With Electric Field Controlling Semiconductor Layer Having A Low Enough Doping Level In Relationship To Its Thickness To Be Fully Depleted Prior To Avalanche Breakdown (e.g., Resurf Devices) Patents (Class 257/492)
  • Patent number: 7408234
    Abstract: An object of the present invention is to provide a semiconductor device that is able to realize a low on-resistance maintaining a high drain-to-source breakdown voltage, and a method for manufacturing thereof, the present invention including: a supporting substrate; a semiconductor layer having a P? type active region that is formed on the supporting substrate, interposing a buried oxide film between the semiconductor layer and the supporting substrate; and a gate electrode that is formed on the semiconductor layer, interposing a gate oxide film and a part of a LOCOS film between the gate electrode and the semiconductor layer, wherein the P? type active region has: an N+ type source region; a P type body region; a P+ type back gate contact region; an N type drain offset region; an N+ type drain contact region; and an N type drain buffer region that is formed in a limited region between the N type drain offset region and the P type body region, and the N type drain buffer region is in contact with a source sid
    Type: Grant
    Filed: June 23, 2005
    Date of Patent: August 5, 2008
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hisao Ichijo, Hiroyoshi Ogura, Yoshinobu Sato, Teruhisa Ikuta
  • Publication number: 20080150073
    Abstract: A charge compensation component having a drift path between two electrodes, an electrode and a counterelectrode, and methods for producing the same. The drift path has drift zones of a first conduction type and charge compensation zones of a complementary conduction type with respect to the first conduction type. A drift path layer doping comprising the volume integral of the doping locations of a horizontal drift path layer of the vertically extending drift path including the drift zone regions and charge compensation zone regions arranged in the drift path layer is greater in the vicinity of the electrodes than in the direction of the centre of the drift path.
    Type: Application
    Filed: December 20, 2007
    Publication date: June 26, 2008
    Applicant: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Anton Mauder, Stefan Sedlmaier
  • Publication number: 20080135972
    Abstract: In a semiconductor device of the present invention, a first base region 16 is extended to a part under a gate electrode 7 while having a vertical concentration profile of an impurity that increases from the surface of a semiconductor layer 3 and becomes maximum under an emitter region 5, and the length in the lateral direction from a point where the impurity concentration becomes maximum located under an end of the gate electrode 7 to the boundary with a second base region is is not smaller than the length in the vertical direction from the point where the impurity concentration becomes maximum to the boundary with the second base region 15.
    Type: Application
    Filed: November 21, 2007
    Publication date: June 12, 2008
    Applicant: Matsushita Electric Industrial Co., Ltd.
    Inventors: Teruhisa Ikuta, Yoshinobu Sato
  • Publication number: 20080135973
    Abstract: The high-withstand voltage MOSFET comprises a trench portion formed at the high-withstand voltage active region on a semiconductor substrate, two polysilicon layers formed on the high-withstand voltage active region on both sides of the trench portion by implanting an impurity of the conductivity type opposite to the high-withstand voltage active region, two impurity diffusion drift layers formed on both sides of the trench portion by implanting an impurity of the conductivity type opposite to the high-withstand voltage active region in the surface of the high-withstand voltage active region under the polysilicon layers, and a gate electrode formed through a gate oxide film on bottom and side surfaces of the trench portion and end surfaces and upper surfaces of adjacent regions of the polysilicon layers close to the trench portion, and source and drain regions are formed in the two polysilicon layers excluding the adjacent regions covered with the gate electrode.
    Type: Application
    Filed: November 29, 2007
    Publication date: June 12, 2008
    Applicant: SHARP KABUSHIKI KAISHA
    Inventors: Satoshi HIKIDA, Takuya Otabe, Hisashi Yonemoto
  • Publication number: 20080135971
    Abstract: A drift diffusion layer of a low concentration is formed so as to surround a collector buffer layer having a relatively high concentration including a high-concentration collector diffusion layer in a plane structure. Thereby, current crowding in corner portions of the high-concentration collector diffusion layer is suppressed while maintaining a short turnoff time, and the improvement of breakdown voltage at on-time is realized.
    Type: Application
    Filed: October 18, 2007
    Publication date: June 12, 2008
    Applicant: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hisaji Nishimura, Hiroyoshi Ogura, Akira Ohdaira
  • Patent number: 7385250
    Abstract: A semiconductor device comprises a semiconductor portion including first semiconductor layers of a first conduction type and second semiconductor layers of a second conduction type alternately arranged on the surface of a semiconductor substrate to form a striped shape. A main region is formed to arrange a main cell in a well. A current sense cell is arranged in a sense well. A sense region is formed having the direction of the length in a direction that intersects the direction of alternate arrangement of the first semiconductor layers and the second semiconductor layers.
