Including Programmable Passive Component (e.g., Fuse) Patents (Class 257/529)
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Patent number: 9997455Abstract: Improvement of key electrical specifications of vertical semiconductor devices, usually found in the class of devices known as discrete semiconductors, has a direct impact on the performance achievement and power efficiency of the systems in which these devices are used. Imprecise vertical device specifications cause system builders to either screen incoming devices for their required specification targets or to design their system with lower performance or lower efficiency than desired. Disclosed is an architecture and method for achieving a desired target specification for a vertical semiconductor device. Precise trimming of threshold voltage improves targeting of both on-resistance and switching time. Precise trimming of gate resistance also improves targeting of switching time. Precise trimming of a device's effective width improves targeting of both on-resistance and current-carrying capability.Type: GrantFiled: March 6, 2017Date of Patent: June 12, 2018Assignee: D3 Semiconductor LLCInventor: Thomas E. Harrington, III
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Patent number: 9991126Abstract: A semiconductor device includes a substrate; a hydrogen insulating layer disposed on the substrate and including hydrogen ions; a first level layer disposed on the substrate and including a first wire and a second wire; a second level layer disposed on the substrate at a different level from the first level layer and including a third wire; an interlayer insulating layer disposed between the first level layer and the second level layer; a diffusion prevention layer contacting the third wire; a contact plug penetrating the interlayer insulating layer and electrically connecting the second wire to the third wire; and a dummy contact plug penetrating the interlayer insulating layer. The dummy contact plug contacts the first and second level layers, is spaced apart from the diffusion prevention layer, and is configured to provide a movement path for the hydrogen ions in the hydrogen insulating layer.Type: GrantFiled: March 2, 2017Date of Patent: June 5, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dong-Sik Park, Won-Chul Lee
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Patent number: 9984966Abstract: Provided is a semiconductor device preventing readhesion of conductive body which forms fuse elements and breakage of the fuse elements. The semiconductor device includes a first insulating film formed on a semiconductor substrate, a plurality of fuse elements formed on the first insulating film adjacent to one another, a protective insulating film covering at least side surfaces of the fuse elements, and a second insulating film formed of one of a BPSG film and a PSG film to cover the fuse elements and the protective insulating film. The protective insulating film is higher in mechanical strength than the second insulating film.Type: GrantFiled: January 31, 2017Date of Patent: May 29, 2018Assignee: ABLIC INC.Inventor: Yoshitaka Kimura
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Patent number: 9978679Abstract: A fuse structure may include an anode pattern, a cathode pattern and a connection member. The anode pattern may be formed on a semiconductor substrate. The cathode pattern may be formed on the anode pattern. The connection member may be electrically connected between the anode pattern and the cathode pattern. The connection member may have different widths.Type: GrantFiled: March 30, 2017Date of Patent: May 22, 2018Assignee: SK Hynix Inc.Inventor: Dong Yean Oh
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Patent number: 9939484Abstract: A method for operating a display device includes configuring at least a portion of a row or at least a portion of a column of pixels of the display device to produce interconnected pixels, wherein the interconnected pixels are interconnected to one another in an electrically parallel configuration to create a parallel capacitance that is larger than capacitances of each of the interconnected pixels; connecting a voltage-measuring probe to drains of TFTs of the interconnected pixels; applying source voltages to the TFTs of the interconnected pixels from one or more source lines and applying a gate voltage to the TFTs of the interconnected pixels from one or more gate lines; and measuring voltage of the TFT drains of the interconnected pixels.Type: GrantFiled: December 19, 2013Date of Patent: April 10, 2018Assignee: Amazon Technologies, Inc.Inventors: Toru Sakai, Jozef Elisabeth Aubert
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Patent number: 9934925Abstract: Fuse structures and forming and operation methods thereof are disclosed. One of the fuse structures includes a dielectric strip and a fuse strip extending in different directions. The dielectric strip is sandwiched by a first conductive strip and a second conductive strip. The fuse strip is insulated from each of the first conductive strip and the second conductive strip and has a blowing region corresponding to the dielectric strip.Type: GrantFiled: November 16, 2015Date of Patent: April 3, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Chou Tsai, Mu-Yi Lin, Tzy-Kuang Lee
