With Non-planar Semiconductor Surface (e.g., Groove, Mesa, Bevel, Etc.) Patents (Class 257/586)
  • Publication number: 20130285120
    Abstract: This disclosure relates to bipolar transistors, such as heterojunction bipolar transistors, having at least one grading in the collector. One aspect of this disclosure is a bipolar transistor that includes a collector having a high doping concentration at a junction with the base and at least one grading in which doping concentration increases away from the base. In some embodiments, the high doping concentration can be at least about 3×1016 cm?3. According to certain embodiments, the collector includes two gradings. Such bipolar transistors can be implemented, for example, in power amplifiers.
    Type: Application
    Filed: April 30, 2012
    Publication date: October 31, 2013
    Applicant: Skyworks Solutions, Inc.
    Inventor: Peter J. Zampardi, JR.
  • Publication number: 20130277804
    Abstract: Methods for fabricating a device structure such as a bipolar junction transistor, device structures for a bipolar junction transistor, and design structures for a bipolar junction transistor. The device structure includes a collector region formed in a substrate, an intrinsic base coextensive with the collector region, an emitter coupled with the intrinsic base, a first isolation region surrounding the collector region, and a second isolation region formed at least partially within the collector region. The first isolation region has a first sidewall and the second isolation region having a second sidewall peripherally inside the first sidewall. A portion of the collector region is disposed between the first sidewall of the first isolation region and the second sidewall of the second isolation region.
    Type: Application
    Filed: April 20, 2012
    Publication date: October 24, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Peng Cheng, David L. Harame, Robert K. Leidy, Qizhi Liu
  • Patent number: 8536012
    Abstract: Methods for fabricating bipolar junction transistors, bipolar junction transistors made by the methods, and design structures for a bipolar junction transistor. The bipolar junction transistor includes a dielectric layer on an intrinsic base and an extrinsic base at least partially separated from the intrinsic base by the dielectric layer. An emitter opening extends through the extrinsic base and the dielectric layer. The dielectric layer is recessed laterally relative to the emitter opening to define a cavity between the intrinsic base and the extrinsic base. The cavity is filled with a semiconductor layer that physically links the extrinsic base and the intrinsic base together.
    Type: Grant
    Filed: July 6, 2011
    Date of Patent: September 17, 2013
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Peter B. Gray, David L. Harame, Alvin J. Joseph, Marwan H. Khater, Qizhi Liu
  • Patent number: 8525301
    Abstract: A method for fabricating heterojunction bipolar transistors that exhibit simultaneous low base resistance and short base transit times, which translate into semiconductor devices with low power consumption and fast switching times, is presented. The method comprises acts for fabricating a set of extrinsic layers by depositing a highly-doped p+ layer on a substrate, depositing a masking layer on highly-doped p+ layer, patterning the masking layer with a masking opening, removing a portion of the highly-doped p+ layer and the substrate through the masking opening in the masking layer to form a well, and growing an intrinsic layered device in the well by a combination of insitu etching and epitaxial regrowth, where an intrinsic layer has a thickness selected independently from a thickness of its corresponding extrinsic layer, thus allowing the resulting device to have thick extrinsic base layer (low base resistance) and thin intrinsic base layer (short base transit times) simultaneously.
    Type: Grant
    Filed: November 5, 2008
    Date of Patent: September 3, 2013
    Assignee: HRL Laboratories, LLC
    Inventor: Tahir Hussain
  • Patent number: 8525187
    Abstract: An IGBT, which is capable of reducing on resistance by reducing channel mobility, includes: an n type substrate made of SiC and having a main surface with an off angle of not less than 50° and not more than 65° relative to a plane orientation of {0001}; a p type reverse breakdown voltage holding layer made of SiC and formed on the main surface of the substrate; an n type well region formed to include a second main surface of the reverse breakdown voltage holding layer; an emitter region formed in the well region to include the second main surface and including a p type impurity at a concentration higher than that of the reverse breakdown voltage holding layer; a gate oxide film formed on the reverse breakdown voltage holding layer; and a gate electrode formed on the gate oxide film. In a region including an interface between the well region and the gate oxide film, a high-concentration nitrogen region is formed to have a nitrogen concentration higher than those of the well region and the gate oxide film.
    Type: Grant
    Filed: March 23, 2010
    Date of Patent: September 3, 2013
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Shin Harada, Keiji Wada, Toru Hiyoshi
  • Patent number: 8502236
    Abstract: A MOSFET, which is capable of reducing on resistance by reducing channel mobility even when a gate voltage is high, includes: an n type substrate made of SiC and having a main surface with an off angle of 50°-65° relative to a {0001} plane; an n type reverse breakdown voltage holding layer made of SiC and formed on the main surface of the substrate; a p type well region formed in the reverse breakdown voltage holding layer distant away from a first main surface thereof; a gate oxide film formed on the well region; an n type contact region disposed between the well region and the gate oxide film; a channel region connecting the n type contact region and the reverse breakdown voltage holding layer; and a gate electrode disposed on the gate oxide film. In a region including an interface between the channel region and the gate oxide film, a high-concentration nitrogen region is formed.