    Type: Grant
    Filed: June 20, 2006
    Date of Patent: June 10, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Ichiro Omura, Wataru Saito
  • Patent number: 7372104
    Abstract: A transistor suitable for high-voltage applications is provided. The transistor is formed on a substrate having a deep well of a first conductivity type. A first well of the first conductivity type and a second well of a second conductivity type are formed such that they are not immediately adjacent each other. The well of the first conductivity type and the second conductivity type may be formed simultaneously as respective wells for low-voltage devices. In this manner, the high-voltage devices may be formed on the same wafer as low-voltage devices with fewer process steps, thereby reducing costs and process time. A doped isolation well may be formed adjacent the first well on an opposing side from the second well to provide further device isolation.
    Type: Grant
    Filed: December 12, 2005
    Date of Patent: May 13, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Bau Wu, Chien-Shao Tang, Robin Hsieh, Ruey-Hsin Liu, Shun-Liang Hsu
  • Patent number: 7364994
    Abstract: A method of manufacturing a semiconductor device includes providing semiconductor substrate having trenches and mesas. At least one mesa has first and second sidewalls. The method includes angularly implanting a dopant of a second conductivity into the first sidewall, and angularly implanting a dopant of a second conductivity into the second sidewall. The at least one mesa is converted to a pillar by diffusing the dopants into the at least one mesa. The pillar is then converted to a column by angularly implanting a dopant of the first conductivity into a first sidewall of the pillar, and by angularly implanting the dopant of the first conductivity type into a second sidewall of the pillar. The dopants are then diffused into the pillar to provide a P-N junction of the first and second doped regions located along the depth direction of the adjoining trench. Finally, the trenches are filled with an insulating material.
    Type: Grant
    Filed: May 26, 2006
    Date of Patent: April 29, 2008
    Assignee: Third Dimension (3D) Semiconductor, Inc.
    Inventors: Fwu-Iuan Hshieh, Koon Chong So, Brian D. Pratt
  • Patent number: 7365402
    Abstract: An LDMOS semiconductor transistor structure comprises a substrate having an epitaxial layer of a first conductivity type, a source region extending from a surface of the epitaxial layer of a second conductivity type, a lightly doped drain region within the epitaxial layer of a second conductivity type, a channel located between the drain and source regions, and a gate arranged above the channel within an insulating layer, wherein the lightly doped drain region comprises an implant region of the first conductivity type extending from the surface of the epitaxial layer into the epitaxial layer covering an end portion of the lightly doped drain region next to the gate.
    Type: Grant
    Filed: January 6, 2005
    Date of Patent: April 29, 2008
    Assignee: Infineon Technologies AG
    Inventor: Gordon Ma
  • Publication number: 20080093697
    Abstract: A second impurity region is surrounded by a first impurity region at a first main surface. A third impurity region of the first main surface sandwiches the second impurity region with the first impurity region. Fourth and fifth impurity regions of a second main surface sandwich the first impurity region with the second impurity region. A control electrode layer is opposite to the second impurity region with an insulating film interposed. That portion of the second main surface which is opposite to the portion of the first main surface where the first impurity region is formed surrounds the regions for forming the fourth and fifth impurity regions of the second main surface, and it is a region of the first conductivity type or a region of the second conductivity type having impurity concentration not higher than that of the first impurity region.
    Type: Application
    Filed: December 29, 2006
    Publication date: April 24, 2008
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Mitsuru Kaneda, Hideki Takahashi, Yoshifumi Tomomatsu
  • Patent number: 7358563
    Abstract: A CMOS image sensor and a method for fabricating the same can ensure isolation characteristics using a shallow trench isolation (STI) process and a selective epitaxy method. The CMOS image sensor and method for fabricating the same can also reduce pixel size. The CMOS image sensor includes a semiconductor substrate, a first photodiode, a first epitaxial layer, a second epitaxial layer, a plurality of device isolation layers formed in isolation regions formed at the second epitaxial layer, a second photodiode formed between the device isolation layers, and a third epitaxial layer.
    Type: Grant
    Filed: December 29, 2005
    Date of Patent: April 15, 2008
    Assignee: Dongbu Electronics Co., Ltd
    Inventor: Sang Gi Lee
  • Patent number: 7352046
    Abstract: A semiconductor integrated circuit device has a first MOS transistor having an insulating film, a first source, a first gate electrode, and a nitride film overlapping the first gate electrode from the first source through the insulating film. A second MOS transistor has a second source and a second gate electrode but does not have a nitride film overlapping the second gate electrode from the second source.
    Type: Grant
    Filed: August 8, 2005
    Date of Patent: April 1, 2008
    Assignee: Seiko Instruments Inc.
