Anti-fuse Patents (Class 257/530)
  • Patent number: 8742457
    Abstract: A device includes a substrate, isolation regions at a surface of the substrate, and a semiconductor region over a top surface of the isolation regions. A conductive feature is disposed over the top surface of the isolation regions, wherein the conductive feature is adjacent to the semiconductor region. A dielectric material is disposed between the conductive feature and the semiconductor region. The dielectric material, the conductive feature, and the semiconductor region form an anti-fuse.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: June 3, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Hsiao-Lan Yang
  • Patent number: 8736020
    Abstract: An electronic anti-fuse structure, the structure including an Mx level comprising a first Mx metal and a second Mx metal, a dielectric layer located above the Mx level, an Mx+1 level located above the dielectric layer; and a metallic element in the dielectric layer and positioned between the first Mx metal and the second Mx metal, wherein the metallic element is insulated from both the first Mx metal and the second Mx metal.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: May 27, 2014
    Assignee: International Business Machines Corporation
    Inventors: Junjing Bao, Griselda Bonilla, Samuel S. Choi, Ronald G. Filippi, Naftali Eliahu Lustig, Andrew H. Simon
  • Patent number: 8729642
    Abstract: A semiconductor device comprises an active region formed in a semiconductor substrate and a gate electrode formed on the active region via a gate insulating film formed on a surface of the active region. A peripheral portion of the gate electrode and a peripheral portion of the active region overlap each other at a position where the active region is not divided by the gate electrode when viewed in plan view, thus forming an overlap region.
    Type: Grant
    Filed: October 3, 2011
    Date of Patent: May 20, 2014
    Inventors: Eiji Kitamura, Shinichi Horiba, Nobuyuki Nakamura
  • Patent number: 8723290
    Abstract: The invention relates generally to a fuse device of a semiconductor device, and more particularly, to an electrical fuse device of a semiconductor device. Embodiments of the invention provide a fuse device that is capable of reducing programming error caused by non-uniform current densities in a fuse link. In one respect, there is provided an electrical fuse device that includes: an anode; a fuse link coupled to the anode on a first side of the fuse link; a cathode coupled to the fuse link on a second side of the fuse link; a first cathode contact coupled to the cathode; and a first anode contact coupled to the anode, at least one of the first cathode contact and the first anode contact being disposed across a virtual extending surface of the fuse link.
    Type: Grant
    Filed: May 15, 2012
    Date of Patent: May 13, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-suk Shin, Andrew-Tae Kim, Hong-jae Shin
  • Publication number: 20140124892
    Abstract: A method for forming a semiconductor device is disclosed. An anti-fuse is formed at a buried bit line such that the area occupied by the anti-fuse is smaller than that of a conventional planar-gate-type anti-fuse, and a breakdown efficiency of an insulation film is increased. This results in an increase in reliability and stability of the semiconductor device. A semiconductor device includes a line pattern formed over a semiconductor substrate, a device isolation film formed at a center part of the line pattern, a contact part formed at both sides of the line pattern, configured to include an oxide film formed over the line pattern, and a bit line formed at a bottom part between the line patterns, and connected to the contact part.
    Type: Application
    Filed: January 14, 2014
    Publication date: May 8, 2014
    Applicant: SK HYNIX INC.
    Inventor: Jung Sam KIM
  • Patent number: 8719600
    Abstract: The operating voltage of an integrated circuit (e.g., a processor) is changed in response to one or more conditions (e.g., a laptop computer is connected to an AC power source). Both the operating frequency and the operating voltage of the integrated circuit are changed. The voltage regulator providing the operating voltage to the integrated circuit is caused to transition between voltage levels using one or more intermediate steps. The integrated circuit continues to operate in the normal manner both at the new voltage and throughout the voltage transition.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: May 6, 2014
    Assignee: Intel Corporation
    Inventors: Stephen H. Gunther, Robert Greiner, Matthew M. Ma, Kevin Dai
  • Patent number: 8710591
    Abstract: Provided are a semiconductor chip including a TSV passing through a transistor, and a stack module and a memory card using such a semiconductor chip. The semiconductor chip may include a semiconductor layer that has a first surface and a second surface opposite to each other. A conductive layer may be disposed on the first surface of the semiconductor layer. A TSV may pass through the semiconductor layer and the conductive layer. A side wall insulating layer may surround a side wall of the TSV in order to electrically insulate the semiconductor layer and the conductive layer from the TSV.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: April 29, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyong-ryol Hwang, Ho-cheol Lee, Byong-wook Na
  • Publication number: 20140103485
    Abstract: The present disclosure relates to an antifuse for preventing a flow of electrical current in an integrated circuit. One such antifuse includes a reactive material and a silicon region thermally coupled to the reactive material, where an electrical current to the reactive material causes the reactive material to release heat which transitions the silicon region from a high resistance state to a low resistance state. Another such antifuse includes a reactive material, at least one metal and a silicon region adjacent to the at least one metal and thermally coupled to the reactive material, where an electrical current to the reactive material causes the reactive material to release heat which transitions the silicon region from a high resistance state to a low resistance state.
