Abstract: Provided are a display device, a method of fabricating the display device, and a method of fabricating an image sensor device. The method of fabricating the display device includes preparing a substrate including a cell array area and a peripheral circuit area, forming a silicon layer on the peripheral circuit area of the substrate, forming oxide layers on the cell array area and the peripheral circuit area of the substrate, forming gate dielectric layers on the silicon layer and the oxide layers, forming the gate electrodes on the gate dielectric layers, wherein the gate electrodes expose both ends of the silicon layer and both ends of the oxide layers, and injecting dopant into both ends of the silicon layer and both ends of the oxide layers at the same time.

Abstract: A display device is disclosed. In one aspect, the device includes a plurality of pixels. Each of the pixels includes a first thin-film transistor (TFT) formed over a substrate and comprising gate electrode, a source electrode, and a drain electrode. Each pixel also includes a storage capacitor formed over the substrate, wherein the storage capacitor includes first and second electrodes, and a dielectric layer interposed between the first and second electrodes. The first electrode, the dielectric layer, and the second electrode have substantially the same pattern.

Abstract: A method of forming an integrated circuit structure includes providing a wafer having a silicon substrate; forming a plurality of shallow trench isolation (STI) regions in the silicon substrate; and forming recesses by removing top portions of the silicon substrate between opposite sidewalls of the plurality of STI regions. Substantially all long sides of all recesses in the silicon substrate extend in a same direction. A III-V compound semiconductor material is then epitaxially grown in the recesses.

Abstract: By thermal oxidation a field oxide layer is formed that lines first and second trenches that extend from a main surface into a semiconductor layer. After the thermal oxidation, field electrodes and trench gate electrodes of power transistor cells are formed in the first and second trenches. A protection cover including a silicon nitride layer is formed that covers a cell area with the first and second trenches. With the protection cover covering the cell area, planar gate electrodes of lateral transistors are formed in a support area of the semiconductor layer.

Abstract: According to an embodiment, the invention provides an nFET/pFET pair of finFETs formed on a gate stack. At least one fin extends into a source drain region of each of the FET pair and a carbon doped silicon (Si:C) layer is formed on each such fin. Another aspect of the invention is a process flow to enable dual in-situ doped epitaxy to fill the nFET and pFET source drain with different epi materials while avoiding a ridge in the hard cap on the gate between the pair of finFETS. The gate spacer in both of the pair can be the same thickness. The extension region of both of the pair of finFETs can be activated by a single anneal.

Abstract: By providing appropriate TFT structures arranged in various circuits of the semiconductor device in response to the functions required by the circuits, it is made possible to improve the operating performances and the reliability of a semiconductor device, reduce power consumption as well as realizing reduced manufacturing cost and increase in yield by lessening the number of processing steps. An LDD region of a TFT is formed to have a concentration gradient of an impurity element for controlling conductivity which becomes higher as the distance from a drain region decreases. In order to form such an LDD region having a concentration gradient of an impurity element, the present invention uses a method in which a gate electrode having a taper portion is provided to thereby dope an ionized impurity element for controlling conductivity accelerated in the electric field so that it penetrates through the gate electrode and a gate insulating film into a semiconductor layer.

Abstract: There is provided a conductive pattern forming method that can suppress shape abnormalities caused by the reattachment of a neodymium component. A conductive pattern forming method according to an aspect of the invention includes forming an aluminum-neodymium alloy film on a base material; forming, on the aluminum-neodymium alloy film, a conductive film having a thickness greater than or equal to ¼ times the thickness of the aluminum-neodymium alloy film; and patterning the aluminum-neodymium alloy film and the conductive film by using dry etching.

Abstract: The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication.

Abstract: It is an object to provide a manufacturing method of a structure of a thin film transistor including an oxide semiconductor film, in which threshold voltage at which a channel is formed is positive and as close to 0 V as possible. A protective insulating layer is formed to cover a thin film transistor including an oxide semiconductor layer that is dehydrated or dehydrogenated by first heat treatment, and second heat treatment at a temperature that is lower than that of the first heat treatment, in which the increase and decrease in temperature are repeated plural times, is performed, whereby a thin film transistor including an oxide semiconductor layer, in which threshold voltage at which a channel is formed is positive and as close to 0 V as possible without depending on the channel length, can be manufactured.

