Abstract: According to an aspect, an array substrate includes a first scan line, a second scan line, and a signal line. A semiconductor film has a coupling portion coupling one end of a first linear portion to one end of a second linear portion. Another end of the first linear portion of the semiconductor film and another end of the second linear portion of the semiconductor film are coupled to the signal line. In a plan view, the semiconductor film is disposed between the first scan line and the second scan line, the first linear portion intersects two first gate electrodes, and the second linear portion intersects two second gate electrodes.

Abstract: A semiconductor structure includes a substrate and first SRAM cells and second SRAM cells. Each first SRAM cell includes two first p-type FinFET and four first n-type FinFET. Each first p-type and n-type FinFET includes a channel in a single semiconductor fin. The first SRAM cells are arranged with a first X-pitch and a first Y-pitch. Each second SRAM cell includes two second p-type FinFET and four second n-type FinFET. Each second p-type FinFET includes a channel in a single semiconductor fin. Each second n-type FinFET includes a channel in multiple semiconductor fins. The second SRAM cells are arranged with a second X-pitch and a second Y-pitch. The source/drain regions of the first p-type FinFET have a higher boron dopant concentration than the source/drain regions of the second p-type FinFET. A ratio of the second X-pitch to the first X-pitch is within a range of 1.1 to 1.5.

Abstract: A method of fabricating suspended beam silicon carbide microelectromechanical (MEMS) structure with low capacitance and good thermal expansion match. A suspended material structure is attached to an anchor material structure that is direct wafer bonded to a substrate. The anchor material structure and the suspended material structure are formed from either a hexagonal single-crystal SiC material, and the anchor material structure is bonded to the substrate while the suspended material structure does not have to be attached to the substrate. The substrate may be a semi-insulating or insulating SiC substrate. The substrate may have an etched recess region on the substrate first surface to facilitate the formation of the movable suspended material structures. The substrate may have patterned electrical electrodes on the substrate first surface, within recesses etched into the substrate.

Abstract: A structure of semiconductor device is provided, including a substrate. First and second trench isolations are disposed in the substrate. A height of a portion of the substrate is between a top and a bottom of the first and second trench isolations. A gate insulation layer is disposed on the portion of the substrate between the first and second trench isolations. A first germanium (Ge) doped layer region is disposed in the portion of the substrate just under the gate insulation layer. A second Ge doped layer region is in the portion of the substrate, overlapping with the first Ge doped layer region to form a Ge gradient from high to low along a depth direction under the gate insulation layer. A fluorine (F) doped layer region is in the portion of the substrate, lower than and overlapping with the first germanium doped layer region.

Abstract: Self-aligned gate cutting techniques for multigate devices are disclosed herein that provide multigate devices having asymmetric metal gate profiles and asymmetric source/drain feature profiles. An exemplary multigate device has a channel layer, a metal gate that wraps a portion of the channel layer, and source/drain features disposed over a substrate. The channel layer extends along a first direction between the source/drain features. A first dielectric fin and a second dielectric fin are disposed over the substrate and configured differently. The channel layer extends along a second direction between the first dielectric fin and the second dielectric fin. The metal gate is disposed between the channel layer and the second dielectric fin. In some embodiments, the first dielectric fin is disposed on a first isolation feature, and the second dielectric fin is disposed on a second isolation feature. The first isolation feature and the second isolation feature are configured differently.

Abstract: A method includes providing a structure having a substrate and a stack of semiconductor layers over a surface of the substrate and spaced vertically one from another; forming an interfacial layer wrapping around each of the semiconductor layers; forming a high-k dielectric layer over the interfacial layer and wrapping around each of the semiconductor layers; and forming a capping layer over the high-k dielectric layer and wrapping around each of the semiconductor layers. With the capping layer wrapping around each of the semiconductor layers, the method further includes performing a thermal treatment to the structure, thereby increasing a thickness of the interfacial layer. After the performing of the thermal treatment, the method further includes removing the capping layer.