    Type: Application
    Filed: October 17, 2012
    Publication date: April 17, 2014
    Applicant: International Business Machines Corporation
    Inventors: GREGORY M. FRITZ, BAHMAN HEKMATSHOARTABARI, ALI KHAKIFIROOZ, DIRK PFEIFFER, KENNETH P. RODBELL, DAVOOD SHAHRJERDI
  • Patent number: 8698277
    Abstract: According to one embodiment, a nonvolatile variable resistance device includes a first electrode, a second electrode, a first layer, and a second layer. The second electrode includes a metal element. The first layer is arranged between the first electrode and the second electrode and includes a semiconductor element. The second layer is inserted between the second electrode and the first layer and includes the semiconductor element. The percentage of the semiconductor element being unterminated is higher in the second layer than in the first layer.
    Type: Grant
    Filed: September 15, 2011
    Date of Patent: April 15, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Yamauchi, Shosuke Fujii, Reika Ichihara
  • Patent number: 8686476
    Abstract: A memory cell is provided that includes a diode and a resistance-switching material layer coupled in series with the diode. The resistance-switching material layer: (a) includes a material from the family consisting of XvOw, wherein X represents an element from the family consisting of Hf and Zr, and wherein the subscripts v and w have non-zero values that form a stable compound, and (b) has a thickness between 20 and 65 angstroms. Other aspects are also provided.
    Type: Grant
    Filed: January 4, 2013
    Date of Patent: April 1, 2014
    Assignee: SanDisk 3D LLC
    Inventors: Xiaoyu Yang, Roy E. Scheuerlein, Feng Li, Albert T. Meeks
  • Patent number: 8680648
    Abstract: Embodiments of present invention provide methods and apparatuses for connecting and/or disconnecting nodes in a semiconductor device. Embodiments of the apparatus may include a plurality of metal layers formed above a substrate and an interconnect structure formed between first and second nodes in the plurality of metal layers. The interconnect structure includes one or more metal lines formed in each of the metal layers. The metal lines are connected by a plurality of vias. Modifying one of the metal lines in any one of the metal layers changes an electrical connection between the first and second nodes.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: March 25, 2014
    Assignee: ATI Technologies ULC
    Inventors: Omid Rowhani, Victor M. Ma
  • Patent number: 8674476
    Abstract: Disclosed are embodiments of a circuit and method for electroplating a feature (e.g., a BEOL anti-fuse device) onto a wafer. The embodiments eliminate the use of a seed layer and, thereby, minimize subsequent processing steps (e.g., etching or chemical mechanical polishing (CMP)). Specifically, the embodiments allow for selective electroplating metal or alloy materials onto an exposed portion of a metal layer in a trench on the front side of a substrate. This is accomplished by providing a unique wafer structure that allows a current path to be established from a power supply through a back side contact and in-substrate electrical connector to the metal layer. During electrodeposition, current flow through the current path can be selectively controlled. Additionally, if the electroplated feature is an anti-fuse device, current flow through this current path can also be selectively controlled in order to program the anti-fuse device.
    Type: Grant
    Filed: June 28, 2012
    Date of Patent: March 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Veeraraghavan S. Basker, Toshiharu Furukawa, William R. Tonti
  • Patent number: 8674475
    Abstract: Provided are an antifuse and methods of operating and manufacturing the same. The antifuse may include first and second conductors separate from each other; a dielectric layer for an antifuse between the first and second conductors; and a diffusion layer between one of the first and second conductors and the dielectric layer.
    Type: Grant
    Filed: April 7, 2009
    Date of Patent: March 18, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Deok-kee Kim, Jung-hun Sung, Sang-moo Choi, Soo-jung Hwang
  • Publication number: 20140070363
    Abstract: An electronic anti-fuse structure, the structure including an Mx level comprising a first Mx metal and a second Mx metal, a dielectric layer located above the Mx level, an Mx+1 level located above the dielectric layer; and a metallic element in the dielectric layer and positioned between the first Mx metal and the second Mx metal, wherein the metallic element is insulated from both the first Mx metal and the second Mx metal.
