Magnetic Field Patents (Class 257/421)
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Patent number: 10811595Abstract: Techniques are disclosed for forming a logic device including integrated spin-transfer torque magnetoresistive random-access memory (STT-MRAM). In accordance with some embodiments, one or more magnetic tunnel junction (MTJ) devices may be formed within a given back-end-of-line (BEOL) interconnect layer of a host logic device. A given MTJ device may be formed, in accordance with some embodiments, over an electrically conductive layer configured to serve as a pedestal layer for the MTJ's constituent magnetic and insulator layers. In accordance with some embodiments, one or more conformal spacer layers may be formed over sidewalls of a given MTJ device and attendant pedestal layer, providing protection from oxidation and corrosion. A given MTJ device may be electrically coupled with an underlying interconnect or other electrically conductive feature, for example, by another intervening electrically conductive layer configured to serve as a thin via, in accordance with some embodiments.Type: GrantFiled: April 1, 2016Date of Patent: October 20, 2020Assignee: Intel CorporationInventors: Kevin J. Lee, Oleg Golonzka, Tahir Ghani, Ruth A. Brain, Yih Wang
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Patent number: 10804319Abstract: A top pinned magnetic tunnel junction (MTJ) stack for use in spin-transfer torque magnetoresistive random access memory (STT MRAM) is provided. The top pinned MTJ stack contains a synthetic anti-ferromagnetic magnetic free layer stack that is formed on an insulating aluminum nitride (AlN) seed layer having hexagonal symmetry. For such a top pinned MTJ stack, the symmetry requirements for the tunnel barrier layer do not conflict anymore with the symmetry requirements for strong anti-ferromagnetic exchange. Further, and compared to using only a metallic seed, the insulating AlN seed layer limits spin pumping from the magnetic free layer into the metallic seed layer and therefore lowers the switching current, while only making a small contribution to the resistance of a STT MRAM.Type: GrantFiled: February 15, 2019Date of Patent: October 13, 2020Assignee: International Business Machines CorporationInventor: Matthias G. Gottwald
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Patent number: 10804460Abstract: Material layer stack structures to provide a magnetic tunnel junction (MTJ) having improved perpendicular magnetic anisotropy (PMA) characteristics. In an embodiment, a free magnetic layer of the material layer stack is disposed between a tunnel barrier layer and a cap layer of magnesium oxide (Mg). The free magnetic layer includes a Cobalt-Iron-Boron (CoFeB) body substantially comprised of a combination of Cobalt atoms, Iron atoms and Boron atoms. A first Boron mass fraction of the CoFeB body is equal to or more than 25% (e.g., equal to or more than 27%) in a first region which adjoins an interface of the free magnetic layer with the tunnel barrier layer. In another embodiment, the first Boron mass fraction is more than a second Boron mass fraction in a second region of the CoFeB body which adjoins an interface of the free magnetic layer with the cap layer.Type: GrantFiled: July 1, 2016Date of Patent: October 13, 2020Assignee: Intel CorporationInventors: MD Tofizur Rahman, Christopher J. Wiegand, Brian Maertz, Daniel G. Ouellette, Kevin P. O'Brien, Kaan Oguz, Brian S. Doyle, Mark L. Doczy, Daniel B. Bergstrom, Justin S. Brockman, Oleg Golonzka, Tahir Ghani
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Patent number: 10797225Abstract: A dual magnetic tunnel junction (DMTJ) is disclosed with a PL1/TB1/free layer/TB2/PL2/capping layer configuration wherein a first tunnel barrier (TB1) has a substantially lower resistance×area (RA1) product than RA2 for an overlying second tunnel barrier (TB2) to provide an acceptable net magnetoresistive ratio (DRR). Moreover, magnetizations in first and second pinned layers, PL1 and PL2, respectively, are aligned antiparallel to enable a lower critical switching current than when in a parallel alignment. An oxide capping layer having a RACAP is formed on PL2 to provide higher PL2 stability. The condition RA1<RA2 and RACAP<RA2 is achieved when TB1 and the oxide capping layer have one or both of a smaller thickness and a lower oxidation state than TB2, are comprised of conductive (metal) channels in a metal oxide or metal oxynitride matrix, or are comprised of a doped metal oxide or doped metal oxynitride layer.Type: GrantFiled: September 18, 2018Date of Patent: October 6, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Vignesh Sundar, Yu-Jen Wang, Luc Thomas, Guenole Jan, Sahil Patel, Ru-Ying Tong
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Patent number: 10797233Abstract: The various implementations described herein include methods, devices, and systems for fabricating magnetic memory devices. In one aspect, a method of fabricating a magnetic memory device includes: (1) providing a dielectric substrate with a metallic core protruding from the dielectric substrate, where: (a) a first portion of the metallic core is surrounded by the dielectric substrate and a second portion of the metallic core protrudes away from a surface of the dielectric substrate; and (b) the second portion includes: (i) a surface offset from the surface of the dielectric substrate and (ii) sidewalls extending away from the surface of the dielectric substrate to the offset surface; (2) depositing a first ferromagnetic layer on exposed surfaces of the metallic core and the dielectric substrate; (3) depositing a spacer layer on exposed surfaces of the first ferromagnetic layer; and (4) depositing a second ferromagnetic layer on exposed surfaces of the spacer layer.Type: GrantFiled: December 29, 2017Date of Patent: October 6, 2020Assignee: SPIN MEMORY, INC.Inventors: Marcin Gajek, Michail Tzoufras, Davide Guarisco, Eric Michael Ryan
