum wavelengths ranges from within as low as UV to the wavelengths as high as 25 ?m, but also band selection capability. This invention is also related to the multiband detector arrays or image sensing device for multicolor imaging, sensing, and advanced communication.Type: GrantFiled: March 15, 2013Date of Patent: November 10, 2015Assignee: BANPIL PHOTONICS, INC.Inventor: Achyut Dutta
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Patent number: 9166109Abstract: A semiconductor light emitting element includes a light emitting structure including a first conductivity type semiconductor layer, an active layer and a second conductivity type semiconductor layer. A first electrode structure includes a conductive via connected to the first conductivity type semiconductor layer. A second electrode structure is connected to the second conductivity type semiconductor layer. An insulating part having an open region exposes part of the first and second electrode structures while covering the first and second electrode structures. First and second pad electrodes are formed on the first and second electrode structures exposed by the open region and are connected to the first and second electrode structures.Type: GrantFiled: May 22, 2013Date of Patent: October 20, 2015Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jong In Yang, Tae Hyung Kim, Kwang Min Song, Seung Hwan Lee, Wan Tae Lim, Se Jun Han, Hyun Kwon Hong, Su Min Hwangbo
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Patent number: 9159823Abstract: Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.Type: GrantFiled: December 9, 2011Date of Patent: October 13, 2015Assignee: Intel CorporationInventors: Van H. Le, Benjamin Chu-Kung, Harold Hal W. Kennel, Willy Rachmady, Ravi Pillarisetty, Jack T. Kavalieros
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Patent number: 9147632Abstract: A semiconductor device having improved heat dissipation is disclosed. The semiconductor device includes a semi-insulating substrate and epitaxial layers disposed on the semi-insulating substrate wherein the epitaxial layers include a plurality of heat conductive vias that are disposed through the epitaxial layers with the plurality of heat conductive vias being spaced along a plurality of finger axes that are aligned generally parallel across a surface of the epitaxial layers. The semiconductor device further includes an electrode having a plurality of electrically conductive fingers that are disposed along the plurality of finger axes such that the electrically conductive fingers are in contact with the first plurality of heat conductive vias.Type: GrantFiled: August 23, 2013Date of Patent: September 29, 2015Assignee: RF Micro Devices, Inc.Inventor: Andrew P. Ritenour
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Patent number: 9147734Abstract: Substrates of GaN over silicon suitable for forming electronics devices such as heterostructure field effect transistors (HFETs), and methods of making the substrates, are disclosed. Voids in a crystalline Al2O3 film on a top surface of a silicon wafer are formed. The top surface of the silicon wafer is along the <111> silicon crystal orientation. A plurality of laminate layers is deposited over the voids and the Al2O3 film. Each laminate layer includes an AlN film and a GaN film. A transistor or other device may be formed in the top GaN film.Type: GrantFiled: April 18, 2014Date of Patent: September 29, 2015Assignee: Power Integrations, Inc.Inventors: Jamal Ramdani, John P. Edwards, Linlin Liu
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Semiconductor device having a pair of transistors that are directly coupled and capacitively coupled
Patent number: 9142551Abstract: According to one embodiment, a semiconductor element includes a first transistor section, a second transistor section, a contact region, and a capacitive element section. The first transistor section includes a first electrode, a second electrode, a first semiconductor region, a second semiconductor region, a third semiconductor region, the third semiconductor region, and the third semiconductor region being connected to the second electrode, and a third electrode. The second transistor section includes a fourth electrode, a fifth electrode, a fourth semiconductor region, a fifth semiconductor region, a sixth semiconductor region, and the sixth semiconductor region being connected to the fifth electrode, and a sixth electrode, the second transistor section being arranged adjacent to the first transistor section. The contact region includes a seventh electrode, electrically connecting the fifth electrode and the first electrode.Type: GrantFiled: January 26, 2015Date of Patent: September 22, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Tatsuo Shimizu, Kazuto Takao, Takashi Shinohe -
