Memory Structures (epo) Patents (Class 257/E21.645)
  • Patent number: 10475697
    Abstract: Some embodiments include an integrated memory having an array of capacitors. The array has edges. The capacitors along the edges are edge capacitors, and the other capacitors are internal capacitors. The edge capacitors have inner edges facing toward the internal capacitors, and have outer edges in opposing relation to the inner edges. An insulative beam extends laterally between the capacitors. The insulative beam is along upper regions of the capacitors. First void regions are under the insulative beam, along lower regions of the internal capacitors, and along the inner edges of the edge capacitors. Peripheral extensions of the insulative beam extend laterally outward of the edge capacitors, and second void regions are under the peripheral extensions and along the outer edges of the edge capacitors. Some embodiments included integrated assemblies having two or more memory array decks stacked on atop another. Some embodiments include methods of forming memory arrays.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: November 12, 2019
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 10418278
    Abstract: A semiconductor device includes a semiconductor pattern on a semiconductor substrate, a three-dimensional memory array on the semiconductor pattern, and a peripheral interconnection structure between the semiconductor pattern and the semiconductor substrate. The peripheral interconnection structure includes an upper interconnection structure on a lower interconnection structure. The upper interconnection structure includes an upper interconnection and an upper barrier layer. The lower interconnection structure includes a lower interconnection and a lower barrier layer. The upper barrier layer is under a bottom surface of the upper interconnection and does not cover side surfaces of the upper interconnection. The lower barrier layer is under a bottom surface of the lower interconnection and covers side surfaces of the lower interconnection.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: September 17, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dohyun Lee, Youngwoo Park, Junghoon Park, Jaeduk Lee
  • Patent number: 10418374
    Abstract: A vertical memory device includes a plurality of stacked structures, at least one inter-structure layer, and a channel structure. The plurality of stacked structures comprises a plurality of gate electrodes and a plurality of insulation film patterns that are alternately and repeatedly stacked on a substrate. At least one inter-structure layer is positioned between the two stacked structures adjacent to each other from among the plurality of stacked structures. A channel structure penetrates the plurality of stacked structures and the at least one inter-structure layer, the channel structure extending in the first direction, the channel structure being connected to the substrate.
    Type: Grant
    Filed: January 4, 2017
    Date of Patent: September 17, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Eun-young Lee, Yong-hoon Son, Jae-young Ahn
  • Patent number: 10269426
    Abstract: Integrated circuits with memory elements are provided. A memory element may include non-volatile resistive elements coupled together in a back-to-back configuration or an in-line configuration. Erase, programming, and margining operations may be performed on the resistive elements. Each of the resistive memory elements may receive a positive voltage, a ground voltage, or a negative voltage on either the anode or cathode terminal.
    Type: Grant
    Filed: June 15, 2017
    Date of Patent: April 23, 2019
    Assignee: Intel Corporation
    Inventors: Richard G. Smolen, Rusli Kurniawan, Yue-Song He, Andy L. Lee, Jeffrey T. Watt, Christopher J. Pass
  • Patent number: 10002880
    Abstract: According to one embodiment, an insulating layer is provided above a word line contact region portion. An upper surface of the insulating layer is at a height higher than an uppermost conductive layer. A first cover film is provided between the word line contact region portion and the insulating layer. A second cover film included in a first separation portion covers a side surface along a first direction of the insulating layer and a side surface along the first direction of the word line contact region portion. A third cover film is provided on the uppermost conductive layer. The third cover film covers a side surface along a second direction of the insulating layer. The first, second, and third cover films are of materials different from a material of the insulating layer.
    Type: Grant
    Filed: September 5, 2017
    Date of Patent: June 19, 2018
    Assignee: Toshiba Memory Corporation
    Inventor: Satoshi Nagashima
  • Patent number: 9935204
    Abstract: A static random access memory (SRAM) device includes a circuit element that includes a first inverter having a first load transistor and a first drive transistor and a second inverter having a second load transistor and a second drive transistor. Input and output nodes of the first inverter and the second inverter are cross-connected to each other. A first transfer transistor is connected to the output node of the first inverter, and a second transfer transistor is connected to the output nodes of the second inverter. Each of the first and second load transistors, the first and second drive transistors, and the first and second transfer transistors includes a transistor having multi-bridge channels. At least one of the first and second load transistors, the first and second drive transistors, and the first and second transfer transistors includes a transistor having a different number of multi-bridge channels from the other transistors.
