With Lightly Doped Portion Of Drain Region Adjacent Channel (e.g., Ldd Structure) Patents (Class 257/344)
  • Patent number: 9040971
    Abstract: A thin film transistor (TFT) that includes a control electrode, a semiconductor pattern, a first input electrode, a second input electrode, and an output electrode is disclosed. in one aspect, the semiconductor pattern includes a first input area, a second input area, a channel area, and an output area. The channel area is formed between the first input area and the output area and overlapped with the control electrode to be insulated from the control electrode. The second input area is formed between the first input area and the channel area and doped with a doping concentration different from a doping concentration of the first input areas. The second input electrode makes contact with the second input area and receives a control voltage to control a threshold voltage.
    Type: Grant
    Filed: September 24, 2013
    Date of Patent: May 26, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventor: Yong Soo Lee
  • Patent number: 9041108
    Abstract: MOSFETs and methods for making MOSFETs with a recessed channel and abrupt junctions are disclosed. The method includes creating source and drain extensions while a dummy gate is in place. The source/drain extensions create a diffuse junction with the silicon substrate. The method continues by removing the dummy gate and etching a recess in the silicon substrate. The recess intersects at least a portion of the source and drain junction. Then a channel is formed by growing a silicon film to at least partially fill the recess. The channel has sharp junctions with the source and drains, while the unetched silicon remaining below the channel has diffuse junctions with the source and drain. Thus, a MOSFET with two junction regions, sharp and diffuse, in the same transistor can be created.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: May 26, 2015
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Pranita Kerber, Ali Khakifirooz
  • Publication number: 20150137233
    Abstract: A high-voltage transistor includes an active region including a diffused region of a first conductivity type defined by inner edges of a border of shallow trench isolation. A gate having side edges and end edges is disposed over the active region. Spaced apart source and drain regions of a second conductivity type opposite the first conductivity type are disposed in the active region outwardly with respect to the side edges of the gate. Lightly-doped regions of the second conductivity type more lightly-doped than the source and drain regions surround the source and drain regions and extend inwardly between the source and drain regions towards the gate to define a channel, and outwardly towards all of the inner edges of the shallow trench isolation. Outer edges of the lightly-doped region from at least the drain region are spaced apart from the inner edges of the shallow trench isolation.
    Type: Application
    Filed: November 19, 2014
    Publication date: May 21, 2015
    Applicant: MICROSEMI SOC CORPORATION
    Inventors: Fengliang Xue, Fethi Dhaoui, John McCollum
  • Patent number: 9035382
    Abstract: One or more embodiments of techniques or systems for forming a semiconductor structure are provided herein. In some embodiments, a semiconductor structure includes a substrate, a first lightly doped drain (LDD), a second LDD, an interface layer (IL), a high-k stack, a gate region, a dummy poly region, a first hard mask (HM) region, a second HM region, and a seal spacer region. The HK stack has a HK stack width and the gate region has a gate region width that is less than or substantially equal to the HK stack width. Because of the increased width of the HK stack, some of the HK stack likely overlaps some of the first LDD or the second LDD. In this manner, a saturation current and a threshold voltage associated with the semiconductor structure are improved. The increased width of the HK stack also protects more of the IL during LDD implanting.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: May 19, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Che-Cheng Chang, Jr-Jung Lin, Yi-Jen Chen, Yung Jung Chang
  • Patent number: 9024384
    Abstract: A method of forming an integrated circuit (IC) having at least one PMOS transistor includes performing PLDD implantation including co-implanting indium, carbon and a halogen, and a boron specie to establish source/drain extension regions in a substrate having a semiconductor surface on either side of a gate structure including a gate electrode on a gate dielectric formed on the semiconductor surface. Source and drain implantation is performed to establish source/drain regions, wherein the source/drain regions are distanced from the gate structure further than the source/drain extension regions. Source/drain annealing is performed after the source and drain implantation. The co-implants can be selectively provided to only core PMOS transistors, and the method can include a ultra high temperature anneal such as a laser anneal after the PLDD implantation.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: May 5, 2015
    Assignee: Texas Instruments Incorporated
    Inventors: Mahalingam Nandakumar, Amitabh Jain
  • Patent number: 9024385
    Abstract: Semiconductor devices including a stressor in a recess and methods of forming the semiconductor devices are provided. The methods may include forming a trench in an active region and the trench may include a notched portion of the active region. The methods may also include forming an embedded stressor in the trench. The embedded stressor may include a lower semiconductor layer and an upper semiconductor layer, which has a width narrower than a width of the lower semiconductor layer. A side of the upper semiconductor layer may not be aligned with a side of the lower semiconductor layer and an uppermost surface of the upper semiconductor layer may be higher than an uppermost surface of the active region.