Patent number: 9129952Abstract: Semiconductor devices including a stressor in a recess and methods of forming the semiconductor devices are provided. The methods may include forming a trench in an active region and the trench may include a notched portion of the active region. The methods may also include forming an embedded stressor in the trench. The embedded stressor may include a lower semiconductor layer and an upper semiconductor layer, which has a width narrower than a width of the lower semiconductor layer. A side of the upper semiconductor layer may not be aligned with a side of the lower semiconductor layer and an uppermost surface of the upper semiconductor layer may be higher than an uppermost surface of the active region.Type: GrantFiled: September 23, 2013Date of Patent: September 8, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-Suk Shin, Hyun-Chul Kang, Dong-Hyun Roh, Pan-Kwi Park, Geo-Myung Shin, Nae-In Lee, Chul-Woong Lee, Hoi-Sung Chung, Young-Tak Kim
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Patent number: 9123799Abstract: A method for fabricating a lateral gallium nitride (GaN) field-effect transistor includes forming a first and second GaN layer coupled to a substrate, removing a first portion of the second GaN layer to expose a portion of the first GaN layer, and forming a third GaN layer coupled to the second GaN layer and the exposed portion of the first GaN layer. The method also includes removing a portion of the third GaN layer to expose a portion of the second GaN layer, forming a source structure coupled to the third GaN layer. A first portion of the second GaN layer is disposed between the source structure and the second GaN layer. A drain structure is formed that is coupled to the third GaN layer or alternatively to the substrate. The method also includes forming a gate structure coupled to the third GaN layer such that a second portion of the third GaN layer is disposed between the gate structure and the second GaN layer.Type: GrantFiled: November 11, 2013Date of Patent: September 1, 2015Assignee: Avogy, Inc.Inventors: Ozgur Aktas, Isik C. Kizilyalli
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Patent number: 9117890Abstract: According to example embodiments, a HEMT includes a channel supply layer on a channel layer, a p-type semiconductor structure on the channel supply layer, a gate electrode on the p-type semiconductor structure, and source and drain electrodes spaced apart from two sides of the gate electrode respectively. The channel supply layer may have a higher energy bandgap than the channel layer. The p-type semiconductor structure may have an energy bandgap that is different than the channel supply layer. The p-type semiconductor structure may include a hole injection layer (HIL) on the channel supply layer and be configured to inject holes into at least one of the channel layer and the channel supply in an on state. The p-type semiconductor structure may include a depletion forming layer on part of the HIL. The depletion forming layer may have a dopant concentration that is different than the dopant concentration of the HIL.Type: GrantFiled: June 5, 2013Date of Patent: August 25, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Jong-seob Kim, Kyoung-yeon Kim, Joon-yong Kim, Jai-kwang Shin, Jae-joon Oh, Hyuk-soon Choi, Jong-bong Ha, Sun-kyu Hwang, In-jun Hwang
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Patent number: 9112104Abstract: Epitaxial growth methods and devices are described that include a textured surface on a substrate. Geometry of the textured surface provides a reduced lattice mismatch between an epitaxial material and the substrate. Devices formed by the methods described exhibit better interfacial adhesion and lower defect density than devices formed without texture. Silicon substrates are shown with gallium nitride epitaxial growth and devices such as LEDs are formed within the gallium nitride.Type: GrantFiled: June 9, 2014Date of Patent: August 18, 2015Assignee: Micron Technology, Inc.Inventors: Anton deVilliers, Erik Byers, Scott E. Sills
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Patent number: 9111839Abstract: An epitaxial wafer for a heterojunction type FET includes an AlN primary layer, a stepwisely composition-graded buffer layer structure, a superlattice buffer layer structure, a GaN channel layer, and a nitride semiconductor electron supply layer, which are sequentially provided on a Si substrate, the stepwisely composition-graded buffer layer structure including a plurality of AlGaN buffer layers provided on each other such that an Al composition ratio is sequentially reduced, an uppermost layer thereof having a composition of AlxGa1?xN (0<x), a plurality of sets of an AlyGa1?yN (y?1) superlattice constituting layer and an AlzGa1?zN (0<z<y) superlattice constituting layer being provided on each other alternately starting from one of the AlyGa1?yN superlattice constituting layer and the AlzGa1?zN superlattice constituting layer in the superlattice buffer layer structure, the AlxGa1?xN buffer layer and the AlzGa1?zN superlattice constituting layer satisfying x?0.05?z?x+0.05.Type: GrantFiled: January 15, 2013Date of Patent: August 18, 2015Assignee: SHARP KABUSHIKI KAISHAInventors: Masayuki Hoteida, Nobuaki Teraguchi, Daisuke Honda, Nobuyuki Ito, Masakazu Matsubayashi, Haruhiko Matsukasa
