Schottky Barrier Patents (Class 257/471)
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Publication number: 20130334647Abstract: A semiconductor device has a gate electrode including a leg part and a canopy part. A barrier layer is formed on a bottom face of the leg part of the gate electrode. In addition, on the lower surface of the barrier layer, a Schottky metal layer with an electrode width wider than the electrode width of the barrier layer is formed to have a Schottky junction with a semiconductor layer.Type: ApplicationFiled: February 21, 2013Publication date: December 19, 2013Applicant: Kabushiki Kaisha ToshibaInventor: Fumio SASAKI
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Patent number: 8610233Abstract: A method of forming a transistor device includes forming a patterned gate structure over a semiconductor substrate, forming a raised source region over the semiconductor substrate adjacent a source side of the gate structure, and forming silicide contacts on the raised source region, on the patterned gate structure, and on the semiconductor substrate adjacent a drain side of the gate structure. Thereby, a hybrid field effect transistor (FET) structure having a drain side Schottky contact and a raised source side ohmic contact is defined.Type: GrantFiled: March 16, 2011Date of Patent: December 17, 2013Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Ali Khakifirooz, Pranita Kulkarni, Ghavam G. Shahidi
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Patent number: 8610235Abstract: A Schottky diode includes a semiconductor layer formed on a semiconductor substrate; first and second trenches formed in the semiconductor layer where the first and second trenches are lined with a thin dielectric layer and being filled partially with a trench conductor layer and remaining portions of the first and second trenches are filled with a first dielectric layer; and a Schottky metal layer formed on a top surface of the semiconductor layer between the first trench and the second trench. The Schottky diode is formed with the Schottky metal layer as the anode and the semiconductor layer between the first and second trenches as the cathode. The trench conductor layer in each of the first and second trenches is electrically connected to the anode of the Schottky diode. In one embodiment, the Schottky diode is formed integrated with a trench field effect transistor on the same semiconductor substrate.Type: GrantFiled: September 22, 2011Date of Patent: December 17, 2013Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Daniel Calafut, Yi Su, Jongoh Kim, Hong Chang, Hamza Yilmaz, Daniel S. Ng
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Patent number: 8604582Abstract: An embodiment is a semiconductor structure. The semiconductor structure comprises a p-type region in a substrate; a first n-type well in the p-type region; a first p-type well in the p-type region; and a second p-type well in the first p-type well. A concentration of a p-type impurity in the first p-type well is less than a concentration of a p-type impurity in the second p-type well. Additional embodiments further comprise further n-type and p-type wells in the substrate. A method for forming a semiconductor structure is also disclosed.Type: GrantFiled: October 12, 2011Date of Patent: December 10, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jam-Wem Lee, Yi-Feng Chang
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Patent number: 8604583Abstract: The present invention aims to enhance the reliability of a semiconductor device equipped with a Schottky barrier diode within the same chip, and its manufacturing technology. The semiconductor device includes an n-type n-well region formed over a p-type semiconductor substrate, an n-type cathode region formed in part thereof and higher in impurity concentration than the n-well region, a p-type guard ring region formed so as to surround the n-type cathode region, an anode conductor film formed so as to integrally cover the n-type cathode region and the p-type guard ring region and to be electrically coupled thereto, n-type cathode conduction regions formed outside the p-type guard ring region with each separation portion left therebetween, and a cathode conductor film formed so as to cover the n-type cathode conduction regions and to be electrically coupled thereto. The anode conductor film and the n-type cathode region are Schottky-coupled to each other.Type: GrantFiled: April 3, 2012Date of Patent: December 10, 2013Assignee: Renesas Electronics CorporationInventors: Kunihiko Kato, Hideki Yasuoka, Masatoshi Taya, Masami Koketsu
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Publication number: 20130320482Abstract: A semiconductor device includes a pillar formed on a substrate of the same conductivity type. The pillar has a vertical thickness that extends from a top surface down to the substrate. The pillar extends in first and second lateral directions in a loop shape. First and second dielectric regions are disposed on opposite lateral sides of the pillar, respectively. First and second conductive field plates are respectively disposed in the first and second dielectric regions. A metal layer is disposed on the top surface of the pillar, the metal layer forming a Schottky diode with respect to the pillar. When the substrate is raised to a high-voltage potential with respect to both the metal layer and the first and second field plates, the first and second field plates functioning capacitively to deplete the pillar of charge, thereby supporting the high-voltage potential along the vertical thickness of the pillar.Type: ApplicationFiled: June 1, 2012Publication date: December 5, 2013Applicant: POWER INTEGRATIONS, INC.Inventor: Vijay Parthasarathy