Abstract: Semiconductor devices having improved gate electrode structures and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a gate structure over a semiconductor substrate, the gate structure including a high-k dielectric layer; an n-type work function layer over the high-k dielectric layer; an anti-reaction layer over the n-type work function layer, the anti-reaction layer including a dielectric material; a p-type work function layer over the anti-reaction layer, the p-type work function layer covering top surfaces of the anti-reaction layer; and a conductive cap layer over the p-type work function layer.

Abstract: A method comprising forming at least one fin on a substrate, wherein the at least one fin has a first section and a second section. Forming a separating layer on the substrate to isolate the second section of the fin from the first section of the fin. Forming as first set of electrical components on the first section of the at least one fin. Flipping the substrate over and removing the substrate to expose a surface of the second section of the at least one fin. Removing a portion of the second section of the at least one fin, whereby removing a portion of the second section a trench is created between sections of the separating layer and an exposed portion of the at least one fin and forming a hard mask in the trench.

Abstract: A display device includes a pixel connected to a data line, a data pad connected to the data line, and a first test area. The first test area includes a test control line transmitting a test control signal, a test signal line transmitting a test signal, and a first switch connected to the data pad. The first switch includes a gate electrode connected to the test control line, first and second semiconductor layers overlapping the gate electrode, a source electrode connected to the first and second semiconductor layers, and a drain electrode spaced from the source electrode and connected to the first and second semiconductor layers. The source electrode and the drain electrode are connected to the test signal line and data pad, respectively. One of the first or second semiconductor layers includes an oxide semiconductor and the other of the first or second semiconductor layer includes a silicon-based semiconductor.

Abstract: A semiconductor device includes first and second active patterns extending in a first direction, a first epitaxial pattern on the first active pattern and adjacent to the second active pattern, a second epitaxial pattern on the second active pattern and adjacent to the first active pattern, an element separation structure separating the first and second active patterns between the first and second epitaxial patterns, and including a core separation pattern, and a separation side wall pattern on a side wall of the core separation pattern, and a gate structure extending in a second direction intersecting the first direction, on the first active pattern. An upper surface of the gate structure is on the same plane as an upper surface of the core separation pattern. The separation side wall pattern includes a high dielectric constant liner, which includes a high dielectric constant dielectric film including a metal.

Abstract: A semiconductor structure includes a first fin, which includes a first plurality of suspended nanostructures vertically stacked over one another, each of the first plurality of suspended nanostructure having a center portion that has a first cross section, and a second fin, which includes a second plurality of suspended nanostructures vertically stacked over one another, the first plurality of suspended nanostructures and the second plurality of suspended nanostructures having different material compositions, each of the second plurality of suspended nanostructure having a center portion that has a second cross section, wherein a shape or an area of the first cross section is different from that of the second cross section.

Abstract: A structure and a formation method of hybrid semiconductor devices are provided. The structure includes a substrate and a fin structure over the substrate. The fin structure has a channel height. The structure also includes a stack of nanostructures over the substrate. The channel height is greater than a lateral distance between the fin structure and the stack of the nanostructures. The structure further includes a gate stack over the nanostructures. The nanostructures are separated from each other by portions of the gate stack.

Abstract: A method of forming a semiconductor device is presented. A layer stack of alternating epitaxial materials including one or more layers is formed. The layer stack of alternating epitaxial materials into a first region of nano sheets and a second region of nano sheets is divided. A first field effect transistor on a working surface of a substrate using the nano sheets in the first region of nano sheets is formed. A stack of field effect transistors on the working surface of the substrate using the nano sheets in the second region of nano sheets is formed.