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Patent number: 9093271Abstract: The invention relates to a method for manufacturing, by means of epitaxy, a monocrystalline layer of GaN on a substrate, wherein the coefficient of thermal expansion is less than the coefficient of thermal expansion of GaN, comprising the following steps: (b) three-dimensional epitaxial growth of a layer of GaN relaxed at the epitaxial temperature, (c1) growth of an intermediate layer of BwAlxGayInzN, (c2) growth of a layer of BwAlxGayInzN, (c3) growth of an intermediate layer of BwAlxGayInzN, at least one of the layers formed in steps (c1) to (c3) being an at least ternary III-N alloy comprising aluminium and gallium, (d) growth of said layer of GaN.Type: GrantFiled: June 28, 2012Date of Patent: July 28, 2015Assignees: Soitec, Centre National de la Recherche Scientifique (CNRS)Inventors: David Schenk, Alexis Bavard, Yvon Cordier, Eric Frayssinet, Mark Kennard, Daniel Rondi
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Patent number: 9087896Abstract: The present invention relates to providing layers of different thickness on vertical and horizontal surfaces (15, 20) of a vertical semiconductor device (1). In particular the invention relates to gate electrodes and the formation of precision layers (28) in semiconductor structures comprising a substrate (10) and an elongated structure (5) essentially standing up from the substrate. According to the method of the invention the vertical geometry of the device (1) is utilized in combination with either anisotropic deposition or anisotropic removal of deposited material to form vertical or horizontal layers of very high precision.Type: GrantFiled: October 8, 2013Date of Patent: July 21, 2015Assignee: QUNANO ABInventors: Jonas Ohlsson, Lars Samuelson, Erik Lind, Lars-Erik Wernersson, Truls Lowgren
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Patent number: 9076819Abstract: A method of fabricating a semiconductor device comprises epitaxially-growing a strained material in a cavity of a substrate comprising a major surface and the cavity, the cavity being below the major surface. A lattice constant of the strained material is different from a lattice constant of the substrate. The method also comprises forming a first metal layer over the strained material, and forming a dielectric layer over the first metal layer, wherein the dielectric layer has a thickness ranging from 1 nm to 10 nm. The method further comprises forming a dummy poly-silicon over the dielectric layer, and forming an interlayered dielectric layer (ILD) surrounding the dummy poly-silicon. The method additionally comprises removing the dummy poly-silicon over the dielectric layer, and forming a second metal layer over the dielectric layer.Type: GrantFiled: March 21, 2014Date of Patent: July 7, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
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Patent number: 9076812Abstract: An iron-doped high-electron-mobility transistor (HEMT) structure includes a substrate, a nucleation layer over the substrate, and a buffer layer over the nucleation layer. The gallium-nitride buffer layer includes a iron-doping-stop layer having a concentration of iron that drops from a juncture with an iron-doped component of the buffer layer over a thickness that is relatively small compared to that of the iron-doped component. The iron-doping-stop layer is formed at lower temperature compared to the temperature at which the iron-doped component is formed. The iron-doped HEMT structure also includes a channel layer over the buffer layer. A carrier-supplying barrier layer is formed over the channel layer.Type: GrantFiled: June 27, 2013Date of Patent: July 7, 2015Assignee: IQE KC, LLCInventors: Oleg Laboutin, Yu Cao, Wayne Johnson
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Patent number: 9076868Abstract: Embodiments of the present invention provide an improved shallow trench isolation structure and method of fabrication. The shallow trench isolation cavity includes an upper region having a sigma cavity shape, and a lower region having a substantially rectangular cross-section. The lower region is filled with a first material having good gap fill properties. The sigma cavity is filled with a second material having good stress-inducing properties. In some embodiments, source/drain stressor cavities may be eliminated, with the stress provided by the shallow trench isolation structure. In other embodiments, the stress from the shallow trench isolation structure may be used to complement or counteract stress from a source/drain stressor region of an adjacent transistor. This enables precise tuning of channel stress to achieve a desired carrier mobility for a transistor.Type: GrantFiled: July 18, 2014Date of Patent: July 7, 2015Assignee: GLOBALFOUNDRIES INC.Inventors: HaoCheng Tsai, Min-hwa Chi