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Patent number: 10797230Abstract: Some embodiments relate to a method for manufacturing a magnetoresistive random-access memory (MRAM) cell. The method includes forming a spacer layer surrounding at least a magnetic tunnel junction (MTJ) layer and a top electrode of the MRAM cell; etching the spacer layer to expose a top surface of the top electrode and a top surface of a spacer formed by the spacer layer; forming an upper etch stop layer over the top electrode top surface and the spacer top surface; and forming an upper metal layer in contact with the top electrode top surface of the MRAM cell. A width of the upper etch stop layer is greater than a width of a bottom surface of the upper metal layer.Type: GrantFiled: September 24, 2019Date of Patent: October 6, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Jiunyu Tsai, Sheng-Huang Huang
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Patent number: 10796833Abstract: An electrical device structure including a magnetic tunnel junction structure having a first tunnel junction dielectric layer positioned between a free magnetization layer and a fixed magnetization layer. A magnetization enhancement stack present on the magnetic tunnel junction structure. The magnetization enhancement stack includes a second tunnel junction layer that is in contact with the free magnetization layer of the magnetic tunnel junction structure, a metal contact layer present on the second tunnel junction layer, and a metal electrode layer present on the metal contact layer. A metallic ring on a sidewall of the magnetic enhancement stack, wherein a base of the metallic ring may be in contact with the free magnetization layer of the magnetic tunnel junction structure.Type: GrantFiled: September 25, 2018Date of Patent: October 6, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Nicholas A. Lanzillo, Benjamin D. Briggs, Michael Rizzolo, Theodorus E. Standaert, Lawrence A. Clevenger, James Stathis
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Patent number: 10790635Abstract: An apparatus for novel technique of high-speed magnetic recording based on manipulating pinning layer in magnetic tunnel junction-based memory by using terahertz magnon laser is provided. The apparatus comprises a terahertz writing head configured to generate a tunable terahertz writing signal and a memory cell including a spacer that comprises a thickness configured based on Ruderman-Kittel-Kasuya-Yosida (RKKY) interaction. The memory cell comprises two separate memory states: a first binary state and a second binary state; wherein the first binary memory state corresponds to a ferromagnetic sign of the Ruderman-Kittel-Kasuya-Yosida (RKKY) interaction corresponding to a first thickness value of the spacer; and wherein the second binary memory state corresponds to an antiferromagnetic sign of the Ruderman-Kittel-Kasuya-Yosida (RKKY) interaction corresponding to a second thickness value of the spacer. The thickness of the spacer is manipulated by the tunable terahertz writing signal.Type: GrantFiled: December 5, 2019Date of Patent: September 29, 2020Assignee: Magtera, Inc.Inventor: Boris G. Tankhilevich
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Patent number: 10783945Abstract: The present invention provides a memory device in which a lower electrode, a seed layer, synthetic antiferromagnetic layers, a separation layer, a magnetic tunnel junction, a capping layer, and an upper electrode are formed on a substrate in a laminated manner, wherein a diffusion barrier is formed between the magnetic tunnel junction and the capping layer. In addition, the present invention provides a memory device in which a lower electrode, a seed layer, synthetic antiferromagnetic layers, a separation layer, a magnetic tunnel junction, a capping layer, and an upper electrode are formed on a substrate in a laminated manner, wherein the seed layer is formed of a material that allows the synthetic antiferromagnetic layers to grow in the FCC (111) direction.Type: GrantFiled: November 18, 2019Date of Patent: September 22, 2020Assignee: IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)Inventors: Jea Gun Park, Du Yeong Lee, Seung Eun Lee
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Patent number: 10777737Abstract: In a method of manufacturing an MRAM device, first and second lower electrodes may be formed on first and second regions, respectively, of a substrate. First and second MTJ structures having different switching current densities from each other may be formed on the first and second lower electrodes, respectively. First and second upper electrodes may be formed on the first and second MTJ structures, respectively.Type: GrantFiled: August 14, 2019Date of Patent: September 15, 2020Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dae-Shik Kim, Jeong-Heon Park, Gwan-Hyeob Koh
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Patent number: 10770511Abstract: A magnetic random access memory (MRAM) device includes a conductor disposed in an insulating material of a lower wiring layer, a magnetic tunnel junction (MTJ) structure formed in an upper wiring layer, and a landing pad formed in an intermediary wiring layer between the lower and upper wiring layers, the landing pad extending from a top surface of the conductor to a height above the intermediary wiring layer, wherein the landing pad connects the MJT structure to the conductor.Type: GrantFiled: February 1, 2019Date of Patent: September 8, 2020Assignee: International Business Machines CorporationInventors: Lawrence A. Clevenger, Nicholas A. Lanzillo, Michael Rizzolo, Theodorus E. Standaert