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: April 3, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dong-hun Lee, Dong-won Kim
  • Patent number: 9899387
    Abstract: A semiconductor includes a first transistor and a second transistor. The first transistor includes a first and a second epitaxial layer, formed of a first semiconductor material. The second epitaxial layer is disposed over the first epitaxial layer. The first transistor also includes a first gate dielectric layer surrounds the first and second epitaxial layers and extends from a top surface of the first epitaxial layer to a bottom surface of the second epitaxial layer and a first metal gate layer surrounding the first gate dielectric layer. The second transistor includes a third epitaxial layer formed of the first semiconductor material and a fourth epitaxial layer disposed directly on the third epitaxial layer and formed of a second semiconductor. The second transistor also includes a second gate dielectric layer disposed over the third and fourth epitaxial layers and a second metal gate layer disposed over the second gate dielectric layer.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: February 20, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Ching, Chung-Cheng Wu, Ching-Fang Huang, Wen-Hsing Hsieh, Ying-Keung Leung, Cheng-Ting Chung
  • Patent number: 9881973
    Abstract: Some embodiments include a construction having a first memory array deck and a second memory array deck over the first memory array deck. The second memory array deck differs from the first memory array deck in one or more operating characteristics, in pitch, and/or in one or more structural parameters; with the structural parameters including different materials and/or different thicknesses of materials. Some embodiments include a construction having a first series and a third series of access/sense lines extending along a first direction, and a second series of access/sense lines between the first and third series and extending along a second direction which crosses the first direction. First memory cells are between the first and second series of access/sense lines and arranged in a first memory array deck. Second memory cells are between the second and third series of access/sense lines and arranged in a second memory array deck.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: January 30, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Andrea Redaelli
  • Patent number: 9875931
    Abstract: A semiconductor device includes a semiconductor pattern on a semiconductor substrate, a three-dimensional memory array on the semiconductor pattern, and a peripheral interconnection structure between the semiconductor pattern and the semiconductor substrate. The peripheral interconnection structure includes an upper interconnection structure on a lower interconnection structure. The upper interconnection structure includes an upper interconnection and an upper barrier layer. The lower interconnection structure includes a lower interconnection and a lower barrier layer. The upper barrier layer is under a bottom surface of the upper interconnection and does not cover side surfaces of the upper interconnection. The lower barrier layer is under a bottom surface of the lower interconnection and covers side surfaces of the lower interconnection.
    Type: Grant
    Filed: July 5, 2016
    Date of Patent: January 23, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dohyun Lee, Youngwoo Park, Junghoon Park, Jaeduk Lee
  • Patent number: 9865693
    Abstract: A semiconductor memory device and a semiconductor memory cell thereof are provided. The semiconductor memory device includes a plurality of semiconductor memory cells and an electric isolating structure. Each semiconductor memory cell includes a substrate, a first gate, a second gate, a first gate dielectric layer, a second gate dielectric layer, and a first spacing film. The first gate and the second gate are formed on the substrate. The first gate dielectric layer is between the first gate and the substrate, whereas the second gate dielectric layer is between the second gate and the substrate. The first spacing film having a side and a top edge is between the first gate and the second gate. The second gate covers the side and the top edge. Additionally, a method of manufacturing the semiconductor memory device is also provided.
    Type: Grant
    Filed: August 4, 2016
    Date of Patent: January 9, 2018
    Assignee: UNITED MICROELECTRONICS CORPORATION
    Inventors: Weichang Liu, Zhen Chen, Shen-De Wang, Wang Xiang, Wei Ta
  • Patent number: 9768234
    Abstract: Providing a high-density two-terminal memory architecture(s) having performance benefits of two-terminal memory and relatively low fabrication cost, is described herein. By way of example, the two-terminal memory architecture(s) can be constructed on a substrate, in various embodiments, and comprise two-terminal memory cells formed within conductive layer recess structures of the memory architecture. In one embodiment, a conductive layer recess can be created as a horizontal etch in conjunction with a vertical via etch. In another embodiment, the conductive layer recess can be patterned for respective conductive layers of the two-terminal memory architecture.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: September 19, 2017
    Assignee: CROSSBAR, INC.
    Inventor: Sung Hyun Jo
  • Patent number: 9685539
    Abstract: A method for manufacturing a semiconductor device includes forming a doped silicon layer on a bulk substrate, forming an undoped silicon cap layer on the doped silicon layer, forming a stacked configuration of silicon germanium (SiGe) and silicon layers on the undoped silicon cap layer, wherein the stacked configuration comprises a repeating arrangement of a silicon layer stacked on an SiGe layer, forming a plurality of dummy gates spaced apart from each other on the stacked configuration, the doped silicon layer and the undoped silicon cap layer, forming a spacer layer on each of the plurality of dummy gates, and on the doped silicon layer and the undoped silicon cap layer, selectively etching the doped silicon layer with respect to the undoped silicon layer, and filling the area from where the doped s silicon layer was selectively removed with a dielectric layer.