    Type: Grant
    Filed: September 23, 2013
    Date of Patent: May 5, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Suk Shin, Hyun-Chul Kang, Dong-Hyun Roh, Pan-Kwi Park, Geo-Myung Shin, Nae-In Lee, Chul-Woong Lee, Hoi-Sung Chung, Young-Tak Kim
  • Patent number: 9006820
    Abstract: A transistor includes a semiconductor body; a body region of a first conductivity type formed in the semiconductor body; a gate electrode formed partially overlapping the body region and insulated from the semiconductor body by a gate dielectric layer; a source diffusion region of a second conductivity type formed in the body region on a first side of the gate electrode; a trench formed in the semiconductor body on a second side, opposite the first side, of the gate electrode, the trench being lined with a sidewall dielectric layer; and a doped sidewall region of the second conductivity type formed in the semiconductor body along the sidewall of the trench where the doped sidewall region forms a vertical drain current path for the transistor.
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: April 14, 2015
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventor: Hideaki Tsuchiko
  • Patent number: 9006826
    Abstract: The present disclosure relates to an SRAM memory cell. The SRAM memory cell has a semiconductor substrate with an active area and a gate region positioned above the active area. A butted contact extends along a length (i.e., the larger dimension of the butted contact) from a position above the active area to a position above the gate region. The butted contact contains a plurality of distinct regions having different widths (i.e., the smaller dimensions of the butted contact), such that a region spanning the active area and gate region has width less than the regions in contact with the active area or gate region. By making the width of the region spanning the active area and gate region smaller than the regions in contact with the active area or gate, the etch rate is reduced at a junction of the gate region with the active area, thereby preventing etch back of the gate material and leakage current.
    Type: Grant
    Filed: May 14, 2012
    Date of Patent: April 14, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Tzyh-Cheang Lee
  • Patent number: 9000517
    Abstract: Power Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) and methods of forming the same are provided. A power MOSFET may comprise a first drift region formed at a side of a gate electrode, and a second drift region beneath the gate electrode, adjacent to the first drift region, with a depth less than a depth of the first drift region so that the first drift region and the second drift region together form a stepwise shape. A sum of a depth of the second drift region, a depth of the gate dielectric, and a depth of the gate electrode may be of substantially a same value as a depth of the first drift region. The first drift region and the second drift region may be formed at the same time, using the gate electrode as a part of the implanting mask.
    Type: Grant
    Filed: January 11, 2013
    Date of Patent: April 7, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Yu Chu, Chih-Chang Cheng, Tung-Yang Lin, Ruey-Hsin Liu
  • Patent number: 8994107
    Abstract: Semiconductor devices and methods of forming semiconductor devices are provided herein. In an embodiment, a semiconductor device includes a semiconductor substrate. A source region and a drain region are disposed in the semiconductor substrate. A channel region is defined in the semiconductor substrate between the source region and the drain region. A gate dielectric layer overlies the channel region of the semiconductor substrate, and a gate electrode overlies the gate dielectric layer. The channel region includes a first carbon-containing layer, a doped layer overlying the first carbon-containing layer, a second carbon-containing layer overlying the doped layer, and an intrinsic semiconductor layer overlying the second carbon-containing layer. The doped layer includes a dopant that is different than carbon.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: March 31, 2015
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: El Mehdi Bazizi, Francis Benistant
  • Patent number: 8994104
    Abstract: Techniques are disclosed for forming transistor devices having reduced parasitic contact resistance relative to conventional devices. The techniques can be implemented, for example, using a standard contact stack such as a series of metals on, for example, silicon or silicon germanium (SiGe) source/drain regions. In accordance with one example such embodiment, an intermediate boron doped germanium layer is provided between the source/drain and contact metals to significantly reduce contact resistance. Numerous transistor configurations and suitable fabrication processes will be apparent in light of this disclosure, including both planar and non-planar transistor structures (e.g., FinFETs), as well as strained and unstrained channel structures. Graded buffering can be used to reduce misfit dislocation. The techniques are particularly well-suited for implementing p-type devices, but can be used for n-type devices if so desired.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: March 31, 2015
