With Means To Increase Breakdown Voltage (e.g., Field Shield Electrode, Guard Ring, Etc.) Patents (Class 257/409)
  • Patent number: 9559097
    Abstract: A semiconductor device configured with one or more integrated breakdown protection diodes in non-isolated power transistor devices and electronic apparatus, and methods for fabricating the devices.
    Type: Grant
    Filed: October 6, 2014
    Date of Patent: January 31, 2017
    Assignee: NXP USA, Inc.
    Inventors: Patrice M. Parris, Hubert M. Bode, Weize Chen, Richard J DeSouza, Andreas Laudenbach, Kurt U. Neugebauer
  • Patent number: 9536965
    Abstract: A semiconductor device comprises: a substrate; a multilayer semiconductor layer located on the substrate; a source located on the multilayer semiconductor layer, the source including a first source portion inside an active region and a second source portion inside a passive region; a drain located on the multilayer semiconductor layer, the drain including a first drain portion inside the active region and a second drain region inside the passive region; a gate located on the multilayer semiconductor layer, the gate including a first gate portion inside the active region and a second gate portion inside the passive region, and the first gate portion being in a form of interdigital among the first source portion and the first drain portion; and a heat dissipating layer disposed at one or more of the first source portion, the first drain portion, the first gate portion, the second source portion, the second drain portion and the second gate portion.
    Type: Grant
    Filed: October 23, 2015
    Date of Patent: January 3, 2017
    Assignee: DYNAX SEMICONDUCTOR, INC.
    Inventors: Yi Pei, Mengjie Zhou, Naiqian Zhang
  • Patent number: 9520493
    Abstract: A high voltage integrated device includes a semiconductor layer having a first conductivity, a source region having a second conductivity and a drift region having the second conductivity which are disposed in the semiconductor layer and spaced apart from each other by a channel region, a drain region having the second conductivity and disposed in the drift region, a gate insulation layer disposed over the channel region, a first field insulation layer and a second field insulation layer which are disposed over the drift region and between the channel region and the drain region, wherein the first field insulation layer and the second field insulation layer are spaced apart from each other, an insulation layer disposed over the drift region and located between the first and second field insulation layers, and a gate electrode disposed over the gate insulation layer, the first field insulation layer, the insulation layer, and the second field insulation layer, wherein the first field insulation layer is adjace
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: December 13, 2016
    Assignee: SK Hynix Inc.
    Inventors: Dae Hoon Kim, Se Kyung Oh
  • Patent number: 9508792
    Abstract: An electric field buffer layer is formed so as to surround an active region. The electric field buffer layer includes a plurality of P-type impurity layers. Each of the P-type impurity layers includes P-type implantation layers and P-type diffusion layers that are formed so as to respectively surround the P-type implantation layers and contain P-type impurities at a concentration lower than that of the P-type implantation layers. A first P-type implantation layer is formed to be in contact with or to partially overlap the active region. Each of the P-type diffusion layers is formed to have an expansion to a degree to which the first P-type diffusion layer is in contact with or overlaps a second P-type diffusion layer. Intervals between the P-type implantation layers increase from the active region toward the outer peripheral portion of the semiconductor substrate.
    Type: Grant
    Filed: May 1, 2013
    Date of Patent: November 29, 2016
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tsuyoshi Kawakami, Ze Chen, Akito Nishii, Fumihito Masuoka, Katsumi Nakamura, Akihiko Furukawa, Yuji Murakami
  • Patent number: 9496334
    Abstract: A semiconductor device according to an embodiment includes a first semiconductor layer of a first conductivity type, second semiconductor regions of a second conductivity type, a third semiconductor region of the second conductivity type, a fourth semiconductor region of the first conductivity type, a gate electrode, an insulating layer, and a first electrode. The first semiconductor layer includes first semiconductor regions. The second semiconductor regions are provided respectively between the first semiconductor regions. The insulating layer is provided between the gate electrode and the third semiconductor region. The first electrode includes a first portion and a second portion. The first portion is connected to the first semiconductor region. The second portion is provided on the fourth semiconductor region side of the first portion. The first electrode is provided on the first semiconductor region and on the second semiconductor region.