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Patent number: 9917054Abstract: As means for preventing a leakage of a fuse element cut by laser trimming due to a conductive residue or the like, an insulating film which has a high thermal conductivity and a relatively low adhesion is formed between an element isolation region and the fuse element in the case of forming the fuse element on the element isolation region in a groove on a main surface of an epitaxial substrate. When the fuse element is cut by performing the laser trimming, both of a part of the fuse element and the insulating film below the part of the fuse element are removed.Type: GrantFiled: November 27, 2014Date of Patent: March 13, 2018Assignee: Renesas Electronics CorporationInventor: Eisuke Kodama
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Patent number: 9917006Abstract: A method includes forming a patterned layer on a substrate having a first region and a second region being adjacent each other. The patterned layer includes first features in the first region. The second region is free of the patterned layer. The method further includes forming a material layer on the patterned layer and the substrate; forming a first guard ring disposed in the second region and surrounding the first features; forming a flowable-material (FM) layer over the material layer; forming a patterned resist layer over the FM layer, wherein the patterned resist layer includes a plurality of openings; and transferring the plurality of openings to the material layer.Type: GrantFiled: September 9, 2016Date of Patent: March 13, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chihy-Yuan Cheng, Chun-Chang Wu, Shun-Shing Yang, Ching-Sen Kuo, Feng-Jia Shiu, Chun-Chang Chen
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Patent number: 9899466Abstract: An integrated circuit with first and second resistors comprised of resistor bodies, resistor heads, and resistor buffer regions wherein the resistor buffer regions are disposed between the resistor body and the resistor heads. The width of the first and second resistors is different. The length of the first and second resistor buffer regions is different. The total head resistance which is equal to the resistor head resistance plus the resistor buffer region is equal for both the first and second resistors.Type: GrantFiled: October 27, 2016Date of Patent: February 20, 2018Assignee: TEXAS INSTRUMENTS INCORPORATEDInventor: Josef Muenz
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Patent number: 9899314Abstract: A method for fabricating a semiconductor substrate is disclosed, which includes: forming a first dielectric layer on a substrate body; forming a plurality of first vias penetrating the first dielectric layer to expose portions of the substrate body; forming a second dielectric layer on the first dielectric layer and the exposed portions of the substrate body, wherein the second dielectric layer extends on walls of the first vias; etching the second dielectric layer to form a plurality of openings communicating with the first vias and form a plurality of second vias penetrating the second dielectric layer in the first vias so as to expose portions of the substrate body, leaving the second dielectric layer on the walls of the first vias; and forming a circuit layer in the openings, and forming a plurality of conductive vias in the second vias for electrically connecting the circuit layer and the substrate body.Type: GrantFiled: September 4, 2014Date of Patent: February 20, 2018Assignee: Siliconware Precision Industries Co., Ltd.Inventor: Wei-Che Chang
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Patent number: 9881837Abstract: A fuse device and method for fabricating the fuse device is disclosed. An exemplary fuse device includes a first contact and a second contact coupled with a metal-semiconductor alloy layer, wherein the metal-semiconductor alloy layer extends continuously between the first contact and the second contact. The metal-semiconductor alloy layer is disposed over an epitaxial layer that is disposed over a fin structure of a substrate.Type: GrantFiled: March 3, 2015Date of Patent: January 30, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Min-Chang Liang, Shien-Yang Wu, Wei-Chang Kung
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Patent number: 9875964Abstract: Semiconductor device components and methods are disclosed. In one embodiment, a semiconductor device component includes a conductive segment having a first surface, a second surface opposite the first surface, a first end, and a second end opposite the first end. A first via is coupled to the second surface of the conductive segment at the first end. A second via is coupled to the first surface of the conductive segment at the second end, and a third via is coupled to the second surface of the conductive segment at the second end.Type: GrantFiled: January 28, 2014Date of Patent: January 23, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Bi-Ling Lin, Jian-Hong Lin, Ming-Hong Hsieh, Lee-Der Chen, Jiaw-Ren Shih, Chwei-Ching Chiu