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Patent number: 8598621Abstract: A memory cell includes a thyristor having a plurality of alternately doped, vertically superposed semiconductor regions; a vertically oriented access transistor having an access gate; and a control gate operatively laterally adjacent one of the alternately doped, vertically superposed semiconductor regions. The control gate is spaced laterally of the access gate. Other embodiments are disclosed, including methods of forming memory cells and methods of forming a shared doped semiconductor region of a vertically oriented thyristor and a vertically oriented access transistor.Type: GrantFiled: February 11, 2011Date of Patent: December 3, 2013Assignee: Micron Technology, Inc.Inventor: Sanh D. Tang
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Patent number: 8598623Abstract: A termination structure for a semiconductor device includes an array of termination cells formed using a thin epitaxial layer (nanotube) formed on sidewalls of dielectric-filled trenches. In other embodiments, semiconductor devices are formed using a thin epitaxial layer (nanotube) formed on sidewalls of dielectric-filled trenches.Type: GrantFiled: September 21, 2012Date of Patent: December 3, 2013Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Hamza Yilmaz, Xiaobin Wang, Anup Bhalla, John Chen, Hong Chang
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Publication number: 20130313676Abstract: A method of manufacturing a semiconductor device is disclosed. The method includes forming a first trench and a second trench in an n-type substrate surface, the first trenches being spaced apart from each other, the second trench surrounding the first trenches, the second trench being wider than the first trench. The method also includes forming a gate oxide film on the inner surfaces of the first and second trenches, and depositing an electrically conductive material to the thickness a half or more as large as the first trench width. The method further includes removing the electrically conductive material using the gate oxide film as a stopper layer, forming an insulator film thicker than the gate oxide film, and polishing the insulator film by CMP for exposing the n-type substrate and the electrically conductive material in the first trench.Type: ApplicationFiled: June 24, 2013Publication date: November 28, 2013Applicant: FUJI ELECTRIC CO., LTD.Inventor: Tomonori MIZUSHIMA
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Publication number: 20130299840Abstract: The present invention discloses a Schottky barrier diode (SBD) and a manufacturing method thereof. The SBD includes: a semiconductor layer, which has multiple openings forming an opening array; and an anode, which has multiple conductive protrusions protruding into the multiple openings and forming a conductive array; wherein a Schottky contact is formed between the semiconductor layer and the anode.Type: ApplicationFiled: May 8, 2012Publication date: November 14, 2013Inventors: Chieh-Hsiung Kuan, Ting-Wei Liao, Chien-Wei Chiu, Tsung-Yi Huang
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Patent number: 8581359Abstract: A Schottky barrier diode includes a GaN freestanding substrate having a front surface, a GaN epitaxial layer deposited on the front surface, and an insulation layer deposited on the GaN epitaxial layer at a front surface and having an opening. Furthermore, the Schottky barrier diode also includes an electrode. The electrode is configured by a Schottky electrode provided in the opening in contact with the GaN epitaxial layer, and a field plate electrode connected to the Schottky electrode and also overlapping the insulation layer. The GaN freestanding substrate has a dislocation density of at most 1×108 cm?2.Type: GrantFiled: August 22, 2008Date of Patent: November 12, 2013Assignee: Sumitomo Electric Industries, Ltd.Inventors: Taku Horii, Tomihito Miyazaki, Makoto Kiyama
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Patent number: 8581360Abstract: A trench Schottky diode and a manufacturing method thereof are provided. A plurality of trenches are formed in A semiconductor substrate. A plurality of doped regions are formed in the semiconductor substrate and under some of the trenches. A gate oxide layer is formed on a surface of the semiconductor substrate and the surfaces of the trenches. A polysilicon structure is formed on the gate oxide layer. Then, the polysilicon structure is etched, so that the gate oxide layer within the trenches is covered by the polysilicon structure. Then, a mask layer is formed to cover the polysilicon structure within a part of the trenches and a part of the gate oxide layer, and the semiconductor substrate uncovered by the mask layer is exposed. Afterwards, a metal sputtering layer is formed to cover a part of the surface of the semiconductor substrate.Type: GrantFiled: February 15, 2012Date of Patent: November 12, 2013Inventor: Tzu-Hsiung Chen
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Publication number: 20130293031Abstract: High frequency currents may be rectified by means of a printable diode comprising a first and a second electrode, between which a semiconducting layer comprising semiconducting particles embedded in an inert matrix, and a conducting layer comprising conducting particles embedded in an inert matrix are arranged.Type: ApplicationFiled: November 22, 2011Publication date: November 7, 2013Applicants: Acreo Swedish ICT AB, De La Rue International LimitedInventors: Magnus Berggren, Xin Wang, Mats Robertsson, Petronella Norberg, Philip George Cooper, Peter Andersson Ersman