    Type: Grant
    Filed: August 14, 2015
    Date of Patent: November 15, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroaki Yamashita, Syotaro Ono, Hideyuki Ura, Masahiro Shimura
  • Patent number: 9472660
    Abstract: A semiconductor device including: a first conductivity type n-type drift layer; a second conductivity type VLD region which is formed on a chip inner circumferential side of a termination structure region provided on one principal surface of the n-type drift layer and which is higher in concentration than the n-type drift layer; a second conductivity type first clip layer which is formed on a chip outer circumferential side of the VLD region so as to be separated from the VLD region and which is higher in concentration than the n-type drift layer; and a first conductivity type channel stopper layer which is formed on a chip outer circumferential side of the first clip layer so as to be separated from the first clip layer and which is higher in concentration than the n-type drift layer.
    Type: Grant
    Filed: May 9, 2014
    Date of Patent: October 18, 2016
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Hong-fei Lu
  • Patent number: 9461184
    Abstract: A capacitor for a semiconductor device includes a bottom electrode plate, an insulating layer formed on the bottom electrode plate, and a top electrode plate formed on the insulating layer. The bottom plate includes a capacitor well and at least one diffused region formed on the capacitor well. A doping concentration of the at least one diffused region is higher than a doping concentration of the capacitor well, the capacitor well comprising a first well.
    Type: Grant
    Filed: October 9, 2013
    Date of Patent: October 4, 2016
    Assignee: Fitipower Integrated Technology, Inc.
    Inventors: Chun-Ping Yang, Da-Pong Zhang
  • Patent number: 9412809
    Abstract: Provided is a semiconductor device in which movable ions in an insulation layer on a main surface are reduced and dielectric strength is enhanced. A semiconductor device has a plurality of FLRs, an insulation layer, and a semiconductor layer. The plurality of FLRs surrounds, in a plan view of a substrate, an active region in which an element is formed. The insulation layer is provided on the main surface of the semiconductor device and covers the plurality of FLRs. The semiconductor layer is provided in the insulation layer and surrounds the active region in parallel to the FLRs. The semiconductor layer contains impurities at a surface density lower than a surface density that satisfies a RESURF condition. In the plan view, the semiconductor layer overlaps with a part of the region (an inter-ring region) between adjacent FLRs and does not overlap with rest of the inter-ring region.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: August 9, 2016
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventor: Masaru Senoo
  • Patent number: 9383266
    Abstract: A field effect transistor (FET) having a source, a drain and a gate includes a first connection electrically connected to the gate near a first end of the gate, a second connection electrically connected to the gate near the first end of the gate, a third connection electrically connected to the gate near a second end of the gate, and a fourth connection electrically connected to the gate near the second end of the gate. By performing gate resistance measurements at different ambient temperatures, a thermal coefficient of gate resistance can be derived and then used to monitor the gate temperature, which is representative of the channel temperature.
    Type: Grant
    Filed: October 15, 2013
    Date of Patent: July 5, 2016
    Assignee: HRL Laboratories, LLC
    Inventors: James Chingwei Li, Tahir Hussain
  • Patent number: 9373619
    Abstract: Provided is a high voltage semiconductor device. The high voltage semiconductor device includes a substrate that includes a doped well disposed therein. The doped well and the substrate have opposite doping polarities. The high voltage semiconductor device includes an insulating device disposed over the doped well. The high voltage semiconductor device includes an elongate resistor disposed over the insulating device. A non-distal portion of the resistor is coupled to the doped well. The high voltage semiconductor device includes a high-voltage junction termination (HVJT) device disposed adjacent to the resistor.
    Type: Grant
    Filed: August 1, 2011
    Date of Patent: June 21, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 9343453
    Abstract: A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.
    Type: Grant
    Filed: May 15, 2015
    Date of Patent: May 17, 2016
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Ryo Kanda, Tetsu Toda, Yasushi Nakahara, Yoshinori Kaya
  • Patent number: 9324857
    Abstract: A semiconductor device includes a p-type semiconductor layer, n-type column regions formed of columnar thermal donors exhibiting an n-type property, a p-type column region interposed between the n-type column regions, the n-type column regions configured to form a super-junction structure in cooperation with the p-type column region, a channel region formed in the semiconductor layer, a source region formed in the channel region, a gate insulator film formed on the semiconductor layer, and a gate electrode formed on the gate insulator film and opposite to the channel region across the gate insulator film.
    Type: Grant
    Filed: April 10, 2015
    Date of Patent: April 26, 2016
    Assignee: ROHM CO., LTD.