    Type: Grant
    Filed: March 14, 2016
    Date of Patent: June 20, 2017
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Junli Wang
  • Patent number: 9627616
    Abstract: An electronic device comprising a semiconductor memory unit that includes a resistance variable element formed over a substrate, and including stacked therein a bottom electrode, a variable resistance layer and a top electrode, and a barrier layer formed over the resistance variable element, and including an amorphous silicon layer which is doped with at least one kind of impurity.
    Type: Grant
    Filed: March 25, 2014
    Date of Patent: April 18, 2017
    Assignee: SK hynix Inc.
    Inventors: Sook-Joo Kim, Jae-Geun Oh, Keum-Bum Lee, Hyung-Suk Lee
  • Patent number: 9589609
    Abstract: A static RAM having a plurality of word lines; a plurality of bit line pairs; a plurality of memory cells provided at intersections of the plurality of bit line pairs and the plurality of word lines; a write driver connected between a high potential power source line, of which potential is higher than a reference potential, and a drive line; a column switch having transistor pairs which connect one of the plurality of bit line pairs, which is selected, to the write driver; and a boost circuit which boosts the drive line of the write driver to a negative potential, which is a potential lower than the reference potential, at a time of writing of the memory cell, where a well of the transistor pairs of the column switch is connected to the drive line.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: March 7, 2017
    Assignee: SOCIONEXT INC.
    Inventor: Wenhao Wu
  • Patent number: 9502306
    Abstract: The present invention provides a pattern formation method of forming a pattern on a substrate by partially removing a line and space pattern formed on the substrate, comprising a first formation step of forming a first layer including a plurality of first openings on the line and space pattern, a second step of forming, on the first layer, a second layer including a second opening for exposing one or more first openings, which are used to partially remove the line and space pattern, among the plurality of first openings, and a removing step of partially removing the line and space pattern through the second opening and the first opening, wherein the plurality of first openings are located on a plurality of lines of the line and space pattern.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: November 22, 2016
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Koichiro Tsujita, Tadashi Arai
  • Patent number: 9496369
    Abstract: A method of forming a memory device on a substrate having memory, LV and HV areas, including forming pairs of spaced apart memory stacks in the memory area, forming a first conductive layer over and insulated from the substrate, forming a first insulation layer on the first conductive layer and removing it from the memory and HV areas, performing a conductive material deposition to thicken the first conductive layer in the memory and HV areas, and to form a second conductive layer on the first insulation layer in the LV area, performing an etch to thin the first conductive layer in the memory and HV areas and to remove the second conductive layer in the LV area, removing the first insulation layer from the LV area, and patterning the first conductive layer to form blocks of the first conductive layer in the memory, LV and HV areas.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: November 15, 2016
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Man-Tang Wu, Jeng-Wei Yang, Chien-Sheng Su, Chun-Ming Chen, Nhan Do
  • Patent number: 9379165
    Abstract: A semiconductor memory device according to an embodiment described below comprises: first lines arranged in a first direction perpendicular to a main surface of a substrate and extending in a second direction crossing the first direction; second lines arranged in the second direction, extending in the first direction, and intersecting the first lines; memory cells disposed at intersections of the first lines and the second lines; and an interlayer insulating film provided between the second lines. The interlayer insulating film has an air gap extending continuously in the first direction so as to intersect at least some of the first lines aligned along the first direction. The interlayer insulating film also includes an insulating film positioned above the air gap and having a curved surface that protrudes toward a direction of the substrate.