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Patent number: 9875814Abstract: Systems and methods disclosed herein include those that may receive a memory request including a requested memory address and may send the memory request directly to an address decoder associated with a stacked-die memory vault without knowing whether a repair address is required. If a subsequent analysis of the memory request shows that a repair address is required, an in-process decode of the requested memory address can be halted and decoding of the repair address initiated.Type: GrantFiled: May 16, 2016Date of Patent: January 23, 2018Assignee: Micron Technology, Inc.Inventors: Joe M. Jeddeloh, Paul A. LaBerge
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Patent number: 9870989Abstract: Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.Type: GrantFiled: March 22, 2017Date of Patent: January 16, 2018Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Veeraraghavan S. Basker, Kangguo Cheng, Ali Khakifirooz, Juntao Li
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Patent number: 9865537Abstract: In described examples, an apparatus includes: an integrated circuit die having multiple terminals; the integrated circuit die positioned on a die pad portion of a leadframe having leads for external connections, at least some of the leads having an inner portion electrically coupled to at least one terminal of the integrated circuit die; a fuse element coupled between one of the leads of the leadframe and at least one terminal selected from the multiple terminals of the integrated circuit die; and encapsulation material surrounding the integrated circuit die and the leadframe to form a packaged integrated circuit including the integrated circuit die and the fuse element, and having a cavity in the encapsulation material surrounding the fuse element such that the fuse element is spaced from the encapsulation material.Type: GrantFiled: December 30, 2016Date of Patent: January 9, 2018Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Barry Jon Male, Steve Kummerl, Benjamin Stassen Cook
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Patent number: 9847311Abstract: A semiconductor device includes first and second semiconductor elements and first and second conductive members. A first electrode on the first semiconductor element is bonded to a first stack part of the first conductive member by a first bonding layer. A second electrode on the second semiconductor element is bonded to a second stack part of the second conductive member by a second bonding layer. A first joint part of the first conductive member is bonded to a second joint part of the second conductive member by an intermediate bonding layer. A first surface of the first joint part facing the second joint part, a side surface of the first joint part continuous from the first surface, a second surface of the second joint part facing the first joint part, and a side surface of the second joint part continuous from the second surface are covered by nickel layers.Type: GrantFiled: November 3, 2015Date of Patent: December 19, 2017Assignee: Toyota Jidosha Kabushiki KaishaInventor: Takuya Kadoguchi
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Patent number: 9842812Abstract: Embodiments herein provide for a self-destructing chip including at least a first die and a second die. The first die includes an electronic circuit, and the second die is composed of one or more polymers that disintegrates at a first temperature. The second die defines a plurality of chambers, wherein a first subset of the chambers contain a material that reacts with oxygen in an exothermic manner. A second subset of the chambers contain an etchant to etch materials of the first die. In response to a trigger event, the electronic circuit is configured to expose the material in the first subset of chambers to oxygen in order to heat the second die to at least the first temperature, and is configured to release the etchant from the second subset of the chambers to etch the first die.Type: GrantFiled: March 17, 2015Date of Patent: December 12, 2017Assignee: Honeywell International Inc.Inventors: Steven Tin, Jeffrey James Kriz, Steven J. Eickhoff, Jeff A. Ridley, Amit Lal, Christopher Ober, Serhan Ardanuc, Ved Gund, Alex Ruyack, Katherine Camera
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Patent number: 9831176Abstract: A semiconductor integrated circuit device includes a fuse element that can be laser trimmed to adjust the characteristics of the semiconductor integrated circuit device, The semiconductor integrated circuit device includes an interlayer insulating film above the fuse element, and the thickness of the interlayer insulating film is reduced by using an amorphous silicon layer that is formed by sputtering as a material of the fuse element, and by forming the amorphous silicon layer at the same time as metal wiring is formed. The laser trimming processing is thus stabilized without needing a high level of dry etching stabilization control.Type: GrantFiled: March 2, 2016Date of Patent: November 28, 2017Assignee: SII Semiconductor CorporationInventor: Hirofumi Harada