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Publication number: 20130292790Abstract: A semiconductor device includes a semiconductor layer and a Schottky electrode, a Schottky junction being formed between the semiconductor layer and the Schottky electrode. The Schottky electrode includes a metal part containing a metal, a Schottky junction being formed between the semiconductor layer and the metal part; and a nitride part around the metal part, the nitride part containing a nitride of the metal, and a Schottky junction being formed between the semiconductor layer and the nitride part.Type: ApplicationFiled: June 28, 2013Publication date: November 7, 2013Inventors: Yuichi Minoura, NAOYA OKAMOTO
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Publication number: 20130285136Abstract: An apparatus of and method for making enhanced Schottky diodes having p-body regions operable to pinch a current flow path in a high-voltage n-well region and field plate structures operable to distribute an electric potential of the Schottky diode allow for a device with enhanced breakdown voltage properties. N-well regions implanted into the substrate over a p-type epitaxial layer may act as an anode of the Schottky diode and n-type well regions implanted in the high-voltage n-well regions may act as cathodes of the Schottky diode. The Schottky diode may also be used as a low-side mosfet structure device.Type: ApplicationFiled: April 25, 2012Publication date: October 31, 2013Applicant: MACRONIX INTERNATIONAL CO., LTD.Inventors: Chin-Hsien LU, Shuo-Lun TU, Chin-Wei CHANG, Ching-Lin CHAN, Ming-Tung LEE
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Patent number: 8569843Abstract: A bidirectional switch includes a plurality of unit cells 11 including a first ohmic electrode 15, a first gate electrode 17, a second gate electrode 18, and a second ohmic electrode 16. The first gate electrodes 15 are electrically connected via a first interconnection 31 to a first gate electrode pad 43. The second gate electrodes 18 are electrically connected via a second interconnection 32 to a second gate electrode pad 44. A unit cell 11 including a first gate electrode 17 having the shortest interconnect distance from the first gate electrode pad 43 includes a second gate electrode 18 having the shortest interconnect distance from the second gate electrode pad 44.Type: GrantFiled: November 29, 2012Date of Patent: October 29, 2013Assignee: Panasonic CorporationInventors: Manabu Yanagihara, Kazushi Nakazawa, Tatsuo Morita, Yasuhiro Uemoto
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Publication number: 20130270668Abstract: A trenched semiconductor structure comprises a semiconductor substrate, an epitaxial layer, an ion implantation layer, a termination region dielectric layer, an active region dielectric layer, and a first polysilicon layer. The epitaxial layer doped with impurities of a first conductive type is formed on the semiconductor substrate. A plurality of active region trenches and a termination region trench are formed in the epitaxial layer. The ion implantation layer is formed in the active region trenches by doping impurities of a second conductive type. The termination region dielectric layer covers the termination region trench. The active region dielectric layer covers the ion implantation region. The first polysilicon layer covers the active region dielectric layer and fills the active region trenches. The depth of the termination region trench is greater than that of the active region trenches and close to that of the depletion region under reverse breakdown.Type: ApplicationFiled: January 9, 2013Publication date: October 17, 2013Applicant: TAIWAN SEMICONDUCTOR CO., LTD.Inventors: CHAO-HSIN HUANG, CHIH-CHIANG CHUANG
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Patent number: 8552476Abstract: A semiconductor layer has a second impurity concentration. First trenches are formed in the semiconductor layer to extend downward from an upper surface of the semiconductor layer. Each of insulation layers is formed along each of the inner walls of the first trenches. Each of conductive layers is formed to bury each of the first trenches via each of the insulation layers, and extends downward from the upper surface of the semiconductor layer to a first position. A first semiconductor diffusion layer reaches a second position from the upper surface of the semiconductor layer, is positioned between the first trenches, and has a third impurity concentration lower than the second impurity concentration. A length from the upper surface of the semiconductor layer to the second position is equal to or less than half a length from the upper surface of the semiconductor layer to the first position.Type: GrantFiled: September 19, 2011Date of Patent: October 8, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Tsuyoshi Ohta, Masatoshi Arai, Miwako Suzuki
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Patent number: 8551867Abstract: A mesa edge shielding trench Schottky rectifier includes a semiconductor substrate; an epitaxial layer grown on the first surface of the semiconductor substrate; a plurality of trenches spaced from each other and extended into the epitaxial layer, wherein an epitaxial region between two adjacent trenches forms the silicon mesa; a polysilicon region, having a T-shape, is separated from an inner wall of each of the trenches and a top surface of the epitaxial layer by an oxide layer, wherein a width of the top surface of the polysilicon region is bigger than an open size of each of the trenches; an anode electrode, deposited on an entire structure, forming an ohmic contact on the top surface of the polysilicon region and a Schottky contact on an exposed surface of the epitaxial layer; and a cathode electrode, deposited on the second surface of the semiconductor substrate, forming an ohmic contact thereon.Type: GrantFiled: December 30, 2010Date of Patent: October 8, 2013Assignee: Suzhou Silikron Semicoductor Co., LtdInventors: Wei Liu, Fan Wang, Xiaozhong Sun