    Assignee: Intel Corporation
    Inventors: Glenn A. Glass, Anand S. Murthy, Tahir Ghani
  • Patent number: 8981473
    Abstract: According to one embodiment, in a dielectric isolation substrate, an insulating film having a first thickness is provided on a semiconductor substrate. A semiconductor layer of a first conductivity type having a second thickness is provided on the insulating film. An impurity diffusion layer of a second conductivity type is provided partially in a lower portion of the semiconductor layer and is in contact with the insulating film.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: March 17, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Ryo Wada, Kaori Yoshioka, Norio Yasuhara, Tomoko Matsudai, Yuichi Goto
  • Patent number: 8975696
    Abstract: A semiconductor component may include a semiconductor layer which has a front side and a back side, a first terminal electrode on the front side, a second terminal electrode on the back side, a first dopant region of a first conduction type on the front side, which is electrically connected to one of the terminal electrodes, a second dopant region of a second conduction type in the semiconductor layer, which is electrically connected to the other terminal electrode, a pn junction being formed between the first and second dopant regions, a dielectric layer on the back side between the semiconductor layer and the second terminal electrode, and the dielectric layer having an opening through which an electrical connection between the second terminal electrode and the first or second dopant region is passed.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: March 10, 2015
    Assignee: Infineon Technologies AG
    Inventors: Oliver Haeberlen, Franz Hirler, Maximilian Roesch
  • Publication number: 20150061011
    Abstract: A novel MOS transistor including a well region, a gate dielectric layer, a gate electrode, a source region and a drain region is provided. The well region of a first conductivity type extends into a semiconductor substrate. The gate dielectric layer is located over the well region. The gate electrode is located over the gate dielectric layer. The source region of a second conductivity type opposite to the first conductivity type and a drain region of the second conductivity type are located in the well region and on opposite sides of the gate electrode. The gate dielectric layer has a first portion and a second portion respectively closest to the source region and the drain region. The thickness of the second portion is greater than that of the first portion, so as to raise breakdown voltage and to maintain current simultaneously.
    Type: Application
    Filed: August 30, 2013
    Publication date: March 5, 2015
    Inventors: Chih-Chang CHENG, Fu-Yu CHU, Ruey-Hsin LIU
  • Publication number: 20150061012
    Abstract: A transistor and method of fabrication thereof includes a screening layer formed at least in part in the semiconductor substrate beneath a channel layer and a gate stack, the gate stack including spacer structures on either side of the gate stack. The transistor includes a shallow lightly doped drain region in the channel layer and a deeply lightly doped drain region at the depth relative to the bottom of the screening layer for reducing junction leakage current. A compensation layer may also be included to prevent loss of back gate control.
    Type: Application
    Filed: November 6, 2014
    Publication date: March 5, 2015
    Inventors: Scott E. Thompson, Lucian Shifren, Pushkar Ranade, Yujie Liu, Sung Hwan Kim, Lingquan Wang, Dalong Zhao, Teymur Bakhishev, Thomas Hoffmann, Sameer Pradhan, Michael Duane
  • Publication number: 20150061010
    Abstract: Semiconductor structures are provided including a raised source region comprising, from bottom to top, a source-side phosphorus doped epitaxial semiconductor material portion and a source-side arsenic doped epitaxial semiconductor material portion and located on one side of a gate structure, and a raised drain region comprising from bottom to top, a drain-side phosphorus doped epitaxial semiconductor material portion and a drain-side arsenic doped epitaxial semiconductor material portion and located on another side of the gate structure.
    Type: Application
    Filed: August 27, 2013
    Publication date: March 5, 2015
    Applicant: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Alexander Reznicek
  • Publication number: 20150060875
    Abstract: To realize a transistor of normally-off type having a high mobility and a high breakdown voltage. A compound semiconductor layer is formed over a substrate, has both a concentration of p-type impurities and a concentration of n-type impurities less than 1×1016/cm3, and includes a group III nitride compound. A well is a p-type impurity layer and formed in the compound semiconductor layer. A source region is formed within the well and is an n-type impurity layer. A low-concentration n-type region is formed in the compound semiconductor layer and is linked to the well. A drain region is formed in the compound semiconductor layer and is located on a side opposite to the well via the low-concentration n-type region. The drain region is an n-type impurity layer.