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Patent number: 9818691Abstract: A corrosion resistant semiconductor device includes fuse elements that can be cut by laser light. An upper portion of the fuse elements is covered with a porous insulating film so that, when laser light irradiated from a rear surface of a semiconductor substrate is collected at selected fuse elements, the fuse elements generate heat, expand, and rupture. A metal lattice having a plurality of windows is disposed over the fuse elements to permit rapid expansion of the fuse elements when irradiated with the laser light. Alternatively, a metal array having a plurality of independent light-shielding portions may be disposed over the fuse elements to prevent the laser light from adversely affecting circuitry on the front surface side of the semiconductor device.Type: GrantFiled: March 10, 2016Date of Patent: November 14, 2017Assignee: SII Semiconductor CorporationInventors: Yukihiro Imura, Yoshitaka Kimura, Masaru Akino
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Patent number: 9793215Abstract: A semiconductor integratd circuit device includes fuse elements formed on an element isolation insulating film, and an insulating film, an interlayer insulating film and a silicon nitride film successively formed over the fuse elements. An opening region extends through the silicon nitride film into the interlayer insulating film above the fuse elements, and openings formed in the interlayer insulating film are positioned on both sides of middle portions of the fuse elements. The openings facilitate blowing off of the insulating film during laser cutting of the fuse elements, reducing physical damage to the element isolation insulating film under the fuse elements.Type: GrantFiled: April 26, 2016Date of Patent: October 17, 2017Assignee: SII Semiconductor CorporationInventor: Yukimasa Minami
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Patent number: 9768114Abstract: A semiconductor device includes a first line pattern and a second line pattern formed in parallel on a semiconductor substrate, third line patterns formed in parallel between the first line pattern and the second line pattern, fourth line patterns formed in parallel between the first line pattern and the second line pattern, a first connection structure configured to couple a first of the third line patterns with a first of the fourth lines patterns, which are adjacent to the first line pattern, and a second connection structure configured to couple a second of the first lines patterns with a second of the fourth lines patterns, which are adjacent to the second line pattern.Type: GrantFiled: November 7, 2011Date of Patent: September 19, 2017Assignee: SK Hynix Inc.Inventor: Yong Chul Shin
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Patent number: 9768065Abstract: Interconnect structures and related methods of manufacture improve device reliability and performance by selectively incorporating dopants into conductive lines. Multiple seed layer deposition steps or variable trench bottom areas are used to locally control the dopant concentration within the interconnect structures at the same wiring level, which provides a robust integration approach for metallizing interconnects in future-generation technology nodes.Type: GrantFiled: July 6, 2016Date of Patent: September 19, 2017Assignee: GLOBALFOUNDRIES INC.Inventors: Ping-Chuan Wang, Erdem Kaltalioglu, Ronald G. Filippi, Cathryn J. Christiansen
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Patent number: 9768766Abstract: A circuit may comprise an electronic switching element, an integrated sensor, and a low-impedance path from one of the terminals of the sensor to one of the terminals of the electronic switching element.Type: GrantFiled: July 14, 2014Date of Patent: September 19, 2017Assignee: Infineon Technologies Austria AGInventors: Stefan Willkofer, Gernot Langguth, Wolfgang Roesner, Andreas Grassmann
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Patent number: 9761486Abstract: A method of forming a chip package portion having a reduced loading effect between various metal lines during a leveling process comprises forming a first layer, a passivation layer over the first layer, a second layer over the passivation layer, and a third layer over the second layer. The method also comprises forming a patterned opening having multiple depths by removing portions of the first layer, the passivation layer, the second layer, and the third layer by way of one or more removal processes that remove portions of the first layer, the passivation layer, the second layer, and the third layer in accordance with one or more patterned photoresist depositions. The method further comprises depositing a material into the patterned opening, and leveling the material deposited into the patterned opening.Type: GrantFiled: March 31, 2014Date of Patent: September 12, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Gwo-Chyuan Kuo, Han-Wei Yang, Chen-Chung Lai
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Patent number: 9761463Abstract: According to embodiments, a semiconductor device is provided. The semiconductor device includes an insulation layer, an electrode, and a groove. The insulation layer is provided on a surface of a substrate. The electrode is buried in the insulation layer, and a first end surface of the electrode is exposed from the insulation layer. The groove is formed around the electrode on the surface of the substrate. The groove has an outside surface of the electrode as one side surface, and the groove is opened on the surface side of the insulation layer. The first end surface of the electrode buried in the insulation layer protrudes from the surface of the insulation layer.Type: GrantFiled: May 21, 2015Date of Patent: September 12, 2017Assignee: TOSHIBA MEMORY CORPORATIONInventors: Kazumasa Tanida, Takamitsu Yoshida, Kuniaki Utsumi, Atsuko Kawasaki