    Type: Grant
    Filed: April 28, 2014
    Date of Patent: June 28, 2016
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Atsushi Yoshida, Hiroshi Kanno, Takayuki Tsukamoto, Takamasa Okawa, Hideyuki Tabata
  • Patent number: 9349654
    Abstract: Device and a method of forming a device are presented. The method includes providing a substrate prepared with isolation regions. The substrate includes first, second and third regions. The first region includes a memory region, the second region includes a high voltage (HV) region and the third region includes a logic region. An additional dielectric layer covering the substrate and the isolation regions is formed. A first select region is selectively processed while protecting first non-select regions. The first select region is one of the first, second and third device regions. A first gate dielectric is formed on the select region. Top substrate active area and isolation regions of the first non-select regions are not exposed during processing of the first select region and forming the first gate dielectric.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: May 24, 2016
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Liang Li, Xuesong Rao, Martina Damayanti, Wei Lu, Alex See, Yoke Leng Lim
  • Patent number: 9342650
    Abstract: An SRAM cell structure. In one embodiment, a bit cell first level contacts formed at a first and a second CVdd node, a first and a second CVss node, at a bit line node, at a bit line bar node, at a data node and at a data bar node; and second level contacts formed on each of the first level contacts at the first and second CVdd nodes, the first and second CVss nodes, the bit line node and the bit line bar node; wherein the first level contacts formed at the data node and the data bar node do not have a second level contact formed thereon. In another embodiment, a word line is formed and bit lines and a CVdd and a CVss line are formed overlying the SRAM cell and coupled to the corresponding ones of the nodes. Methods are disclosed for forming the cell structure.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: May 17, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jhon-Jhy Liaw
  • Patent number: 9041090
    Abstract: Methods for forming a string of memory cells and apparatuses having a vertical string of memory cells are disclosed. One such string of memory cells can be formed at least partially in a stack of materials comprising a plurality of alternating levels of control gate material and insulator material. A memory cell of the string can include floating gate material adjacent to a level of control gate material of the levels of control gate material. The memory cell can also include tunnel dielectric material adjacent to the floating gate material. The level of control gate material and the tunnel dielectric material are adjacent opposing surfaces of the floating gate material. The memory cell can include metal along an interface between the tunnel dielectric material and the floating gate material. The memory cell can further include a semiconductor material adjacent to the tunnel dielectric material.
    Type: Grant
    Filed: May 15, 2013
    Date of Patent: May 26, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Akira Goda, Durai Vishak Nirmal Ramaswamy
  • Patent number: 9041111
    Abstract: A flat panel detector includes a photoelectric conversion layer and a pixel detecting element disposed under the photoelectric conversion layer. The pixel detecting element includes: a pixel electrode for receiving charges, a storage capacitor for storing the received charges, and a thin film transistor for controlling outputting of the stored charges. The storage capacitor includes a first electrode and a second electrode. The first electrode includes an upper electrode and a bottom electrode that are disposed opposite to each other and electrically connected. A second electrode is sandwiched between the upper electrode and the bottom electrode. It is insulated between the upper electrode and the second electrode and between the second electrode and the bottom electrode.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: May 26, 2015
    Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Zhenyu Xie
  • Patent number: 8999862
    Abstract: Methods of fabricating nano-scale structures are provided. A method includes forming a first hard mask pattern corresponding to first openings in a dense region, forming first guide elements on the first hard mask pattern aligned with the first openings, and forming second hard mask patterns in a sparse region to provide isolated patterns. A blocking layer is formed in the sparse region to cover the second hard mask patterns. A first domain and second domains are formed in the dense region using a phase separation of a block co-polymer layer. Related nano-scale structures are also provided.
    Type: Grant
    Filed: April 7, 2014
    Date of Patent: April 7, 2015
    Assignee: SK Hynix Inc.
    Inventors: Keun Do Ban, Cheol Kyu Bok, Myoung Soo Kim, Jung Hyung Lee, Hyun Kyung Shim, Chang Il Oh
  • Patent number: 9000508
    Abstract: Nonvolatile memory devices according to embodiments of the invention include highly integrated vertical stacks of nonvolatile memory cells. These vertical stacks of memory cells can utilize dummy memory cells to compensate for process artifacts that would otherwise yield relatively poor functioning memory cell strings when relatively large numbers of memory cells are stacked vertically on a semiconductor substrate using a plurality of vertical sub-strings electrically connected in series.
    Type: Grant
    Filed: September 12, 2013
    Date of Patent: April 7, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Changhyun Lee, Sunhil Shim, Jaehoon Jang, Sunghoi Hur, Hansoo Kim, Kihyun Kim
  • Patent number: 9000409
    Abstract: The present application discloses a 3D semiconductor memory device having 1T1R memory configuration based on a vertical-type gate-around transistor, and a manufacturing method thereof. A on/off current ratio can be well controlled by changing a width and a length of a channel of the gate-around transistor, so as to facilitate multi-state operation of the 1T1R memory cell. Moreover, the vertical transistor has a smaller layout size than a horizontal transistor, so as to reduce the layout size effectively. Thus, the 3D semiconductor memory device can be integrated into an array with a high density.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: April 7, 2015
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Zongliang Huo, Ming Liu
  • Patent number: 8999787
    Abstract: A semiconductor device includes a plurality of conductive layers and a plurality of insulating layers formed alternately with each other, at least one channel layer passing through the plurality of conductive layers and the plurality of insulating layers, and at least one first charge blocking layer surrounding the at least one channel layer, wherein a plurality of first regions, interposed between the at least one channel layer and the plurality of conductive layers, and a plurality of second regions, interposed between the at least one channel layer and the plurality of insulating layers, are alternately defined on the at least one first charge blocking layer, and each of the plurality of first regions has a greater thickness than each of the plurality of second regions.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: April 7, 2015
    Assignee: SK Hynix Inc.