    Type: Grant
    Filed: March 23, 2010
    Date of Patent: August 6, 2013
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Shin Harada, Keiji Wada, Toru Hiyoshi
  • Patent number: 8502347
    Abstract: Bipolar junction transistors are provided in which at least one of an emitter contact, a base contact, or a collector contact thereof is formed by epitaxially growing a doped SixGe1-x layer, wherein x is 0?x?1, at a temperature of less than 500° C. The doped SixGe1-x layer comprises crystalline portions located on exposed surfaces of a crystalline semiconductor substrate and non-crystalline portions that are located on exposed surfaces of a passivation layer which can be formed and patterned on the crystalline semiconductor substrate. The doped SixGe1-x layer of the present disclosure, including the non-crystalline and crystalline portions, contains from 5 atomic percent to 40 atomic percent hydrogen.
    Type: Grant
    Filed: June 25, 2012
    Date of Patent: August 6, 2013
    Assignee: International Business Machines Corporation
    Inventors: Bahman Hekmatshoartabari, Tak H. Ning, Devendra K. Sadana, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 8497552
    Abstract: A semiconductor device may include a semiconductor buffer layer having a first conductivity type and a semiconductor mesa having the first conductivity type on a surface of the buffer layer. In addition, a current shifting region having a second conductivity type may be provided adjacent a corner between the semiconductor mesa and the semiconductor buffer layer, and the first and second conductivity types may be different conductivity types. Related methods are also discussed.
    Type: Grant
    Filed: July 30, 2009
    Date of Patent: July 30, 2013
    Assignee: Cree, Inc.
    Inventors: Qingchun Zhang, Anant K. Agarwal
  • Patent number: 8466045
    Abstract: A method for forming strained epitaxial carbon-doped silicon (Si) films, for example as raised source and drain regions for electronic devices. The method includes providing a structure having an epitaxial Si surface and a patterned film, non-selectively depositing a carbon-doped Si film onto the structure, the carbon-doped Si film containing an epitaxial carbon-doped Si film deposited onto the epitaxial Si surface and a non-epitaxial carbon-doped Si film deposited onto the patterned film, and non-selectively depositing a Si film on the carbon-doped Si film, the Si film containing an epitaxial Si film deposited onto the epitaxial carbon-doped Si film and a non-epitaxial Si film deposited onto the non-epitaxial carbon-doped Si film. The method further includes dry etching away the non-epitaxial Si film, the non-epitaxial carbon-doped Si film, and less than the entire epitaxial Si film to form a strained epitaxial carbon-doped Si film on the epitaxial Si surface.
    Type: Grant
    Filed: July 2, 2010
    Date of Patent: June 18, 2013
    Assignee: Tokyo Electron Limited
    Inventors: John Gumpher, Seungho Oh, Anthony Dip
  • Publication number: 20130147017
    Abstract: Methods for fabricating bipolar junction transistors, bipolar junction transistors made by the methods, and design structures for a bipolar junction transistor. The bipolar junction transistor includes a dielectric layer on an intrinsic base and an extrinsic base at least partially separated from the intrinsic base by the dielectric layer. An emitter opening extends through the extrinsic base and the dielectric layer. The dielectric layer is recessed laterally relative to the emitter opening to define a cavity between the intrinsic base and the extrinsic base. The cavity is filled with a semiconductor layer that physically links the extrinsic base and the intrinsic base together.
    Type: Application
    Filed: February 4, 2013
    Publication date: June 13, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: International Business Machines Corporation
  • Publication number: 20130146894
    Abstract: The present disclosure relates to a bipolar junction transistor (BJT) structure that significantly reduces current crowding while improving the current gain relative to conventional BJTs. The BJT includes a collector, a base region, and an emitter. The base region is formed over the collector and includes at least one extrinsic base region and an intrinsic base region that extends above the at least one extrinsic base region to provide a mesa. The emitter is formed over the mesa. The BJT may be formed from various material systems, such as the silicon carbide (SiC) material system. In one embodiment, the emitter is formed over the mesa such that essentially none of the emitter is formed over the extrinsic base regions. Typically, but not necessarily, the intrinsic base region is directly laterally adjacent the at least one extrinsic base region.
    Type: Application
    Filed: December 12, 2011
    Publication date: June 13, 2013
    Applicant: CREE, INC.
    Inventors: Lin Cheng, Anant K. Agarwal, Sei-Hyung Ryu
  • Publication number: 20130134483
    Abstract: Disclosed are a transistor and a method of forming the transistor with a raised collector pedestal in reduced dimension for reduced base-collector junction capacitance. The raised collector pedestal is on the top surface of a substrate, extends vertically through dielectric layer(s), is un-doped or low-doped, is aligned above a sub-collector region contained within the substrate and is narrower than that sub-collector region. An intrinsic base layer is above the raised collector pedestal and the dielectric layer(s). An extrinsic base layer is above the intrinsic base layer. Thus, the space between the extrinsic base layer and the sub-collector region is increased. This increased space is filled by dielectric material and the electrical connection between the intrinsic base layer and the sub-collector region is provided by the relatively narrow, un-doped or low-doped, raised collector pedestal.