Abstract: A semiconductor device is provided. The semiconductor device includes a first cell region and a filler region that are adjacent each other in a first direction. The semiconductor device includes an active pattern extending in the first direction, inside the first cell region, a gate electrode extending in a second direction intersecting the first direction, on the active pattern, a gate contact electrically connected to an upper surface of the gate electrode, a source/drain contact electrically connected to a source/drain region of the active pattern, adjacent a side of the gate electrode, a connection wiring that extends in the first direction over the first cell region and the filler region, and is electrically connected to one of the gate contact or the source/drain contact, and a filler wiring that is inside the filler region. A related layout design method and fabricating method are also provided.

Abstract: Techniques are described for forming strained fins for co-integrated n-MOS and p-MOS devices that include one or more defect trapping layers that prevent defects from migrating into channel regions of the various co-integrated n-MOS and p-MOS devices. A defect trapping layer can include one or more patterned dielectric layers that define aspect ratio trapping trenches. An alternative defect trapping layer can include a superlattice structure of alternating, epitaxially mismatched materials that provides an energetic barrier to the migration of defect. Regardless, the defect trapping layer can prevent dislocations, stacking faults, and other crystallographic defects present in a relaxed silicon germanium layer from migrating into strained n-MOS and p-MOS channel regions grown thereon.

Abstract: Various implementations described herein are directed to an integrated circuit having a wordline driver coupled to a bitcell via a wordline. The integrated circuit may include a read assist transistor coupled to the wordline between the wordline driver and the bitcell. While activated, the read assist transistor may generate an adaptive underdrive on the wordline, the level of which depends on the process, temperature and voltage of operation of the memory, when the wordline is selected and driven by the wordline driver.

Abstract: Memory devices are provided. In an embodiment, a memory device includes a static random access memory (SRAM) array. The SRAM array includes a static random access memory (SRAM) array. The SRAM array includes a first subarray including a plurality of first SRAM cells and a second subarray including a plurality of second SRAM cells. Each n-type transistor in the plurality of first SRAM cells includes a first work function stack and each n-type transistor in the plurality of second SRAM cells includes a second work function stack different from the first work function stack.

Abstract: There is provided a system and method of performing a measurement with respect to an epitaxy formed in a finFET, the epitaxy being separated with at least one adjacent epitaxy by at least one HK fin. The method comprises obtaining an image of the epitaxy and the at least one HK fin, and a gray level (GL) profile indicative of GL distribution of the image; detecting edges of the at least one HK fin; determining two inflection points of the GL profile within an area of interest in the image; performing a critical dimension (CD) measurement between the two inflection points; determining whether to apply correction to the CD measurement based on a GL ratio indicative of a relative position between the epitaxy and the at least one HK fin; and applying correction to the CD measurement upon the GL ratio meeting a predetermined criterion.

Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a stack of semiconductor layers spaced apart from and aligned with each other, a first source/drain epitaxial feature in contact with a first one or more semiconductor layers of the stack of semiconductor layers, and a second source/drain epitaxial feature disposed over the first source/drain epitaxial feature. The second source/drain epitaxial feature is in contact with a second one or more semiconductor layers of the stack of semiconductor layers. The structure further includes a first dielectric material disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature and a first liner disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature. The first liner is in contact with the first source/drain epitaxial feature and the first dielectric material.

Abstract: An integrated circuit (IC) that includes a memory cell having a first p-type active region, a first n-type active region, a second n-type active region, and a second p-type active region. Each of the first and the second p-type active regions includes a first group of vertically stacked channel layers having a width W1, and each of the first and the second n-type active regions includes a second group of vertically stacked channel layers having a width W2, where W2 is less than W1. The IC structure further includes a standard logic cell having a third n-type fin and a third p-type fin. The third n-type fin includes a third group of vertically stacked channel layers having a width W3, and the third p-type fin includes a fourth group of vertically stacked channel layers having a width W4, where W3 is greater than or equal to W4.

Abstract: The disclosure describes a nanowire for an anode material of a lithium ion cell and a method of preparing the same. The nanowire includes silicon (Si) and germanium (Ge). The nanowire has a content of the silicon (Si) higher than a content of the germanium (Ge) at a surface thereof, and has the content of germanium (Ge) higher than the content of the silicon (Si) at an inner part thereof.