    Type: Application
    Filed: September 10, 2012
    Publication date: March 13, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Junjing Bao, Griselda Bonilla, Samuel S. Choi, Ronald G. Filippi, Naftali Eliahu Lustig, Andrew H. Simon
  • Publication number: 20140070364
    Abstract: An electrically programmable gate oxide anti-fuse device includes an anti-fuse aperture having anti-fuse links that include metallic and/or semiconductor electrodes with a dielectric layer in between. The dielectric layer may be an interlayer dielectric (ILD), an intermetal dielectric (IMD) or an etch stop layer. The anti-fuse device may includes a semiconductor substrate having a conductive gate (e.g., a high K metal gate) disposed on a surface of the substrate, and a dielectric layer disposed on the conductive gate. A stacked contact can be disposed on the dielectric layer and a gate contact is disposed on an exposed portion of the gate.
    Type: Application
    Filed: September 13, 2012
    Publication date: March 13, 2014
    Applicant: QUALCOMM Incorporated
    Inventors: Yong Park, Zhongze Wang, John J. Zhu, Choh Fei Yeap
  • Patent number: 8664744
    Abstract: An anti-fuse element that includes an insulation layer; a pair of electrode layers on the upper and lower surfaces of the insulation layer; and an extraction electrode formed so as to make contact with a section of the electrode layers that form electrostatic capacitance with the insulation layer. The anti-fuse element is configured to create a structural change section including short circuit sections that are short-circuited such that the pair of electrode layers are fused mutually to engulf the insulation layer, and a dissipation section with the electrode layers and insulation layer dissipated by engulfing the insulation layer, when a voltage not less than the breakdown voltage of the insulation layer is applied. Furthermore, the extraction electrode has at least two or more sections in contact with the electrode layer.
    Type: Grant
    Filed: January 20, 2012
    Date of Patent: March 4, 2014
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Shinsuke Tani, Toshiyuki Nakaiso
  • Publication number: 20140048905
    Abstract: An anti-fuse structure is provided in which an anti-fuse material liner is embedded within one of the openings provided within an interconnect dielectric material. The anti-fuse material liner is located between a first conductive metal and a second conductive metal which are also present within the opening. A diffusion barrier liner separates the first conductive metal from any portion of the interconnect dielectric material. The anti-fuse structure is laterally adjacent an interconnect structure that is formed within the same interconnect dielectric material as the anti-fuse structure.
    Type: Application
    Filed: October 23, 2013
    Publication date: February 20, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chih-Chao Yang, Stephen M. Gates
  • Patent number: 8653624
    Abstract: Metal fuses in semiconductor devices may be formed on the basis of additional mechanisms for obtaining superior electromigration in the fuse bodies. To this end, the compressive stress caused by the current-induced metal diffusion may be restricted or reduced in the fuse body, for instance, by providing a stress buffer region and/or by providing a dedicated metal agglomeration region. The concept may be applied to the metallization system and may also be used in the device level, when fabricating the metal fuse in combination with high-k metal gate electrode structures.
    Type: Grant
    Filed: July 29, 2013
    Date of Patent: February 18, 2014
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Christian Hennesthal, Oliver Aubel, Jens Poppe, Holger Pagel, Andreas Kurz
  • Patent number: 8648438
    Abstract: Techniques for fabricating passive devices in an extremely-thin silicon-on-insulator (ETSOI) wafer are provided. In one aspect, a method for fabricating one or more passive devices in an ETSOI wafer is provided. The method includes the following steps. The ETSOI wafer having a substrate and an ETSOI layer separated from the substrate by a buried oxide (BOX) is provided. The ETSOI layer is coated with a protective layer. At least one trench is formed that extends through the protective layer, the ETSOI layer and the BOX, and wherein a portion of the substrate is exposed within the trench. Spacers are formed lining sidewalls of the trench. Epitaxial silicon templated from the substrate is grown in the trench. The protective layer is removed from the ETSOI layer. The passive devices are formed in the epitaxial silicon.
    Type: Grant
    Filed: October 3, 2011
    Date of Patent: February 11, 2014
    Assignee: International Business Machines Corporation
    Inventors: Ming Cai, Dechao Guo, Chun-Chen Yeh
  • Patent number: 8638589
    Abstract: An operating method for a memory unit is provided, wherein the memory unit includes a well region, a select gate, a first gate, a second gate, an oxide nitride spacer, a first diffusion region, and a second diffusion region. The operating method for the memory unit comprises the following steps. During a programming operation, a breakdown voltage is coupled to the second diffusion region through a first channel region formed under the select gate. A programming voltage is sequentially or simultaneously applied to the first gate and the second gate to rupture a first oxide layer and a second oxide layer, wherein the first oxide layer is disposed between the first gate and the well region, and the second oxide layer is disposed between the second gate and the well region.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: January 28, 2014
    Assignee: eMemory Technology Inc.