    Inventor: Toshio Nakajima
  • Patent number: 9312249
    Abstract: In a semiconductor light emitting device, a light emitting structure includes a first-conductivity type semiconductor layer, an active layer, and a second-conductivity type semiconductor layer, which are sequentially formed on a conductive substrate. A second-conductivity type electrode includes a conductive via and an electrical connection part. The conductive via passes through the first-conductivity type semiconductor layer and the active layer, and is connected to the inside of the second-conductivity type semiconductor layer. The electrical connection part extends from the conductive via and is exposed to the outside of the light emitting structure. An insulator electrically separates the second-conductivity type electrode from the conductive substrate, the first-conductivity type semiconductor layer, and the active layer. A passivation layer is formed to cover at least a side surface of the active layer in the light emitting structure.
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: April 12, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Pun Jae . Choi, Sang Bum Lee, Jin Bock Lee, Yu Seung Kim, Sang Yeob Song
  • Patent number: 9305906
    Abstract: In a semiconductor light emitting device, a light emitting structure includes a first-conductivity type semiconductor layer, an active layer, and a second-conductivity type semiconductor layer, which are sequentially formed on a conductive substrate. A second-conductivity type electrode includes a conductive via and an electrical connection part. The conductive via passes through the first-conductivity type semiconductor layer and the active layer, and is connected to the inside of the second-conductivity type semiconductor layer. The electrical connection part extends from the conductive via and is exposed to the outside of the light emitting structure. An insulator electrically separates the second-conductivity type electrode from the conductive substrate, the first-conductivity type semiconductor layer, and the active layer. A passivation layer is formed to cover at least a side surface of the active layer in the light emitting structure.
    Type: Grant
    Filed: July 21, 2014
    Date of Patent: April 5, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Pun Jae Choi, Sang Bum Lee, Jin Bock Lee, Yu Seung Kim, Sang Yeob Song
  • Patent number: 9287383
    Abstract: A method for manufacturing a semiconductor device includes providing a semiconductor substrate having first and second sides, laterally spaced semiconductor devices integrated into the semiconductor substrate, and a drift region of a first conductivity type. Trenches are formed in the semiconductor substrate at the first side of the semiconductor substrate between laterally adjacent semiconductor devices, each of the trenches having two sidewalls and a bottom. First doping zones of a second conductivity type are formed in the semiconductor substrate at least along the sidewalls of the trenches. The first doping zones form pn-junctions with the drift region. Second doping zones of the first conductivity type are formed in the semiconductor substrate at least along a part of the bottom of the trenches. The second doping zones adjoin the drift region. The semiconductor substrate is cut along the second doping zones in the trenches to separate the semiconductor devices.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: March 15, 2016
    Assignee: Infineon Technologies AG
    Inventor: Gerhard Schmidt
  • Patent number: 9287184
    Abstract: Apparatuses and methods can include a die seal between an integrated circuit region of a die and a periphery of the die. A via chain(s) may be arranged around an inner circumference of the die seal between the die seal and the integrated circuit region and/or around an outer circumference of the die seal between the die seal and the periphery of the die. The via chain may include a plurality of contacts comprised of conductive material and extending through portions of the die. Circuitry may be coupled to an end of the via chain to detect an electrical signal. Additional apparatuses and methods are described.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: March 15, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Charles H. Dennison, Kenneth W. Marr, Deepak Thimmegowda, Philip J. Ireland
  • Patent number: 9245960
    Abstract: Disclosed are embodiments of a lateral, extended drain, metal oxide semiconductor, field effect transistor (LEDMOSFET) having tapered dielectric field plates positioned laterally between conductive field plates and opposing sides of a drain drift region of the LEDMOSFET. Each dielectric field plate comprises, in whole or in part, an airgap. These field plates form plate capacitors that can create an essentially uniform horizontal electric field profile within the drain drift region so that the LEDMOSFET can exhibit a specific, relatively high, breakdown voltage (Vb). Tapered dielectric field plates that incorporate airgaps provide for better control over the creation of the uniform horizontal electric field profile within the drain drift region, as compared to tapered dielectric field plates without such airgaps and, thereby ensure that the LEDMOSFET exhibits the specific, relatively high, Vb desired. Also disclosed herein are embodiments of a method of forming such an LEDMOSFET.
    Type: Grant
    Filed: February 8, 2013
    Date of Patent: January 26, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Michel J. Abou-Khalil, Theodore J. Letavic, Stephen E. Luce, Anthony K. Stamper
  • Patent number: 9240463
    Abstract: High-voltage LDMOS devices with voltage linearizing field plates and methods of manufacture are disclosed. The method includes forming an array of poly islands and a control gate structure by patterning a poly layer formed over a deep well region and a body of a substrate. The method further includes forming a metal shield in contact with the control gate structure and over the array of poly islands.