    Inventor: Jun Osanai
  • Publication number: 20080067624
    Abstract: A semiconductor lateral voltage-sustaining region and devices based thereupon. The voltage-sustaining region is made by using the Metal-Insulator-Semiconductor capacitance formed by terrace field plate to emit or to absorb electric flux on the semiconductor surface, so that the effective electric flux density emitted from the semiconductor surface to the substrate approaches approximately the optimum distribution, and a highest breakdown voltage can be achieved within a smallest distance on the surface. The field plates can be either floating ones, or connected to floating field limiting rings. Coupling capacitance between different plates can also be used to change the flux distribution.
    Type: Application
    Filed: May 25, 2007
    Publication date: March 20, 2008
    Inventor: Xingbi Chen
  • Publication number: 20080067625
    Abstract: An improved semiconductor device having a gate electrode buried in a trench that a short circuit is hardly generated between a gate electrode and a source electrode at a termination of the gate electrode. A trench is formed in a semiconductor substrate. A gate electrode and a buried insulating film are buried in the trench. A source electrode is provided above the gate electrode via the buried insulating film. At the termination of the gate electrode, an interlayer insulating film is provided between the buried insulating film and the source electrode in such a way that the interlayer insulating film strides over the termination of the trench. Both of the buried insulating film and the interlayer insulating film function as an insulating film and prevent a short circuit at the termination of the gate electrode.
    Type: Application
    Filed: September 13, 2007
    Publication date: March 20, 2008
    Applicant: NEC ELECTRONICS CORPORATION
    Inventors: Hideo Yamamoto, Kenya Kobayashi
  • Patent number: 7345341
    Abstract: High voltage semiconductor devices and methods for fabricating the same are provided. An exemplary embodiment of a semiconductor device capable of high-voltage operation, comprising a substrate comprising a first well formed therein. A gate stack is formed overlying the substrate, comprising a gate dielectric layer and a gate electrode formed thereon. A channel well and a second well are formed in portions of the first well. A source region is formed in a portion of the channel well. A drain region is formed in a portion of the second well, wherein the gate dielectric layer comprises a relatively thinner portion at one end of the gate stack adjacent to the source region and a relatively thicker portion at one end of the gate stack adjacent to and directly contacts the drain region.
    Type: Grant
    Filed: February 9, 2006
    Date of Patent: March 18, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Chun Lin, Kuo-Ming Wu, Reuy-Hsin Liu
  • Patent number: 7335944
    Abstract: A high-voltage transistor includes first and second trenches that define a mesa in a semiconductor substrate. First and second field plate members are respectively disposed in the first and second trenches, with each of the first and second field plate members being separated from the mesa by a dielectric layer. The mesa includes a plurality of sections, each section having a substantially constant doping concentration gradient, the gradient of one section being at least 10% greater than the gradient of another section. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: February 26, 2008
    Assignee: Power Integrations, Inc.
    Inventors: Sujit Banerjee, Donald Ray Disney
  • Patent number: 7329583
    Abstract: An structure for electrically isolating a semiconductor device is formed by implanting dopant into a semiconductor substrate that does not include an epitaxial layer. Following the implant the structure is exposed to a very limited thermal budget so that dopant does not diffuse significantly. As a result, the dimensions of the isolation structure are limited and defined, thereby allowing a higher packing density than obtainable using conventional processes which include the growth of an epitaxial layer and diffusion of the dopants. In one group of embodiments, the isolation structure includes a deep layer and a sidewall which together form a cup-shaped structure surrounding an enclosed region in which the isolated semiconductor device may be formed. The sidewalls may be formed by a series of pulsed implants at different energies, thereby creating a stack of overlapping implanted regions.
    Type: Grant
    Filed: February 25, 2005
    Date of Patent: February 12, 2008
    Assignees: Advanced Analogic Technologies, Inc., Advanced Analogic Technologies (Hong Kong) Limited
    Inventors: Richard K. Williams, Michael E. Cornell, Wai Tien Chan
  • Patent number: 7327007
    Abstract: A technique is provided which allows easy achievement of a semiconductor device with desired breakdown voltage. In a high-potential island region defined by a p impurity region, an n+ impurity region is formed in an n? semiconductor layer, and first field plates and second field plates are formed in multiple layers above the n? semiconductor layer between the n+ impurity region and the p impurity region. The second field plates in the upper layer are located above spaces between the first field plates in the lower layer, over which an interconnect line passes. One of the second field plates which is closest to the p impurity region has a cut portion under the interconnect line, and an electrode is spaced between the first field plates located under the cut portion.