Abstract: A manufacturing method of semiconductor devices having metal gate includes following steps. A substrate having a first semiconductor device and a second semiconductor device formed thereon is provided. The first semiconductor device includes a first gate trench and the second semiconductor device includes a second gate trench. A first work function metal layer is formed in the first gate trench and the second gate trench. A portion of the first work function metal layer is removed from the second gate trench. A second work function metal layer is formed in the first gate trench and the second gate trench. The second work function metal layer and the first work function metal layer include the same metal material. A third work function metal layer and a gap-filling metal layer are sequentially formed in the first gate trench and the second gate trench.

Abstract: Embodiments of a semiconductor device structure and a method for forming the same are provided. The semiconductor device structure includes a substrate and a first metal gate structure formed over the substrate. The first metal gate structure has a first width. The semiconductor device structure further includes a first contact formed adjacent to the first metal gate structure and a second metal gate structure formed over the substrate. The second metal gate structure has a second width smaller than the first width. The semiconductor device structure further includes an insulating layer formed over the second metal gate structure and a second contact self-aligned to the second metal gate structure.

Abstract: An input signal having a high level or a low level is input to a pad. A first protection element includes a first transistor configured as an N-channel MOSFET designed so as to withstand ESD. A second protection element includes a second transistor configured as a P-channel MOSFET designed so as to withstand ESD. A capacitance element is connected to a second line, and forms an RC filter together with a filter resistor. The capacitance element includes at least one from among a third transistor having the same device structure as that of the first transistor and a fourth transistor having the same device structure as that of the second transistor.

Abstract: The inventive concepts provide semiconductor devices and methods of manufacturing the same. One semiconductor device includes a substrate, a device isolation layer disposed on the substrate, a fin-type active pattern defined by the device isolation layer and having a top surface higher than a top surface of the device isolation layer, a first conductive line disposed on an edge portion of the fin-type active pattern and on the device isolation layer adjacent to the edge portion of the fin-type active pattern, and an insulating thin layer disposed between the fin-type active pattern and the first conductive line. The first conductive line forms a gate electrode of an anti-fuse that may be applied with a write voltage.

Abstract: A semiconductor device including at least one fin disposed on a surface of a semiconductor substrate is provided. The fin includes a main portion extending along a first direction, and at least one secondary portion extending outward from the main portion along a second direction not collinear with the first direction.

Abstract: Integrated circuits with improved gate structures and methods for fabricating integrated circuits with improved gate structures are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate with fin structures. A gate-forming material is deposited over the semiconductor substrate and fin structures. The method includes performing a first etch process to etch the gate-forming material to form a gate line having a first side and a second side. The first side and second side of the gate line are bounded with material. The method includes performing a second etch process to etch a portion of the gate line bound by the material to separate the gate line into adjacent gate structures and to define a tip-to-tip distance between the adjacent gate structures.

Abstract: A method of removing a hard mask on a gate includes forming a first gate structure and a second gate structure. The first gate structure includes a first gate, a first hard mask disposed on the first gate and a first spacer surrounding the first gate and the first hard mask, wherein the second gate structure includes a second gate, a second hard mask disposed on the second gate and a second spacer surrounding the second gate and the second hard mask. Later, the first spacer surrounding the first hard mask and the second spacer surrounding the second hard mask are removed. After that, a dielectric layer is formed to cover the first hard mask and the second hard mask. Finally, the second dielectric layer, the first mask layer and the second mask layer are removed.

Abstract: Transistors each include a gate electrode, a gate insulating layer over the gate electrode, an oxide semiconductor layer over the gate insulating layer, and a source electrode and a drain electrode over the oxide semiconductor layer. A driver circuit portion includes first to third wirings formed in the same step as the gate electrode, fourth to sixth wirings formed in the same step as the source electrode and the drain electrode, a seventh wiring formed in the same step as a pixel electrode, a first region where the second wiring intersects with the fifth wiring, and a second region where the third wiring intersects with the sixth wiring. The first wiring is connected to the fourth wiring through the seventh wiring. A distance between the wirings in the second region is longer than that in the first region.

Abstract: A semiconductor device includes a first semiconductor layer having a first conductive type; a circuit layer including a second semiconductor layer; and a plurality of layered members. Each of the layered members includes an interlayer insulation film and a wiring layer formed on the interlayer insulation film. The second semiconductor layer includes a circuit element. The layered members form a multilayer wiring layer. The semiconductor device further includes a penetrating conductive member; a conductive portion; and a first conductive type region. The penetrating conductive member penetrates from the first semiconductor layer to the interlayer insulation film of the layered member at the highest position. The conductive portion includes an electrode formed in the wiring layer of the layered member at the highest position and connected to the penetrating conductive member. The first conductive type region has an impurity concentration greater than that of the first semiconductor layer.