    Type: Grant
    Filed: May 24, 2013
    Date of Patent: January 19, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: John J. Ellis-Monaghan, Theodore J. Letavic, Santosh Sharma, Yun Shi, Michael J. Zierak
  • Patent number: 9240464
    Abstract: A manufacturing method of a power MOSFET employs a hard mask film over a portion of the wafer surface as a polishing stopper, between two successive polishing steps. After embedded epitaxial growth is performed in a state where a hard mask film for forming trenches is present in at least a scribe region of a wafer, primary polishing is performed by using the hard mask film as a stopper, and secondary polishing is then performed after the hard mask film is removed.
    Type: Grant
    Filed: January 14, 2014
    Date of Patent: January 19, 2016
    Assignee: Renesas Electronics Corporation
    Inventors: Satoshi Eguchi, Daisuke Taniguchi
  • Patent number: 9224859
    Abstract: A high voltage metal-oxide-semiconductor (HV MOS) device includes a substrate including a first conductivity type, a gate positioned on the substrate, a drain region formed in the substrate, the drain region including a second conductivity type, and a source region formed in the substrate, where the source region includes at least one first part and at least one second part, the first part includes the second conductivity type, the second part includes the first conductivity type, and the first conductivity type and the second conductivity type are complementary.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: December 29, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Chieh Pu, Ming-Tsung Lee, Cheng-Hua Yang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
  • Patent number: 9147791
    Abstract: The present invention provides a method for fabricating nano material pattern comprising the steps of forming a perfluorinated polymer pattern on top of the substrate (step 1); spreading a dispersion containing the dispersed nano material on the substrate patterned in step 1) (step 2); and eliminating the perfluorinated polymer pattern formed on the substrate of step 2) (step 3). The method for fabricating nano material pattern of the present invention has advantages over the conventional lift-off method for the fabrication of nano material pattern, which are easiness in eliminating the perfluorinated polymer pattern after forming the nano material pattern with it and no chance of damaging the substrate, suggesting that the method of the invention is excellent in fabricating an excellent nano material pattern.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: September 29, 2015
    Assignee: INHA-Industry Partnership Institute
    Inventors: Se-Geun Park, Jin-Kyun Lee, Myung-Soo Kim, Jung Seokheon
  • Patent number: 9142625
    Abstract: Embodiments of a semiconductor device, a circuit including a semiconductor device and a driver circuit, and a method for operating a semiconductor device are described. In one embodiment, a semiconductor device includes a substrate, a source region, a drain region, and a drain extension region formed in the substrate, and an insulation layer adjacent to the drain extension region. A gate layer and a field plate are formed one of within and on the insulation layer. The field plate is located adjacent to the drain extension region and is electrically insulated from the gate layer and the source region such that a voltage can be applied to the field plate independent from voltages applied to the gate layer and the source region. Other embodiments are also described.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: September 22, 2015
    Assignee: NXP B.V.
    Inventors: Anco Heringa, Gerhard Koops, Boni Kofi Boksteen, Alessandro Ferrara
  • Patent number: 9129841
    Abstract: A semiconductor device in which a reliable high voltage p-channel transistor is formed without an increase in cost and the number of manufacturing steps. The transistor includes: a semiconductor substrate having a main surface and a p-type region therein; a p-type well region located over the p-type region and in the main surface, having a first p-type impurity region to obtain a drain electrode; an n-type well region adjoining the p-type well region along the main surface and having a second p-type impurity region to obtain a source electrode; a gate electrode between the first and second p-type impurity regions along the main surface; and a p-type buried channel overlying the n-type well region and extending along the main surface. The border between the n-type and p-type well regions is nearer to the first p-type impurity region than the gate electrode end near to the first p-type impurity region.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: September 8, 2015
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventor: Hirokazu Sayama
  • Patent number: 9117899
    Abstract: A semiconductor field-effect device is disclosed that utilizes an octagonal or inverse-octagonal deep trench super-junction in combination with an octagonal or inverse-octagonal gate trench. The field-effect device achieves improved packing density, improved current density, and improved on resistance, while at the same time maintaining compatibility with the multiple-of-45°-angles of native photomask processing and having well characterized (010), (100) and (110) (and their equivalent) silicon sidewall surfaces for selective epitaxial refill and gate oxidation, resulting in improved scalability. By varying the relative length of each sidewall surface, devices with differing threshold voltages can be achieved without additional processing steps. Mixing trenches with varying sidewall lengths also allows for stress balancing during selective epitaxial refill.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: August 25, 2015
    Assignee: D3 Semiconductor LLC
    Inventors: Thomas E. Harrington, III, Robert Kuo-Chang Yang
  • Patent number: 9105715
    Abstract: In a cell region of a first major surface of a semiconductor substrate of a first conductivity type, a first well of a second conductivity type is in an upper surface. A diffusion region of a first conductivity type is in the upper surface in the first well. A first gate insulating film is on the first well, and a first gate electrode on the first gate insulating film. A second well of a second conductivity type is in the upper surface of the first major surface on a peripheral portion of the cell region. A second gate insulating film is on the second well, and a thick field oxide film is on the peripheral side than the second gate insulating film. A second gate electrode is sequentially on the second gate insulating film and the field oxide film and electrically connected to the first gate electrode. A first electrode is connected to the first, second well and the diffusion region. A second electrode is connected on a second major surface of the semiconductor substrate.