    Inventors: Hau-Yan Lu, Hsin-Ming Chen, Ching-Sung Yang
  • Patent number: 8637957
    Abstract: An anti-fuse structure is provided in which an anti-fuse material liner is embedded within one of the openings provided within an interconnect dielectric material. The anti-fuse material liner is located between a first conductive metal and a second conductive metal which are also present within the opening. A diffusion barrier liner separates the first conductive metal from any portion of the interconnect dielectric material. The anti-fuse structure is laterally adjacent an interconnect structure that is formed within the same interconnect dielectric material as the anti-fuse structure.
    Type: Grant
    Filed: July 18, 2012
    Date of Patent: January 28, 2014
    Assignee: International Business Machines Corporation
    Inventors: Chih-Chao Yang, Stephen M. Gates
  • Publication number: 20140021581
    Abstract: An anti-fuse structure is provided in which an anti-fuse material liner is embedded within one of the openings provided within an interconnect dielectric material. The anti-fuse material liner is located between a first conductive metal and a second conductive metal which are also present within the opening. A diffusion barrier liner separates the first conductive metal from any portion of the interconnect dielectric material. The anti-fuse structure is laterally adjacent an interconnect structure that is formed within the same interconnect dielectric material as the anti-fuse structure.
    Type: Application
    Filed: July 18, 2012
    Publication date: January 23, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chih-Chao Yang, Stephen M. Gates
  • Patent number: 8633567
    Abstract: A device is provided that includes a vertically oriented p-i-n diode that includes semiconductor material, a silicide, germanide, or silicide-germanide layer disposed adjacent the vertically oriented p-i-n diode, and a dielectric material arranged electrically in series with the vertically oriented p-i-n diode. The dielectric material is disposed between a first conductive layer and a second conductive layer, and is selected from the group consisting of HfO2, Al2O3, ZrO2, TiO2, La2O3, Ta2O5, RuO2, ZrSiOx, AlSiOx, HfSiOx, HfAlOx, HfSiON, ZrSiAlOx, HfSiAlOx, HfSiAlON, and ZrSiAlON. Numerous other aspects are provided.
    Type: Grant
    Filed: December 5, 2012
    Date of Patent: January 21, 2014
    Assignee: SanDisk 3D LLC
    Inventor: Scott Brad Herner
  • Publication number: 20140015096
    Abstract: An anti-fuse based on a Field Nitride Trap (FNT) is disclosed. The anti-fuse includes a first active pillar including a first junction, a second active pillar including a second junction, a selection line buried between the first active pillar and the second active pillar, and a trap layer for electrically coupling the first junction to the second junction by trapping minority carriers according to individual voltages applied to the first junction, the second junction and the selection line. As a result, the fuse can be highly integrated through the above-mentioned structure, and programming of the fuse can be easily achieved.
    Type: Application
    Filed: December 17, 2012
    Publication date: January 16, 2014
    Applicant: SK HYNIX INC.
    Inventor: Eun Sung LEE
  • Publication number: 20140015095
    Abstract: According to one exemplary implementation, a dual anti-fuse structure includes a first channel in a common semiconductor fin adjacent to a first programmable gate. The dual anti-fuse structure further includes a second channel in said common semiconductor fin adjacent to a second programmable gate. A first anti-fuse is formed between the first channel and the first programmable gate. Furthermore, a second anti-fuse is formed between the second channel and the second programmable gate. The first programmable gate can be on a first sidewall of the common semiconductor fin and can comprise a first gate dielectric and a first electrode. The second programmable gate can be on a second sidewall of the common semiconductor fin and can comprise a second gate dielectric and a second electrode.
    Type: Application
    Filed: July 12, 2012
    Publication date: January 16, 2014
    Applicant: BROADCOM CORPORATION
    Inventors: Frank Hui, Neal Kistler
  • Patent number: 8618628
    Abstract: A semiconductor device and a method for manufacturing the same are disclosed. A dummy pattern is formed between a fuse pattern and a semiconductor substrate so as to prevent the semiconductor substrate from being damaged, and a buffer pattern is formed between the dummy pattern and the semiconductor substrate, so that a dummy metal pattern primarily absorbs or reflects laser energy transferred to the semiconductor substrate during the blowing of the fuse pattern, and the buffer pattern secondarily reduces stress generated between the dummy pattern and the semiconductor substrate, resulting in the prevention of a defect such as a crack.
    Type: Grant
    Filed: October 5, 2011
    Date of Patent: December 31, 2013
    Assignee: Hynix Semiconductor Inc.