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Patent number: 8552469Abstract: There is a problem that a reverse off-leak current becomes too large in a Schottky barrier diode. A semiconductor device of the present invention includes P-type first and second anode diffusion layers formed in an N-type epitaxial layer, N-type cathode diffusion layers formed in the epitaxial layer, a P-type third anode diffusion layer formed in the epitaxial layer so as to surround the first and second anode diffusion layers and to extend toward the cathode diffusion layers, and a Schottky barrier metal layer formed on the first and second anode diffusion layers.Type: GrantFiled: September 27, 2007Date of Patent: October 8, 2013Assignees: SANYO Semiconductor Co., Ltd., Semiconductor Components Industries, LLCInventors: Shuichi Kikuchi, Shigeaki Okawa, Kiyofumi Nakaya, Shuji Tanaka
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Patent number: 8546905Abstract: To reduce size of a finished product by reducing the number of externally embedded parts, embedding of a Schottky barrier diode relatively large in the amount of current in a semiconductor integrated circuit device has been pursued. It is general practice to densely arrange a number of contact electrodes in a matrix over a Schottky junction region. A sputter etching process to the surface of a silicide layer at the bottom of each contact hole is performed before a barrier metal layer is deposited. However, in a structure in which electrodes are thus arranged over a Schottky junction region, a reverse leakage current in a Schottky barrier diode is varied by variations in the amount of sputter etching. The present invention is a semiconductor integrated circuit device having a Schottky barrier diode in which contact electrodes are arranged over a guard ring in contact with a peripheral isolation region.Type: GrantFiled: February 10, 2012Date of Patent: October 1, 2013Assignee: Renesas Electronics CorporationInventors: Kunihiko Kato, Shigeya Toyokawa, Kozo Watanabe, Masatoshi Taya
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Patent number: 8525222Abstract: A planar diode and method of making the same employing only one mask. The diode is formed by coating a substrate with an oxide, removing a central portion of the oxide to define a window through which dopants are diffused. The substrate is given a Ni/Au plating to provide ohmic contact surfaces, and the oxide on the periphery of the window is coated with a polyimide passivating agent overlying the P/N junction.Type: GrantFiled: March 25, 2005Date of Patent: September 3, 2013Assignee: Vishay General Semiconductor LLCInventors: Benson Wang, Kevin Lu, Warren Chiang, Max Chen
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Patent number: 8525288Abstract: In the diffusion region (3) of the second conductivity mode, a more highly doped region of the same conductivity mode (5) is introduced in such a manner that the region of the first conductivity mode (2) which is covered by the metal silicide (9) and of the second conductivity mode (3) are connected in a conductive manner. The region (3) of the second conductivity mode is diffused in such a manner that it reaches the more highly doped region (1) of the first doping type (1), with an outward diffusion of the doping from the more highly doped substrate layer (1) into the more weakly doped layer (2) of the same conductivity mode in the direction of the semiconductor surface taking place at the same time.Type: GrantFiled: April 19, 2010Date of Patent: September 3, 2013Assignee: Eris Technology CorporationInventors: Michael Reschke, Hans-Jurgen Hillemann, Klaus Gunther
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Patent number: 8513763Abstract: There was a problem that it was difficult to manufacture silicon carbide semiconductor devices with suppressed variations in characteristics without increasing the number of process steps. A silicon carbide semiconductor device according to the present invention includes an N type SiC substrate and an N type SiC epitaxial layer as a silicon carbide semiconductor substrate of a first conductivity type, a plurality of recesses intermittently formed in a surface of the N type SiC epitaxial layer, P type regions as second-conductivity-type semiconductor layers formed in the N type SiC epitaxial layer in the bottoms of the plurality of recesses, and a Schottky electrode selectively formed over the surface of the N type SiC epitaxial layer, wherein the plurality of recesses all have an equal depth.Type: GrantFiled: June 22, 2010Date of Patent: August 20, 2013Assignee: Mitsubishi Electric CorporationInventor: Yoichiro Tarui
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Patent number: 8513674Abstract: A method of manufacturing of a semiconductor device (101) includes: a fine pattern forming step of forming p-type impurity regions (3, 4) and surface ohmic contact electrodes (5) using a stepper, after forming an N-type epitaxial layer (2) on a SiC single-crystal substrate (1); a protective film planarizing step of forming a protective film so as to cover the surface ohmic contact electrodes (5) and performing planarization of the protective film; a substrate thinning step of thinning the SiC single-crystal substrate (1); a backside ohmic contact electrode forming step of forming a backside ohmic contact electrode (7) on the SiC single-crystal substrate (1); a surface Schottky contact electrode forming step of forming a Schottky metal portion (8) connected to the p-type impurity regions (3, 4) and the surface ohmic contact electrodes (5); and a step of forming a surface pad electrode (9) that covers the Schottky metal portion (8).Type: GrantFiled: November 25, 2009Date of Patent: August 20, 2013Assignee: Showa Denko K.K.Inventors: Akihiko Sugai, Yasuyuki Sakaguchi