    Type: Application
    Filed: November 30, 2011
    Publication date: May 30, 2013
    Applicant: International Business Machines Corporation
    Inventors: James W. Adkisson, John J. Ellis-Monaghan, David L. Harame, Qizhi Liu, John J. Pekarik
  • Publication number: 20130092939
    Abstract: Disclosed are example bipolar transistors capable of reducing the area of a collector, reducing the distance between a base and a collector, and/or reducing the number of ion implantation processes. A bipolar transistor may includes a trench formed by etching a portion of a semiconductor substrate. A first collector may be formed on the inner wall of the trench. A second collector may be formed inside the semiconductor substrate in the inner wall of the trench. A first isolation film may be formed on the sidewall of the first collector. An intrinsic base may be connected to the third collector. An extrinsic base may be formed on the intrinsic base and inside the first isolation film. A second isolation film may be formed on the inner wall of the extrinsic base. An emitter may be formed by burying a conductive material inside the second isolation film.
    Type: Application
    Filed: July 6, 2012
    Publication date: April 18, 2013
    Applicant: Dongbu HiTek Co., Ltd.
    Inventor: Nam Joo KIM
  • Patent number: 8384194
    Abstract: A power semiconductor device with improved avalanche capability structures is disclosed. By forming at least an avalanche capability enhancement doped regions with opposite conductivity type to epitaxial layer underneath an ohmic contact doped region which surrounds at least bottom of trenched contact filled with metal plug between two adjacent gate trenches, avalanche current is enhanced with the disclosed structures.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: February 26, 2013
    Assignee: Force MOS Technology Co., Ltd.
    Inventor: Fu-Yuan Hsieh
  • Patent number: 8378390
    Abstract: The present disclosure relates to a silicon carbide (SiC) bipolar junction transistor (BJT), where the surface region between the emitter and base contacts (1, 2) on the transistor is given a negative electric surface potential with respect to the potential in the bulk SiC. The present disclosure also relates to a method for increasing the current gain in a silicon carbide (SiC) bipolar junction transistor (BJT) by the reduction of the surface recombination at the SiC surface between the emitter and base contacts (1, 2) of the transistor.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: February 19, 2013
    Assignee: Fairchild Semiconductor Corporation
    Inventor: Martin Domeij
  • Patent number: 8368181
    Abstract: The invention provides a mesa semiconductor device and a method of manufacturing the same which enhance the yield and productivity. An N? type semiconductor layer is formed on a front surface of a semiconductor substrate, and a P type semiconductor layer is formed thereon. An anode electrode is further formed on the P type semiconductor layer so as to be connected to the P type semiconductor layer, and a mesa groove is formed from the front surface of the P type semiconductor layer deeper than the N? type semiconductor layer so as to surround the anode electrode. Then, a second insulation film is formed from inside the mesa groove onto the P type semiconductor layer on the outside of the mesa groove. The second insulation film is made of an organic insulator such as polyimide type resin or the like. The lamination body made of the semiconductor substrate and the layers laminated thereon is then diced along a scribe line.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: February 5, 2013
    Assignees: SANYO Semiconductor Co., Ltd., SANYO Semiconductor Manufacturing Co., Ltd., Semiconductor Components Industries, LLC
    Inventors: Akira Suzuki, Katsuyuki Seki, Keita Odajima
  • Patent number: 8362595
    Abstract: The invention provides a mesa semiconductor device and a method of manufacturing the same which minimize the manufacturing cost and prevents contamination and physical damage of the device. An N? type semiconductor layer is formed on a front surface of a semiconductor substrate, and a P type semiconductor layer is formed thereon. An anode electrode is further formed on the P type semiconductor layer so as to be connected to the P type semiconductor layer, and a mesa groove is formed from the front surface of the P type semiconductor layer deeper than the N? type semiconductor layer so as to surround the anode electrode. Then, a second insulation film is formed from inside the mesa groove onto the end portion of the anode electrode. The second insulation film is made of an organic insulator such as polyimide type resin or the like. The lamination body made of the semiconductor substrate and the layers laminated thereon is then diced along a scribe line.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: January 29, 2013
    Assignees: SANYO Semiconductor Co., Ltd., SANYO Semiconductor Manufacturing Co., Ltd., Semiconductor Components Industries, LLC
    Inventors: Akira Suzuki, Katsuyuki Seki, Keita Odajima
  • Patent number: 8357972
    Abstract: A semiconductor power device includes a substrate, a first semiconductor layer on the substrate, a second semiconductor layer on the first semiconductor layer, and a third semiconductor layer on the second semiconductor layer. At least a recessed epitaxial structure is disposed within a cell region and the recessed epitaxial structure may be formed in a pillar or stripe shape. A first vertical diffusion region is disposed in the third semiconductor layer and the recessed epitaxial structure is surrounded by the first vertical diffusion region. A source conductor is disposed on the recessed epitaxial structure and a trench isolation is disposed within a junction termination region surrounding the cell region. In addition, the trench isolation includes a trench, a first insulating layer on an interior surface of the trench, and a conductive layer filled into the trench, wherein the source conductor connects electrically with the conductive layer.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: January 22, 2013
    Assignee: Anpec Electronics Corporation
    Inventors: Yung-Fa Lin, Shou-Yi Hsu, Meng-Wei Wu, Main-Gwo Chen, Yi-Chun Shih
  • Publication number: 20130001647
    Abstract: In an embodiment, a bipolar transistor structure is formed on a silicon-on-insulator (SOI) structure that includes a semiconductor substrate, a buried oxide layer formed on the semiconductor substrate and a top silicon layer formed on the buried oxide layer.