Abstract: Electronic devices and methods of forming electronic devices with gate-all-around non-I/O devices and finlike structures for I/O devices are described. A plurality of dummy gates is etched to expose a fin comprising alternating layers of a first material and a second material. The second material layers are removed to create openings and the first material layers remaining are epitaxially grown to form a finlike structure.

Abstract: A semiconductor device includes a first transistor of a first conductivity type and a second transistor of a second conductivity type. The first transistor is arranged in a first layer and includes a gate extending in a first direction and a first active region extending in a second direction perpendicular to the first direction. The second transistor is arranged in a second layer over the first layer and includes the gate and a second active region extending in the second direction. The semiconductor device also includes a first conductive line arranged in a third layer between the first layer and the second layer and extending in the second direction, wherein the first conductive line is configured to electrically connect a first source/drain region of the first active region to a second source/drain region of the second active region.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first device formed over a substrate, and the first device includes a first fin structure. The semiconductor device structure also includes a second device formed over or below the first device, and the second device includes a plurality of second nanostructures stacked in a vertical direction.

Abstract: Semiconductor structures and fabrication methods are provided. An exemplary fabrication method includes providing a semiconductor substrate having at least one first region, at least one second region and at least one third region; forming at least one first fin on the at least one first region, at least one second fin on the at least one second region and at least one third fin on the at least one third region; forming a first opening in the first fin; forming a second opening in the second fin; forming a first epitaxial layer in the first opening and the second opening; forming a third opening in the at least one third fin; removing at least a portion of the first epitaxial layer in the at least one second fin to form a fourth opening; and forming a second epitaxial layer in the third opening and the fourth opening.

Abstract: Disclosed is a switch branch structure having an input terminal, an output terminal, and a series stack of an N-number of transistors formed in an active device layer within a first plane, wherein a first one of the N-number of transistors is coupled to the input terminal, and an nth one of the N-number of transistors is coupled to the output terminal, where n is a positive integer greater than one. A metal layer element has a planar body with a proximal end that is electrically coupled to the input terminal and distal end that is electrically open, wherein the planar body is within a second plane spaced from and in parallel with the first plane such that the planar body capacitively couples a radio frequency signal at the input terminal to between 10% and 90% of the N-number of transistors when the switch branch structure is in an off-state.

Abstract: A method of fabricating a semiconductor device includes forming a first stack of first transistor structures on a substrate, and forming a second stack of second transistor structures on the substrate adjacent to the first stack. The second stack is formed adjacent to the first stack such that stacked S/D regions at an end of the first stack are facing respective stacked S/D regions at an end of the second stack. A first pair of facing S/D regions of the first and second stack is connected by forming a connecting structure that extends in the horizontal direction to physically connect the first pair of facing S/D regions to each other. A second pair of facing S/D regions of the first and second stack is maintained as a separated pair of facing S/D regions which are physically separated from one another. First and second metal interconnect structures are connected to respective S/D regions in the second pair of facing S/D regions.

Abstract: A method of manufacturing a semiconductor device is provided. A substrate is provided. The substrate has a first region and a second region. An n-type work function layer is formed over the substrate in the first region but not in the second region. A p-type work function layer is formed over the n-type work function layer in the first region, and over the substrate in the second region. The p-type work function layer directly contacts the substrate in the second region. And the p-type work function layer includes a metal oxide.

Abstract: A method of fabricating a device includes forming a dummy gate over a plurality of fins. Thereafter, a first portion of the dummy gate is removed to form a first trench that exposes a first hybrid fin and a first part of a second hybrid fin. The method further includes filling the first trench with a dielectric material disposed over the first hybrid fin and over the first part of the second hybrid fin. Thereafter, a second portion of the dummy gate is removed to form a second trench and the second trench is filled with a metal layer. The method further includes etching-back the metal layer, where a first plane defined by a first top surface of the metal layer is disposed beneath a second plane defined by a second top surface of a second part of the second hybrid fin after the etching-back the metal layer.