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Patent number: 9070619Abstract: A nitride semiconductor wafer includes a substrate, and a buffer layer formed on the substrate and including an alternating layer of AlxGa1-xN (0?x?0.05) and AlyGa1-yN (0<y?1 and x<y) layers. Only the AlyGa1-yN layer in the alternating layer is doped with an acceptor.Type: GrantFiled: August 8, 2013Date of Patent: June 30, 2015Assignee: HITACHI METALS, LTD.Inventor: Tadayoshi Tsuchiya
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Patent number: 9064892Abstract: A semiconductor structure and method for forming the same provide a high mobility stressor material suitable for use as source/drain regions or other active devices. The structure is formed in a substrate opening and is doped with an impurity such as boron in upper portions but is void of the impurity in regions that contact the surfaces of the opening. The structure is therefore resistant to out-diffusion of the dopant impurity during high temperature operations and may be formed through selective deposition using reduced pressure chemical vapor deposition or reduced pressure epitaxial deposition.Type: GrantFiled: August 30, 2011Date of Patent: June 23, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wen Chu Hsiao, Ju Wen Hsiao, Ying Min Chou, Hsiang Hsiang Ko, Ying-Lang Wang
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Patent number: 9064893Abstract: A manufacturing method of a semiconductor device is provided. The method includes at least the following steps. A gate structure is formed on a substrate. An epitaxial structure is formed on the substrate, wherein the epitaxial structure comprises SiGe, and the Ge concentration in the epitaxial structure is equal to or higher than 45%. A first cap layer is formed on the epitaxial structure, wherein the first cap layer comprises Si. The first cap layer is doped with boron for forming a flat top surface of the first cap layer.Type: GrantFiled: May 13, 2013Date of Patent: June 23, 2015Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-I Liao, Chin-Cheng Chien
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Patent number: 9065003Abstract: According to one embodiment, a semiconductor light emitting device includes a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer and configured to emit a light having a peak wavelength of 440 nanometers or more. Tensile strain is applied to the first semiconductor layer. An edge dislocation density of the first semiconductor layer is 5×109/cm2 or less. A lattice mismatch factor between the first semiconductor layer and the light emitting layer is 0.11 percent or less.Type: GrantFiled: February 27, 2012Date of Patent: June 23, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Hisashi Yoshida, Koichi Tachibana, Tomonari Shioda, Toshiki Hikosaka, Jongil Hwang, Hung Hung, Naoharu Sugiyama, Shinya Nunoue
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Patent number: 9054178Abstract: A transistor comprises a substrate, a pair of spacers on the substrate, a gate dielectric layer on the substrate and between the pair of spacers, a gate electrode layer on the gate dielectric layer and between the pair of spacers, an insulating cap layer on the gate electrode layer and between the pair of spacers, and a pair of diffusion regions adjacent to the pair of spacers. The insulating cap layer forms an etch stop structure that is self aligned to the gate and prevents the contact etch from exposing the gate electrode, thereby preventing a short between the gate and contact. The insulator-cap layer enables self-aligned contacts, allowing initial patterning of wider contacts that are more robust to patterning limitations.Type: GrantFiled: February 6, 2014Date of Patent: June 9, 2015Assignee: Intel CorporationInventors: Mark T. Bohr, Tahir Ghani, Nadia M. Rahhai-Orabi, Subhash M. Joshi, Joseph M. Steigerwald, Jason W. Klaus, Jack Hwang, Ryan Mackiewicz
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Publication number: 20150145001Abstract: Exemplary embodiments provide materials and methods of forming high-quality semiconductor devices using lattice-mismatched materials. In one embodiment, a composite film including one or more substantially-single-particle-thick nanoparticle layers can be deposited over a substrate as a nanoscale selective growth mask for epitaxially growing lattice-mismatched materials over the substrate.Type: ApplicationFiled: January 30, 2015Publication date: May 28, 2015Inventors: SEUNG-CHANG LEE, STEVEN R.J. BRUECK