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Patent number: 9721885Abstract: Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.Type: GrantFiled: October 25, 2016Date of Patent: August 1, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Veeraraghavan S. Basker, Kangguo Cheng, Ali Khakifirooz, Juntao Li
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Patent number: 9716064Abstract: Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.Type: GrantFiled: August 14, 2015Date of Patent: July 25, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Veeraraghavan S. Basker, Kangguo Cheng, Ali Khakifirooz, Juntao Li
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Patent number: 9691873Abstract: The invention provides transient devices, including active and passive devices that electrically and/or physically transform upon application of at least one internal and/or external stimulus. Materials, modeling tools, manufacturing approaches, device designs and system level examples of transient electronics are provided.Type: GrantFiled: September 21, 2012Date of Patent: June 27, 2017Assignees: The Board of Trustees of the University of Illinois, Trustees of Tufts CollegeInventors: John A. Rogers, Fiorenzo G. Omenetto, Suk-Won Hwang, Hu Tao, Dae-Hyeong Kim, David Kaplan
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Patent number: 9659861Abstract: A semiconductor device includes a lower wiring layer made of a conductive material; an upper wiring layer formed in an upper layer than the lower wiring layer; and a fuse film, at least a portion of the fuse film being formed in a plug formation layer in which a plug for connecting the lower wiring layer and the upper wiring layer is formed, and made of a conductive material including a metallic material other than copper.Type: GrantFiled: June 18, 2015Date of Patent: May 23, 2017Assignee: ROHM CO., LTD.Inventors: Satoshi Kageyama, Yuichi Nakao
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Patent number: 9646929Abstract: A wafer chip and a method of designing the chip is disclosed. A first fuse is formed having a first critical dimension and a second fuse having a second critical dimension are formed in a layer of the chip. A voltage may be applied to burn out at least one of the first fuse and the second fuse. The first critical dimension of the first fuse may result from applying a first mask to the layer and applying light having a first property to the mask. The second critical dimension of the second fuse may result from applying a second mask to the layer and applying light having a second property to the mask.Type: GrantFiled: June 13, 2013Date of Patent: May 9, 2017Assignee: GLOBALFOUNDRIES, INC.Inventors: Hsueh-Chung Chen, Chiahsun Tseng, Chun-Chen Yeh, Ailian Zhao
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Patent number: 9627314Abstract: A fuse structure and a method of blowing the same are provided. The fuse structure includes a conductive line on a substrate, first and second vias on the conductive line that are spaced apart from each other, a cathode electrode line that is electrically connected to the first via, an anode electrode line that is electrically connected to the second via, and a dummy pattern that is adjacent at least one of the cathode and anode electrode lines and electrically isolated from the conductive line.Type: GrantFiled: January 4, 2016Date of Patent: April 18, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: Hyun-Min Choi, Shigenobu Maeda
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Patent number: 9601354Abstract: An integrated circuit die includes a first bond pad having a bond contact area at a first depth into a plurality of build-up layers over a semiconductor substrate of the integrated circuit die, having sidewalls that surround the bond contact area, the sidewalls extending from the first depth to a top surface of the plurality of build-up layers, and having a top portion that extends over a portion of a top surface of the plurality of build-up layers.Type: GrantFiled: August 27, 2014Date of Patent: March 21, 2017Assignee: NXP USA, Inc.Inventors: Douglas M. Reber, Sergio A. Ajuria, Phuc M. Nguyen
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Patent number: 9576899Abstract: Electrical fuses and methods for forming an electrical fuse. A semiconductor substrate is implanted to define a modified region in the semiconductor substrate. Trenches that surround the modified region and that penetrate into the semiconductor substrate to a depth greater than a depth of the modified region are formed in the modified region so as to define a fuse link of the electrical fuse. The substrate is removed from beneath the fuse link with a selective etching process that removes the semiconductor substrate with a first etch rate that is higher than a second etch rate of the modified region.Type: GrantFiled: June 23, 2015Date of Patent: February 21, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Vibhor Jain, Qizhi Liu, Ian A. McCallum-Cook