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Patent number: 10763426Abstract: Various embodiments of the present application are directed towards a method for forming a flat via top surface for memory, as well as an integrated circuit (IC) resulting from the method. In some embodiments, an etch is performed into a dielectric layer to form an opening. A liner layer is formed covering the dielectric layer and lining the opening. A lower body layer is formed covering the dielectric layer and filling a remainder of the opening over the liner layer. A top surface of the lower body layer and a top surface of the liner layer are recessed to below a top surface of the dielectric layer to partially clear the opening. A homogeneous upper body layer is formed covering the dielectric layer and partially filling the opening. A planarization is performed into the homogeneous upper body layer until the dielectric layer is reached.Type: GrantFiled: August 27, 2019Date of Patent: September 1, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Sheng-Hung Shih, Tung-Sheng Hsiao, Wen-Ting Chu, Yu-Wen Liao, I-Ching Chen
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Patent number: 10763304Abstract: The present disclosure provides a semiconductor structure, including a memory region and a logic region adjacent to the memory region. The memory region includes a first Nth metal line, a first stop layer being disposed over a magnetic tunneling junction (MTJ) over the first Nth metal line, and a first (N+1)th metal via being disposed over the MTJ and surrounded by the first stop layer, the first (N+1)th metal via having a first height. The logic region includes a second Nth metal line, a second stop layer being disposed over an (N+1)th metal line, and a second (N+1)th metal via over the (N+1)th metal line and having a second height. N is an integer greater than or equal to 1 and the first height is greater than the second height. A method of manufacturing the semiconductor structure is also disclosed.Type: GrantFiled: April 23, 2018Date of Patent: September 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chern-Yow Hsu, Yuan-Tai Tseng, Shih-Chang Liu
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Patent number: 10763428Abstract: A magnetic tunnel junction is disclosed wherein the reference layer and free layer each comprise one layer having a boron content from 25 to 50 atomic %, and an adjoining second layer with a boron content from 1 to 20 atomic %. One of the first and second layers in each of the free layer and reference layer contacts the tunnel barrier. Each boron containing layer has a thickness of 1 to 10 Angstroms and may include one or more B layers and one or more Co, Fe, CoFe, or CoFeB layers. As a result, migration of non-magnetic metals along crystalline boundaries to the tunnel barrier is prevented, and the MTJ has a low defect count of around 10 ppm while maintaining an acceptable TMR ratio following annealing to temperatures of about 400° C. The boron containing layers are selected from CoB, FeB, CoFeB and alloys thereof including CoFeNiB.Type: GrantFiled: December 8, 2017Date of Patent: September 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Huanlong Liu, Yuan-Jen Lee, Jian Zhu, Guenole Jan, Po-Kang Wang
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Patent number: 10763427Abstract: A method of forming a 3D Hall effect sensor and the resulting device are provided. Embodiments include forming a p-type well in a substrate; forming a first n-type well in a first region surrounded by the p-type well in top view; forming a second n-type well in a second region surrounding the p-type well; implanting n-type dopant in the first and second n-type wells; and implanting p-type dopant in the p-type well and the first n-type well.Type: GrantFiled: January 9, 2019Date of Patent: September 1, 2020Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Eng Huat Toh, Ruchil Kumar Jain, Yongshun Sun, Shyue Seng Tan
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Patent number: 10756258Abstract: A method for fabricating a memory device includes forming a bottom electrode over a substrate; forming an etch stop layer over and surrounding the bottom electrode; removing at least one portion of the etch stop layer to expose the bottom electrode; forming a stack layer over the bottom electrode and a remaining portion of the etch stop layer, the stack layer comprising a resistance switching layer; and etching the stack layer to form a stack over the bottom electrode, the stack comprising a resistance switching element over the bottom electrode and a top electrode over the resistance switching element, wherein the etch stop layer has a higher etch resistance to the etching than that of the resistance switching element.Type: GrantFiled: January 2, 2018Date of Patent: August 25, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Hao Liao, Hsi-Wen Tien, Chih-Wei Lu, Pin-Ren Dai, Chung-Ju Lee
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Patent number: 10741477Abstract: Semiconductor devices and methods of forming the same are disclosed. One of the semiconductor devices includes a first conductive layer, an organic layer, a silicon layer, a magnetic layer and a second conductive layer. The organic layer is disposed over and exposes a portion of the first conductive layer. The silicon layer is disposed on and in contact with the organic layer. The magnetic layer is disposed over the first conductive layer. The second conductive layer is disposed over the organic layer and the magnetic layer to electrically connect the first conductive layer.Type: GrantFiled: March 23, 2018Date of Patent: August 11, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Cheng-Lung Yang, Chih-Hung Su, Chen-Shien Chen, Hon-Lin Huang, Kun-Ming Tsai, Wei-Je Lin