    Type: Application
    Filed: June 28, 2011
    Publication date: January 3, 2013
    Inventor: Steven J. Adler
  • Patent number: 8334451
    Abstract: A photovoltaic (PV) cell device comprises a first semiconductor substrate; a second semiconductor substrate bonded to the first semiconductor substrate; an insulating layer provided between the first and second substrates to electrically isolate the first substrate from the second substrate; a plurality of PV cells defined on the first substrate, each PV cell including a n-type region and a p-type region; a plurality of vertical trenches provided in the first substrate to separated the PV cells, the vertical trenches terminating at the insulating layer; a plurality of isolation structures provided within the vertical trenches, each isolation structure including a first isolation layer including oxide and a second isolation layer including polysilicon; and an interconnect layer patterned to connect the PV cells to provide X number of PV cells in series and Y number of PV cells in parallel.
    Type: Grant
    Filed: October 4, 2004
    Date of Patent: December 18, 2012
    Assignee: IXYS Corporation
    Inventors: Nestore Polce, Ronald P. Clark, Nathan Zommer
  • Publication number: 20120305994
    Abstract: Junction field-effect transistors with vertical channels and self-aligned regrown gates and methods of making these devices are described. The methods use techniques to selectively grow and/or selectively remove semiconductor material to form a p-n junction gate along the sides of the channel and on the bottom of trenches separating source fingers. Methods of making bipolar junction transistors with self-aligned regrown base contact regions and methods of making these devices are also described. The semiconductor devices can be made in silicon carbide.
    Type: Application
    Filed: August 14, 2012
    Publication date: December 6, 2012
    Applicant: SS SC IP, LLC
    Inventors: Joseph Neil MERRETT, Igor SANKIN
  • Patent number: 8283705
    Abstract: A switching power supply has a start-up circuit that includes a field effect transistor (JFET), which has a gate region (a p-type well region) formed in a surface layer of a p-type substrate and a drift region (a first n-type well region). A plurality of source regions (second n-type well regions) are formed circumferentially around the drift region. A drain region (a third n-type well region) is formed centrally of the source region. The drain region and the source regions can be formed at the same time. A metal wiring of the source electrode wiring connected to source regions is divided into at least two groups to form at least two junction field effect transistors.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: October 9, 2012
    Assignee: Fuji Electric Co., Ltd.
    Inventors: Masaru Saito, Koji Sonobe
  • Publication number: 20120248564
    Abstract: According to an exemplary embodiment, a dual compartment semiconductor package includes a conductive clip having first and second compartments. The first compartment is electrically and mechanically connected to a top surface of the first die. The second compartment electrically and mechanically connected to a top surface of a second die. The dual compartment semiconductor package also includes a groove formed between the first and second compartments, the groove preventing contact between the first and second dies. The dual compartment package electrically connects the top surface of the first die to the top surface of the second die. The first die can include an insulated-gate bipolar transistor (IGBT) and the second die can include a diode. A temperature sensor can be situated adjacent to, over, or within the groove for measuring a temperature of the dual compartment semiconductor package.
    Type: Application
    Filed: March 30, 2011
    Publication date: October 4, 2012
    Applicant: INTERNATIONAL RECTIFIER CORPORATION
    Inventor: Henning M. Hauenstein
  • Publication number: 20120248575
    Abstract: The present invention provides a semiconductor with a multilayered contact structure. The multilayered structure includes a metal contact placed on an active region of a semiconductor and a metal contact extension placed on the metal contact.
    Type: Application
    Filed: December 21, 2009
    Publication date: October 4, 2012
    Applicant: NXP B.V.
    Inventors: Soenke Habenicht, Detief Oelgeschlaeger, Olrik Schumacher, Stefan Bengt Berglund
  • Patent number: 8269313
    Abstract: A bipolar transistor at least includes a semiconductor substrate including an N? epitaxial growth layer and a P? silicon substrate, an N+ polysilicon layer, a tungsten layer, two silicide layers, a base electrode, an emitter electrode, and a collector electrode. The N+ polysilicon layer formed on the semiconductor substrate is covered with one of the silicide layers. The tungsten layer that is formed on the silicide layer is covered with the other silicide layer.