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Patent number: 9570537Abstract: A semiconductor device has a field insulating film formed on a semiconductor substrate, a resistor and a fuse formed on the field insulating film, a first interlayer insulating film formed on the fuse, a second interlayer insulating film formed on the first interlayer insulating film, and a third interlayer insulating film including an SOG layer and formed on the second interlayer insulating film. A passivation oxide film is formed on the third interlayer insulating film. A fuse opening is formed above the fuse and extends from the passivation oxide film to a midpoint in the second interlayer insulating film. A passivation nitride film covers the passivation oxide film and is disposed on a side surface and a bottom surface of the fuse opening. The passivation nitride film disposed on the bottom surface of the fuse opening has an opening exposing the second interlayer insulating film at the midpoint thereof.Type: GrantFiled: January 23, 2014Date of Patent: February 14, 2017Assignee: SII Semiconductor CorporationInventor: Hisashi Hasegawa
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Patent number: 9553046Abstract: A method of forming a semiconductor device comprising a fuse is provided including providing a semiconductor-on-insulator (SOI) structure comprising an insulating layer and a semiconductor layer formed on the insulating layer, forming raised semiconductor regions on the semiconductor layer adjacent to a central portion of the semiconductor layer and performing a silicidation process of the central portion of the semiconductor layer and the raised semiconductor regions to form a silicided semiconductor layer and silicided raised semiconductor regions.Type: GrantFiled: May 21, 2015Date of Patent: January 24, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Jan Hoentschel, Peter Baars, Hans-Peter Moll
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Patent number: 9548270Abstract: An electrical fuse device is disclosed. A circuit apparatus can include the fuse device, a first circuit element and a second circuit element. The fuse includes a first contact that has a first electromigration resistance, a second contact that has a second electromigration resistance and a metal line, which is coupled to the first contact and to the second contact, that has a third electromigration resistance that is lower than the second electromigration resistance. The first circuit element is coupled to the first contact and the second circuit element coupled to the second contact. The fuse is configured to conduct a programming current from the first contact to the second contact through the metal line. Further, the programming current causes the metal line to electromigrate away from the second contact to electrically isolate the second circuit element from the first circuit element.Type: GrantFiled: September 15, 2015Date of Patent: January 17, 2017Assignee: International Business Machines CorporationInventors: Baozhen Li, Yan Zun Li, Keith Kwong Hon Wong, Chih-Chao Yang
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Patent number: 9536829Abstract: An method including forming a back end of the line (BEOL) wiring portion directly on top of a semiconductor base portion, the BEOL wiring portion including a plurality of layers of a metallic material and a dielectric material and excluding a semiconductor material, forming a through-substrate via through the BEOL wiring portion and the semiconductor base portion, forming an electronic fuse in the BEOL wiring portion adjacent to the through-substrate via, and forming a guard ring in the BEOL wiring portion surrounding the through-substrate via and the electronic fuse in the BEOL wiring portion, the through-substrate via in the semiconductor base portion being free from the guard ring.Type: GrantFiled: September 11, 2014Date of Patent: January 3, 2017Assignee: Internatonal Business Machines CorporationInventors: Mukta G. Farooq, Timothy D. Sullivan, Ping-Chuan Wang, Lijuan Zhang
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Patent number: 9514865Abstract: The object of the invention is a multi-contact element for a varistor wherein the multi-contact element has a sandwich structure, wherein the sandwich structure has two or more contact elements in a lowermost layer, and wherein the sandwich structure has at least one common connection electrode in an uppermost layer, wherein a first intermediate layer made of an electrically insulating layer of material is provided at least in segments between the lowermost layer (US) and the uppermost layer, wherein fuses are located in the first intermediate layer that are configured such that they are capable of sustaining a specified surge current, the specified surge current per fuse being less than the specified surge current of the varistor, wherein the fuses are embodied as vias within the first intermediate layer, wherein the fuses in the first intermediate layer are in direct electrical contact with the common connection electrode, wherein each of the fuses is in direct or indirect electrical contact with a subset oType: GrantFiled: November 19, 2014Date of Patent: December 6, 2016Assignee: Phoenix Contact GMBH & Co. KGInventors: Jan-Erik Schmutz, Friedrich-Eckhard Brand