Abstract: A device includes a first transistor, a second transistor, and a contact. The first transistor includes a first source/drain, a second source/drain, and a first gate between the first and second source/drains. The second transistor includes a third source/drain, a fourth source/drain, and a second gate between the third and fourth source/drains. The contact covers the first source/drain of the first transistor and the third source/drain of the second transistor. The contact is electrically connected to the first source/drain of the first transistor and electrically isolated from the third source/drain of the second transistor.

Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises a first semiconductor stack and a second semiconductor stack over a substrate, wherein each of the first and second semiconductor stacks includes semiconductor layers stacked up and separated from each other; a dummy spacer between the first and second semiconductor stacks, wherein the dummy spacer contacts a first sidewall of each semiconductor layer of the first and second semiconductor stacks; and a gate structure wrapping a second sidewall, a top surface, and a bottom surface of each semiconductor layer of the first and second semiconductor stacks.

Abstract: A quantum device with spin qubits, comprising: a semiconductor portion arranged on a buried dielectric layer of a semiconductor-on-insulator substrate also including a semiconductor support layer, wherein first distinct parts each form a confinement region of one of the qubits and are spaced apart from one another by a second part forming a coupling region between the confinement regions of the qubits; front gates each at least partially covering one of the first parts of the semiconductor portion; and wherein the support layer comprises a doped region a part of which is arranged in line with the second part of the semiconductor portion and is self-aligned with respect to the front gates, and forms a back gate controlling the coupling between the confinement regions of the qubits.

Abstract: A multi-channel semiconductor-on-insulator (SOI) transistor includes a substrate having an electrically insulating layer thereon and a semiconductor active layer on the electrically insulating layer. A vertical stack of spaced-apart insulated gate electrodes, which are buried within the semiconductor active layer, is also provided. This vertical stack includes a first insulated gate electrode extending adjacent the electrically insulating layer and an (N?1)th insulated gate electrode that is spaced from a surface of the semiconductor active layer, where N is a positive integer greater than two. An Nth insulated gate electrode is provided on the surface of the semiconductor active layer. A pair of source/drain regions are provided within the semiconductor active layer. These source/drain regions extend adjacent opposing sides of the vertical stack of spaced-apart insulated gate electrodes.

Abstract: A cross-coupled inverter made of nanolayers from a nanosheet stack structure has a left field effect transistor (FET) stack and a right FET stack. The left FET stack has a second left FET stacked on a first left FET. The first and second left FETs have opposite types. The right FET stack has a second right FET stacked on a first right FET. The first and second right FETs have opposite types. The first left and first right FET have a first common source drain (S/D). The left FET stack has a left gate stack surrounding the one or more first left FET channel layers and the one or more second left FET channel layers. The right FET stack has a right gate stack surrounding the one or more first right FET channel layers and the one or more second right FET channel layers. In some embodiments the left/right gate stack has a left/right center gate stack layer and one or more left/right gate stack layers. The center gate stack layers are thicker than the gate stack layers and are between the first and second FETs.

Abstract: A semiconductor device includes plural semiconductor fins and a gate structure over at least one of the semiconductor fins. The semiconductor fins have parallelogram top surfaces, and the parallelogram top surface has two acute interior angles and two obtuse interior angles. Two of the semiconductor fins are arranged along <110> crystallographic direction, and two of the semiconductor fins are arranged along <100> crystallographic direction.

Abstract: An embodiment of the invention may include a semiconductor structure and method of manufacturing. The semiconductor structure may include a top channel and a bottom channel, wherein the top channel includes a plurality of vertically oriented channels. The bottom channel includes a plurality of horizontally oriented channels. The semiconductor structure may include a gate surrounding the top channel and the bottom channel. The semiconductor structure may include spacers located on each side of the gate. A first spacer includes a dielectric material located between the plurality of vertically oriented channels. A second spacer includes a dielectric material located between the plurality of horizontally oriented channels. This may enable spacer formation between the vertical spacers.