    Type: Grant
    Filed: April 1, 2010
    Date of Patent: September 18, 2012
    Assignee: Renesas Electronics Corporation
    Inventor: Akio Matsuoka
  • Patent number: 8258602
    Abstract: Design and methods for fabricating bipolar junction transistors are described. In one embodiment, a semiconductor device includes a first fin comprising a first emitter region, a first base region, and a first collector region. The first emitter region, the first base region, and the first collector region form a bipolar junction transistor. A second fin is disposed adjacent and parallel to the first fin. The second fin includes a first contact to the first base region.
    Type: Grant
    Filed: November 13, 2009
    Date of Patent: September 4, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Yao Ke, Tao-Wen Chung, Shine Chung, Fu-Lung Hsueh
  • Publication number: 20120175738
    Abstract: A first (e.g. replaceable or disposable) dielectric spacer formed on a sidewall of a dummy emitter mandrel is removed after a raised extrinsic base layer and covering dielectric layer are formed. Thereafter, a second dielectric spacer is formed within the opening that results. As a result, the second dielectric spacer, which is not subjected to RIE processing, provides a desired level of isolation and tighter emitter final critical dimension than that which could be achieved through the technique described in the prior art. In a particular embodiment, an additional layer of silicon nitride is disposed over a passivation oxide layer as a sacrificial layer which protects the passivation oxide layer from being reduced in thickness and/or being undercut during the RIE process and one or more cleaning processes conducted after the RIE process.
    Type: Application
    Filed: March 22, 2012
    Publication date: July 12, 2012
    Applicant: International Business Machines Corporation
    Inventor: MARWAN H. KHATER
  • Patent number: 8217423
    Abstract: While embedded silicon germanium alloy and silicon carbon alloy provide many useful applications, especially for enhancing the mobility of MOSFETs through stress engineering, formation of alloyed silicide on these surfaces degrades device performance. The present invention provides structures and methods for providing unalloyed silicide on such silicon alloy surfaces placed on semiconductor substrates. This enables the formation of low resistance contacts for both mobility enhanced PFETs with embedded SiGe and mobility enhanced NFETs with embedded Si:C on the same semiconductor substrate. Furthermore, this invention provides methods for thick epitaxial silicon alloy, especially thick epitaxial Si:C alloy, above the level of the gate dielectric to increase the stress on the channel on the transistor devices.
    Type: Grant
    Filed: January 4, 2007
    Date of Patent: July 10, 2012
    Assignee: International Business Machines Corporation
    Inventors: Yaocheng Liu, Dureseti Chidambarrao, Oleg Gluschenkov, Judson R Holt, Renee T Mo, Kern Rim
  • Publication number: 20120132999
    Abstract: Consistent with an example embodiment, there is method of manufacturing a bipolar transistor comprising providing a substrate including an active region; depositing a layer stack; forming a base window over the active region in said layer stack; forming at least one pillar in the base window, wherein a part of the pillar is resistant to polishing; depositing an emitter material over the resultant structure, thereby filling said base window; and planarizing the deposited emitter material by polishing. Consistent with another example embodiment, a bipolar transistor may be manufactured according to the afore-mentioned method.
    Type: Application
    Filed: November 22, 2011
    Publication date: May 31, 2012
    Applicant: NXP B.V.
    Inventors: Evelyne Gridelet, Tony Vanhoucke, Johannes Josephus Theodorus Marinus Donkers, Hans Mertens, Blandine Duriez
  • Patent number: 8178949
    Abstract: Bipolar semiconductor devices have a Zener voltage controlled very precisely in a wide range of Zener voltages (for example, from 10 to 500 V). A bipolar semiconductor device has a mesa structure and includes a silicon carbide single crystal substrate of a first conductivity type, a silicon carbide conductive layer of a first conductivity type, a highly doped layer of a second conductivity type and a silicon carbide conductive layer of a second conductivity type which substrate and conductive layers are laminated in the order named.
    Type: Grant
    Filed: January 31, 2008
    Date of Patent: May 15, 2012
    Assignees: The Kansai Electric Power Co., Inc., Central Research Institute of Electric Power Industry
    Inventors: Ryosuke Ishii, Koji Nakayama, Yoshitaka Sugawara, Hidekazu Tsuchida
  • Publication number: 20120104554
    Abstract: Preferred embodiment flexible and on wafer hybrid plasma semiconductor devices have at least one active solid state semiconductor region; and a plasma generated in proximity to the active solid state semiconductor region(s). Doped solid state semiconductor regions are in a thin flexible solid state substrate, and a flexible non conducting material defining a microcavity adjacent the semiconductor regions. The flexible non conducting material is bonded to the thin flexible solid state substrate, and at least one electrode is arranged with respect to said flexible substrate to generate a plasma in said microcavity, where the plasma will influence or perform a semiconducting function in cooperation with said solid state semiconductor regions. A preferred on-wafer device is formed on a single side of a silicon on insulator wafer and defines the collector (plasma cavity), emitter and base regions on a common side, which provides a simplified and easy to manufacture structure.