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Patent number: 9490246Abstract: A P-type epitaxial growth layer is formed on a P-type semiconductor substrate with an N-type buried region and a P-type buried region interposed therebetween. A cathode region, an anode region, and an N-type sinker region are formed in P-type epitaxial growth layer. A resistance element is formed on a surface of an isolation region that electrically isolates anode region and N-type sinker region. Resistance element has: one end portion electrically connected to each of anode region and N-type sinker region; and the other end portion electrically connected to a ground potential.Type: GrantFiled: July 24, 2015Date of Patent: November 8, 2016Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Yasuki Yoshihisa, Ryoji Matsuda
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Patent number: 9478585Abstract: There is provided a solid-state image pickup device that includes a functional region provided with an organic film, and a guard ring surrounding the functional region.Type: GrantFiled: March 31, 2016Date of Patent: October 25, 2016Assignee: Sony CorporationInventors: Keisuke Hatano, Tetsuji Yamaguchi, Shintarou Hirata
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Patent number: 9478547Abstract: Dishing of a plate of a capacitor is suppressed in a structure where the top of the plate is flush with a top of an interconnection. Double interlayer dielectric films are used to form a first recess and a second recess. The second recess has an opening on the bottom of the first recess. The first and second recesses are used to form a capacitor. The lower electrode of the capacitor has a bottom part along the bottom of the first recess. The lower electrode further includes a sidewall part having an upper end that projects along a side face of the second recess from the opening of the second recess up to a position between the opening of the second recess and a top of the upper interlayer dielectric film (the upper one of the double interlayer dielectric films).Type: GrantFiled: June 3, 2015Date of Patent: October 25, 2016Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Hiroyuki Kunishima, Masashige Moritoki, Toshiji Taiji, Youichi Yamamoto
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Patent number: 9466567Abstract: An e-fuse is provided in one area of a semiconductor substrate. The E-fuse includes a vertical stack of from, bottom to top, base metal semiconductor alloy portion, a first metal semiconductor alloy portion, a second metal semiconductor portion, a third metal semiconductor alloy portion and a fourth metal semiconductor alloy portion, wherein the first metal semiconductor alloy portion and the third metal semiconductor portion have outer edges that are vertically offset and do not extend beyond vertical edges of the second metal semiconductor alloy portion and the fourth metal semiconductor alloy portion.Type: GrantFiled: December 3, 2015Date of Patent: October 11, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Kangguo Cheng, Bruce B. Doris, Pouya Hashemi, Ali Khakifirooz, Alexander Reznicek
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Patent number: 9460975Abstract: Methods of testing TSVs using eFuse cells prior to and post bonding wafers in a 3D IC stack are provided. Embodiments include providing a wafer of a 3D IC stack, the wafer having thin and thick metal layers; forming first and second TSVs on the wafer, the first and second TSVs laterally separated; forming an eFuse cell between and separated from the first and second TSVs; forming a FF adjacent to the second TSV and on an opposite side of the second TSV from the eFuse cell; connecting the first TSV, the eFuse cell, the second TSV, and the FF in series in an electric circuit; and testing the first and second TSVs prior to bonding the wafer to a subsequent wafer in the 3D IC stack.Type: GrantFiled: February 2, 2015Date of Patent: October 4, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Sukeshwar Kannan, Xiaoqiang Zhang, Shan Gao
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Patent number: 9461056Abstract: There is provided a non-volatile memory including: plural zener zap devices, each including a cathode region and an anode region formed in a well; and a metal wiring line that is formed above the plural zener zap devices, that is commonly connected to each of the cathode regions, and that supplies a write voltage to each of the zener zap devices.Type: GrantFiled: November 3, 2015Date of Patent: October 4, 2016Assignee: LAPIS Semiconductor Co., Ltd.Inventor: Masayuki Otsuka
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Patent number: 9449918Abstract: A semiconductor device has improved reliability by preventing a fuse cut through a repair process from being electrically reconnected by electrochemical migration. The semiconductor device includes a substrate, a fuse including a first fuse pattern and a second fuse pattern formed at the same level on the substrate, the first fuse pattern and the second fuse pattern being spaced a first width apart from each other such that a gap in the fuse is disposed at a first location between the first fuse pattern and the second fuse pattern, and a first insulation layer formed on the first fuse pattern and the second fuse pattern, the first insulation layer including an opening above the first location and having a second width smaller than the first width.Type: GrantFiled: July 14, 2015Date of Patent: September 20, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Moon-Gi Cho, Eun-Chul Ahn, Sang-Young Kim, Joo-Weon Shin, Min-Ho Lee