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Patent number: 10734443Abstract: A material stack includes a first magnetoresistance element with a first direction of response to an external magnetic field and a second magnetoresistance element with second direction of response to the external magnetic field, opposite to the first direction of response. The first magnetoresistance element can be disposed under or over the second magnetoresistance element. An insulating layer separates the first and second magnetoresistance elements.Type: GrantFiled: July 10, 2019Date of Patent: August 4, 2020Assignee: Allegro MicroSystems, LLCInventors: Rémy Lassalle-Balier, Paolo Campiglio
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Patent number: 10734013Abstract: Spin transfer torque (STT) devices with multilayer seed layers that can be used in magnetic recording and memory are provided. One such STT device includes a substrate, and a stack of layers formed on the substrate, where the stack includes a first seed layer directly on the substrate and including Cr, a second seed layer on the first seed layer and including Ta, a ferromagnetic free layer on the second seed layer; a ferromagnetic polarizing layer, and a nonmagnetic spacer layer between the free layer and the polarizing layer. One such method includes fabricating the STT device.Type: GrantFiled: February 15, 2019Date of Patent: August 4, 2020Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.Inventors: Zheng Gao, Masahiko Hashimoto, Susumu Okamura, James Mac Freitag
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Patent number: 10734572Abstract: A device including a capping layer over a portion of a top electrode, and method of production thereof. Embodiments include an MRAM cell in a first region and a logic area in a second region of a substrate, wherein the MRAM cell includes a MTJ pillar between a top electrode and a bottom electrode; and a capping layer over a portion of the top electrode.Type: GrantFiled: July 18, 2018Date of Patent: August 4, 2020Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Yi Jiang, Curtis Chun-I Hsieh, Wanbing Yi, Juan Boon Tan
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Patent number: 10725100Abstract: Methods and apparatus for magnetic field sensor having a sensing element, an analog circuit path coupled to the sensing element for generating an output voltage in response to a magnetic field applied to the sensing element, and a coil in proximity to the sensing element, the coil having a first terminal that is accessible external to the magnetic field sensor.Type: GrantFiled: March 15, 2013Date of Patent: July 28, 2020Assignee: Allegro MicroSystems, LLCInventors: Shaun D. Milano, Michael C. Doogue, William P. Taylor
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Patent number: 10727272Abstract: The present disclosure provides a semiconductor structure, including a logic region and a memory region. The memory region includes a first Nth metal line of an Nth metal layer, a magnetic tunneling junction (MTJ) over first Nth metal line, a carbon-based layer between the first Nth metal line and the MTJ, and a first (N+M)th metal via of an (N+M)th metal layer. A method of manufacturing the semiconductor structure is also disclosed.Type: GrantFiled: April 25, 2018Date of Patent: July 28, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Harry-Hak-Lay Chuang, Sheng-Huang Huang, Keng-Ming Kuo, Hung Cho Wang
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Patent number: 10727397Abstract: A magneto-resistive random access memory (MRAM) cell includes a substrate having a dielectric layer disposed thereon, a conductive via disposed in the dielectric layer, and a cylindrical stack disposed on the conductive via. The cylindrical stack includes a bottom electrode, a magnetic tunneling junction (MTJ) layer on the bottom electrode, and a top electrode on the MTJ layer. A spacer layer is disposed on a sidewall of the cylindrical stack. The top electrode protrudes from a top surface of the spacer layer.Type: GrantFiled: January 29, 2019Date of Patent: July 28, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Lin Wang, Yi-Wei Tseng, Meng-Jun Wang, Chen-Yi Weng, Chin-Yang Hsieh, Jing-Yin Jhang, Yu-Ping Wang, Chien-Ting Lin, Ying-Cheng Liu, Yi-An Shih, Yi-Hui Lee, I-Ming Tseng
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Patent number: 10720178Abstract: A magnetoresistance effect element has a first ferromagnetic metal layer, a second ferromagnetic metal layer, and a tunnel barrier layer that is sandwiched between the first and second ferromagnetic metal layers, and the tunnel barrier layer has a spinel structure represented by a composition formula AGa2Ox (0<x?4), and an A-site is a non-magnetic divalent cation which is one or more selected from a group consisting of magnesium, zinc and cadmium.Type: GrantFiled: February 15, 2019Date of Patent: July 21, 2020Assignee: TDK CORPORATIONInventors: Tomoyuki Sasaki, Katsuyuki Nakada, Tatsuo Shibata