    Type: Application
    Filed: August 21, 2014
    Publication date: March 5, 2015
    Inventors: Ippei Kume, Hiroshi Takeda, Toshiharu Nagumo, Takashi Hase
  • Publication number: 20150041896
    Abstract: A semiconductor structure and method of manufacture and, more particularly, a field effect transistor that has a body contact and method of manufacturing the same is provided. The structure includes a device having a raised source region of a first conductivity type and an active region below the raised source region extending to a body of the device. The active region has a second conductivity type different than the first conductivity type. A contact region is in electric contact with the active region. The method includes forming a raised source region over an active region of a device and forming a contact region of a same conductivity type as the active region, wherein the active region forms a contact body between the contact region and a body of the device.
    Type: Application
    Filed: October 24, 2014
    Publication date: February 12, 2015
    Inventors: Alan B. BOTULA, Alvin J. JOSEPH, Stephen E. LUCE, John J. PEKARIK, Yun SHI
  • Publication number: 20150041895
    Abstract: Semiconductor structures and methods of manufacture are disclosed herein. Specifically, disclosed herein are methods of manufacturing a high-voltage metal-oxide-semiconductor field-effect transistor and respective structures. A method includes forming a field-effect transistor (FET) on a substrate in a FET region, forming a high-voltage FET (HVFET) on a dielectric stack over a over lightly-doped diffusion (LDD) drain in a HVFET region, and forming an NPN on the substrate in an NPN region.
    Type: Application
    Filed: October 24, 2014
    Publication date: February 12, 2015
    Inventors: William F. CLARK, JR., Qizhi LIU, John J. Pekarik, Yun SHI, Yanli ZHANG
  • Patent number: 8951874
    Abstract: Disclosed is a semiconductor device manufacturing method comprising: forming an element isolation region in one principal face of a semiconductor substrate of one conductivity type; forming a gate electrode extending from an element region to the element isolation region at both sides of the element region in a first direction, both end portions of the gate electrode in the first direction being on the element isolation region and respectively including a concave portion and protruding portions at both sides of the concave portion; carrying out ion implantation of impurities of the one conductivity type from a direction tilted from a direction perpendicular to the one principal face toward the first direction so that first and second impurity implantation regions of the one conductivity type are formed in the one principal face in two end regions of the element region in the first direction.
    Type: Grant
    Filed: February 23, 2011
    Date of Patent: February 10, 2015
    Assignee: LAPIS Semiconductor Co., Ltd.
    Inventor: Eisuke Seo
  • Publication number: 20150035057
    Abstract: A device formed from a method of fabricating a fine metal silicide layer having a uniform thickness regardless of substrate doping. A planar vacancy is created by the separation of an amorphousized surface layer of a silicon substrate from an insulating layer, a metal source enters the vacancy through a contact hole through the insulating later connecting with the vacancy, and a heat treatment converts the metal in the vacancy into metal silicide. The separation is induced by converting the amorphous silicon into crystalline silicon.
    Type: Application
    Filed: October 20, 2014
    Publication date: February 5, 2015
    Inventor: JONG-KI JUNG
  • Publication number: 20150028418
    Abstract: Embodiments of the invention provide a thin film transistor, an array substrate and a manufacturing method thereof, and a display panel. The thin film transistor comprises: an active layer pattern, a source electrode, a drain electrode and a gate electrode. The gate electrode is positioned above the active layer pattern, the source electrode is connected with the active layer pattern, the drain electrode is connected with the active layer pattern, and the source electrode and the drain electrode are disposed in an adjacent layer of the active layer pattern.
    Type: Application
    Filed: November 8, 2012
    Publication date: January 29, 2015
    Inventors: Won Seok Kim, Pil Seok Kim
  • Publication number: 20150021688
    Abstract: An integrated circuit structure include a semiconductor substrate, a gate stack over the semiconductor substrate, and an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack. A silicon germanium region is disposed in the opening, wherein the silicon germanium region has a first p-type impurity concentration. A silicon cap substantially free from germanium is overlying the silicon germanium region. The silicon cap has a second p-type impurity concentration greater than the first p-type impurity concentration.