Abstract: An embodiment method includes: forming a semiconductor liner layer on exposed surfaces of a fin structure that extends above a dielectric isolation structure disposed over a substrate; forming a first capping layer to laterally surround a bottom portion of the semiconductor liner layer; forming a second capping layer over an upper portion of the semiconductor liner layer; and annealing the fin structure having the semiconductor liner layer, the first capping layer, and the second capping layer thereon, the annealing driving a dopant from the semiconductor liner layer into the fin structure, wherein a dopant concentration profile in a bottom portion of the fin structure is different from a dopant concentration profile in an upper portion of the fin structure.

Abstract: Nanostructure field-effect transistors (nano-FETs) including isolation layers formed between epitaxial source/drain regions and semiconductor substrates and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a power rail, a dielectric layer over the power rail, a first channel region over the dielectric layer, a second channel region over the first channel region, a gate stack over the first channel region and the second channel region, where the gate stack is further disposed between the first channel region and the second channel region and a first source/drain region adjacent the gate stack and electrically connected to the power rail.

Abstract: An integrated circuit structure comprises a lower device layer that includes a first structure comprising a first set of transistor fins and a first set of contact metallization. An upper device layer is bonded onto the lower device layer, where the upper device layer includes a second structure comprising a second set of transistor fins and a second set of contact metallization. At least one power isolation wall extends from a top of the upper device layer to the bottom of the lower device layer, wherein the power isolation wall is filled with a conductive material such that power is routed between transistor devices on the upper device layer and the lower device layer.

Abstract: A semiconductor structure includes a fin disposed on a substrate, the fin including a channel region comprising a plurality of channels vertically stacked over one another, the channels comprising germanium distributed therein. The semiconductor structure further includes a gate stack engaging the channel region of the fin and gate spacers disposed between the gate stack and the source and drain regions of the fin, wherein each channel of the channels includes a middle section wrapped around by the gate stack and two end sections engaged by the gate spacers, wherein a concentration of germanium in the middle section of the channel is higher than a concentration of germanium in the two end sections of the channel, and wherein the middle section of the channel further includes a core portion and an outer portion surrounding the core portion with a germanium concentration profile from the core portion to the outer portion.

Abstract: The disclosed technology generally relates to semiconductor devices and more particularly to a semiconductor device comprising stacked complementary transistor pairs.

Abstract: A semiconductor device including: a substrate that includes a first active region and a second active region; a first source/drain pattern on the first active region; a second source/drain pattern on the second active region; a separation dielectric pattern on the substrate between the first source/drain pattern and the second source/drain pattern; and a first contact pattern on the first source/drain pattern, wherein the first contact pattern includes: a first metal pattern; a first barrier pattern between the first metal pattern and the first source/drain pattern; and a second barrier pattern between the first barrier pattern and the first source/drain pattern, wherein the first barrier pattern contacts the separation dielectric pattern and extends along a sidewall of the first metal pattern adjacent to the separation dielectric pattern.

Abstract: A semiconductor device includes a first transistor, a division pattern, and a second transistor sequentially stacked on a substrate. The first transistor includes a first gate structure, a first source/drain layer at each of opposite sides of the first gate structure, and first semiconductor patterns spaced apart from each other in a vertical direction. Each of the first semiconductor patterns extends through the first gate structure and contacts the first source/drain layer. The division pattern includes an insulating material. The second transistor includes a second gate structure, a second source/drain layer at each of opposite sides of the second gate structure, and second semiconductor patterns spaced apart from each other in the vertical direction. Each of the second semiconductor patterns extends through the second gate structure and contacts the second source/drain layer. The first source/drain layer does not directly contact the second source/drain layer.