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Patent number: 8508015Abstract: The present invention provides Schottky-like and ohmic contacts comprising metal oxides on zinc oxide substrates and a method of forming such contacts. The metal oxide Schottky-like and ohmic contacts may be formed on zinc oxide substrates using various deposition and lift-off photolithographic techniques. The barrier heights of the metal oxide Schottky-like contacts are significantly higher than those for plain metals and their ideality factors are very close to the image force controlled limit. The contacts may have application in diodes, power electronics, FET transistors and related structures, and in various optoelectronic devices, such as UV photodetectors.Type: GrantFiled: May 19, 2008Date of Patent: August 13, 2013Assignee: Canterprise LimitedInventors: Martin Ward Allen, Steven Michael Durbin
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Patent number: 8502336Abstract: A diode (200) is disclosed having improved efficiency, smaller form factor, and reduced reverse biased leakage current. Schottky diodes (212) are formed on the sidewalls (210) of a mesa region (206). The mesa region (206) is a cathode of the Schottky diode (212). The current path through the mesa region (206) has a lateral and a vertical current path. The diode (200) further comprises a MOS structure (214), p-type regions (220), MOS structures (230), and p-type regions (232). MOS structure (214) with the p-type regions (220) pinch-off the lateral current path under reverse bias conditions. P-type regions (220), MOS structures (230), and p-type regions (232) each pinch-off the vertical current path under reverse bias conditions. MOS structure (214) and MOS structures (230) reduce resistance of the lateral and vertical current path under forward bias conditions. The mesa region (206) can have a uniform or non-uniform doping concentration.Type: GrantFiled: May 17, 2011Date of Patent: August 6, 2013Assignee: Semiconductor Components Industries, LLCInventors: Gordon M. Grivna, Jefferson W. Hall, Mohammed Tanvir Quddus
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Patent number: 8497563Abstract: A semiconductor system having a trench MOS barrier Schottky diode, having an integrated substrate PN diode as a clamping element (TMBS-ub-PN), suitable in particular as a Zener diode having a breakdown voltage of approximately 20V for use in a vehicle generator system, the TMBS-sub-PN being made up of a combination of Schottky diode, MOS structure, and substrate PN diode, and the breakdown voltage of substrate PN diode BV_pn being lower than the breakdown voltage of Schottky diode BV_schottky and the breakdown voltage of MOS structure BV_mos.Type: GrantFiled: September 15, 2008Date of Patent: July 30, 2013Assignee: Robert Bosch GmbHInventors: Ning Qu, Alfred Goerlach
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Publication number: 20130181319Abstract: The present invention discloses a trench Schottky barrier diode (SBD) and a manufacturing method thereof. The trench SBD includes: an epitaxial layer, formed on a substrate; multiple mesas, defined by multiple trenches; a field plate, formed on the epitaxial layer and filled in the multiple trenches, wherein a Schottky contact is formed between the field plate and top surfaces of the mesas; a termination region, formed outside the multiple mesas and electrically connected to the field plate; a field isolation layer, formed on the upper surface and located outside the termination region; and at least one mitigation electrode, formed below the upper surface outside the termination region, and is electrically connected to the field plate through the field isolation layer, wherein the mitigation electrode and the termination region are separated by part of a dielectric layer and part of the epitaxial layer.Type: ApplicationFiled: July 8, 2012Publication date: July 18, 2013Inventors: Tsung-Yi Huang, Chien-Hao Huang
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Patent number: 8487396Abstract: A Schottky photodiode may include a monocrystalline semiconductor substrate having a front surface, a rear surface, and a first dopant concentration and configured to define a cathode of the Schottky photodiode, a doped epitaxial layer over the front surface of the monocrystalline semiconductor substrate having a second dopant concentration less than the first dopant concentration, and parallel spaced apart trenches in the doped epitaxial layer and having of a depth less than a depth of the doped epitaxial layer.Type: GrantFiled: August 11, 2011Date of Patent: July 16, 2013Assignee: STMicroelectronics S.r.l.Inventor: Massimo Cataldo Mazzillo
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Patent number: 8482029Abstract: A semiconductor device includes a source metallization and a semiconductor body. The semiconductor body includes a first field-effect structure including a source region of a first conductivity type electrically coupled to the source metallization. The semiconductor body also includes a second field-effect structure including a source region of the first conductivity type electrically coupled to the source metallization. A voltage tap including a semiconductor region within the semiconductor body is electrically coupled to a first gate electrode of the first field-effect structure by an intermediate inverter structure.Type: GrantFiled: May 27, 2011Date of Patent: July 9, 2013Assignee: Infineon Technologies Austria AGInventors: Anton Mauder, Franz Hirler, Joachim Weyers