    Type: Grant
    Filed: December 3, 2004
    Date of Patent: February 5, 2008
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Kazuhiro Shimizu
  • Publication number: 20080023785
    Abstract: This invention discloses bottom-source lateral diffusion MOS (BS-LDMOS) device. The device has a source region disposed laterally opposite a drain region near a top surface of a semiconductor substrate supporting a gate thereon between the source region and a drain region. The BS-LDMOS device further has a combined sinker-channel region disposed at a depth in the semiconductor substrate entirely below a body region disposed adjacent to the source region near the top surface wherein the combined sinker-channel region functioning as a buried source-body contact for electrically connecting the body region and the source region to a bottom of the substrate functioning as a source electrode. A drift region is disposed near the top surface under the gate and at a distance away from the source region and extending to and encompassing the drain region.
    Type: Application
    Filed: July 28, 2006
    Publication date: January 31, 2008
    Inventor: Francois Hebert
  • Patent number: 7307330
    Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.
    Type: Grant
    Filed: April 4, 2006
    Date of Patent: December 11, 2007
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
  • Patent number: 7304363
    Abstract: A technique of spreading current flowing in a semiconductor device comprising an electrode, a drift region adjacent to the electrode, a junction termination extension implant region in the drift region, and a current spreader adjacent to the junction termination extension implant region and the electrode. The current spreader is adapted to reduce current densities and electrostatic fields (preferably simultaneously) in an area connecting the electrode with the drift region. Moreover, the current spreader is adapted to spread current flowing from the electrode into the drift region. The semiconductor device further comprises an ohmic metal contact connected to the electrode and an implant pocket in the drift region, wherein the implant pocket is adapted for terminating electrostatic field lines in the semiconductor device. Preferably, the current spreader comprises an ohmic metal and the electrode comprises any of an anode and a cathode.
    Type: Grant
    Filed: November 26, 2004
    Date of Patent: December 4, 2007
    Assignee: United States of America as represented by the Secretary of the Army
    Inventor: Pankaj B. Shah
  • Patent number: 7294886
    Abstract: Disclosed is a power semiconductor device, including a first semiconductor layer of a first conductivity type, a second semiconductor layer of the first conductivity type and a third semiconductor layer of a second conductivity type which are alternately and laterally arranged on the first semiconductor layer and, a fourth semiconductor layer of the second conductivity type selectively formed in the surface regions of the second and third semiconductor layers, a fifth semiconductor layer of the first conductivity type selectively formed in the surface region of the fourth semiconductor layer, and a control electrode formed on the surfaces of the second, fourth and fifth semiconductor layers, in which a layer thickness ratio A is given by the expression: 0<A=t/(t+d)?0.72 where t is the thickness of the first semiconductor layer, and d is the thickness of the second semiconductor layer.
    Type: Grant
    Filed: November 3, 2005
    Date of Patent: November 13, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Wataru Saito, Ichiro Omura, Tsuneo Ogura
  • Patent number: 7294901
    Abstract: A p impurity region (3) defines a RESURF isolation region in an n? semiconductor layer (2). A trench isolation structure (8a) and the p impurity region (3) together define a trench isolation region in the n? semiconductor layer (2) in the RESURF isolation region. An nMOS transistor (103) is provided in the trench isolation region. A control circuit is provided in the RESURF isolation region excluding the trench isolation region. An n+ buried impurity region (4) is provided at the interface between the n? semiconductor layer (2) and a p? semiconductor substrate (1), and under an n+ impurity region 7 connected to a drain electrode (14) of the nMOS transistor (103).
    Type: Grant
    Filed: January 22, 2004
    Date of Patent: November 13, 2007
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Kazuhiro Shimizu
  • Patent number: 7285837
    Abstract: A structure of an electrostatic discharge (ESD) device integrated with a pad is provided. The ESD device is integrated with the pad and formed under the pad. By using the area under the pad, the ESD device does not occupy additional space of an integrated circuit. Furthermore, since the pad is a large, plate, and ideal conductor, the connected pad and the ESD device are capable of distributing current in the ESD device averagely.
    Type: Grant
    Filed: January 17, 2005
    Date of Patent: October 23, 2007
    Assignee: System General Corp.
    Inventors: Chih-Feng Huang, Tuo-Hsin Chien, Jenn-yu G. Lin, Ta-yung Yang
  • Patent number: 7279757
    Abstract: A double-sided extended drain field effect transistor that includes a gate terminal overlying a channel region in a substrate. The substrate includes a drain region of a first carrier type that is laterally separated from the channel region by a first RESURF region of the first carrier type, and a source region of the first carrier type that is laterally separated from the channel region by a second RESURF region of the first carrier type. Regions of the first carrier type may also be disposed laterally adjacent to the source and drain regions on the opposite lateral side as compared to the RESURF regions. This configuration improves the reverse bias breakdown voltage of the transistor.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: October 9, 2007
    Assignee: AMI Semiconductor, Inc.