    Type: Application
    Filed: July 19, 2011
    Publication date: May 3, 2012
    Applicant: The Board of Trustees of the University of Illinois
    Inventors: J. Gary Eden, Paul A. Tchertchian, Thomas J. Houlahan, Dane J. Sievers, Benben Li, Clark J. Wagner
  • Patent number: 8148799
    Abstract: A bipolar transistor structure comprises a semiconductor substrate having a first conductivity type, a collector region having a second conductivity type that is opposite the first conductivity type formed in a substrate active device region defined by isolation dielectric material formed in an upper surface of the semiconductor substrate, a base region that includes an intrinsic base region having the first conductivity type formed over the collector region and an extrinsic base region having the second conductivity type formed over the isolation dielectric material, and a sloped in-situ doped emitter plug having the second conductivity type formed on the intrinsic base region.
    Type: Grant
    Filed: January 25, 2010
    Date of Patent: April 3, 2012
    Assignee: National Semiconductor Corporation
    Inventors: Monir El-Diwany, Alexei Sadovnikov, Jamal Ramdani
  • Patent number: 8129818
    Abstract: The present invention is a power device includes, a first conductive type semiconductor substrate, a second conductive type base region formed on a surface of the semiconductor substrate, a second conductive type collector region formed on a rear surface of the semiconductor substrate, a first conductive type emitter region formed on a surface of the base region, a trench gate formed via a gate insulating film in a first trench groove formed in the base region so as to penetrate the emitter region, a dent formed in the base region in proximity to the emitter region, a second conductive type contact layer formed on an inner wall of the dent, having a higher dopant density than that of the base region, a dummy trench formed via a dummy trench insulating film in a second trench groove formed at a bottom of the dent, and an emitter electrode electrically connected to the emitter region, the contact layer and the dummy trench, wherein the trench gate and the dummy trench reach the semiconductor substrate.
    Type: Grant
    Filed: October 14, 2008
    Date of Patent: March 6, 2012
    Assignee: Mitsubishi Electric Corporation
    Inventors: Shigeo Tooi, Tetsujiro Tsunoda
  • Publication number: 20120049327
    Abstract: The invention discloses a vertical parasitic PNP transistor in a BiCMOS process and manufacturing method of the same, wherein an active region is isolated by STIs. The transistor includes a collector region, a base region, an emitter region, pseudo buried layers, and N-type polysilicon. The pseudo buried layers, formed at the bottom of the STIs located on both sides of the collector region, extend laterally into the active region and contact with the collector region, whose electrodes are picked up through making deep-hole contacts in the STIs. The N-type polysilicon is formed on the base region and contacts with it, whose electrodes are picked up through making metal contacts on the N-type polysilicon. The transistors can be used as output devices in high-speed and high-gain circuits, efficiently reducing the transistors area, diminishing the collector resistance, and improving the transistors performance. The method can reduce the cost without additional technological conditions.
    Type: Application
    Filed: August 29, 2011
    Publication date: March 1, 2012
    Inventors: Wensheng Qian, Donghua Liu, Jun Hua
  • Patent number: 8097919
    Abstract: An electronic device includes a drift layer having a first conductivity type, a buffer layer having a second conductivity type, opposite the first conductivity type, on the drift layer and forming a P?N junction with the drift layer, and a junction termination extension region having the second conductivity type in the drift layer adjacent the P?N junction. The buffer layer includes a step portion that extends over a buried portion of the junction termination extension. Related methods are also disclosed.
    Type: Grant
    Filed: August 11, 2008
    Date of Patent: January 17, 2012
    Assignee: Cree, Inc.
    Inventors: Qingchun Zhang, Anant K. Agarwal
  • Publication number: 20110278570
    Abstract: Bipolar transistor structures, methods of designing and fabricating bipolar transistors, methods of designing circuits having bipolar transistors. The method of designing the bipolar transistor includes: selecting an initial design of a bipolar transistor; scaling the initial design of the bipolar transistor to generate a scaled design of the bipolar transistor; determining if stress compensation of the scaled design of the bipolar transistor is required based on dimensions of an emitter of the bipolar transistor after the scaling; and if stress compensation of the scaled design of the bipolar transistor is required then adjusting a layout of a trench isolation layout level of the scaled design relative to a layout of an emitter layout level of the scaled design to generate a stress compensated scaled design of the bipolar transistor.
    Type: Application
    Filed: August 1, 2011
    Publication date: November 17, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Alvin Jose Joseph, Ramana Murty Malladi, James Albert Slinkman
  • Patent number: 7989885
    Abstract: A semiconductor device has a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type complementary to the first conductivity type arranged in or on the first semiconductor layer. The semiconductor device has a region of the first conductivity type arranged in the second semiconductor layer. A first electrode contacts the region of the first conductivity type and the second semiconductor layer. A trench extends into the first semiconductor layer, and a voltage dependent short circuit diverter structure has a highly-doped diverter region of the second conductivity type. This diverter region is arranged via an end of a channel region and coupled to a diode arranged in the trench.