    Type: Grant
    Filed: April 30, 2009
    Date of Patent: August 11, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Naruhisa Miura, Shuhei Nakata, Kenichi Ohtsuka, Shoyu Watanabe, Naoki Yutani
  • Patent number: 9099552
    Abstract: The invention provides an LDMOS transistor of which the time-dependent degrading of the performance due to the trapping of hot electrons in the gate insulation film is decreased. A body layer is disposed in a surface portion of an N? type semiconductor layer. A source layer including an N? type layer is disposed in a surface portion of the body layer. An N? type drift layer is formed in a surface portion of the N? type semiconductor layer. This drift layer includes a first region having a first N type impurity concentration peak region and a second region having a second N type impurity concentration peak region that is positioned deeper than the first N type impurity concentration peak region, the second region adjoining this first region. An N+ type drain layer is formed in a surface portion of the second region.
    Type: Grant
    Filed: February 24, 2014
    Date of Patent: August 4, 2015
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Yasuhiro Takeda, Shinya Inoue, Yuzo Otsuru
  • Patent number: 9093432
    Abstract: A semiconductor device is free from degradation of characteristics attributable to a manufacturing process thereof and its characteristics are hardly affected by changes in electric potentials of bonding pads. The semiconductor device 10 includes an active region 12, a first insulating layer 13 covering the active region 12, a floating conductor 14 formed on the first insulating layer 13, a second insulating layer 15 formed on the first insulating layer 13 and the floating conductor 14, a bonding pad 18 formed on the second insulating layer 17 and interconnection vias 19, 20 for electrically connecting the active region 12 and the bonding pad 18.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: July 28, 2015
    Assignee: SANKEN ELECTRIC CO., LTD.
    Inventors: Akio Iwabuchi, Hironori Aoki
  • Patent number: 9093310
    Abstract: A semiconductor device including a semiconductor layer of a first conductivity type in a cell region, a first base layer of a second conductivity type on the semiconductor layer in the cell region; a second base layer of the second conductivity type on the semiconductor layer in an intermediate region; a conductive region of a first conductivity type in the first base layer; a gate electrode on a channel region placed between the conductive region and the semiconductor layer; a first electrode connected to the first and second base layers; a second electrode connected to the semiconductor layer; and a gate pad on the semiconductor layer via an insulating film in a pad region and connected to the gate electrode, an impurity concentration gradation in the gate pad side of the second base layer has a gentler VLD structure than an impurity concentration gradation in the first base layer.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: July 28, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventor: Kazutoyo Takano
  • Patent number: 9082779
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: July 14, 2015
    Assignee: PANASONIC CORPORATION
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Patent number: 9082843
    Abstract: A semiconductor body has a first side, second side, lateral edge, active area, edge termination between the active area and the lateral edge, and drift region of a first conductivity type. The edge termination includes a step formed in the semiconductor body between the first side and the lateral edge. The step includes a lateral surface extending up to the first side and a bottom surface extending up to the lateral edge. A first doping zone of a second conductivity type is formed in the semiconductor body along the lateral surface of the step and forms a pn-junction with the drift region. A second doping zone of the first conductivity type is formed in the semiconductor body at least along a part of the bottom surface of the step and extends up to the lateral edge, wherein the second doping zone is in contact with the drift region.