    Inventors: Ki Hong Lee, Seung Ho Pyi, Seok Min Jeon
  • Patent number: 8993397
    Abstract: A method of forming a memory device. The method provides a semiconductor substrate having a surface region. A first dielectric layer is formed overlying the surface region of the semiconductor substrate. A bottom wiring structure is formed overlying the first dielectric layer and a second dielectric material is formed overlying the top wiring structure. A bottom metal barrier material is formed to provide a metal-to-metal contact with the bottom wiring structure. The method forms a pillar structure by patterning and etching a material stack including the bottom metal barrier material, a contact material, a switching material, a conductive material, and a top barrier material. The pillar structure maintains a metal-to-metal contact with the bottom wiring structure regardless of the alignment of the pillar structure with the bottom wiring structure during etching. A top wiring structure is formed overlying the pillar structure at an angle to the bottom wiring structure.
    Type: Grant
    Filed: August 27, 2013
    Date of Patent: March 31, 2015
    Assignee: Crossbar, Inc.
    Inventor: Scott Brad Herner
  • Patent number: 8980708
    Abstract: A complementary back end of line (BEOL) capacitor (CBC) structure includes a metal oxide metal (MOM) capacitor structure. The MOM capacitor structure is coupled to a first upper interconnect layer of an interconnect stack of an integrated circuit (IC) device. The MOM capacitor structure includes at least one lower interconnect layer of the interconnect stack. The CBC structure may also include a second upper interconnect layer of the interconnect stack coupled to the MOM capacitor structure. The CBC structure also includes at least one metal insulator metal (MIM) capacitor layer between the first upper interconnect layer and the second upper interconnect layer. In addition, CBC structure may also include a MIM capacitor structure coupled to the MOM capacitor structure. The MIM capacitor structure includes a first capacitor plate having at least a portion of the first upper interconnect layer, and a second capacitor plate having at least a portion of the MIM capacitor layer(s).
    Type: Grant
    Filed: February 19, 2013
    Date of Patent: March 17, 2015
    Assignee: QUALCOMM Incorporated
    Inventors: John J. Zhu, Bin Yang, P R Chidambaram, Lixin Ge, Jihong Choi
  • Patent number: 8981491
    Abstract: A memory array having improved radiation immunity is described. The memory array comprises a plurality of memory elements, each memory element having an p-type transistor formed in an n-type region; and a plurality of p-wells, each p-well having an n-type transistor coupled to a corresponding p-type transistor to form a memory element of the plurality of memory elements; wherein each p-well provides a p-n junction to dissipate minority charge in a portion of the n-type region occupied by a corresponding p-type transistor and associated with at least two adjacent memory elements. A method of implementing a memory array is also described.
    Type: Grant
    Filed: April 4, 2012
    Date of Patent: March 17, 2015
    Assignee: Xilinx, Inc.
    Inventors: Michael J. Hart, James Karp
  • Patent number: 8975114
    Abstract: Embodiments of the invention generally relate to memory devices and methods for fabricating such memory devices. In one embodiment, a method for fabricating a resistive switching memory device includes depositing a metallic layer on a lower electrode disposed on a substrate and exposing the metallic layer to an activated oxygen source while heating the substrate to an oxidizing temperature within a range from about 300° C. to about 600° C. and forming a metal oxide layer from an upper portion of the metallic layer during an oxidation process. The lower electrode contains a silicon material and the metallic layer contains hafnium or zirconium. Subsequent to the oxidation process, the method further includes heating the substrate to an annealing temperature within a range from greater than 600° C. to about 850° C. while forming a metal silicide layer from a lower portion of the metallic layer during a silicidation process.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: March 10, 2015
    Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLC
    Inventors: Dipankar Pramanik, Tony P. Chiang, Tim Minvielle, Takeshi Yamaguchi
  • Patent number: 8951862
    Abstract: The technology relates to a damascene word line for a three dimensional array of nonvolatile memory cells. Conductive lines such as silicon are formed over stacked nonvolatile memory structures. Word line trenches separate neighboring ones of the silicon lines. The silicon lines separated by the word line trenches are oxidized, making insulating surfaces in the word line trenches. Word lines are made in the word line trenches.