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Publication number: 20150144962Abstract: A complementary fin field-effect transistor (FinFET) includes a p-type device having a p-channel fin. The p-channel fin may include a first material that is lattice mismatched relative to a semiconductor substrate. The first material may have a compressive strain. The FinFET device also includes an n-type device having an re-channel fin. The n-channel fin may include a second material having a tensile strain that is lattice mismatched relative to the semiconductor substrate. The p-type device and the n-type device cooperate to form the complementary FinFET device.Type: ApplicationFiled: July 2, 2014Publication date: May 28, 2015Inventors: Kern RIM, Jeffrey Junhao XU, Stanley Seungchul SONG
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Publication number: 20150144998Abstract: A fin structure of a semiconductor device, such as a fin field effect transistor (FinFET), and a method of manufacture, is provided. In an embodiment, trenches are formed in a substrate, and a liner is formed along sidewalls of the trenches, wherein a region between adjacent trenches define a fin. A dielectric material is formed in the trenches. Portions of the semiconductor material of the fin are replaced with a second semiconductor material and a third semiconductor material, the second semiconductor material having a different lattice constant than the substrate and the third semiconductor material having a different lattice constant than the second semiconductor material. Portions of the second semiconductor material are oxidized.Type: ApplicationFiled: November 26, 2013Publication date: May 28, 2015Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Cheng Ching, Jiun-Jia Huang, Chao-Hsiung Wang, Chi-Wen Liu
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Publication number: 20150144999Abstract: The present disclosure provides a semiconductor device that includes a substrate of a first semiconductor material; a fin feature having a first portion, a second portion and a third portion stacked on the substrate; an isolation feature formed on the substrate and disposed on sides of the fin feature; semiconductor oxide features including a second semiconductor material, disposed on recessed sidewalls of the second portion, defining dented voids overlying the semiconductor oxide features and underlying the third portion; and a gate stack disposed on the fin feature and the isolation feature. The gate stack includes a gate dielectric layer extended into and filling in the dented voids. The first and third portions include the first semiconductor material having a first lattice constant. The second portion includes the second semiconductor material having a second lattice constant different from the first lattice constant.Type: ApplicationFiled: November 26, 2013Publication date: May 28, 2015Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Cheng Ching, Chih-Hao Wang, Zhiqiang Wu, Carlos H. Diaz
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Publication number: 20150145000Abstract: Integrated circuits with electrical components near shallow trench isolations and methods for producing such integrated circuits are provided. The method includes forming a trench is a substrate, where the trench has a trench surface. A barrier layer including silicon and germanium is formed overlying the trench surface. A shallow trench isolation is then formed with a core overlying the barrier layer, where the core includes a shallow trench isolation insulator.Type: ApplicationFiled: November 27, 2013Publication date: May 28, 2015Applicant: GLOBALFOUNDRIES, Inc.Inventors: Ran Yan, Nicolas Sassiat, Alban Zaka, Kun-Hsien Lin
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Patent number: 9041027Abstract: A method of producing semiconductor materials and devices that incorporate the semiconductor materials are provided. In particular, a method is provided of producing a semiconductor material, such as a III-V semiconductor, on a spinel substrate using a sacrificial buffer layer, and devices such as photovoltaic cells that incorporate the semiconductor materials. The sacrificial buffer material and semiconductor materials may be deposited using lattice-matching epitaxy or coincident site lattice-matching epitaxy, resulting in a close degree of lattice matching between the substrate material and deposited material for a wide variety of material compositions. The sacrificial buffer layer may be dissolved using an epitaxial liftoff technique in order to separate the semiconductor device from the spinel substrate, and the spinel substrate may be reused in the subsequent fabrication of other semiconductor devices.Type: GrantFiled: December 1, 2010Date of Patent: May 26, 2015Assignee: Alliance for Sustainable Energy, LLCInventors: Aaron Joseph Ptak, Yong Lin, Andrew Norman, Kirstin Alberi