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Patent number: 10720567Abstract: Techniques for preventing switching of spins in a magnetic tunnel junction by stray magnetic fields using a thin film magnetic shield are provided. In one aspect, a method of forming a magnetic tunnel junction includes: forming a stack on a substrate, having a first magnetic layer, a tunnel barrier, and a second magnetic layer; etching the stack to partially pattern the magnetic tunnel junction in the stack, wherein the etching includes patterning the magnetic tunnel junction through the second magnetic layer, the tunnel barrier, and partway through the first magnetic layer; depositing a first spacer and a magnetic shield film onto the partially patterned magnetic tunnel junction; etching back the magnetic shield film and first spacer; complete etching of the magnetic tunnel junction through the first magnetic layer to form a fully patterned magnetic tunnel junction; and depositing a second spacer onto the fully patterned magnetic tunnel junction.Type: GrantFiled: May 7, 2018Date of Patent: July 21, 2020Assignee: International Business Machines CorporationInventors: Benjamin D. Briggs, Lawrence A. Clevenger, Nicholas A. Lanzillo, Michael Rizzolo, Theodorus E. Standaert
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Patent number: 10720568Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer, a bottom electrode over the Nth metal layer, a magnetic tunneling junction (MTJ) over the bottom electrode, a top electrode over the MTJ, and an (N+M)th metal layer over the Nth metal layer. N and M are positive integers. The (N+M)th metal layer surrounds a portion of a sidewall of the top electrode. A manufacturing method of forming the semiconductor structure is also provided.Type: GrantFiled: July 30, 2018Date of Patent: July 21, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Fu-Ting Sung, Chung-Chiang Min, Yuan-Tai Tseng, Chern-Yow Hsu, Shih-Chang Liu
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Patent number: 10720572Abstract: A memory device includes a memory stack formed on a substrate to program skyrmions within at least one layer of the stack. The skyrmions represent logic states of the memory device. The memory stack further includes a top and bottom electrode to receive electrical current from an external source and to provide the electrical current to the memory stack. A free layer stores a logic state of the skyrmions in response to the electrical current. A Dzyaloshinskii-Moriya (DM) Interaction (DMI) layer in contact with the free layer induces skyrmions in the free layer. A tunnel barrier is interactive with the DMI layer to facilitate detection of the logic state of the skyrmions in response to a read current. At least one fixed magnetic (FM) layer is positioned within the memory stack to facilitate programming of the skyrmions within the free layer in response to the electrical current.Type: GrantFiled: February 12, 2019Date of Patent: July 21, 2020Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: Michael M. Fitelson, Thomas F. Ambrose, Nicholas D. Rizzo
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Patent number: 10707269Abstract: According to one embodiment, a semiconductor storage device includes: a first memory cell and a second memory cell, each including a switching element and a resistance change element coupled to the switching element, and the first memory cell and the second memory cell being adjacent to each other; a non-active member having a switching function between the switching element of the first memory cell and the switching element of the second memory cell; and an insulator which covers at least one of an upper surface or a lower surface of the non-active member, a side surface of the non-active member, a side surface of the switching element of the first memory cell, and a side surface of the switching element of the second memory cell.Type: GrantFiled: March 13, 2019Date of Patent: July 7, 2020Assignee: TOSHIBA MEMORY CORPORATIONInventors: Toshihiko Nagase, Daisuke Watanabe, Koji Ueda, Tadashi Kai, Kazumasa Sunouchi
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Patent number: 10707356Abstract: According to one embodiment, a magnetic memory device includes a stacked structure including first and second magnetic layers having variable and fixed magnetization directions, respectively, and a nonmagnetic layer provided between the first and second magnetic layers and containing a first compound containing first cationic and anionic elements, and a predetermined-material layer provided around side surfaces of the stacked structure and containing a second compound containing second added cationic and second added anionic elements. An absolute value of a valence number (ionic valency) of the second added cationic element is less than that of the first cationic element, and an absolute value of a valence number (ionic valency) of the second added anionic element is less than that of the first anionic element.Type: GrantFiled: March 14, 2019Date of Patent: July 7, 2020Assignee: TOSHIBA MEMORY CORPORATIONInventors: Megumi Yakabe, Yasushi Nakasaki, Tadaomi Daibou, Tadashi Kai, Junichi Ito, Masahiro Koike, Shogo Itai, Takamitsu Ishihara
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Patent number: 10700125Abstract: The present disclosure relates to magnetic memory device. The magnetic memory device includes a bottom electrode, a selector layer disposed over the bottom electrode, and a MTJ stack disposed over the selector layer and comprising a reference layer and a free layer disposed over the reference layer and separated from the reference layer by a tunneling barrier layer. The magnetic memory device further includes a modulating layer disposed over the MTJ stack and a top electrode disposed over the switching threshold modulating layer. The selector layer is configured to switch current on and off based on applied bias.Type: GrantFiled: May 20, 2019Date of Patent: June 30, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Katherine H. Chiang, Chung-Te Lin, Min Cao, Han-Ting Tsai, Pin-Cheng Hsu, Yen-Chung Ho