Abstract: A display device includes a pixel portion in which a pixel is arranged in a matrix, the pixel including an inverted staggered thin film transistor having a combination of at least two kinds of oxide semiconductor layers with different amounts of oxygen and having a channel protective layer over a semiconductor layer to be a channel formation region overlapping a gate electrode layer and a pixel electrode layer electrically connected to the inverted staggered thin film transistor. In the periphery of the pixel portion in this display device, a pad portion including a conductive layer made of the same material as the pixel electrode layer is provided. In addition, the conductive layer is electrically connected to a common electrode layer formed on a counter substrate.

Abstract: An electro static discharge (ESD) protection circuit including a signal transmission line coupled to an external input terminal, the ESD protection circuit including: a first power line coupled to a high voltage power supply; a second power line coupled to a low voltage power supply; a plurality of first oxide thin film transistors coupled in parallel between the first power line and the signal transmission line, the first oxide thin film transistors being diode-connected; and a plurality of second oxide thin film transistors coupled in parallel between the signal transmission line and the second power line, the second oxide thin film transistors being diode-connected.

Abstract: A semiconductor device includes a first and second fin-shaped semiconductor layers on a substrate. A first insulating film is around the first and second fin-shaped layers. A first and second pillar-shaped semiconductor layers reside on the first and second fin-shaped layers, respectively. A width of a bottom of the first pillar-shaped semiconductor layer is equal to a width of a top of the first fin-shaped semiconductor layer, and a width of a bottom of the second pillar-shaped semiconductor layer is equal to the width of a top of the second fin-shaped semiconductor layer. First and second gate insulating films and first and second metal gate electrodes reside around the first and second pillar-shaped layers, respectively. A metal gate line is connected to the first and second metal gate electrodes and extends in a direction perpendicular to the first and second fin-shaped layers.

Abstract: A semiconductor structure includes a metal gate, a second dielectric layer and a contact plug. The metal gate is located on a substrate and in a first dielectric layer, wherein the metal gate includes a work function metal layer having a U-shaped cross-sectional profile and a low resistivity material located on the work function metal layer. The second dielectric layer is located on the metal gate and the first dielectric layer. The contact plug is located on the second dielectric layer and in a third dielectric layer, thereby a capacitor is formed. Moreover, the present invention also provides a semiconductor process forming said semiconductor structure.

Abstract: A method of forming a semiconductor device structure includes providing a substrate with a semiconductor-on-insulator (SOI) configuration, the SOI substrate comprising a semiconductor layer formed on a buried oxide (BOX) layer which is disposed on a semiconductor bulk substrate, forming trench isolation structures delineating a first region and a second region within the SOI substrate, removing the semiconductor layer and the BOX layer in the first region for exposing the semiconductor bulk substrate within the first region, forming a first semiconductor device with an electrode in and over the exposed semiconductor bulk substrate in the first region, forming a second semiconductor device in the second region, the second semiconductor device comprising a gate structure disposed over the semiconductor layer and the BOX layer in the second region, and performing a polishing process for defining a common height level to which the electrode and the gate structure substantially extend.

Abstract: Embodiments of the disclosure disclose an array substrate and a fabrication method thereof, and a display device. The fabrication method of the array substrate comprises: forming a thin film transistor; forming a passivation layer covering the thin film transistor, the passivation layer having a via hole and the via hole exposing at least a portion of a drain electrode of the thin film transistor; forming a via-hole conductive layer, the via-hole conductive layer covering the portion of the drain electrode exposed at the via hole and connected to the drain electrode; treating the via-hole conductive layer, so that a reflectivity of the via-hole conductive layer is lower than a reflectivity of the drain electrode; and forming a pixel electrode, the pixel electrode being connected with the drain electrode through the via-hole conductive layer.

Abstract: An organic electroluminescent display device includes: a substrate; plural anodes that are formed in respective pixels; pixel separation films that cover at least an edge of the respective anodes between the respective pixels; an organic layer that covers a display area over the plurality of anodes, and the pixel separation films, and includes at least a light emitting layer; a cathode that is formed on the organic layer; and a counter substrate that is arranged on the cathode so as to face the substrate, in which the anodes each include: a contact area that comes in contact with the organic layer, and faces a corresponding pixel of the counter substrate, and a peripheral area that is formed around the contact area, and faces pixels around the corresponding pixels of the counter substrate. The organic electroluminescent display device can realize higher definition, higher luminance, and prevention of color mixture.