    Type: Application
    Filed: July 16, 2013
    Publication date: January 22, 2015
    Inventors: Hsueh-Chang Sung, Tsz-Mei Kwok, Kun-Mu Li, Tze-Liang Lee, Chii-Horng Li
  • Patent number: 8927376
    Abstract: A method for forming epitaxial layer is disclosed. The method includes the steps of providing a semiconductor substrate, and forming an undoped first epitaxial layer in the semiconductor substrate. Preferably, the semiconductor substrate includes at least a recess, the undoped first epitaxial layer has a lattice constant, a bottom thickness, and a side thickness, in which the lattice constant is different from a lattice constant of the semiconductor substrate and the bottom thickness is substantially larger than or equal to the side thickness.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: January 6, 2015
    Assignee: United Microelectronics Corp.
    Inventors: Chin-I Liao, Teng-Chun Hsuan, Chin-Cheng Chien
  • Patent number: 8883600
    Abstract: A transistor and method of fabrication thereof includes a screening layer formed at least in part in the semiconductor substrate beneath a channel layer and a gate stack, the gate stack including spacer structures on either side of the gate stack. The transistor includes a shallow lightly doped drain region in the channel layer and a deeply lightly doped drain region at the depth relative to the bottom of the screening layer for reducing junction leakage current. A compensation layer may also be included to prevent loss of back gate control.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: November 11, 2014
    Assignee: SuVolta, Inc.
    Inventors: Scott E. Thompson, Lucian Shifren, Pushkar Ranade, Yujie Liu, Sung Hwan Kim, Lingquan Wang, Dalong Zhao, Teymur Bakhishev, Thomas Hoffmann, Sameer Pradhan, Michael Duane
  • Patent number: 8853696
    Abstract: An object of the present invention is to provide an EL display device having a high operation performance and reliability. The switching TFT 201 formed within a pixel has a multi-gate structure, which is a structure which imposes an importance on reduction of OFF current value. Further, the current control TFT 202 has a channel width wider than that of the switching TFT to make a structure appropriate for flowing electric current. Morever, the LDD region 33 of the current control TFT 202 is formed so as to overlap a portion of the gate electrode 35 to make a structure which imposes importance on prevention of hot carrier injection and reduction of OFF current value.
    Type: Grant
    Filed: May 26, 2000
    Date of Patent: October 7, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Jun Koyama, Kunitaka Yamamoto, Toshimitsu Konuma
  • Patent number: 8847332
    Abstract: A high voltage semiconductor device is provided. The device includes a semiconductor substrate having a high voltage well with a first conductivity type therein. A gate structure is disposed on the semiconductor substrate of the high voltage well. A source doped region and a drain doped region are in the high voltage well on both sides of the gate structure, respectively. A lightly doped region with the first conductivity type is between the source and drain doped regions and relatively near to the source doped region. The disclosure also presents a method for fabricating a high voltage semiconductor device.
    Type: Grant
    Filed: April 20, 2011
    Date of Patent: September 30, 2014
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Wei-Chun Chou, Yi-Hung Chiu, Chu-Feng Chen, Cheng-Yi Hsieh, Chung-Ren Lao
  • Patent number: 8846478
    Abstract: A semiconductor device including a low-concentration impurity region formed on the drain side of an n-type MIS transistor, in a non-self-aligned manner with respect to an end portion of the gate electrode. A high-concentration impurity region is placed with a specific offset from the gate electrode and a sidewall insulating film. The semiconductor device enables the drain breakdown voltage to be sufficient and the on-resistance to decrease. A silicide layer is also formed on the surface of the gate electrode, thereby achieving gate resistance reduction and high frequency characteristics improvement.
    Type: Grant
    Filed: September 4, 2013
    Date of Patent: September 30, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Masashi Shima
  • Patent number: 8841725
    Abstract: A method for manufacturing a semiconductor device includes forming a first gate electrode on a semiconductor substrate in a first transistor region; forming a channel dose region; and forming a first source extension region, wherein the channel dose region is formed by using a first mask as a mask and by ion-implanting a first dopant of the first conductivity type, and the first mask covering a drain side of the first gate electrode and covering a drain region, and the first source extension region is formed by using a second mask and the gate electrode as masks and by ion-implanting a second dopant of a second conductivity type that is a conductivity type opposite to the first conductivity type, the second mask covering the drain side of the first gate electrode and covering the drain region.