    Type: Grant
    Filed: January 10, 2012
    Date of Patent: February 10, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Shih-Hung Chen, Hang-Ting Lue, Yen-Hao Shih
  • Patent number: 8952426
    Abstract: A three dimensional stacked nonvolatile semiconductor memory according to an example of the present invention includes a memory cell array comprised of first and second blocks disposed side by side in a first direction, and a driver disposed on one end of the memory cell array in a second direction orthogonal to the first direction. A source diffusion layer, which is common to the first and second blocks, is disposed in a semiconductor substrate, and a contact plug, which has a lower end connected to the source diffusion layer and an upper end connected to a source line disposed above at least three conductive layers, is interposed between the first and second blocks.
    Type: Grant
    Filed: March 19, 2009
    Date of Patent: February 10, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hiroshi Maejima
  • Patent number: 8945949
    Abstract: A method for fabricating a variable resistance memory device in accordance with an embodiment of the present invention includes: sequentially forming a first conductive layer and a variable resistance layer on a substrate; forming stacked structures in which first conductive lines and variable resistance lines are sequentially stacked by selectively etching the variable resistance layer and the first conductive layer; forming an insulating layer to fill a space between the stacked structures; forming a second conductive layer on the insulating layer and the stacked structures; and forming a second conductive line and a variable resistance pattern by etching the second conductive layer and the variable resistance line using mask patterns in a line type extending in a direction intersecting the stacked structures.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: February 3, 2015
    Assignee: SK Hynix Inc.
    Inventor: Sang Min Hwang
  • Patent number: 8933428
    Abstract: The invention provides a phase change memory and a method for forming the phase change memory. The phase change memory includes a storage region and a peripheral circuit region. The peripheral circuit region has a peripheral substrate, a plurality of peripheral shallow trench isolation (STI) units in the peripheral substrate, and at least one MOS transistor on the peripheral substrate and between the peripheral STI units. The storage region has a storage substrate, an N-type ion buried layer on the storage substrate, a plurality of vertical LEDs on the N-type ion buried layer, a plurality of storage shallow trench isolation (STI) units between the vertical LEDs, and a plurality of phase change layers on the vertical LED and between the storage STI units. The storage STI units have thickness substantially equal to thickness of the vertical LEDs. The peripheral STI units have thickness substantially equal to thickness of the storage STI units. The N-type conductive region contains SiC.
    Type: Grant
    Filed: June 5, 2013
    Date of Patent: January 13, 2015
    Assignee: Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Fumitake Mieno, Youfeng He
  • Patent number: 8928062
    Abstract: A nonvolatile semiconductor memory device includes a plurality of nonvolatile memory cells formed on a semiconductor substrate, each memory cell including source and drain regions separately formed on a surface portion of the substrate, buried insulating films formed in portions of the substrate that lie under the source and drain regions and each having a dielectric constant smaller than that of the substrate, a tunnel insulating film formed on a channel region formed between the source and drain regions, a charge storage layer formed of a dielectric body on the tunnel insulating film, a block insulating film formed on the charge storage layer, and a control gate electrode formed on the block insulating film.
    Type: Grant
    Filed: March 23, 2009
    Date of Patent: January 6, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Naoki Yasuda
  • Patent number: 8912592
    Abstract: According to example embodiments of inventive concepts, a non-volatile memory device includes a substrate including a second impurity region crossing a first impurity region, and channel regions extending in a vertical direction on the substrate. Gate electrodes may be separated from each other in a vertical direction and a horizontal direction along outer walls of the channel regions. A first insulating interlayer may be on the gate electrodes and the channel regions, where the first insulating interlayer defines a contact hole between at least one adjacent pair gate electrodes and a contact plug is formed in the contact hole to be electrically connected to the second impurity region. An etch stop layer pattern may be on the contact plug and the first insulating interlayer.