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Patent number: 10700266Abstract: An MTJ structure having vertical magnetic anisotropy is provided. The MTJ structure having vertical magnetic anisotropy can comprise: a substrate; an artificial antiferromagnetic layer located on the substrate; a buffer layer located on the artificial antiferromagnetic layer, and including W or an alloy containing W; a first ferromagnetic layer located on the buffer layer, and having vertical magnetic anisotropy; a tunneling barrier layer located on the first ferromagnetic layer; and a second ferromagnetic layer located on the tunneling barrier layer, and having vertical magnetic anisotropy. Accordingly, in the application of bonding the artificial antiferromagnetic layer with a CoFeB/MgO/CoFeB structure, the MTJ structure having improved thermal stability at high temperature can be provided by using the buffer layer therebetween.Type: GrantFiled: January 6, 2016Date of Patent: June 30, 2020Assignee: Industry-University Cooperation Foundation Hanyang UniversityInventors: Jin Pyo Hong, Ja Bin Lee
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Patent number: 10700123Abstract: Magnetoresistive device architectures and methods for manufacturing are presented that facilitate integration of process steps associated with forming such devices into standard process flows used for surrounding logic/circuitry. In some embodiments, the magnetoresistive device structures are designed such that the devices are able to fit within the vertical dimensions of the integrated circuit associated with a single metal layer and a single layer of interlayer dielectric material. Integrating the processing for the magnetoresistive devices can include using the same standard interlayer dielectric material as used in the surrounding circuits on the integrated circuit as well as using standard vias to interconnect to at least one of the electrodes of the magnetoresistive devices.Type: GrantFiled: September 26, 2018Date of Patent: June 30, 2020Assignee: Everspin Technologies, Inc.Inventors: Thomas Andre, Sanjeev Aggarwal, Kerry Joseph Nagel, Sarin A. Deshpande
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Patent number: 10692927Abstract: A double magnetic tunnel junction (MTJ) stack for use in spin-transfer torque magnetoresistive random access memory (STT MRAM) is provided. The double MTJ stack includes a bottom tunnel barrier layer having hexagonal symmetry and composed of AlN, a magnetic free layer stack containing a synthetic anti-ferromagnetic coupling layer, and a top tunnel barrier layer having cubic symmetry. For such a double MTJ stack, the symmetry requirements for the tunnel barrier layers do not conflict anymore with the symmetry requirements for strong anti-ferromagnetic exchange. Thus, such a double MTJ stack can be used to provide performance enhancement such as faster switching times and lower write errors to a STT MRAM.Type: GrantFiled: February 15, 2019Date of Patent: June 23, 2020Assignee: International Business Machines CorporationInventor: Matthias G. Gottwald
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Patent number: 10692521Abstract: A storage element is provided. The storage element includes a memory layer; a fixed magnetization layer; an intermediate layer including a non-magnetic material; wherein the intermediate layer is provided between the memory layer and the fixed magnetization layer; wherein the fixed magnetization layer includes at least a first magnetic layer, a second magnetic layer, and a non-magnetic layer, and wherein the first magnetic layer includes a CoFeB composition. A memory apparatus and a magnetic head are also provided.Type: GrantFiled: October 4, 2019Date of Patent: June 23, 2020Assignee: Sony CorporationInventors: Kazutaka Yamane, Masanori Hosomi, Hiroyuki Ohmori, Kazuhiro Bessho, Yutaka Higo, Tetsuya Asayama, Hiroyuki Uchida
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Patent number: 10692926Abstract: A magnetoresistive stack/structure and method of manufacturing same comprising wherein the stack/structure includes a seed region, a fixed magnetic region disposed on and in contact with the seed region, a dielectric layer(s) disposed on the fixed magnetic region and a free magnetic region disposed on the dielectric layer(s). In one embodiment, the seed region comprises an alloy including nickel and chromium having (i) a thickness greater than or equal to 40 Angstroms (+/?10%) and less than or equal to 60 Angstroms (+/?10%), and (ii) a material composition or content of chromium within a range of 25-60 atomic percent (+/?10%) or 30-50 atomic percent (+/?10%).Type: GrantFiled: October 15, 2019Date of Patent: June 23, 2020Assignee: Everspin Technologies, Inc.Inventors: Jijun Sun, Sanjeev Aggarwal, Han-Jong Chia, Jon M. Slaughter, Renu Whig
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Patent number: 10686125Abstract: The present disclosure, in some embodiments, relates to an integrated circuit. The integrated circuit includes a dielectric protection layer disposed over a dielectric structure that laterally surrounds one or more conductive interconnect layers. The dielectric protection layer has a protrusion extending outward from an upper surface of the dielectric protection layer. A bottom electrode is disposed over the dielectric protection layer and has sidewalls extending outward from a lower surface of the bottom electrode through the dielectric protection layer. The bottom electrode has a substantially planar upper surface over the protrusion. A data storage element is over the substantially planar upper surface of the bottom electrode, and a top electrode is over the data storage element.Type: GrantFiled: December 17, 2018Date of Patent: June 16, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