    Type: Grant
    Filed: December 13, 2012
    Date of Patent: July 14, 2015
    Assignee: Infineon Technologies AG
    Inventor: Gerhard Schmidt
  • Patent number: 9082846
    Abstract: Integrated circuits with improved LDMOS structures are provided. An integrated circuit includes a semiconductor substrate, a plurality of shallow trench isolation (STI) regions, each extending at least a first depth below an upper surface of the semiconductor substrate. The STI regions electrically isolate devices fabricated in the semiconductor substrate. The integrated circuit further includes a transistor structure. The transistor structure includes a gate dielectric positioned over a portion of a first one of the plurality of STI regions, a drain region adjacent to the first one of the plurality of STI regions and spaced apart from the gate dielectric, a first gate electrode that extends over a first portion of the gate dielectric, a second gate electrode that extends over a second portion of the gate dielectric and positioned adjacent to the first gate electrode, and a source region positioned adjacent to the first portion of the gate dielectric.
    Type: Grant
    Filed: April 25, 2013
    Date of Patent: July 14, 2015
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yi Lu, Dongli Wang, Deyan Chen, Purakh Raj Verma
  • Patent number: 9076676
    Abstract: A body region (3) with a first type of electric conductivity is arranged at the upper surface (10) of a substrate (1) in a well (2), wherein a portion of the well that is not occupied by the body region has a second type of conductivity opposite the first type of conductivity. At the upper surface, a source region is arranged in the body region and a drain region is arranged in the well at a distance from the body region; the source region and the drain region both have the second type of conductivity. The body region is arranged underneath a surface area of the upper surface that has a border (7) with opposing first border sides (8). The well has a varying depth in the substrate. The depth of the well is smaller underneath the first border sides of the body region than in a portion of the body region that is spaced apart from the first border sides.
    Type: Grant
    Filed: November 21, 2012
    Date of Patent: July 7, 2015
    Assignee: ams AG
    Inventor: Martin Knaipp
  • Patent number: 9048213
    Abstract: A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.
    Type: Grant
    Filed: July 7, 2014
    Date of Patent: June 2, 2015
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Ryo Kanda, Tetsu Toda, Yasushi Nakahara, Yoshinori Kaya
  • Patent number: 9041127
    Abstract: The present invention is a finFET type semiconductor device using LDMOS features. The device includes a first portion of a substrate doped with a second doping type and has a first trench, second trench, and first fin. The second portion of the substrate with a first doping type includes a third trench and second fin. The second fin between the second and third trench covers a part the first portion and a part of the second portion of the substrate. A first segment of the second fin is between the second segment and second trench. A second segment covers a part of the second portion of the substrate and is between the first segment and third trench. A gate covering at least a part of the first segment and a part of the first portion and a part of the second portion of the substrate.
    Type: Grant
    Filed: May 14, 2013
    Date of Patent: May 26, 2015
    Assignee: International Business Machines Corporation
    Inventors: John B. Campi, Jr., Robert J. Gauthier, Jr., Junjun Li, Rahul Mishra, Souvick Mitra, Mujahid Muhammad
  • Publication number: 20150137246
    Abstract: Embodiments of systems, methods, and apparatus for improving ESD performance and switching time for semiconductor devices including metal-oxide-semiconductor (MOS) field effect transistors (FETs), and particularly to MOSFETs fabricated on Semiconductor-On-Insulator (“SOT”) and Silicon-On-Sapphire (“SOS”) substrates.
    Type: Application
    Filed: October 22, 2014
    Publication date: May 21, 2015
    Inventors: Eric S. Shapiro, Matt Allison
  • Publication number: 20150108588
    Abstract: Radiation hardened NMOS devices suitable for application in NMOS, CMOS, or BiCMOS integrated circuits, and methods for fabricating them. A device includes a p-type silicon substrate, a field oxide surrounding a moat region on the substrate tapering through a Bird's Beak region to a gate oxide within the moat region, a heavily-doped p-type guard region underlying at least a portion of the Bird's Beak region and terminating at the inner edge of the Bird's Beak region, a gate included in the moat region, and n-type source and drain regions spaced by a gap from the inner edge of the Bird's Beak and guard regions. A variation of minor alterations to the conventional moat and n-type source/drain masks. The resulting devices have improved radiation tolerance while having a high breakdown voltage and minimal impact on circuit density.