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Patent number: 9040331Abstract: In accordance with an embodiment, a diode comprises a substrate, a dielectric material including an opening that exposes a portion of the substrate, the opening having an aspect ratio of at least 1, a bottom diode material including a lower region disposed at least partly in the opening and an upper region extending above the opening, the bottom diode material comprising a semiconductor material that is lattice mismatched to the substrate, a top diode material proximate the upper region of the bottom diode material, and an active diode region between the top and bottom diode materials, the active diode region including a surface extending away from the top surface of the substrate.Type: GrantFiled: July 20, 2012Date of Patent: May 26, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Anthony J. Lochtefeld
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Publication number: 20150137179Abstract: A power device disclosed herein comprises a substrate, a first semiconductor layer formed on the substrate, a second semiconductor layer formed on the first semiconductor layer and comprising a first element of group III, a third semiconductor layer formed on the second semiconductor layer and a plurality of first interlayers formed in the third semiconductor layer and comprising a second element of III group. The first element of III group and the second element of III group are the same. The second semiconductor layer and the plurality of first interlayers are doped with carbon.Type: ApplicationFiled: November 19, 2013Publication date: May 21, 2015Applicants: HUGA OPTOTECH INC., EPISTAR CORPORATIONInventors: Ya-Yu YANG, Heng-Kuang LIN
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Publication number: 20150137180Abstract: A FinFET includes a substrate, a fin structure on the substrate, a source in the fin structure, a drain in the fin structure, a channel in the fin structure between the source and the drain, a gate dielectric layer over the channel, and a gate over the gate dielectric layer. At least one of the source and the drain includes a bottom SiGe layer.Type: ApplicationFiled: January 27, 2015Publication date: May 21, 2015Inventors: Ming-Hua Yu, Pei-Ren Jeng, Tze-Liang Lee
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Publication number: 20150129931Abstract: A semiconductor device includes a stressed substrate stressed by a first stress, a first stressed channel formed in the substrate and having the first stress, and a first strained gate electrode strained by a first strain generating element. A first strained gate electrode is formed over the first stressed channel, the first strained gate electrode including a first lattice-mismatched layer to induce a second stress to the first stressed channel.Type: ApplicationFiled: March 20, 2014Publication date: May 14, 2015Applicant: SK hynix Inc.Inventor: Yun-Hyuck JI
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Publication number: 20150129911Abstract: Tunable p-i-n diodes comprising Ge heterojunction structures are provided. Also provided are methods for making and using the tunable p-i-n diodes. Tunability is provided by adjusting the tensile strain in the p-i-n heterojunction structure, which enables the diodes to emit radiation over a range of wavelengths.Type: ApplicationFiled: November 8, 2013Publication date: May 14, 2015Applicant: Wisconsin Alumni Research FoundationInventors: Max G. Lagally, José Roberto Sánchez Pérez
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Patent number: 9029911Abstract: Disclosed are a light emitting device, a method of manufacturing the light emitting device, a light emitting device package and a lighting system. The light emitting device includes a silicon substrate; a nitride buffer layer on the silicon substrate; and a gallium nitride epitaxial layer on the nitride buffer layer, wherein the nitride buffer layer includes a first nitride buffer layer having a first aluminum nitride layer on the silicon substrate and a first gallium nitride layer on the first aluminum nitride layer.Type: GrantFiled: July 31, 2012Date of Patent: May 12, 2015Assignee: LG Innotek Co., Ltd.Inventors: Jung Hun Jang, Jeong Sik Lee, Seung Keun Nam
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Publication number: 20150123124Abstract: A transistor device, such as a rotated channel metal oxide/insulator field effect transistor (RC-MO(I)SFET), includes a substrate including a non-polar or semi-polar wide band gap substrate material such as an Al2O3 or a ZnO or a Group-III Nitride-based material, and a first structure disposed on a first side of the substrate comprising of AlInGaN-based and/or ZnMgO based semiconducting materials. The first structure further includes an intentional current-conducting sidewall channel or facet whereupon additional semiconductor layers, dielectric layers and electrode layers are disposed and upon which the field effect of the dielectric and electrode layers occurs thus allowing for a high density monolithic integration of a multiplicity of discrete devices on a common substrate thereby enabling a higher power density than in conventional lateral power MOSFET devices.Type: ApplicationFiled: January 6, 2015Publication date: May 7, 2015Inventors: Bunmi T. ADEKORE, James FIORENZA