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Patent number: 10685671Abstract: A magnetoresistance effect element has a first ferromagnetic metal layer, a second ferromagnetic metal layer, and a tunnel barrier layer that is sandwiched between the first and second ferromagnetic metal layers, and the tunnel barrier layer has a spinel structure represented by a composition formula AGa2Ox (0<x?4), and an A-site is a non-magnetic divalent cation which is one or more selected from a group consisting of magnesium, zinc and cadmium.Type: GrantFiled: February 15, 2019Date of Patent: June 16, 2020Assignee: TDK CORPORATIONInventors: Tomoyuki Sasaki, Katsuyuki Nakada, Tatsuo Shibata
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Patent number: 10679782Abstract: Described is an apparatus which comprises: an input ferromagnet to receive a first charge current and to produce a first spin current; a first layer configured to convert the first spin current to a second charge current via spin orbit coupling (SOC), wherein at least a part of the first layer is coupled to the input ferromagnet; and a second layer configured to convert the second charge current to a second spin current via spin orbit coupling (SOC).Type: GrantFiled: September 9, 2015Date of Patent: June 9, 2020Assignee: Intel CorporationInventors: Sasikanth Manipatruni, Dmitri E. Nikonov, Anurag Chaudhry, Ian A. Young
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Patent number: 10672604Abstract: Improved resistive random access memory (RRAM) devices are provided that use a 2-D electrode as the SET electrode to take up a variable amount of oxygen from an oxide material, thereby providing a non-volatile resistive memory cell.Type: GrantFiled: September 20, 2017Date of Patent: June 2, 2020Assignee: The Board of Trustees of the Leland Stanford Junior UniversityInventors: Seunghyun Lee, Joon Sohn, Hon-Sum Philip Wong
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Patent number: 10672976Abstract: A magnetoresistive random-access memory (MRAM) is disclosed. MRAM device has a magnetic tunnel junction stack having a significantly improved performance of the free layer in the magnetic tunnel junction structure. The MRAM device utilizes a precessional spin current (PSC) magnetic layer in conjunction with a perpendicular MTJ where the in-plane magnetization direction of the PSC magnetic layer is free to rotate. The precessional spin current magnetic layer is constructed with a material having a face centered cubic crystal structure, such as permalloy.Type: GrantFiled: February 28, 2017Date of Patent: June 2, 2020Assignee: Spin Memory, Inc.Inventors: Mustafa Michael Pinarbasi, Bartlomiej Adam Kardasz
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Patent number: 10665676Abstract: Body contact layouts for semiconductor structures are disclosed. In at least one exemplary embodiment, a semiconductor structure comprises: a plurality of gates disposed on a semiconductor layer, each gate extending parallel to a y-axis in a coordinate space; a source region disposed between two of the plurality of gates; a plurality of body contacts disposed in each source region; and wherein a portion of each source region, adjacent to the gate, has a width extending parallel to the y-axis that is greater than the width of the source region parallel to the y-axis at a distance on an x-axis from the gate.Type: GrantFiled: April 25, 2018Date of Patent: May 26, 2020Assignee: Intersil Americas LLCInventors: Dev Alok Girdhar, Jeffrey Michael Johnston
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Patent number: 10665776Abstract: Provided is a magnetoresistance effect element in which a tunnel barrier layer stably has a cation disordered spinel structure. This magnetoresistance effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a tunnel barrier layer disposed between the first ferromagnetic layer and the second ferromagnetic layer. In addition, the tunnel barrier layer is an oxide of MgxAl1-x (0?x<1) and an amount of oxygen in the tunnel barrier layer is lower than an amount of oxygen in a fully oxidized state in which the oxide has an ordered spinel structure.Type: GrantFiled: February 14, 2019Date of Patent: May 26, 2020Assignees: TDK CORPORATION, NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Shinto Ichikawa, Katsuyuki Nakada, Seiji Mitani, Hiroaki Sukegawa, Kazuhiro Hono, Tadakatsu Ohkubo
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Patent number: 10658577Abstract: A magnetic tunnel junction with perpendicular magnetic anisotropy (PMA MTJ) is disclosed wherein a free layer interfaces with a tunnel barrier and has a second interface with an oxide layer. A lattice-matching layer adjoins an opposite side of the oxide layer with respect to the free layer and is comprised of CoXFeYNiZLWMV or an oxide or nitride of Ru, Ta, Ti, or Si, wherein L is one of B, Zr, Nb, Hf, Mo, Cu, Cr, Mg, Ta, Ti, Au, Ag, or P, and M is one of Mo, Mg, Ta, Cr, W, or V, (x+y+z+w+v)=100 atomic %, x+y>0, and each of v and w are >0. The lattice-matching layer grows a BCC structure during annealing thereby promoting BCC structure growth in the oxide layer that results in enhanced free layer PMA and improved thermal stability.Type: GrantFiled: September 30, 2019Date of Patent: May 19, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Huanlong Liu, Yuan-Jen Lee, Jian Zhu, Guenole Jan, Luc Thomas, Po-Kang Wang, Ru-Ying Tong, Jodi Iwata