    Type: Application
    Filed: September 25, 2014
    Publication date: April 23, 2015
    Inventor: James Fred Salzman
  • Publication number: 20150102427
    Abstract: A semiconductor device includes a substrate having an active region, a drain region in the active region, a source region in the active region, a gate structure, and a conductive field plate. The gate structure extends in a first direction over the active region. The gate structure is arranged between the drain region and the source region in a second direction transverse to the first direction. The conductive field plate extends in the second direction over an edge of the active region.
    Type: Application
    Filed: October 11, 2013
    Publication date: April 16, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Yu CHEN, Wan-Hua HUANG, Jing-Ying CHEN
  • Patent number: 9006820
    Abstract: A transistor includes a semiconductor body; a body region of a first conductivity type formed in the semiconductor body; a gate electrode formed partially overlapping the body region and insulated from the semiconductor body by a gate dielectric layer; a source diffusion region of a second conductivity type formed in the body region on a first side of the gate electrode; a trench formed in the semiconductor body on a second side, opposite the first side, of the gate electrode, the trench being lined with a sidewall dielectric layer; and a doped sidewall region of the second conductivity type formed in the semiconductor body along the sidewall of the trench where the doped sidewall region forms a vertical drain current path for the transistor.
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: April 14, 2015
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventor: Hideaki Tsuchiko
  • Patent number: 9000538
    Abstract: A downsized semiconductor device having an excellent reverse characteristic, and a method of manufacturing the semiconductor device is sought to improve. The semiconductor device comprises a semiconductor body having a polygonal contour. An active area is formed in the semiconductor body. An EQR electrode is formed so as to surround the active area and to have curved portions of the EQR electrode along the corners of the semiconductor body. An interlayer insulating film is formed to cover the active area and the EQR electrode. The EQR electrode is embedded in the interlayer insulating film around the active area. EQR contacts are in contact with the curved portions of the EQR electrode and the semiconductor body outside the curved portions, and have at least side walls covered with the interlayer insulating film.
    Type: Grant
    Filed: June 21, 2011
    Date of Patent: April 7, 2015
    Assignee: Renesas Electronics Corporation
    Inventor: Kouichi Murakawa
  • Publication number: 20150091104
    Abstract: The invention provides a semiconductor structure and a semiconductor device having such semiconductor structure. The semiconductor structure includes: a substrate; a first well having a first conductivity type, which is provided on the substrate; a second well having a second conductivity type and contacting the first well at a boundary in between in a lateral direction; and a plurality of mitigation regions having the first conductivity type or the second conductivity type, provided in the first well and being close to the boundary in a lateral direction and penetrating the first well in a vertical direction.
    Type: Application
    Filed: September 30, 2013
    Publication date: April 2, 2015
    Applicant: RICHTEK TECHNOLOGY CORPORATION
    Inventor: Tsung-Yi Huang
  • Patent number: 8994115
    Abstract: A semiconductor structure for facilitating an integration of power devices on a common substrate includes a first insulating layer formed on the substrate and an active region having a first conductivity type formed on at least a portion of the first insulating layer. A first terminal is formed on an upper surface of the structure and electrically connects with at least one other region having the first conductivity type formed in the active region. A buried well having a second conductivity type is formed in the active region and is coupled with a second terminal formed on the upper surface of the structure. The buried well and the active region form a clamping diode which positions a breakdown avalanche region between the buried well and the first terminal. A breakdown voltage of at least one of the power devices is a function of characteristics of the buried well.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: March 31, 2015
    Assignee: Silanna Semiconductor U.S.A., Inc.
    Inventors: Jacek Korec, Boyi Yang
  • Patent number: 8987839
    Abstract: Various embodiments provide ground shield structures, semiconductor devices, and methods for forming the same. An exemplary structure can include a substrate and a dielectric layer disposed on the substrate. The structure can further include multiple conductive rings disposed in the substrate, in the dielectric layer, and/or on the dielectric layer. Each conductive ring of the multiple conductive rings can have openings of about three or more, and the openings of the each conductive ring can divide the multiple conductive rings into a plurality of sub-conductive rings arranged spaced apart. The structure can further a ground ring electrically connected to each of the plurality of sub-conductive rings.