Abstract: An integrated circuit structure includes a semiconductor substrate including a first portion in a first device region, and a second portion in a second device region. A first semiconductor fin is over the semiconductor substrate and has a first fin height. A second semiconductor fin is over the semiconductor substrate and has a second fin height. The first fin height is greater than the second fin height.

Abstract: Isolated and bulk semiconductor devices formed on a same bulk substrate and methods to form such devices are described. For example, a semiconductor structure includes a first semiconductor device having a first semiconductor body disposed on a bulk substrate. The first semiconductor body has an uppermost surface with a first horizontal plane. The semiconductor structure also includes a second semiconductor device having a second semiconductor body disposed on an isolation pedestal. The isolation pedestal is disposed on the bulk substrate. The second semiconductor body has an uppermost surface with a second horizontal plane. The first and second horizontal planes are co-planar.

Abstract: A display device having a novel structure that can improve reliability is provided. It lowers reliability to form a structure by using a photomask, such as a color filter on a rear side of a substrate. With this display device, a transistor and the color filter is provided over a first substrate, a touch sensor is provided on a first surface of a second substrate, and the structure is not provided on a second surface of the second substrate. Consequently, the display device with the touch sensor can perform high reliability.

Abstract: A fuse structure includes a first fin pattern disposed in a field insulating layer that includes an upper surface that projects above an upper surface of the field insulating layer, a conductive pattern on the field insulating layer that crosses the first fin pattern, a first semiconductor region positioned on at least one side of the conductive pattern, and first and second contacts disposed on the conductive pattern on each side of the first fin pattern. The fuse structure may be included in a semiconductor device.

Abstract: A method provides a substrate having a top surface; forming a first semiconductor layer on the top surface, the first semiconductor layer having a first unit cell geometry; epitaxially depositing a layer of a metal-containing oxide on the first semiconductor layer, the layer of metal-containing oxide having a second unit cell geometry that differs from the first unit cell geometry; ion implanting the first semiconductor layer through the layer of metal-containing oxide; annealing the ion implanted first semiconductor layer; and forming a second semiconductor layer on the layer of metal-containing oxide, the second semiconductor layer having the first unit cell geometry. The layer of metal-containing oxide functions to inhibit propagation of misfit dislocations from the first semiconductor layer into the second semiconductor layer. A structure formed by the method is also disclosed.

Abstract: A gate contact with reduced contact resistance is provided by increasing contact area between the gate contact and a gate conductive portion of a gate structure. The gate contact forms a direct contact with a topmost surface and at least portions of outermost sidewalls of a portion of the gate conductive portion, thus increasing the contact area between the gate contact and the gate structure. The gate contact area of the present application can be further increased by completely surrounding a portion of the gate conductive portion of the gate structure with the gate contact.

Abstract: An integrated circuit contains a transistor with a stress enhancement region on the source side only. In a DeMOS transistor, forming the stress enhancement region on the source side only and not forming a stress enhancement region in the drain extension increases the resistance of the drain extension region enabling formation of a DeMOS transistor with reduced area. In a MOS transistor, by forming the stress enhancement region on the source side only and eliminating the stress enhancement region from the drain side, transistor leakage is reduced and CHC reliability improved.

Abstract: It is an object to provide a manufacturing method of a structure of a thin film transistor including an oxide semiconductor film, in which threshold voltage at which a channel is formed is positive and as close to 0 V as possible. A protective insulating layer is formed to cover a thin film transistor including an oxide semiconductor layer that is dehydrated or dehydrogenated by first heat treatment, and second heat treatment at a temperature that is lower than that of the first heat treatment, in which the increase and decrease in temperature are repeated plural times, is performed, whereby a thin film transistor including an oxide semiconductor layer, in which threshold voltage at which a channel is formed is positive and as close to 0 V as possible without depending on the channel length, can be manufactured.