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Patent number: 9450021Abstract: This technology provides an electronic device. An electronic device in accordance with an implementation of this document includes a semiconductor memory, and the semiconductor memory includes a variable resistance structure including a material having a resistance that is changed by formation or dissipation of conductive filaments; and a Magnetic Tunnel Junction (MTJ) structure inserted in the variable resistance structure and comprising a first magnetic layer having a pinned magnetization direction, a second magnetic layer having a variable magnetization direction, and a tunnel dielectric layer interposed between the first magnetic layer and the second magnetic layer.Type: GrantFiled: November 24, 2015Date of Patent: September 20, 2016Assignee: SK hynix Inc.Inventor: Tae-Young Lee
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Patent number: 9449919Abstract: A semiconductor device includes a first interconnect structure. The first interconnect structure includes a first interconnect portion, a second interconnect portion and a third interconnect portion. The first interconnect portion has a width and a length. The second interconnect portion has a width less than the length of the first interconnect portion. The second interconnect portion is connected to the first interconnect portion. The third interconnect portion has a width less than the width of the second interconnect portion. The third interconnect portion is connected to the second interconnect portion.Type: GrantFiled: February 12, 2015Date of Patent: September 20, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jian-Hong Lin, Hsin-Chun Chang, Shiou-Fan Chen, Chwei-Ching Chiu, Yung-Huei Lee
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Patent number: 9431339Abstract: The present disclosure generally relates to a wiring structure for a fuse component and corresponding methods of fabrication. A wiring structure for a fuse component according to the present disclosure can include: a first electrical terminal embedded within a doped conductive layer, the doped conductive layer being positioned between two insulator layers of an integrated circuit (IC) structure; a dielectric liner positioned between the first electrical terminal and the doped conductive layer; a second electrical terminal embedded within the doped conductive layer; wherein each of the first electrical terminal and the second electrical terminal are further embedded in one of the two insulator layers, and the dielectric liner is configured to degrade upon becoming electrically charged.Type: GrantFiled: February 19, 2014Date of Patent: August 30, 2016Assignee: International Business Machines CorporationInventors: Toshiaki Kirihata, Edward P. Maciejewski, Subramanian S. Iyer, Chengwen Pei, Deepal U. Wehella-Gamage
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Patent number: 9431340Abstract: The present disclosure generally relates to a wiring structure for a fuse component and corresponding methods of fabrication. A wiring structure for a fuse component according to the present disclosure can include: a first electrical terminal embedded within a doped conductive layer, the doped conductive layer being positioned between two insulator layers of an integrated circuit (IC) structure; a dielectric liner positioned between the first electrical terminal and the doped conductive layer; a second electrical terminal embedded within the doped conductive layer; wherein each of the first electrical terminal and the second electrical terminal are further embedded in one of the two insulator layers, and the dielectric liner is configured to degrade upon becoming electrically charged.Type: GrantFiled: October 6, 2015Date of Patent: August 30, 2016Assignee: International Business Machines CorporationInventors: Toshiaki Kirihata, Edward P. Maciejewski, Subramanian S. Iyer, Chengwen Pei, Deepal U. Wehella-Gamage
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Patent number: 9425144Abstract: Structure providing more reliable fuse blow location, and method of making the same. A vertical metal fuse blow structure has, prior to fuse blow, an intentionally damaged portion of the fuse conductor. The damaged portion helps the fuse blow in a known location, thereby decreasing the resistance variability in post-blow circuits. At the same time, prior to fuse blow, the fuse structure is able to operate normally. The damaged portion of the fuse conductor is made by forming an opening in a cap layer above a portion of the fuse conductor, and etching the fuse conductor. Preferably, the opening is aligned such that the damaged portion is on the top corner of the fuse conductor. A cavity can be formed in the insulator adjacent to the damaged fuse conductor. The damaged fuse structure having a cavity can be easily incorporated in a process of making integrated circuits having air gaps.Type: GrantFiled: December 23, 2014Date of Patent: August 23, 2016Assignee: GlobalFoundries, Inc.Inventors: Griselda Bonilla, Kaushik Chanda, Samuel S. Choi, Ronald G. Filippi, Stephan Grunow, Naftali Lustig, Andrew H. Simon, Junjing Bao