    Type: Grant
    Filed: November 12, 2013
    Date of Patent: March 24, 2015
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Ling Liu, Jenhao Cheng, Xining Wang
  • Patent number: 8981384
    Abstract: There are provided a high-quality semiconductor device having stable characteristics and a method for manufacturing such a semiconductor device. The semiconductor device includes a substrate having a main surface, and a silicon carbide layer. The silicon carbide layer is formed on the main surface of the substrate. The silicon carbide layer includes a side surface as an end surface inclined relative to the main surface. The side surface substantially includes one of a {03-3-8} plane and a {01-1-4} plane in a case where the silicon carbide layer is of hexagonal crystal type, and substantially includes a {100} plane in a case where the silicon carbide layer is of cubic crystal type.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: March 17, 2015
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventor: Takeyoshi Masuda
  • Patent number: 8975681
    Abstract: In one surface of a semiconductor substrate, an active region in which main current flows and an IGBT is disposed is formed. A termination structure portion serving as an electric-field reduction region is formed laterally with respect to the active region. In the termination structure portion, a porous-oxide-film region, a p-type guard ring region, and an n+-type channel stopper region are formed. A plurality of floating electrodes are formed to contact the surface of the porous-oxide-film region. Another plurality of floating electrodes are formed to contact a first insulating film.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: March 10, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Hajime Akiyama, Akira Okada
  • Patent number: 8963260
    Abstract: A power semiconductor device includes a cell region on a semiconductor substrate, at least a transistor device in the cell region, a peripheral termination region encompassing the cell region, a plurality of epitaxial islands arranged around the cell region, and a grid type epitaxial layer in the peripheral termination region. The grid type epitaxial layer separates the plurality of epitaxial islands from one another.
    Type: Grant
    Filed: May 26, 2013
    Date of Patent: February 24, 2015
    Assignee: Anpec Electronics Corporation
    Inventors: Yung-Fa Lin, Chia-Hao Chang
  • Patent number: 8952457
    Abstract: An ESD protection circuit including a substrate of a first conductivity type, an annular well region of a second conductivity type, two first regions of the first conductivity type and at least one transistor of the second conductivity type is provided. The annular well region is disposed in the substrate. The first regions are disposed in the substrate and surrounded by the annular well region. The at least one transistor is disposed on the substrate between the first regions and including a source, a gate, and a drain. The annular well region and the drain are coupled to a first voltage source. The source and one of the first regions are coupled to a second voltage source, and the other of the first regions is coupled to a substrate triggering circuit.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: February 10, 2015
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Shih-Yu Wang, Chia-Ling Lu, Yan-Yu Chen, Yu-Lien Liu, Tao-Cheng Lu
  • Patent number: 8946817
    Abstract: A semiconductor device includes a semiconductor body including an inner region, and an edge region, a first doped device region of a first doping type in the inner region and the edge region and coupled to a first terminal, and at least one second doped device region of a second doping type complementary to the first doping type in the inner region and coupled to a second terminal. Further, the semiconductor device includes a minority carrier converter structure in the edge region. The minority carrier converter structure includes a first trap region of the second doping type adjoining the first doped device region, and a conductor electrically coupling the first trap region to the first doped device region.
    Type: Grant
    Filed: April 15, 2013
    Date of Patent: February 3, 2015
    Assignee: Infineon Technologies Austria AG
    Inventor: Franz Hirler
  • Publication number: 20150021713
    Abstract: Among other things, one or more semiconductor arrangements and techniques for forming such semiconductor arrangements are provided. A semiconductor arrangement comprises a first guard ring surrounding at least a portion of a device, and a first poly layer formed over the first guard ring.
    Type: Application
    Filed: July 14, 2014
    Publication date: January 22, 2015
    Inventors: Sheng-Fang Cheng, Yen-Lin Liu, Chen-Chih Wu, Chien-Yuan Lee
  • Publication number: 20150014791
    Abstract: A semiconductor device having a first layer adjoining a semiconductor layer, and further comprising at least one field modification structure positioned such that, in use, a potential at the field modification structure causes an E-field vector at a region of an interface between the semiconductor and the first layer to be modified.
    Type: Application
    Filed: July 11, 2013
    Publication date: January 15, 2015
    Inventors: Edward John Coyne, Breandan Pol Og O hAnnaidh, Seamus P. Whiston, William Allan Lane, Donal P. McAuliffe
  • Publication number: 20150008539
    Abstract: A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.
    Type: Application
    Filed: July 7, 2014
    Publication date: January 8, 2015
    Inventors: Ryo KANDA, Tetsu TODA, Yasushi NAKAHARA, Yoshinori KAYA