    Inventors: Ki Soo Choi, Do Hyun Kim
  • Patent number: 8618613
    Abstract: Methods of forming and using a microelectronic structure are described. Embodiments include forming a diode between a metal fuse gate and a PMOS device, wherein the diode is disposed between a contact of the metal fuse gate and a contact of the PMOS device, and wherein the diode couples the contact of the metal fuse gate to the contact of the PMOS device.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: December 31, 2013
    Assignee: Intel Corporation
    Inventors: Xianghong Tong, Zhanping Chen, Walid M. Hafez, Zhiyong Ma, Sarvesh H. Kulkarni, Kevin X. Zhang, Matthew B. Pedersen, Kevin D. Johnson
  • Patent number: 8614471
    Abstract: Collections of laterally crystallized semiconductor islands for use in thin film transistors and systems and methods for making same are described. A display device includes a plurality of thin film transistors (TFTs) on a substrate, such that the TFTs are spaced apart from each other and each include a channel region that has a crystalline microstructure and a direction along which a channel current flows. The channel region of each of the TFTs contains a crystallographic grain that spans the length of that channel region along its channel direction. Each crystallographic grain in the channel region of each of the TFTs is physically disconnected from and crystallographically uncorrelated with each crystallographic grain in the channel region of each adjacent TFT.
    Type: Grant
    Filed: September 22, 2008
    Date of Patent: December 24, 2013
    Assignee: The Trustees of Columbia University in the City of New York
    Inventors: James S. Im, Ui-Jin Chung
  • Patent number: 8610245
    Abstract: An anti-fuse element that includes an insulation layer; a pair of electrode layers formed on upper and lower surfaces of the insulation layer; and an extraction electrode contacting a section of the electrode layers forming electrostatic capacitance with the insulation layer. The anti-fuse element is configured to create a structural change section that includes a short circuit section short-circuited such that the pair of electrode layers are fused mutually to engulf the insulation layer, and a dissipation section with the electrode layers and insulation layer dissipated by the engulfing of the insulation layer, when a voltage not less than the breakdown voltage of the insulation layer is applied. The maximum diameter of a section of the extraction electrode in contact with the electrode layer is larger than the maximum diameter of the structural change section.
    Type: Grant
    Filed: January 19, 2012
    Date of Patent: December 17, 2013
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Shinsuke Tani, Toshiyuki Nakaiso
  • Patent number: 8610243
    Abstract: Disclosed herein is a metal e-fuse device that employs an intermetallic compound programming mechanism and various methods of making such an e-fuse device. In one example, a device disclosed herein includes a first metal line, a second metal line and a fuse element that is positioned between and conductively coupled to each of the first and second metal lines, wherein the fuse element is adapted to be blown by passing a programming current therethrough, and wherein the fuse element is comprised of a material that is different from a material of construction of at least one of the first and second metal lines.
    Type: Grant
    Filed: December 9, 2011
    Date of Patent: December 17, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Jens Poppe, Andreas Kurz
  • Patent number: 8592942
    Abstract: A non-volatile semiconductor memory device having a memory cell in which operating potentials are few and the scale of the peripheral circuitry is reduced includes a select transistor having a source/drain on both sides of a channel of a semiconductor substrate and having a gate electrode disposed on the channel via a thick gate insulating film; an element isolation region formed on the semiconductor substrate in an area adjacent to the select transistor; an antifuse adjacent to the element isolation region, having a lower electrode formed on the semiconductor substrate and having an upper electrode disposed on the semiconductor substrate in an area between the element isolation region and lower electrode via a thin gate insulating film; and a connection contact electrically connecting the source and upper electrode and contacting the source and the upper electrode.
    Type: Grant
    Filed: January 16, 2009
    Date of Patent: November 26, 2013
    Assignee: Renesas Electronics Corporation
    Inventors: Noriaki Kodama, Kenichi Hidaka, Hiroyuki Kobatake, Takuji Onuma
  • Publication number: 20130307115
    Abstract: A method and structure of a non-intrinsic anti-fuse structure. The anti-fuse structure has a first electrode, a second electrode, a first dielectric, and second dielectric. The first and second dielectrics have an interface which couples electrodes. The length along the interface which couples the electrodes is called the predetermined length. When the anti-fuse is programmed a conductive link forms along the interface to connect the first and second electrodes. The anti-fuse structure can be single-level or dual-level. The predetermined length can be less than spacing between adjacent electrodes when a dual-level structure is used. The anti-fuse structures have the advantage that they can be programmed at lower voltages than intrinsic structures and no extra steps are needed to integrate the anti-fuses with active structures.
    Type: Application
    Filed: May 18, 2012
    Publication date: November 21, 2013
    Applicant: International Business Machines Corporation
    Inventors: Ronald G. Filippi, Naftali Lustig, Ping-Chuan Wang, Lijuan Zhang
  • Publication number: 20130307116
    Abstract: A bitcell can include an insulating area, a first doping, a second doping, and a gate terminal for the insulating area. The second doping can be proximate to the first doping and proximate to the insulating area. The second doping can be characterized by a lower threshold voltage than the first doping. The bitcell can be configured for programming by a voltage on the gate terminal that results in a conductive hole selectively burned in the insulating area between the gate terminal and the first doping.