Abstract: An integrated circuit, a method of forming an integrated circuit, and a semiconductor are disclosed for preventing unauthorized use in radiation-hard applications. In one embodiment, the integrated circuit comprises a silicon-on-insulator (SOI) structure, a radiation insensitive sub-circuit, and a radiation sensitive sub-circuit. The SOI structure comprises a silicon substrate, a buried oxide layer, and an active silicon layer. The radiation insensitive sub-circuit is formed on the active layer, and includes a partially depleted transistor. The radiation sensitive sub-circuit is formed on the active layer, and includes a fully depleted transistor, to prevent operation of the radiation sensitive sub-circuit under specified radiation conditions.

Abstract: A semiconductor device includes a gate pattern on a substrate, a multi-channel active pattern under the gate pattern to cross the gate pattern and having a first region not overlapping the gate pattern and a second region overlapping the gate pattern, a diffusion layer in the multi-channel active pattern along the outer periphery of the first region and including an impurity having a concentration, and a liner on the multi-channel active pattern, the liner extending on lateral surfaces of the first region and not extending on a top surface of the first region. Related fabrication methods are also described.

Abstract: Methods for preparing a FinFET device with a protection diode formed prior to M1 formation and resulting devices are disclosed. Embodiments include forming plural fins on a substrate, with a STI region between adjacent fins; forming a dummy gate stack over and perpendicular to the fins, the gate stack including a dummy gate over a dummy gate insulating layer; forming sidewall spacers on opposite sides of the dummy gate stack; forming source/drain regions at opposite sides of the dummy gate stack; forming an ILD over the STI regions between fins; removing the dummy gate stack forming a gate cavity; forming a gate dielectric in the gate cavity; removing the gate dielectric from the gate cavity in a protection diode area, exposing an underlying fin; implanting a dopant into the exposed fin; and forming a RMG in the gate cavity, wherein a protection diode is formed in the protection diode area.

Abstract: A thin film transistor array panel includes: a gate conductor disposed on a substrate and including a gate line and a gate electrode, a semiconductor layer overlapping the gate electrode and including an oxide semiconductor, a data conductor including a data line intersecting the gate line, a source electrode connected to the data line, and a drain electrode facing the source electrode, a sidewall covering side surface parts of the drain electrode and the source electrode adjacent to a channel region of the semiconductor layer, and a passivation layer covering the source electrode, the drain electrode, and the sidewall.

Abstract: Fabrication methods are disclosed that facilitate the production of electronic structures that are both flexible and stretchable to conform to non-planar (e.g. curved) surfaces without suffering functional damage due to excessive strain. Electronic structures including CMOS devices are provided that can be stretched or squeezed within acceptable limits without failing or breaking. The methods disclosed herein further facilitate the production of flexible, stretchable electronic structures having multiple levels of intra-chip connectors. Such connectors are formed through deposition and photolithographic patterning (back end of the line processing) and can be released following transfer of the electronic structures to flexible substrates.

Abstract: A semiconductor device includes first and second fin-shaped silicon layers on a substrate, each corresponding to the dimensions of a sidewall pattern around a dummy pattern. First and second pillar-shaped silicon layers reside on the first and second fin-shaped silicon layers, respectively. An n-type diffusion layer resides in an upper portion of the first fin-shaped silicon layer and in upper and lower portions of the first pillar-shaped silicon layer. A p-type diffusion layer resides in an upper portion of the second fin-shaped silicon layer and upper and lower portions of the second pillar-shaped silicon layer. First and second gate insulating films and metal gate electrodes are around the first and second pillar-shaped silicon layers, respectively. A metal gate line is connected to the first and second metal gate electrodes and extends in a direction perpendicular to the first and second fin-shaped silicon layers.

Abstract: On a semiconductor substrate, a plurality of transistors that includes a drive transistor which controls a drive current according to a potential of a gate, a light emitting element that emits a light having a brightness corresponding to the drive current, and an element isolation portion that electrically isolates each transistor are formed. The element isolation portion has a structure in which an insulator fills inside of a groove formed on the semiconductor substrate.

Abstract: Devices and methods for increasing the aperture ratio and providing more precise gray level control to pixels in an active matrix organic light emitting diode (AMOLED) display are provided. By way of example, one embodiment includes disposing a gate insulator and an interlayer dielectric material between a gate electrode of a thin-film transistor of a driving circuit and a channel of the thin-film transistor. The improved structure of the driving circuit facilitates a higher voltage range for controlling the gray level of the pixels, and may increase the aperture ratio of the pixels.