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Publication number: 20130168729Abstract: A semiconductor device has at least a cell between two opposite main surfaces. Each cell has a first device feature region contacted with the first main surface and a second device feature region contacted with the second main surface. There is a voltage-sustaining region between the first device feature region and the second device feature region, which includes at least a semiconductor region and an insulator region containing conductive particles. The semiconductor region and the insulator region contact directly with each other. The structure of such voltage-sustaining region can not only be used to implement high-voltage devices, but further be used as a junction edge technique of high-voltage devices.Type: ApplicationFiled: November 29, 2012Publication date: July 4, 2013Applicant: University of Electronic Science and TechnologyInventor: University of Electronic Science and Technology
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Publication number: 20130161779Abstract: A Schottky diode includes an n+-substrate, an n-epilayer, trenches introduced into the n-epilayer, floating Schottky contacts being located on their side walls and on the entire trench bottom, mesa regions between the adjacent trenches, a metal layer on its back face, this metal layer being used as a cathode electrode, and an anode electrode on the front face of the Schottky diode having two metal layers, the first metal layer of which forms a Schottky contact and the second metal layer of which is situated below the first metal layer and also forms a Schottky contact. Preferably, these two Schottky contacts have different barrier heights.Type: ApplicationFiled: November 30, 2012Publication date: June 27, 2013Inventors: Ning Qu, Alfred Goerlach
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Publication number: 20130154030Abstract: A semiconductor device includes a drift region of a first doping type, a junction between the drift region and a device region, a compensation region of a second doping type, and at least one field electrode structure arranged between the drift region and the compensation region. The at least one field electrode includes a field electrode and a field electrode dielectric adjoining the field electrode. The field electrode dielectric is arranged between the field electrode and the drift region and between the field electrode and the compensation. The field electrode dielectric includes a first opening through which the field electrode is coupled to drift region and a second opening through which the field electrode is coupled to the compensation region.Type: ApplicationFiled: December 20, 2011Publication date: June 20, 2013Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventor: Hans Weber
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Patent number: 8467637Abstract: In a waveguide path coupling-type photodiode, a semiconductor light absorbing layer and an optical waveguide path core are adjacently arranged. An electrode formed of at least one layer is installed in a boundary part of the semiconductor light absorbing layer and the optical waveguide path core. The electrodes are arranged at an interval of (1/100)? to ? [?: wavelength of light transmitted through optical waveguide path core]. At least a part of the electrodes is embedded in the semiconductor light absorbing layer. Embedding depth from a surface of the semiconductor light absorbing layer is a value not more than ?/(2 ns) [ns: refractive index of semiconductor light absorbing layer]. At least one layer of the electrode is constituted of a material which can surface plasmon-induced.Type: GrantFiled: April 30, 2008Date of Patent: June 18, 2013Assignees: NEC Corporation, Nippon Telegraph and Telephone CorporationInventors: Junichi Fujikata, Jun Ushida, Daisuke Okamoto, Kenichi Nishi, Keishi Ohashi, Tai Tsuchizawa, Seiichi Itabashi
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Patent number: 8455943Abstract: Provided is a technology, in a semiconductor device having a power MISFET and a Schottky barrier diode on one semiconductor substrate, capable of suppressing a drastic increase in the on-resistance of the power MISFET while making the avalanche breakdown voltage of the Schottky barrier diode greater than that of the power MISFET. In the present invention, two epitaxial layers, one having a high doping concentration and the other having a low doping concentration, are formed over a semiconductor substrate and the boundary between these two epitaxial layers is located in a region equal in depth to or shallower than the bottom portion of a trench.Type: GrantFiled: July 13, 2011Date of Patent: June 4, 2013Assignee: Renesas Electronics CorporationInventors: Yoshito Nakazawa, Hitoshi Matsuura
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Patent number: 8450798Abstract: A monolithically integrated trench FET and Schottky diode includes a plurality of trenches extending into a FET region and a Schottky region of a semiconductor layer. A trench in the Schottky region includes a dielectric layer lining the trench sidewalls, and a conductive electrode having a top surface that is substantially coplanar with a top surface of the semiconductor layer adjacent the trench. An interconnect layer electrically contacts the top surface of the semiconductor layer adjacent the trench so as to form a Schottky contact with the top surface of the semiconductor layer adjacent the trench. A surface of the semiconductor layer in the Schottky region is lower relative to a surface of the semiconductor layer in the FET region.Type: GrantFiled: October 21, 2011Date of Patent: May 28, 2013Assignee: Fairchild Semiconductor CorporationInventor: Fred Session