    Type: Application
    Filed: July 24, 2013
    Publication date: November 21, 2013
    Applicant: Broadcom Corporation
    Inventor: Jonathan Schmitt
  • Patent number: 8587088
    Abstract: A die package having a vertical stack of dies and side-mounted circuitry and methods for making the same are disclosed, for use in an electronic device. The side-mounted circuitry is mounted to a vertical surface of the stack, as opposed to a top surface or adjacent of the stack to reduce the volume of the NVM package.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: November 19, 2013
    Assignee: Apple Inc.
    Inventor: Nicholas Seroff
  • Publication number: 20130299940
    Abstract: An approach is provided for semiconductor devices including an anti-fuse structure. The semiconductor device includes a first metallization layer including a first portion of a first electrode and a second electrode, the second electrode being formed in a substantially axial plane surrounding the first portion of the first electrode, with a dielectric material in between the two electrodes. An ILD is formed over the first metallization layer, a second metallization layer including a second portion of the first electrode is formed over the ILD, and at least one via is formed through the ILD, electrically connecting the first and second portions of the first electrode. Breakdown of the dielectric material is configured to enable an operating current to flow between the second electrode and the first electrode in a programmed state of the anti-fuse structure.
    Type: Application
    Filed: July 16, 2013
    Publication date: November 14, 2013
    Inventors: Andreas KURZ, Jens POPPE
  • Patent number: 8575715
    Abstract: A storage system and method for forming a storage system that uses punch-through diodes as a steering element in series with a reversible resistivity-switching element is described. The punch-through diode allows bipolar operation of a cross-point memory array. The punch-through diode may have a symmetrical non-linear current/voltage relationship. The punch-through diode has a high current at high bias for selected cells and a low leakage current at low bias for unselected cells. Therefore, it is compatible with bipolar switching in cross-point memory arrays having resistive switching elements. The punch-through diode may be a N+/P?/N+ device or a P+/N?/P+ device.
    Type: Grant
    Filed: August 9, 2012
    Date of Patent: November 5, 2013
    Assignee: SanDisk 3D LLC
    Inventors: Andrei Mihnea, Deepak C. Sekar, George Samachisa, Roy Scheuerlein, Li Xiao
  • Patent number: 8575590
    Abstract: According to one embodiment, there is provided a nonvolatile semiconductor memory device including a first interconnection layer, memory cell modules each of which is formed by laminating a non-ohmic element layer with an MIM structure having an insulating film sandwiched between metal films and a variable resistance element layer, and a second interconnection layer formed on the memory cell modules, the insulating film of the non-ohmic element layer includes plural layers whose electron barriers and dielectric constants are different, or contains impurity atoms that form defect levels in the insulating film or contains semiconductor or metal dots. The nonvolatile semiconductor memory device using non-ohmic elements and variable resistance elements in which memory cells can be miniaturized and formed at low temperatures is realized by utilizing the above structures.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: November 5, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Koichi Muraoka, Hiroyuki Nagashima
  • Patent number: 8575719
    Abstract: Silicon nitride antifuses can be advantageously used in memory arrays employing diode-antifuse cells. Silicon nitride antifuses can be ruptured faster and at a lower breakdown field than antifuses formed of other materials, such as silicon dioxide. Examples are given of monolithic three dimensional memory arrays using silicon nitride antifuses with memory cells disposed in rail-stacks and pillars, and including PN and Schottky diodes. Pairing a silicon nitride antifuse with a low-density, high-resistivity conductor gives even better device performance.
    Type: Grant
    Filed: June 30, 2003
    Date of Patent: November 5, 2013
    Assignee: SanDisk 3D LLC
    Inventors: Mark G. Johnson, N. Johan Knall, S. Brad Herner
  • Patent number: 8569755
    Abstract: An antifuse has first and second semiconductor regions having one conductivity type and a third semiconductor region therebetween having an opposite conductivity type. A conductive region contacting the first region has a long dimension in a second direction transverse to the direction of a long dimension of a gate. An antifuse anode is spaced apart from the first region in the second direction and a contact is connected with the second region. Applying a programming voltage between the anode and the contact with gate bias sufficient to fully turn on field effect transistor operation of the antifuse heats the first region to drive a dopant outwardly, causing an edge of the first region to move closer to an edge of the second region and reduce electrical resistance between the first and second regions by an one or more orders of magnitude.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: October 29, 2013
    Assignee: International Business Machines Corporation
    Inventors: Yan Zun Li, Chandrasekharan Kothandaraman, Dan Moy, Norman W. Robson, John M. Safran
  • Patent number: 8546779
    Abstract: According to one embodiment, a resistance-change memory of embodiment includes a first interconnect line extending in a first direction, a second interconnect line extending in a second direction intersecting with the first direction, and a cell unit. The cell unit is provided at an intersection of the first interconnect line and the second interconnect line. The cell unit includes a non-ohmic element having a silicide layer on at least one of first and second ends thereof, and a memory element to store data in accordance with a reversible change in a resistance state. The silicide layer includes a 3d transition metal element which combines with an Si element to form silicide and which has a first atomic radius, and at least one kind of an additional element having a second atomic radius greater than the first atomic radius.