    Type: Grant
    Filed: November 5, 2012
    Date of Patent: December 16, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-heun Lim, Ki-ho Bae, Hyo-jung Kim, Kyung-hyun Kim, Chan-wook Seo, Young-beom Pyon
  • Patent number: 8896046
    Abstract: Provided is a semiconductor device with a novel structure in which stored data can be retained even when power is not supplied, and which does not have a limitation on the number of writing. The semiconductor device includes both a memory circuit including a transistor including an oxide semiconductor (in a broader sense, a transistor whose off-state current is sufficiently small), and a peripheral circuit such as a driver circuit including a transistor including a material other than an oxide semiconductor (that is, a transistor capable of operating at sufficiently high speed). Further, the peripheral circuit is provided in a lower portion and the memory circuit is provided in an upper portion, so that the area and size of the semiconductor device can be decreased.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: November 25, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Kiyoshi Kato
  • Patent number: 8890214
    Abstract: The present invention relates to a method of manufacturing sidewall spacers on a memory device. The method comprises forming sidewall spacers on a memory device having a memory array region and at least one peripheral circuit region by forming a first sidewall spacer adjacent to a word line in the memory array region and a second sidewall spacer adjacent to a transistor in the peripheral circuit region. The first sidewall spacer has a first thickness and the second sidewall spacer has a second thickness, wherein the second thickness is greater than the first thickness.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: November 18, 2014
    Assignee: Nan Ya Technology Corporation
    Inventors: Panda Durga, Jaydip Guha, Robert Kerr
  • Patent number: 8891284
    Abstract: A memristor based on mixed-metal-valence compounds comprises: a first electrode; a second electrode; a layer of a mixed-metal-valence phase in physical contact with at least one layer of a fully oxidized phase. The mixed-metal-valence phase is essentially a condensed phase of dopants for the fully oxidized phase that drift into and out of the fully oxidized phase in response to an applied electric field. One of the first and second electrodes is in electrical contact with either the layer of the mixed-metal-valence phase or a layer of a fully oxidized phase and the other is in electrical contact with the layer (or other layer) of the fully oxidized phase. The memristor is prepared by forming in either order the layer of the mixed-metal-valence phase and the layer of the fully oxidized phase, one on the other. A reversible diode and an ON-switched diode are also provided. A method of operating the memristor is further provided.
    Type: Grant
    Filed: September 4, 2009
    Date of Patent: November 18, 2014
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: R. Stanley Williams, Jianhua Yang, Matthew Pickett, Gilberto Ribeiro, John Paul Strachan
  • Patent number: 8889507
    Abstract: A capacitor and methods for forming the same are provided. The method includes forming a bottom electrode; treating the bottom electrode in an oxygen-containing environment to convert a top layer of the bottom electrode into a buffer layer; forming an insulating layer on the buffer layer; and forming a top electrode over the insulating layer.
    Type: Grant
    Filed: June 20, 2007
    Date of Patent: November 18, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Ta Wu, Jason Lee, Chung Chien Wang, Hsing-Lien Lin, Yu-Jen Wang, Yeur-Luen Tu, Chern-Yow Hsu, Yuan-Hung Liu, Chi-Hsin Lo, Chia-Shiung Tsai, Lucy Chang, Chia-Lin Chen, Ming-Chih Tsai
  • Patent number: 8877590
    Abstract: A semiconductor memory device and a method of manufacturing the same are provided. The device includes interlayer insulating patterns and conductive patterns stacked alternately, vertical channel layers formed through the interlayer insulating patterns and the conductive patterns, a tunnel insulating layer formed to surround sidewalls of each of the vertical channel layers, and a multifunctional layer formed to surround the tunnel insulating layer. The multifunctional layer includes trap regions disposed at intersections between the vertical channel layers and the conductive patterns, respectively, and disposed to be in contact with the tunnel insulating layer, blocking regions disposed to be in contact with the trap regions and the conductive patterns, and sacrificial regions disposed between adjacent ones of the blocking regions.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: November 4, 2014
    Assignee: SK Hynix Inc.
    Inventor: Nam Jae Lee
  • Patent number: 8871574
    Abstract: Some embodiments include memory cells including a memory component having a first conductive material, a second conductive material, and an oxide material between the first conductive material and the second conductive material. A resistance of the memory component is configurable via a current conducted from the first conductive material through the oxide material to the second conductive material. Other embodiments include a diode comprising metal and a dielectric material and a memory component connected in series with the diode. The memory component includes a magnetoresistive material and has a resistance that is changeable via a current conducted through the diode and the magnetoresistive material.
    Type: Grant
    Filed: August 5, 2013
    Date of Patent: October 28, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Chandra Mouli
  • Patent number: 8853767
    Abstract: A semiconductor device includes a first source layer; at least one of a second source layer, the second source layer formed substantially in the first source layer; a plurality of conductive layers stacked substantially over the first source layer; channel layers that pass through the plurality of conductive layers and couple to the second source layer; and at least one of a third source layer, the third source layer formed substantially in the second source layer, wherein the third source layer passes through the second source layer and is coupled to the first source layer.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: October 7, 2014
    Assignee: SK Hynix Inc.