    Inventors: Greg Scott, J. Marcos Laraia
  • Patent number: 7276431
    Abstract: An structure for electrically isolating a semiconductor device is formed by implanting dopant into a semiconductor substrate that does not include an epitaxial layer. Following the implant the structure is exposed to a very limited thermal budget so that dopant does not diffuse significantly. As a result, the dimensions of the isolation structure are limited and defined, thereby allowing a higher packing density than obtainable using conventional processes which include the growth of an epitaxial layer and diffusion of the dopants. In one group of embodiments, the isolation structure includes a deep layer and a sidewall which together form a cup-shaped structure surrounding an enclosed region in which the isolated semiconductor device may be formed. The sidewalls may be formed by a series of pulsed implants at different energies, thereby creating a stack of overlapping implanted regions.
    Type: Grant
    Filed: February 25, 2005
    Date of Patent: October 2, 2007
    Assignees: Advanced Analogic Technologies, Inc., Advanced Analogic Technologies (Hong Kong) Limited
    Inventors: Richard K. Williams, Michael E. Cornell, Wai Tien Chan
  • Patent number: 7276773
    Abstract: A power semiconductor device includes second semiconductor layers of a first conductivity type and third semiconductor layers of a second conductivity type alternately disposed on a first semiconductor layer of the first conductivity type. The device further includes fourth semiconductor layers of the second conductivity type disposed in contact with upper portions of the third semiconductor layers between the second semiconductor layers, and fifth semiconductor layers of the first conductivity type formed in surfaces of the fourth semiconductor layers. The first semiconductor layer is lower in impurity concentration of the first conductivity type than each second semiconductor layer. The third semiconductor layer includes a fundamental portion and an impurity-amount-larger portion formed locally in a depth direction and higher in impurity amount than the fundamental portion.
    Type: Grant
    Filed: April 29, 2005
    Date of Patent: October 2, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Wataru Saito, Ichiro Omura
  • Patent number: 7259440
    Abstract: A fast switching diode includes an n? layer having an upper surface and a lower surface and a first edge and a second edge, the second edge provided on an opposing side of the first edge. A converted region is provided proximate the upper surface of the n? layer. The converted region includes platinum and has a first depth. The converted region has a platinum concentration that is substantially greater than an n-type dopant concentration in the converted region. First and second n+ regions are provided proximate the first and second edges of the n? layer, respectively, and extend from the upper surface of the n? layer to second and third depths, respectively. Each of the second and third depths is greater than the first depth to reduce leakage current. A first electrode is provided proximate the upper surface of the n? layer. A second electrode is provided proximate the lower surface of the n? layer.
    Type: Grant
    Filed: March 22, 2005
    Date of Patent: August 21, 2007
    Assignee: IXYS Corporation
    Inventor: Ulrich Kelberlau
  • Patent number: 7253476
    Abstract: A semiconductor device having an alternating conductivity type layer improves the tradeoff between the on-resistance and the breakdown voltage and facilitates increasing the current capacity by reducing the on resistance while maintaining a high breakdown voltage. The semiconductor device includes a semiconductive substrate region, through which a current flows in the ON-state of the device and that is depleted in the OFF-state. The semiconductive substrate region includes a plurality of vertical alignments of n-type buried regions 32 and a plurality of vertical alignments of p-type buried regions. The vertically aligned n-type buried regions and the vertically aligned p-type buried regions are alternately arranged horizontally. The n-type buried regions and p-type buried regions are formed by diffusing respective impurities into highly resistive n-type layers 32a laminated one by one epitaxially.
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: August 7, 2007
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Tatsuhiko Fujihira
  • Patent number: 7205629
    Abstract: A voltage booster transistor with an optimal conducting path formed in widebandgap semiconductors like Silicon Carbide and Diamond, is provided as a power transistor with a voltage rating >200V. Contrary to conventional vertical design of power transistors, a higher, optimum doping for a given thickness supports higher Source/Drain blocking voltage. A topside and backside gate region of the opposite conductivity type than the channel region providing control of source to drain current path through a small gate voltage. The backside gate and the Drain junction are able to support the rated blocking voltage of the device.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: April 17, 2007
    Assignee: WidebandGap LLC
    Inventor: Ranbir Singh
  • Patent number: 7180152
    Abstract: A starting wafer for high voltage semiconductor devices is formed by implanting arsenic into the top surface of a p type silicon substrate wafer to a depth of about 0.1 micron. A N type non-graded epitaxial layer is then grown atop the substrate without any diffusion step so that the arsenic is not intentionally driven. Device junction are then diffused into the epitaxially grown layer.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: February 20, 2007
    Assignee: International Rectifier Corporation
    Inventor: Thomas Herman
  • Patent number: 7180132
    Abstract: An HV PMOS device formed on a substrate having an HV well of a first polarity type formed in an epitaxial layer of a second polarity type includes a pair of field oxide regions on the substrate and at least partially over the HV well. Insulated gates are formed on the substrate between the field oxide regions. Stacked hetero-doping rims are formed in the HV well and in self-alignment with outer edges of the gates. A buffer region of the first polarity type is formed in the HV well between and in self-alignment with inner edges of the gates. A drift region of the second polarity type is formed in the buffer region between and in self-alignment with inner edges of the gates. The drift region includes a region having a gradual dopant concentration change, and includes a drain region of the second polarity type.