Abstract: An organic light emitting display includes a substrate, a thin film transistor disposed on the substrate, an overcoat layer having a first thru-hole formed therethrough to expose a portion of the thin film transistor and inclined at an angle with respect to the substrate, an upper passivation layer disposed on the overcoat layer and having a second thru-hole formed threrethrough to expose the portion of the thin film transistor, a first electrode connected to the thin film transistor through the second thru-hole, a light emitting layer disposed on the first electrode, and a second electrode disposed on the light emitting layer.

Abstract: Disclosed are a resistance change memory device, a method of fabricating the same, and a resistance change memory array including the same. The resistance change memory device includes a first electrode and a second electrode. A hybrid switching layer is interposed between the first electrode and the second electrode. The hybrid switching layer is a metal oxide layer having both threshold switching characteristics and memory switching characteristics.

Abstract: Provided is an organic light emitting display panel. The organic light emitting display panel includes a pixel unit including a plurality of pixels I displaying mutually different colors, a plurality of data pads electrically connected to wirings extending from the data lines, each of the plurality of data pads being connected to corresponding data lines, respectively, and an array test unit applying an array test signal to the plurality of pixels of the pixel unit, and sensing a current outputted from the plurality of pixels. The array test unit includes an array test pad electrically connected to a plurality of data pads through a plurality of array test switches.

Abstract: A method for forming a semiconductor structure includes forming a gate stack over a semiconductor substrate; forming a recess in the semiconductor substrate and adjacent the gate stack; and performing a selective epitaxial growth to grow a semiconductor material in the recess to form an epitaxy region. After the step of performing the selective epitaxial growth, a selective etch-back is performed to the epitaxy region. The selective etch-back is performed using process gases comprising a first gas for growing the semiconductor material, and a second gas for etching the epitaxy region.

Abstract: An active device array substrate includes a flexible substrate, a gate electrode, a dielectric layer, a channel layer, a source electrode, a drain electrode, and a pixel electrode. The flexible substrate has a transistor region and a transparent region adjacent to each other. The gate electrode is disposed on the transistor region. The dielectric layer covers the flexible substrate and the gate electrode. A portion of the dielectric layer disposed on the gate electrode has a first thickness. Another portion of the dielectric layer disposed on the transparent region has a second thickness less than the first thickness. The channel layer is disposed above the gate electrode. The source electrode and the drain electrode are electrically connected to the channel layer. The pixel electrode is disposed on the dielectric layer which is disposed on the transparent region. The pixel electrode is electrically connected to the drain electrode.

Abstract: Fin contacted electrostatic discharge (ESD) devices with improved heat distribution and methods of manufacture are disclosed. The method includes forming a plurality of fins on a substrate which is aligned with at least one well region in the substrate. The method further includes forming at least one electrostatic discharge (ESD) device spanning two or more of the plurality of fins. The forming of the ESD device includes forming an epitaxial material spanning the two or more of the plurality of fins and forming one or more contacts on the epitaxial material.

Abstract: Methods and structures for forming localized, differently-strained regions in a semiconductor layer on a substrate are described. An initial, unstrained, semiconductor-on-insulator substrate may be processed to form the differently-strained regions in the original semiconductor layer. The differently-strained regions may have opposite types of strain. The strains in the different regions may be formed independently.

Abstract: As will be appreciated in more detail herein, the present disclosure provides for FinFET techniques whereby a FinFET channel region has a particular orientation with respect to the crystalline lattice of the semiconductor device to provide enhanced mobility, compared to conventional FinFETs. In particular, the present disclosure provides FinFETs with a channel region whose lattice includes silicon atoms arranged on (551) lattice plane. In this configuration, the sidewalls of the channel region are particularly smooth at the atomic level, which tends to promote higher carrier mobility and higher device performance than previously achievable.

Abstract: An issue arises when manufacturing semiconductor circuits including PFETs with an SiGe alloy embedded in their source/drain regions and NFETs without any embedded SiGe alloy. In this case, the thickness of the NFET spacers is considerably greater than that of the PFET spacers. In order to alleviate this asymmetry in spacer thickness, a manufacturing flow is proposed wherein a spacer-reducing etching process is introduced before the salicidation. The etching process is performed directly after the ion implantation performed in order to form deep regions of source/drain regions of the NFETs. Thus, the spacer-reducing etching process may be performed in the presence of the same mask used during the NFET deep implantations. The spacer-reducing etching process results in thinning of the NFET spacer structures, thus alleviating the spacer thickness imbalance between NFETs and PFETs.