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Patent number: 8450826Abstract: Disclosed herein is a nitride based semiconductor device. There is provided a nitride based semiconductor device including a base substrate; a semiconductor layer disposed on the base substrate; and an electrode structure disposed on the semiconductor layer, wherein the electrode structure includes: a first electrode ohmic-contacting the semiconductor layer; a ohmic contact unit ohmic-contacting the semiconductor layer and spaced apart from the first electrode; and a schottky contact unit schottky-contacting the semiconductor layer and covering the ohmic contact unit.Type: GrantFiled: March 16, 2011Date of Patent: May 28, 2013Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Younghwan Park, Kiyeol Park, Woochul Jeon
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Publication number: 20130126894Abstract: A method of making a diode begins by depositing an AlxGa1-xN nucleation layer on a SiC substrate, then depositing an n+ GaN buffer layer, an n? GaN layer, an AlxGa1-xN barrier layer, and an SiO2 dielectric layer. A portion of the dielectric layer is removed and a Schottky metal deposited in the void. The dielectric layer is affixed to the support layer with a metal bonding layer using an Au—Sn utectic wafer bonding process, the substrate is removed using reactive ion etching to expose the n+ layer, selected portions of the n+, n?, and barrier layers are removed to form a mesa diode structure on the dielectric layer over the Schottky metal; and an ohmic contact is deposited on the n+ layer.Type: ApplicationFiled: December 4, 2012Publication date: May 23, 2013Applicant: CREE, INC.Inventor: CREE, INC.
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Patent number: 8445368Abstract: A semiconductor device includes a trench MOS barrier Schottky diode having an integrated PN diode and a method is for manufacturing same.Type: GrantFiled: May 10, 2011Date of Patent: May 21, 2013Assignee: Robert Bosch GmbHInventors: Alfred Goerlach, Ning Qu
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Patent number: 8432012Abstract: A semiconductor device includes a semiconductor layer having a first conductivity type and having a surface in which an active region of the semiconductor device is defined, and a plurality of spaced apart doped regions within the active region. The plurality of doped regions have a second conductivity type that is opposite the first conductivity type and define a plurality of exposed portions of the semiconductor layer within the active region. The plurality of doped regions include a plurality of rows extending in a longitudinal direction. Each of the rows includes a plurality of longitudinally extending segments, and the longitudinally extending segments in a first row at least partially overlap the longitudinally extending segments in an adjacent row in a lateral direction that is perpendicular to the longitudinal direction.Type: GrantFiled: March 18, 2011Date of Patent: April 30, 2013Assignee: Cree, Inc.Inventors: Qingchun Zhang, Jason Henning
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Patent number: 8426939Abstract: The present invention provides a semiconductor device including: a base substrate; a first semiconductor layer which is disposed on the base substrate and has a front surface and a rear surface opposite to the front surface; first ohmic electrodes disposed on the front surface of the first semiconductor layer; a second ohmic electrode disposed on the rear surface of the first semiconductor layer; a second semiconductor layer interposed between the first semiconductor layer and the first ohmic electrodes; and a Schottky electrode part which covers the first ohmic electrodes on the front surface of the first semiconductor layer.Type: GrantFiled: January 8, 2010Date of Patent: April 23, 2013Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Woo Chul Jeon, Jung Hee Lee, Young Hwan Park, Ki Yeol Park
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Patent number: 8421181Abstract: A Schottky barrier diode comprises a first-type substrate, a second-type well isolation region on the first-type substrate, and a first-type well region on the second-type well isolation region. With embodiments herein a feature referred to as a perimeter capacitance well junction ring is on the second-type well isolation region. A second-type well region is on the second-type well isolation region. The perimeter capacitance well junction ring is positioned between and separates the first-type well region and the second-type well region. A second-type contact region is on the second-type well region, and a first-type contact region contacts the inner portion of the first-type well region. The inner portion of the first-type well region is positioned within the center of the first-type contact region. Additionally, a first ohmic metallic layer is on the first-type contact region and a second ohmic metallic layer is on the first-type well region.Type: GrantFiled: July 21, 2010Date of Patent: April 16, 2013Assignee: International Business Machines CorporationInventors: Frederick G. Anderson, Jenifer E. Lary, Robert M. Rassel, Mark E. Stidham
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Patent number: 8422268Abstract: A memory element (3) arranged in matrix in a memory device and including a resistance variable element (1) which switches its electrical resistance value in response to a positive or negative electrical pulse applied thereto and retains the switched electrical resistance value; and a current control element (2) for controlling a current flowing when the electrical pulse is applied to the resistance variable element (1); wherein the current control element (2) includes a first electrode; a second electrode; and a current control layer sandwiched between the first electrode and the second electrode; and wherein the current control layer comprises SiNx, and at least one of the first electrode and the second electrode comprises ?-tungsten.Type: GrantFiled: May 1, 2009Date of Patent: April 16, 2013Assignee: Panasonic CorporationInventors: Koji Arita, Takumi Mikawa, Mitsuteru Iijima, Takashi Okada