    Type: Grant
    Filed: February 26, 2009
    Date of Patent: August 2, 2011
    Assignee: Infineon Technologies Austria AG
    Inventors: Franz Hirler, Frank Dieter Pfirsch
  • Patent number: 7982248
    Abstract: A switching power supply has a start-up circuit that includes a field effect transistor (JFET), which has a gate region (a p-type well region) formed in a surface layer of a p-type substrate and a drift region (a first n-type well region). A plurality of source regions (second n-type well regions) are formed circumferentially around the drift region. A drain region (a third n-type well region) is formed centrally of the source region. The drain region and the source regions can be formed at the same time. A metal wiring of the source electrode wiring connected to source regions is divided into at least two groups to form at least two junction field effect transistors.
    Type: Grant
    Filed: March 24, 2007
    Date of Patent: July 19, 2011
    Assignee: Fuji Electric Systems Co., Ltd.
    Inventors: Masaru Saito, Koji Sonobe
  • Patent number: 7968971
    Abstract: A thin-body bipolar device includes: a semiconductor substrate, a semiconductor fin constructed over the semiconductor substrate, a first region of the semiconductor fin having a first conductivity type, the first region serving as a base of the thin-body bipolar device, and a second and third region of the semiconductor fin having a second conductivity type opposite to the first conductivity type, the second and third region being both juxtaposed with and separated by the first region, the second and third region serving as an emitter and collector of the thin-body bipolar device, respectively.
    Type: Grant
    Filed: July 10, 2009
    Date of Patent: June 28, 2011
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shine Chung, Fu-Lung Hsueh
  • Publication number: 20110147893
    Abstract: By providing a novel bipolar device design implementation, a standard CMOS process can be used unchanged to fabricate useful bipolar transistors and other bipolar devices having adjustable properties by partially blocking the P or N well doping used for the transistor base. This provides a hump-shaped base region with an adjustable base width, thereby achieving, for example, higher gain than can be obtained with the unmodified CMOS process alone. By further partially blocking the source/drain doping step used to form the emitter of the bipolar transistor, the emitter shape and effective base width can be further varied to provide additional control over the bipolar device properties. The embodiments thus include prescribed modifications to the masks associated with the bipolar device that are configured to obtain desired device properties. The CMOS process steps and flow are otherwise unaltered and no additional process steps are required.
    Type: Application
    Filed: March 7, 2011
    Publication date: June 23, 2011
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Xin Lin, Bernhard H. Grote, Hongning Yang, Jiang-Kai Zuo
  • Publication number: 20110133312
    Abstract: The present invention is a power device includes, a first conductive type semiconductor substrate, a second conductive type base region formed on a surface of the semiconductor substrate, a second conductive type collector region formed on a rear surface of the semiconductor substrate, a first conductive type emitter region formed on a surface of the base region, a trench gate formed via a gate insulating film in a first trench groove formed in the base region so as to penetrate the emitter region, a dent formed in the base region in proximity to the emitter region, a second conductive type contact layer formed on an inner wall of the dent, having a higher dopant density than that of the base region, a dummy trench formed via a dummy trench insulating film in a second trench groove formed at a bottom of the dent, and an emitter electrode electrically connected to the emitter region, the contact layer and the dummy trench, wherein the trench gate and the dummy trench reach the semiconductor substrate.
    Type: Application
    Filed: October 14, 2008
    Publication date: June 9, 2011
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Shigeo Tooi, Tetsujiro Tsunoda
  • Publication number: 20110115054
    Abstract: A diode comprises a substrate formed of a first material having a first doping polarity. The substrate has a planar surface and at least one semispherical structure extending from the planar surface. The semispherical structure is formed of the first material. A layer of second material is over the semispherical structure. The second material comprises a second doping polarity opposite the first doping polarity. The layer of second material conforms to the shape of the semispherical structure. A first electrical contact is connected to the substrate, and a second electrical contact is connected to the layer of second material. Additional semiconductor structures are formed by fabricating additional layers over the original layers.
    Type: Application
    Filed: November 19, 2009
    Publication date: May 19, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Toshiharu Furukawa, Robert R. Robison, William R. Tonti, Richard Q. Williams
  • Patent number: 7902634
    Abstract: An n+-emitter layer arranged under an emitter electrode is formed of convex portions arranged at predetermined intervals and a main body coupled to the convex portions. A convex portion region is in contact with the emitter electrode, and a p+-layer doped more heavily than a p-base layer is arranged at least below the emitter layer. In a power transistor of a lateral structure, a latch-up immunity of a parasitic thyristor can be improved, and a turn-off time can be reduced.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: March 8, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventor: Kazunari Hatade
  • Patent number: 7893432
    Abstract: Various embodiments include apparatus and method having a heat source, a thermal management device, and an interface disposed between the thermal management device and the heat source. The interface includes nanostructures to facilitate heat transfer and adhesion between the heat source and the thermal management device.