    Type: Grant
    Filed: July 27, 2010
    Date of Patent: October 1, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Takeshi Sonehara
  • Patent number: 8541866
    Abstract: A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of stacked component units stacked in a first direction, each of the stacked component units including a first conducting film made of a semiconductor of a first conductivity type provided perpendicular to the first direction and a first insulating film stacked in the first direction with the first conducting film; a semiconductor pillar piercing the stacked structural unit in the first direction and including a conducting region of a second conductivity type, the semiconductor pillar including a first region opposing each of the first conducting films, and a second region provided between the first regions with respect to the first direction, the second region having a resistance different from a resistance of the first region; and a second insulating film provided between the semiconductor pillar and the first conducting film.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: September 24, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Ryota Katsumata, Masaru Kito, Yoshiaki Fukuzumi, Masaru Kidoh, Hiroyasu Tanaka, Yosuke Komori, Megumi Ishiduki, Hideaki Aochi, Ryouhei Kirisawa, Junya Matsunami, Tomoko Fujiwara
  • Patent number: 8542517
    Abstract: An antifuse can include an insulated gate field effect transistor (“IGFET”) having an active semiconductor region including a body and first regions, i.e., at least one source region and at least one drain region separated from one another by the body. A gate may overlie the body and a body contact is electrically connected with the body. The first regions have opposite conductivity (i.e., n-type or p-type) from the body. The IGFET can be configured such that a programming current through at least one of the first regions and the body contact causes heating sufficient to drive dopant diffusion from the at least one first region into the body and cause an edge of the at least one first region to move closer to an adjacent edge of at least one other of the first regions. In such way, the programming current can permanently reduce electrical resistance by one or more orders of magnitude between the at least one first region and the at least one other first region.
    Type: Grant
    Filed: June 13, 2011
    Date of Patent: September 24, 2013
    Assignee: International Business Machines Corporation
    Inventor: Yan Zun Li
  • Patent number: 8530949
    Abstract: An antifuse whose internal written information cannot be analyzed even by utilizing methods to determine whether there is a charge-up in the electrodes. The antifuse includes a gate insulation film, a gate electrode, and a first diffusion layer. A second diffusion layer is isolated from the first diffusion layer by way of a device isolator film, and is the same conduction type as the first diffusion layer. The gate wiring is formed as one integrated piece with the gate electrode, and extends over the device isolator film. A common contact couples the gate wiring to the second diffusion layer. The gate electrode is comprised of semiconductor material such as polysilicon that is doped with impurities of the same conduction type as the first diffusion layer. The second diffusion layer is coupled only to the common contact.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: September 10, 2013
    Assignee: Renesas Electronics Corporation
    Inventors: Takuji Onuma, Kenichi Hidaka, Hiromichi Takaoka, Yoshitaka Kubota, Hiroshi Tsuda, Kiyokazu Ishige
  • Patent number: 8530283
    Abstract: An electronic device can include a nonvolatile memory cell, wherein the nonvolatile memory cell can include an access transistor, a read transistor, and an antifuse component coupled to the access transistor and the read transistor. In an embodiment, the read transistor can include a gate electrode, and the antifuse component can include a first electrode and a second electrode overlying the first electrode. The gate electrode and the first electrode can be parts of the same gate member. In another embodiment, the access transistor can include a gate electrode, and the antifuse component can include a first electrode, an antifuse dielectric layer, and a second electrode. The electronic device can further include a conductive member overlying the antifuse dielectric layer and the gate electrode of the access transistor, wherein the conductive member is configured to electrically float. Processes for making the same are also disclosed.