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Patent number: 8415787Abstract: The present invention relates to a heat dissipator that includes a conductive substrate and a plurality of nanostructures supported by the conductive substrate. The nanostructures are at least partly embedded in an insulator. Each of the nanostructures includes a plurality of intermediate layers on the conductive substrate. At least two of the plurality of intermediate layers are interdiffused, and material of the at least two of the plurality of intermediate layers that are interdiffused is present in the nanostructure.Type: GrantFiled: May 21, 2012Date of Patent: April 9, 2013Assignee: Smoltek ABInventor: Mohammad Shafiqul Kabir
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Publication number: 20130069028Abstract: Select devices for memory cell applications and methods of forming the same are described herein. As an example, one or more non-ohmic select devices can include at least two tunnel barrier regions formed between a first metal material and a second metal material, and a third metal material formed between each of the respective at least two tunnel barrier regions. The non-ohmic select device is a two terminal select device that supports bi-directional current flow therethrough.Type: ApplicationFiled: September 16, 2011Publication date: March 21, 2013Applicant: MICRON TECHNOLOGY, INC.Inventors: David H. Wells, Bhaskar Srinivasan, John K. Zahurak
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Patent number: 8390091Abstract: A monolithic semiconductor structure includes a stack of layers. The stack includes a substrate; a first layer made from a first semiconductor material; and a second layer made from a second semiconductor material. The first layer is situated between the substrate and the second layer and at least one of the first semiconductor material and the second semiconductor material contains a III-nitride material. The structure includes a power transistor, including a body formed in the stack of layers; a first power terminal at a side of the first layer facing the second layer; a second power terminal at least partly formed in the substrate; and a gate structure for controlling the propagation through the body of electric signals between the first power terminal and the second power terminal.Type: GrantFiled: February 3, 2009Date of Patent: March 5, 2013Assignee: Freescale Semiconductor, Inc.Inventor: Philippe Renaud
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Publication number: 20130049160Abstract: This invention reveals a constant current semiconductor device of an N-type or a P-type epitaxial layer on a semi-insulating substrate, the device is treated by using a Schottky barrier to cut off current in conduction channels under certain bias and to provide constant current within cut-off voltage and breakdown voltage region between Schottky barrier section/ohmic contact section as the first electrode and the other ohmic contact section as the second electrode respectively, and has excellent characteristics as lower cut-off voltage (Vkp) than bipolar devices and easily gets higher constant current (Ip) by integrating several constant current units.Type: ApplicationFiled: August 29, 2011Publication date: February 28, 2013Applicant: FORMOSA MICROSEMI CO., Ltd.Inventors: Sheau-Feng TSAI, Wen-Ping Huang, Tzuu-Chi Hu
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Patent number: 8384182Abstract: A junction barrier Schottky (JBS) rectifier device and a method of making the device are described. The device comprises an epitaxially grown first n-type drift layer and p-type regions forming p+-n junctions and self-planarizing epitaxially over-grown second n-type drift regions between and, optionally, on top of the p-type regions. The device may include an edge termination structure such as an exposed or buried P+ guard ring, a regrown or implanted junction termination extension (JTE) region, or a “deep” mesa etched down to the substrate. The Schottky contact to the second n-type drift region and the ohmic contact to the p-type region together serve as an anode. The cathode can be formed by ohmic contact to the n-type region on the backside of the wafer. The devices can be used in monolithic digital, analog, and microwave integrated circuits.Type: GrantFiled: June 26, 2008Date of Patent: February 26, 2013Assignee: Power Integrations, Inc.Inventors: Michael S. Mazzola, Lin Cheng
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Patent number: 8384181Abstract: A power diode having a silicon mesa atop the drift region includes a first contact positioned on the silicon mesa. The silicon mesa is highly doped p-type or n-type, and the anode may be formed on the mesa. The mesa may include two separate silicon layers, one of which is a Schottky barrier height layer. Under a forward bias, the silicon mesa provides carriers to achieve desirable forward current characteristics. The substrate has a significantly reduced thickness. The diode achieves reverse voltage blocking capability by implanting junction barrier Schottky wells within the body of the diode. The diode utilizes a deeper portion of the drift region to support the reverse bias. The method of forming the diode with a silicon mesa includes forming the mesa within a window on the diode or by thermally or mechanically bonding the silicon layer to the drift region.Type: GrantFiled: February 9, 2007Date of Patent: February 26, 2013Assignee: Cree, Inc.Inventors: Qingchun Zhang, Sei-Hyung Ryu