    Type: Grant
    Filed: September 14, 2010
    Date of Patent: September 23, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Masashi Shima
  • Publication number: 20140264589
    Abstract: One or more embodiments of techniques or systems for forming a semiconductor structure are provided herein. In some embodiments, a semiconductor structure includes a substrate, a first lightly doped drain (LDD), a second LDD, an interface layer (IL), a high-k stack, a gate region, a dummy poly region, a first hard mask (HM) region, a second HM region, and a seal spacer region. The HK stack has a HK stack width and the gate region has a gate region width that is less than or substantially equal to the HK stack width. Because of the increased width of the HK stack, some of the HK stack likely overlaps some of the first LDD or the second LDD. In this manner, a saturation current and a threshold voltage associated with the semiconductor structure are improved. The increased width of the HK stack also protects more of the IL during LDD implanting.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventor: Taiwan Semiconductor Manufacturing Company Limited
  • Publication number: 20140264590
    Abstract: A FinFET includes a substrate, a fin structure on the substrate, a source in the fin structure, a drain in the fin structure, a channel in the fin structure between the source and the drain, a gate dielectric layer over the channel, and a gate over the gate dielectric layer. At least one of the source and the drain includes a bottom SiGe layer.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Hua Yu, Pei-Ren Jeng, Tze-Liang Lee
  • Patent number: 8836025
    Abstract: According to one embodiment, a first distance is a distance between both ends of the first insulating film in a direction connecting the fourth semiconductor layer and the sixth semiconductor layer. The first distance in the first region is longer than the first distance in the second region. A second distance is a distance between an edge of the second insulating film on an inner peripheral side of the second semiconductor layer and an edge of the third semiconductor layer on an outer peripheral side of the second semiconductor layer. The second distance in the first region is shorter than the second distance in the second region.
    Type: Grant
    Filed: February 11, 2013
    Date of Patent: September 16, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Mariko Shimizu, Jun Morioka, Keita Takahashi, Kanako Komatsu, Masahito Nishigoori
  • Patent number: 8829615
    Abstract: A semiconductor device and method of forming the semiconductor device are disclosed, where the semiconductor device includes additional implant regions in the source and drain areas of the device for improving Ron-sp and BVD characteristics of the device. The device includes a gate electrode formed over a channel region that separates first and second implant regions in the device substrate. The first implant region has a first conductivity type, and the second implant region has a second conductivity type. A source diffusion region is formed in the first implant region, and a drain diffusion region is formed in the second implant region.
    Type: Grant
    Filed: September 2, 2011
    Date of Patent: September 9, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Chien-Chung Chen, Ming-Tung Lee, Shih-Chin Lien, Shyi-Yuan Wu
  • Patent number: 8823099
    Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a gate over a substrate. The method includes performing a first implantation process to form a first doped region in the substrate, the first doped region being adjacent to the gate. The method includes performing a second implantation process to form a second doped region in the substrate, the second doped region being formed farther away from the gate than the first doped region, the second doped region having a higher doping concentration level than the first doped region. The method includes removing portions of the first and second doped regions to form a recess in the substrate. The method includes epitaxially growing a third doped region in the recess, the third doped region having a higher doping concentration level than the second doped region.
    Type: Grant
    Filed: August 6, 2013
    Date of Patent: September 2, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hsiang Huang, Feng-Cheng Yang
  • Patent number: 8823109
    Abstract: A transistor structure is provided in the present invention. The transistor structure includes: a substrate comprising a N-type well, a gate disposed on the N-type well, a spacer disposed on the gate, a first lightly doped region in the substrate below the spacer, a P-type source/drain region disposed in the substrate at two sides of the gate, a silicon cap layer covering the P-type source/drain region and the first lightly doped region and a silicide layer disposed on the silicon cap layer, and covering only a portion of the silicon cap layer.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: September 2, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Wen-Han Hung, Tsai-Fu Chen, Shyh-Fann Ting, Cheng-Tung Huang, Kun-Hsien Lee, Ta-Kang Lo, Tzyy-Ming Cheng
  • Patent number: 8816357
    Abstract: An optical printer head has an array of lenses that project light emitted by an array of LEDs onto a charged photosensitive drum to form a latent image on the drum surface. A resin film adhered to the exposed surfaces of the lenses prevents chemical reaction between nitric acid, formed as a consequence of ozone produced during electric charging of the photosensitive drum, and alkali components on the surfaces of the lenses thereby preventing clouding of the lens surfaces and dimming of the projected light. The resin film has a thickness of 10 to 100 microns and may be formed of polyvinyl chloride, polyethylene terephthalate or polymethyl meta acrylate.