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Patent number: 10650873Abstract: A memory array that comprises three dimensionally stacked two-dimensional memory arrays. The memory array includes a first layer and a second layer oriented orthogonal to the first layer. The memory array further includes a magnetic tunnel junction adjacent to each of the first layer and the second layer. The magnetic tunnel junction further includes a first magnetic layer adjacent to the second layer. Additionally, the magnetic tunnel junction includes a second magnetic layer adjacent to the first layer. The magnetic tunnel junction also includes a tunnel layer adjacent to the first magnetic layer and the second magnetic layer.Type: GrantFiled: June 18, 2018Date of Patent: May 12, 2020Assignee: Carnegie Mellon UniversityInventors: Jian-Gang Zhu, Chia-Ling Chien, Qinli Ma
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Patent number: 10651370Abstract: A magnetic data recording element for magnetic random access memory data recording. The magnetic data recording element includes a magnetic tunnel junction element that includes a magnetic reference layer, a magnetic free layer and a non-magnetic barrier layer located between the non-magnetic reference layer and the magnetic free layer. The magnetic free layer includes a layer of Hf that causes the magnetic free layer to have an increased perpendicular magnetic anisotropy. This increased perpendicular magnetic anisotropy improves data retention and increases thermal stability, by preventing the magnetization of the magnetic free layer from inadvertently losing its magnetic orientation.Type: GrantFiled: December 29, 2017Date of Patent: May 12, 2020Assignee: SPIN MEMORY, INC.Inventors: Mustafa Pinarbasi, Bartlomiej Adam Kardasz, Jorge Vasquez, Thomas D. Boone
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Patent number: 10643680Abstract: A magnetoresistive random-access memory (MRAM) device is disclosed. The device described herein has a thermal stability enhancement layer over the free layer of a magnetic tunnel junction. The thermal stability enhancement layer improves the thermal stability of the free layer, increases the magnetic moment of the free layer, while also not causing the magnetic direction of the free layer to become in plan. The thermal stability enhancement layer can be comprised of a layer of CoFeB ferromagnetic material.Type: GrantFiled: September 6, 2018Date of Patent: May 5, 2020Assignee: Spin Memory, Inc.Inventors: Mustafa Pinarbasi, Bartek Kardasz
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Patent number: 10643643Abstract: Embodiments of the present disclosure generally relate to a spin torque oscillator device (STO) including a high damping field generation layer or a damping enhancing capping layer for use in microwave assisted magnetic recording (MAMR) write heads. In one embodiment, a STO device for a MAMR write head includes a spin polarization layer, a spacer layer over the spin polarization layer, and a field generation layer over the spacer layer. The field generation layer has a damping in a range from about 0.5% to about 20%.Type: GrantFiled: March 19, 2019Date of Patent: May 5, 2020Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.Inventors: Zheng Gao, James Mac Freitag, Susumu Okamura
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Patent number: 10634634Abstract: Disclosed is a microsensor package. Particularly, disclosed is a microsensor package, in which a sensing chip is packaged by using PCBs stacked on top of one another, whereby the thickness of the package slim can be kept slim, and at the same time, it can be manufactured at a low cost and can be easily manufactured.Type: GrantFiled: September 12, 2017Date of Patent: April 28, 2020Assignee: POINT ENGINEERING CO., LTD.Inventors: Bum Mo Ahn, Seung Ho Park, Sung Hyun Byun
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Patent number: 10636962Abstract: Aspects disclosed include spin-orbit torque (SOT) magnetic tunnel junction (MTJ) (SOT-MTJ) devices employing perpendicular and in-plane free layer magnetic anisotropy to facilitate perpendicular magnetic orientation switching. A free layer in a MTJ in the SOT-MTJ device includes both a perpendicular magnetic anisotropy (PMA) region(s) and an in-plane magnetic anisotropy (IMA) region(s). A spin torque is generated in the free layer when a SOT switching current flows through an electrode adjacent to the free layer sufficient to switch the magnetic moment of the free layer to an in-plane magnetic orientation. To prevent a non-deterministic perpendicular magnetic orientation after the SOT switching current is removed, the free layer also includes the IMA region(s) to provide an in-plane magnetization to generate an effective magnetic field in the free layer to assist in switching the magnetic moment of the free layer past an in-plane magnetic orientation to a perpendicular magnetic orientation.Type: GrantFiled: August 21, 2018Date of Patent: April 28, 2020Assignee: QUALCOMM IncorporatedInventors: Chando Park, Sungryul Kim, Seung Hyuk Kang
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Patent number: 10636794Abstract: A magnetic tunnel junction (MTJ) structure of a magnetic random access memory (MRAM) cell includes an insulation layer, a patterned MTJ film stack, an aluminum oxide protection layer, an interlayer dielectric, and a connection structure. The patterned MTJ film stack is disposed on the insulation layer. The aluminum oxide protection layer is disposed on a sidewall of the patterned MTJ film stack, and the aluminum oxide protection layer includes an aluminum film oxidized by an oxidation treatment. The interlayer dielectric covers the aluminum oxide protection layer and the patterned MTJ film stack. The connection structure penetrates the interlayer dielectric above the patterned MTJ film stack, and the connection structure is electrically connected to a topmost portion of the patterned MTJ film stack.Type: GrantFiled: May 2, 2019Date of Patent: April 28, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hsiao-Pang Chou, Yu-Ru Yang, Chih-Chien Liu, Chao-Ching Hsieh, Chun-Hsien Lin