Abstract: A semiconductor device includes a first plurality of stacked nanowire structures extending in a first direction disposed over a first region of a semiconductor substrate. Each nanowire structure of the first plurality of stacked nanowire structures includes a plurality of nanowires arranged in a second direction substantially perpendicular to the first direction. A nanowire stack insulating layer is between the substrate and a nanowire closest to the substrate of each nanowire structure of the first plurality of stacked nanowire structures. At least one second stacked nanowire structure is disposed over a second region of the semiconductor substrate, and a shallow trench isolation layer is between the first region and the second region of the semiconductor substrate.

Abstract: Techniques are disclosed for achieving multiple fin dimensions on a single die or semiconductor substrate. In some cases, multiple fin dimensions are achieved by lithographically defining (e.g., hardmasking and patterning) areas to be trimmed using a trim etch process, leaving the remainder of the die unaffected. In some such cases, the trim etch is performed on only the channel regions of the fins, when such channel regions are re-exposed during a replacement gate process. The trim etch may narrow the width of the fins being trimmed (or just the channel region of such fins) by 2-6 nm, for example. Alternatively, or in addition, the trim may reduce the height of the fins. The techniques can include any number of patterning and trimming processes to enable a variety of fin dimensions and/or fin channel dimensions on a given die, which may be useful for integrated circuit and system-on-chip (SOC) applications.

Abstract: A semiconductor device includes a transistor and a memory pickup cell formed over a well in a substrate. The transistor includes a first fin having a first width and two first source/drain features on the first fin. The pickup cell includes a second fin having a second width and two second source/drain features on the second fin. The well, the first fin, the second fin, and the second source/drain feature are of a first conductivity type. The first source/drain features are of a second conductivity type opposite to the first conductivity type. The second width is at least three times of the first width. The pickup cell further includes a stack of semiconductor layers over the second fin and connecting the two second source/drain features.

Abstract: The present disclosure relates to a metal layer for an active x-ray attack prevention device for securing integrated circuits. In particular, the present disclosure relates to a structure including a semiconductor material, one or more devices on a front side of the semiconductor material, a backside patterned metal layer under the one or more devices, located and structured to protect the one or more devices from an active intrusion, and at least one contact providing an electrical connection through the semiconductor material to a front side of the backside patterned metal layer. The backside patterned metal layer is between a wafer and one of the semiconductor material and an insulator layer.

Abstract: An integrated circuit includes a first cell and a second cell. The first cell with a first cell height along a first direction includes a first active region and a second active region that extend in a second direction different from the first direction. The first active region overlaps the second active region in a layout view. The second cell with a second cell height includes a first plurality of active regions and a second plurality of active regions. The first plurality of active regions and the second plurality of active regions extend in the second direction and the first plurality of active regions overlap the second plurality of active regions, respectively, in the layout view. The first cell abuts the second cell, and the first active region is aligned with one of the first plurality of active regions in the layout view.

Abstract: A semiconductor device with different gate structure configurations and a method of fabricating the semiconductor device are disclosed. The method includes depositing a high-K dielectric layer surrounding nanostructured channel regions, performing a first doping with a rare-earth metal (REM)-based dopant on first and second portions of the high-K dielectric layer, and performing a second doping with the REM-based dopants on the first portions of the high-K dielectric layer and third portions of the high-K dielectric layer. The first doping dopes the first and second portions of the high-K dielectric layer with a first REM-based dopant concentration. The second doping dopes the first and third portions of the high-K dielectric layer with a second REM-based dopant concentration different from the first REM-based dopant concentration. The method further includes depositing a work function metal layer on the high-K dielectric layer and depositing a metal fill layer on the work function metal layer.

Abstract: A method for inducing stress in a device channel includes forming a stress adjustment layer on a substrate, the stress adjustment layer including an as deposited stress due to crystal lattice differences with the substrate. A device channel layer is formed on the stress adjustment layer. Cuts are etched through the device channel layer and the stress adjustment layer to release the stress adjustment layer to induce stress in the device channel layer. Source/drain regions are formed adjacent to the device channel layer.