    Type: Grant
    Filed: February 27, 2006
    Date of Patent: August 26, 2014
    Assignee: Seiko I Infotech Inc.
    Inventors: Kazuya Utsugi, Toshikazu Suzuki
  • Patent number: 8815712
    Abstract: A treatment is performed on a surface of a first semiconductor region, wherein the treatment is performed using process gases including an oxygen-containing gas and an etching gas for etching the semiconductor material. An epitaxy is performed to grow a second semiconductor region on the surface of the first semiconductor region.
    Type: Grant
    Filed: March 7, 2012
    Date of Patent: August 26, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Tien Wan, You-Ru Lin, Yi-Jing Lee, Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
  • Patent number: 8802533
    Abstract: A transistor device comprising epitaxial LDD and Halo regions and a method of manufacturing the same are disclosed.
    Type: Grant
    Filed: July 30, 2012
    Date of Patent: August 12, 2014
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Changliang Qin, Huaxiang Yin
  • Patent number: 8796124
    Abstract: The present disclosure provides a method to dope fins of a semiconductor device. The method includes forming a first doping film on a first fin and forming a second doping film on the second fin. The first and second doping films include a different dopant type (e.g., n-type and p-type). An anneal process is performed which drives a first dopant from the first doping film into the first fin and drives a second dopant from the second doping film into the second fin. In an embodiment, the first and second dopants are driven into the sidewall of the respective fin.
    Type: Grant
    Filed: October 25, 2011
    Date of Patent: August 5, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Pei-Ren Jeng
  • Patent number: 8796745
    Abstract: A semiconductor device containing an extended drain MOS transistor with an integrated snubber formed by forming a drain drift region of the MOS transistor, forming a snubber capacitor including a capacitor dielectric layer and capacitor plate over the extended drain, and forming a snubber resistor over a gate of the MOS transistor so that the resistor is connected in series between the capacitor plate and a source of the MOS transistor.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: August 5, 2014
    Assignee: Texas Instruments Incorporated
    Inventor: Christopher Boguslaw Kocon
  • Patent number: 8791721
    Abstract: A circuit has a stacked structure having at least one symmetric FET at a bottom of the stack. More particularly, the circuit has a stacked structure which includes an asymmetric FET and a symmetric FET. The symmetric FET is placed at the bottom of the stacked structure closer to ground than the asymmetric FET.
    Type: Grant
    Filed: March 28, 2012
    Date of Patent: July 29, 2014
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Andres Bryant, Edward J. Nowak
  • Patent number: 8779523
    Abstract: According to one embodiment, a semiconductor device includes a semiconductor substrate with a p-type conductivity, a buried layer with an n-type conductivity provided on the semiconductor substrate, a back gate layer with a p-type conductivity provided on the buried layer, a drain layer with an n-type conductivity provided on the back gate layer, a source layer with an n-type conductivity provided spaced from the drain layer, a gate electrode provided in a region immediately above a portion of the back gate layer between the drain layer and the source layer, and a drain electrode in contact with a part of an upper surface of the drain layer. A thickness of the drain layer in a region immediately below a contact surface between the drain layer and the drain electrode is half a total thickness of the back gate and drain layers in the region.
    Type: Grant
    Filed: June 8, 2012
    Date of Patent: July 15, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Koji Shirai, Ken Inadumi, Tsuyoshi Hirayu, Toshihiro Sakamoto
  • Patent number: 8779527
    Abstract: A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.
    Type: Grant
    Filed: October 8, 2012
    Date of Patent: July 15, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Thomas Merelle, Gerben Doornbos, Robert James Pascoe Lander
  • Patent number: 8779509
    Abstract: A semiconductor device includes a doped layer which contains a first dopant of a first conductivity type. In the doped layer, a counter-doped zone is formed in an edge area that surrounds an element area of the semiconductor device. The counter-doped zone contains at least the first dopant and a second dopant of a second conductivity type, which is the opposite of the first conductivity type. A concentration of the second dopant is at least 20% and at most 100% of a concentration of the first dopant. The dopants in the counter-doped zone decrease charge carrier mobility and minority carrier lifetime such that the dynamic robustness of the semiconductor device is increased.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: July 15, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans-Joachim Schulze, Anton Mauder, Franz Hirler
  • Publication number: 20140191318
    Abstract: A complementary metal oxide semiconductor field-effect transistor (MOSFET) includes a substrate, a first MOSFET and a second MOSFET. The first MOSFET is disposed on the substrate within a first transistor region and the second MOSFET is disposed on the substrate within a second transistor region. The first MOSFET includes a first fin structure, two first lightly-doped regions, two first doped regions and a first gate structure. The first fin structure includes a first body portion and two first epitaxial portions, wherein each of the first epitaxial portions is disposed on each side of the first body portion. A first vertical interface is between the first body portion and each of the first epitaxial portions so that the first-lightly doped region is able to be uniformly distributed on an entire surface of each first vertical interface.