    Type: Grant
    Filed: September 16, 2004
    Date of Patent: February 20, 2007
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Jun Cai, Michael Harley-Stead, Jim G. Holt
  • Patent number: 7180158
    Abstract: A semiconductor component and method of manufacture, including an insulated gate bipolar transistor (IGBT) (100) including a semiconductor substrate (110) having a first conductivity type and buried semiconductor region (115) having a second conductivity type located above the semiconductor substrate. The IGBT further includes a plurality of first semiconductor regions (120) having the first conductivity type, a plurality of second semiconductor regions (130) having the first conductivity type, and a plurality of third semiconductor regions (140) having the second conductivity type. A sinker region (142) having the second conductivity type is disposed in a third semiconductor region and a first semiconductor region during manufacture to define the plurality of regions and tie the buried semiconductor region to the plurality of third semiconductor regions.
    Type: Grant
    Filed: June 2, 2005
    Date of Patent: February 20, 2007
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Vishnu K. Khemka, Amitava Bose, Ronghua Zhu
  • Patent number: 7170134
    Abstract: P-type buried regions 104a and 104b are formed in an extended drain region 102 formed in a P-type semiconductor substrate 110. An N-type buried region 113 is formed between the P-type buried regions 104a and 104b. An N-type impurity concentration of the N-type buried region 113 along a G–G? plane is low in the vicinity of boundaries between the N-type buried region 113 and the P-type buried regions 104a and 104b and is increased from the boundaries to an inside of the N-type buried region 113.
    Type: Grant
    Filed: November 23, 2004
    Date of Patent: January 30, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Yasuhiro Takehana, Toshihiko Uno
  • Patent number: 7157772
    Abstract: A gate electrode has an end extended over a part of a LOCOS oxide film, and a source electrode has an end extended further than the end of the gate electrode over a part of the LOCOS oxide film. An insulating film covering the gate electrode and the LOCOS oxide film is formed such that the thickness of the insulating film at an end-portion region, which is on an end portion of the gate electrode provided to extend over a part of the LOCOS oxide film, as viewed from a main surface of a supporting substrate, is smaller than the thickness of the insulating film below an end portion of the source electrode above the drain region and smaller than the thickness of the insulating film on an end portion of the gate electrode above a body region.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: January 2, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hiroyoshi Ogura, Hisao Ichijo, Yoshinobu Sato, Teruhisa Ikuta
  • Patent number: 7148539
    Abstract: A semiconductor structure includes a substrate, a source area formed in the substrate and a drain area formed in the substrate and comprising a doping of a first conductivity type. The drain area includes a first drain portion with a first doping concentration and a second drain portion with a second doping concentration, wherein the first doping concentration is higher than the second doping concentration. In the second drain portion a first region is formed comprising a doping of a second conductivity type which is different to the first conductivity type. Further, a second region is formed in the substrate below the second drain portion comprising a doping of the first conductivity type. A channel area is provided in the substrate between the source area and the second drain portion.
    Type: Grant
    Filed: April 16, 2004
    Date of Patent: December 12, 2006
    Assignee: Infineon Technologies AG
    Inventor: Hans Taddiken
  • Patent number: 7135751
    Abstract: A high breakdown voltage junction terminating structure having a loop-like RESURF structure formed on a SOI substrate is disclosed. A lateral IGBT, a lateral FWD, an output stage element and a driving circuit are formed in the inside region of the structure. The lateral IGBT and the lateral FWD are surrounded by a trench isolation region as an insulation region. Drain electrodes of high breakdown voltage NMOSFETs are provided on the inside of the high breakdown voltage junction terminating structure. Along with this, a gate electrode and a source electrode of each of the NMOSFETs are provided on the outside of the high breakdown voltage junction terminating structure. The periphery of the high breakdown voltage junction terminating structure is surrounded by a trench isolation region as a second insulation region. A control circuit is provided on the outside of the second insulation region.