    Type: Grant
    Filed: September 16, 2008
    Date of Patent: February 22, 2011
    Assignee: Intel Corporation
    Inventors: Eric C. Hannah, Ralph M. Kling
  • Patent number: 7880270
    Abstract: A vertical heterobipolar transistor comprising a substrate of semiconductor material of a first conductivity type and an insulation region provided therein, a first semiconductor electrode arranged in an opening of the insulation region and comprising monocrystalline semiconductor material of a second conductivity type, which is either in the form of a collector or an emitter, and which has a first heightwise portion and an adjoining second heightwise portion which is further away from the substrate interior in a heightwise direction, wherein only the first heightwise portion is enclosed by the insulation region in lateral directions perpendicular to the heightwise direction, a second semiconductor electrode of semiconductor material of the second conductivity type, which is in the form of the other type of semiconductor electrode, a base of monocrystalline semiconductor material of the first conductivity type, and a base connection region having a monocrystalline portion which in a lateral direction laterall
    Type: Grant
    Filed: December 12, 2005
    Date of Patent: February 1, 2011
    Assignee: IHP GmbH—Innovations for High Performance Microelectronics/Leibniz-Institut fur innovative Mikroelektronik
    Inventors: Bernd Heinemann, Holger Rücker, Jürgen Drews, Steffen Marschmeyer
  • Publication number: 20110012232
    Abstract: An improved device (20) is provided, comprising, merged vertical (251) and lateral transistors (252), comprising thin collector regions (34) of a first conductivity type sandwiched between upper (362) and lower (30) base regions of opposite conductivity type that are Ohmically coupled via intermediate regions (32, 361) of the same conductivity type and to the base contact (38). The emitter (40) is provided in the upper base region (362) and the collector contact (42) is provided in outlying sinker regions (28) extending to the thin collector regions (34) and an underlying buried layer (28). As the collector voltage increases part of the thin collector regions (34) become depleted of carriers from the top by the upper (362) and from the bottom by the lower (30) base regions. This clamps the thin collector regions' (34) voltage well below the breakdown voltage of the PN junction formed between the buried layer (28) and the lower base region (30).
    Type: Application
    Filed: July 14, 2009
    Publication date: January 20, 2011
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Xin Lin, Daniel J. Blomberg, Jiang-Kai Zuo
  • Patent number: 7868424
    Abstract: The invention relates to a semiconductor device (10) with a substrate (11) and a semiconductor body (12) comprising a vertical bipolar transistor with an emitter region, a base region and a collector region (1, 2, 3) of, respectively, a first conductivity type, a second conductivity type opposite to the first conductivity type and the first conductivity type, wherein the collector region (3) comprises a first sub-region (3A) bordering the base region (2) and a second sub-region (3B) bordering the first sub-region (3A) which has a lower doping concentration than the second sub-region (3B), and the transistor is provided with a gate electrode (5) which laterally borders the first sub-region (3A) and by means of which the first sub-region (3A) may be depleted.
    Type: Grant
    Filed: July 7, 2005
    Date of Patent: January 11, 2011
    Assignee: NXP B.V.
    Inventors: Godefridus Adrianus Maria Hurkx, Prabhat Agarwal, Erwin Hijzen, Raymond Josephus Engelbart Hueting
  • Patent number: 7867885
    Abstract: A nanometer-scale post structure and a method for forming the same are disclosed. More particularly, a post structure, a light emitting device using the structure, and a method for forming the same, which is capable of forming a nanometer-scale post structure having a repetitive pattern by using an etching process, are disclosed. The method includes forming unit patterns on a substrate by use of a first material, growing a wet-etchable second material on the substrate formed with the unit patterns, and wet etching the substrate having the grown second material.
    Type: Grant
    Filed: February 22, 2007
    Date of Patent: January 11, 2011
    Assignees: LG Electronics Inc., LG Innotek Co., Ltd.
    Inventor: Duk Kyu Bae
  • Patent number: 7863709
    Abstract: Methods and apparatuses directed to low base resistance bipolar junction transistor (BJT) devices are described herein. A low base resistance BJT device may include a collector layer, a base layer formed on the collector layer, a plurality of isolation trench lines formed in the base layer and extending into the collector layer, and a plurality of polysilicon lines formed on the base layer parallel to and overlapping the plurality of isolation trench lines. The base layer may be N-doped or P-doped.
    Type: Grant
    Filed: April 16, 2008
    Date of Patent: January 4, 2011
    Assignee: Marvell International Ltd.
    Inventors: Pantas Sutardja, Albert Wu, Runzi Chang, Chien-Chuan Wei, Winston Lee, Peter Lee
  • Publication number: 20100187656
    Abstract: Design and methods for fabricating bipolar junction transistors are described. In one embodiment, a semiconductor device includes a first fin comprising a first emitter region, a first base region, and a first collector region. The first emitter region, the first base region, and the first collector region form a bipolar junction transistor. A second fin is disposed adjacent and parallel to the first fin. The second fin includes a first contact to the first base region.
    Type: Application
    Filed: November 13, 2009
    Publication date: July 29, 2010
    Inventors: Po-Yao Ke, Tao-Wen Chung, Shine Chung, Fu-Lung Hsueh