    Type: Application
    Filed: January 10, 2013
    Publication date: July 10, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chien-Ting Lin, Shih-Hung Tsai
  • Patent number: 8772871
    Abstract: An partially depleted Dieler LDMOSFET transistor (100) is provided which includes a substrate (150), a drift region (110) surrounding a drain region (128), a first well region (107) surrounding source region (127), a well buffer region (106) separating the drift region and first well region to at least partly define a first channel region, a gate electrode (118) formed over the first channel region having a source-side gate edge aligned with the first well region (107), an LDD extension region (120) extending from the source region to the channel region, and a dielectric RESURF drain extension structure (161) formed at the drain of the gate electrode (118) using the plurality of STI stripes (114).
    Type: Grant
    Filed: August 20, 2010
    Date of Patent: July 8, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Jiang-Kai Zuo
  • Publication number: 20140175548
    Abstract: A method for fabricating an integrated circuit device is disclosed. An exemplary method comprises performing a gate replacement process to form a gate structure, wherein the gate replacement process includes an annealing process; after the annealing process, removing portions of a dielectric material layer to form a contact opening, wherein a portion of the substrate is exposed; forming a silicide feature on the exposed portion of the substrate through the contact opening; and filling the contact opening to form a contact to the exposed portion of the substrate.
    Type: Application
    Filed: February 25, 2014
    Publication date: June 26, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Shi Liu, Chen-Hua Yu
  • Patent number: 8759916
    Abstract: Disclosed are embodiments of a metal oxide semiconductor field effect transistor (MOSFET) structure and a method of forming the structure. The structure incorporates source/drain regions and a channel region between the source/drain regions. The source/drain regions can comprise silicon, which has high diffusivity to the source/drain dopant. The channel region can comprise a silicon alloy selected for optimal charge carrier mobility and band energy and for its low source/drain dopant diffusivity. During processing, the source/drain dopant can diffuse into the edge portions of the channel region. However, due to the low diffusivity of the silicon alloy to the source/drain dopant, the dopant does not diffuse deep into channel region. Thus, the edge portions of the silicon alloy channel region can have essentially the same dopant profile as the source/drain regions, but a different dopant profile than the center portion of the silicon alloy channel region.
    Type: Grant
    Filed: January 27, 2012
    Date of Patent: June 24, 2014
    Assignee: International Business Machines Corporation
    Inventors: Andres Bryant, Edward J. Nowak
  • Patent number: 8759922
    Abstract: Semiconductor devices are formed without full silicidation of the gates and with independent adjustment of silicides in the gates and source/drain regions. Embodiments include forming a gate on a substrate, forming a nitride cap on the gate, forming a source/drain region on each side of the gate, forming a first silicide in each source/drain region, removing the nitride cap subsequent to the formation of the first silicide, and forming a second silicide in the source/drain regions and in the gate, subsequent to removing the nitride cap. Embodiments include forming the first silicide by forming a first metal layer on the source/drain regions and performing a first RTA, and forming the second silicide by forming a second metal layer on the source/drain regions and on the gate and performing a second RTA.
    Type: Grant
    Filed: August 5, 2013
    Date of Patent: June 24, 2014
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Peter Javorka, Stefan Flachowsky, Thilo Scheiper
  • Patent number: 8759915
    Abstract: Semiconductor device formed by a first conductive strip of semiconductor material; a control gate region of semiconductor material, facing a channel portion of the first conductive strip, and an insulation region arranged between the first conductive strip and the control gate region. The first conductive strip includes a conduction line having a first conductivity type and a control line having a second conductivity type, arranged adjacent and in electrical contact with each other, and the conduction line forms the channel portion, a first conduction portion and a second conduction portion arranged on opposite sides of the channel portion.
    Type: Grant
    Filed: March 20, 2006
    Date of Patent: June 24, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Rolandi, Cristiano Calligaro, Luigi Pascucci