    Type: Grant
    Filed: July 21, 2004
    Date of Patent: November 14, 2006
    Assignee: Fuji Electric Device Technology Co., Ltd.
    Inventors: Shinichi Jimbo, Tatsuhiko Fujihira
  • Patent number: 7132725
    Abstract: A p-channel MOSFET 1 has a buried layer 9 between a substrate 2 and an epitaxial layer 3. The impurity concentration of the buried layer 9 is higher than that of the epitaxial layer 3. As a result, if the p-channel MOSFET 3 and an n-channel MOSFET are fabricated in a single semiconductor substrate and when a voltage is applied between the source electrode 13 and the drain electrode 12, the impurity concentration of the epitaxial layer 3 apparently increases. Thus, the charge balance of the p-channel MOSFET 1 is not lost.
    Type: Grant
    Filed: February 24, 2003
    Date of Patent: November 7, 2006
    Assignee: Sanken Electric Co., Ltd.
    Inventor: Akio Iwabuchi
  • Patent number: 7071528
    Abstract: A double-triggered silicon controller rectifier (SCR) comprises a plurality of N+ diffusion areas, a plurality of P+ diffusion areas, a first N-well region, a second N-well region and a third N-well region formed in a P-substrate. The N+ diffusion areas and the P+ diffusion areas are isolated by shallow trench isolation (STI) structures. Two of the N+ diffusion areas are N-type trigger terminals. Two of the P+ diffusion areas are the P-type trigger terminal.
    Type: Grant
    Filed: April 28, 2004
    Date of Patent: July 4, 2006
    Assignee: National Chiao Tung University
    Inventors: Ming-Dou Ker, Kuo-Chun Hsu
  • Patent number: 7071527
    Abstract: A p-channel MOSFET (1) includes a semiconductor substrate (2), an epitaxial region (3), a second diffusion region (6), and a drain region. The epitaxial region (3) is formed on the upper surface of the semiconductor substrate (2). The second diffusion region (6) is formed in a predetermined upper surface area of the epitaxial region (3). The second diffusion region (6) has a central portion (6a) and a peripheral portion (6b). The central portion (6a) is formed substantially at the center of the epitaxial region (3) and formed thicker than the peripheral portion (6b). The peripheral portion (6b) is formed in an annular shape so as to surround the central portion (6a). The drain region (7) is formed in an upper surface area of the central portion (6a) of the second diffusion region (6).
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: July 4, 2006
    Assignee: Sanken Electric Co., Ltd.
    Inventor: Akio Iwabuchi
  • Patent number: 7052982
    Abstract: A method of manufacturing a semiconductor device includes providing semiconductor substrate having trenches and mesas. At least one mesa has first and second sidewalls. The method includes angularly implanting a dopant of a second conductivity into the first sidewall, and angularly implanting a dopant of a second conductivity into the second sidewall. The at least one mesa is converted to a pillar by diffusing the dopants into the at least one mesa. The pillar is then converted to a column by angularly implanting a dopant of the first conductivity into a first sidewall of the pillar, and by angularly implanting the dopant of the first conductivity type into a second sidewall of the pillar. The dopants are then diffused into the pillar to provide a P-N junction of the first and second doped regions located along the depth direction of the adjoining trench. Finally, the trenches are filled with an insulating material.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: May 30, 2006
    Assignee: Third Dimension (3D) Semiconductor, Inc.
    Inventors: Fwu-Iuan Hshieh, Koon Chong So, Brian D. Pratt
  • Patent number: 7049674
    Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.
    Type: Grant
    Filed: April 12, 2004
    Date of Patent: May 23, 2006
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
  • Patent number: 7049675
    Abstract: A high withstand voltage semiconductor device does not show any significant fall of its withstand voltage if the impurity concentration of the RESURF layer of a low impurity concentration semiconductor region thereof varies from the optimal level and/or influenced by the fixed electric charge.
    Type: Grant
    Filed: March 9, 2004
    Date of Patent: May 23, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kozo Kinoshita, Tetsuo Hatakeyama, Takashi Shinohe
  • Patent number: 7026669
    Abstract: A lateral channel transistor with an optimal conducting channel formed in widebandgap semiconductors like Silicon Carbide and Diamond is provided. Contrary to conventional vertical design of power transistors, a higher, optimum doping for a given thickness supports higher source/drain blocking voltage. A backside gate is insulated from the channel region using a low doped layer of the opposite conductivity type than the channel region to support the rated blocking voltage of the device.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: April 11, 2006
    Inventor: Ranbir Singh
  • Patent number: 7019392
    Abstract: A storage apparatus 10 is disclosed, that comprises a wiring substrate 11 having a first surface and a second surface, a flat type external connection terminal 12a disposed on the first surface of the wiring substrate 11, a semiconductor device 14 disposed on the second surface of the wiring substrate 11 and having a connection terminal 14a connected to the flat type external connection terminal 12a, a molding resin 15 for coating the semiconductor device 14 on the second surface of the wiring substrate 11, a card type supporting frame 10a having a concave portion or a hole portion fitting the wiring substrate 11, the semiconductor device 14, and the molding resin 15 in such a manner that the flat type external connection terminal 12a is exposed to the first surface of the wiring substrate 11, and adhesive resin a adhering integrally the flat type external connection terminal 12a, the wiring substrate 11, the semiconductor device 14, the molding resin 15, and the card type supporting frame 10a.