    Type: Grant
    Filed: September 14, 2011
    Date of Patent: September 10, 2013
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Moshe Agam, Thierry Coffi Herve Yao
  • Patent number: 8519509
    Abstract: An object of one embodiment of the present invention is to provide an antifuse which has low writing voltage. The antifuse is used for a memory element for a read only memory device. The antifuse includes a first conductive layer, an insulating layer, a semiconductor layer, and a second conductive layer. The insulating layer included in the antifuse is a silicon oxynitride layer formed by adding ammonia to a source gas. When hydrogen is contained in the layer at greater than or equal to 1.2×1021 atoms/cm3 and less than or equal to 3.4×1021 atoms/cm3 or nitrogen is contained in the layer at greater than or equal to 3.2×1020 atoms/cm3 and less than or equal to 2.2×1021 atoms/cm3, writing can be performed at low voltage.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: August 27, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Kosei Noda, Seiji Yasumoto, Kensuke Yoshizumi, Toshiyuki Miyamoto
  • Patent number: 8519508
    Abstract: A semiconductor device has a conventional NMOS transistor and an NMOS transistor functioning as an anti-fuse element and having an n type channel region. The conventional NMOS transistor is equipped with an n type extension region and a p type pocket region, while the anti-fuse element is not equipped with an extension region and a pocket region. This makes it possible to improve the performance of the transistor and at the same time improve the characteristics of the anti-fuse element after breakdown of its gate dielectric film.
    Type: Grant
    Filed: November 3, 2010
    Date of Patent: August 27, 2013
    Assignee: Renesas Electronics Corporation
    Inventors: Yoshitaka Kubota, Hiroshi Tsuda, Kenichi Hidaka, Takuji Onuma, Hiromichi Takaoka
  • Patent number: 8513769
    Abstract: Electrical fuses and resistors having a sublithographic lateral or vertical dimension are provided. A conductive structure comprising a conductor or a semiconductor is formed on a semiconductor substrate. At least one insulator layer is formed on the conductive structure. A recessed area is formed in the at least one insulator layer. Self-assembling block copolymers are applied into the recessed area and annealed to form a fist set of polymer blocks and a second set of polymer blocks. The first set of polymer blocks are etched selective to the second set and the at least one insulator layer. Features having sublithographic dimensions are formed in the at least one insulator layer and/or the conductive structure. Various semiconductor structures having sublithographic dimensions are formed including electrical fuses and resistors.
    Type: Grant
    Filed: April 22, 2010
    Date of Patent: August 20, 2013
    Assignee: International Business Machines Corporation
    Inventors: Charles T. Black, Matthew E. Colburn, Timothy J. Dalton, Daniel C. Edelstein, Wai-Kin Li, Anthony K. Stamper, Haining S. Yang
  • Patent number: 8513768
    Abstract: Under one aspect, a non-volatile nanotube diode device includes first and second terminals; a semiconductor element including a cathode and an anode, and capable of forming a conductive pathway between the cathode and anode in response to electrical stimulus applied to the first conductive terminal; and a nanotube switching element including a nanotube fabric article in electrical communication with the semiconductive element, the nanotube fabric article disposed between and capable of forming a conductive pathway between the semiconductor element and the second terminal, wherein electrical stimuli on the first and second terminals causes a plurality of logic states.
    Type: Grant
    Filed: August 8, 2007
    Date of Patent: August 20, 2013
    Assignee: Nantero Inc.
    Inventors: Claude L. Bertin, Thomas Rueckes, X. M. Henry Huang, Ramesh Sivarajan, Eliodor G. Ghenciu, Steven L. Konsek, Mitchell Meinhold, Jonathan W. Ward, Darren K. Brock
  • Patent number: 8513770
    Abstract: There is provided an anti-fuse, including a gate dielectric layer formed over a substrate, a gate electrode, including a body portion and one or more protruding portions extending from the body portion, the body portion and the one or more protruding portions being formed to contact on the gate dielectric layer, and a junction region formed in a portion of the substrate exposed by sidewalls of the one or more protruding portions.
    Type: Grant
    Filed: December 15, 2010
    Date of Patent: August 20, 2013
    Assignee: Magnachip Semiconductor, Ltd.
    Inventors: Chang-Hee Shin, Ki-seok Cho, Seong-Do Jeon
  • Patent number: 8497574
    Abstract: In one implementation, a high power semiconductor package is configured as a buck converter including a control transistor and a sync transistor disposed on a leadframe, a flip chip driver integrated circuit (IC) for driving the control and sync transistors, and conductive clips electrically coupling the top surfaces of the transistors to substrate pads such as leadframe pads. The source of the control transistor is electrically coupled to the drain of the sync transistor using the leadframe and one of the transistor conductive clips. In this manner, the leadframe and the conductive clips provide efficient current conduction by direct mechanical connection and large surface area conduction, thereby enabling a package with significantly reduced electrical resistance, form factor, complexity, and cost.
    Type: Grant
    Filed: April 27, 2011
    Date of Patent: July 30, 2013
    Assignee: International Rectifier Corporation
    Inventors: Eung San Cho, Chuan Cheah