    Type: Grant
    Filed: August 14, 2003
    Date of Patent: March 28, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hiroshi Iwasaki
  • Patent number: 7002211
    Abstract: A lateral semiconductor device includes an alternating conductivity type layer for providing a first semiconductor current path in the ON-state of the device and for being depleted in the OFF-state of the device, that has an improved structure for realizing a high breakdown voltage in the curved sections of the alternating conductivity type layer.
    Type: Grant
    Filed: May 19, 2004
    Date of Patent: February 21, 2006
    Assignee: Fuji Electric Co., Ltd.
    Inventors: Yasuhiko Onishi, Tatsuhiko Fujihira, Susumu Iwamoto, Takahiro Sato
  • Patent number: 6979875
    Abstract: A power device and a method for manufacturing the same are provided. The power device comprises a first conductive semiconductor substrate; a second conductive buried layer formed to a certain depth within the semiconductor substrate; a second conductive epitaxial layer formed on the conductive buried layer; a first conductive well formed within the conductive epitaxial layer; a second conductive well formed within the second conductive epitaxial layer, on both sides of the first conductive well; a second conductive drift region formed in predetermined portions on the first and the second conductive well; and a lateral double diffused MOS transistor formed in the second conductive drift region. The breakdown voltage of the power device is controlled according to a distance between the first conductive well and the second conductive buried layer.
    Type: Grant
    Filed: May 28, 2003
    Date of Patent: December 27, 2005
    Assignee: Fairchild Korea Semiconductor Ltd.
    Inventors: Tae-hun Kwon, Choel-joong Kim, Suk-kyun Lee
  • Patent number: 6940126
    Abstract: A semiconductor component has at least one first terminal zone of a first conductivity type in a semiconductor body. The first terminal zone is contact-connected by a first terminal electrode. A drift zone of the first conductivity type is adjoined by a second terminal zone of the second conductivity type. A channel zone of a second conductivity type is formed between the at least one first terminal zone and the drift zone. A control electrode is insulated from the semiconductor body and adjacent to the channel zone. A first channel is formed by the channel zone in a region adjacent to the control electrode, the first channel conducts only upon application of a control voltage that is not equal to zero between the control electrode and the first terminal zone. The first terminal electrode is connected to the drift zone via at least one second channel of the first conductivity type, which already conducts in the event of a control voltage equal to zero.
    Type: Grant
    Filed: September 4, 2003
    Date of Patent: September 6, 2005
    Assignee: Infineon Technologies AG
    Inventors: Gerald Deboy, Uwe Wahl, Armin Willmeroth
  • Patent number: 6936907
    Abstract: This invention provides a method or an auxiliary method to implement optimum variation lateral flux on a semiconductor surface. The method is to cover one or more thin films of high permittivity dielectric material on the semiconductor surface. The one or more films are capable of transmitting flux into or extracting flux from the semiconductor surface, or even to extract some flux from a part of the semiconductor surface and then transmit the flux to another part of the semiconductor surface. By using optimum variation lateral flux, not only can high-voltage lateral devices be made, but also an edge-termination technique for high-voltage vertical devices is provided. While the thin films can be used to prevent the occurrence of strong electric fields produced at the edges of some doped regions, these regions are used to compensate other doped regions with opposite doping and different location.
    Type: Grant
    Filed: August 29, 2003
    Date of Patent: August 30, 2005
    Assignee: The University of Electronic Science and Technology of China
    Inventor: Xingbi Chen
  • Patent number: 6919610
    Abstract: A semiconductor device including a drain layer having a first conductivity type, a drift layer having the first conductivity type, which is formed on the drain layer and has an impurity concentration lower than that in the drain layer, and a RESURF layer having a second conductivity type and formed to extend from a surface of the drift layer into the drain layer, the RESURF layer forming a superjunction structure together with the drift layer and forming a depletion layer in the drift layer.
    Type: Grant
    Filed: November 18, 2003
    Date of Patent: July 19, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Wataru Saitoh, Ichiro Omura