    Inventors: Ki Hong Lee, Seung Ho Pyi, Seok Min Jeon
  • Patent number: 8841649
    Abstract: Three dimension memory arrays and methods of forming the same are provided. An example three dimension memory array can include a stack comprising a plurality of first conductive lines separated from one another by at least an insulation material, and at least one conductive extension arranged to extend substantially perpendicular to the plurality of first conductive lines, such that the at least one conductive extension intersects a portion of at least one of the plurality of first conductive lines. Storage element material is formed around the at least one conductive extension. Cell select material is formed around the at least one conductive extension.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: September 23, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Federico Pio
  • Patent number: 8841644
    Abstract: Thermal isolation in memory cells is described herein. A number of embodiments include a storage element, a selector device formed in series with the storage element, and an electrode between the storage element and the selector device, wherein the electrode comprises an electrode material having a thermal conductivity of less than 0.15 Watts per Kelvin-centimeter (W/K-cm).
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: September 23, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Elijah V. Karpov, David L. Kencke
  • Patent number: 8835900
    Abstract: A floating body memory cell, memory circuit, and method for fabricating floating body memory cells. The floating body memory cell includes a bi-layer heterojunction having a first semiconductor coupled to a second semiconductor. The first semiconductor and the second semiconductor have different energy band gaps. The floating body memory cell includes a buried insulator layer. The floating body memory cell includes a back transistor gate separated from the second semiconductor of the bi-layer heterojunction by at least the buried insulated layer. The floating body memory cell also includes a front transistor gate coupled to the first semiconductor of the bi-layer heterojunction.
    Type: Grant
    Filed: June 7, 2011
    Date of Patent: September 16, 2014
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Ali Khakifirooz, Pranita Kulkarni, Ghavam G. Shahidi
  • Patent number: 8822322
    Abstract: A method of fabricating a semiconductor memory device includes forming a mold stack on a substrate and the mold stack including first sacrificial layers and second sacrificial layers alternately stacked on the substrate. The method also includes forming a plurality of vertical channels that penetrate the mold stack and that contact the substrate, patterning the mold stack to form word line cuts between the vertical channels, the word line cuts exposing the substrate, removing one of the first and second sacrificial layers to form recessed regions in the mold stack, forming a data storage layer, at least a portion of the data storage layer being formed between the vertical channels and the gates, forming gates in the recessed regions, forming air gaps between the gates by removing the other of the first and second sacrificial layers, and forming an insulation layer pattern in the word line cuts.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: September 2, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jaegoo Lee, Youngwoo Park, Jungdal Choi
  • Patent number: 8817514
    Abstract: A three-dimensional array read/write (R/W) memory elements is formed across multiple layers of planes positioned at different distances above a semiconductor substrate. It is preferable to operate the R/W elements with low current and high resistive states. The resistance of these resistive states depends also on the dimension of the R/W elements and is predetermined by the process technology. A sheet electrode in series with the R/W element and a method of forming it provide another degree of freedom to adjust the resistance of the R/W memory element. The thickness of the sheet electrode is adjusted to obtain a reduced cross-sectional contact in the circuit path from the word line to the bit line. This allows the R/W memory element to have a much increased resistance and therefore to operate with much reduced currents. The sheet electrode is formed with little increase in cell size.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: August 26, 2014
    Assignee: SanDisk 3D LLC
    Inventors: George Samachisa, Johann Alsmeier
  • Patent number: 8816423
    Abstract: A semiconducting multi-layer structure comprising a plurality of first conductive layers, a plurality of first insulating layers and a second conductive layer is disclosed. The first conductive layers are separately disposed. Each of the first conductive layers has an upper surface, a bottom surface opposite to the upper surface and a lateral surface. The first insulating layers surround the peripherals of the first conductive layers. Each of the first insulating layers covers at least a part of the upper surface of each of the first conductive layers, at least a part of the bottom surface of each of the first conductive layers and the two lateral surface of each of the first conductive layers. The second conductive layer covers the first conductive layers and the first insulating layers.
    Type: Grant
    Filed: August 13, 2012
    Date of Patent: August 26, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, Yen-Hao Shih
  • Patent number: 8803121
    Abstract: Resistive memory elements and arrays of resistive memory elements are disclosed. In one embodiment, a resistive memory element includes a top electrode element lying in a plane parallel to a reference plane, and having, in perpendicular projection on the reference plane, a top electrode projection; a bottom electrode element lying in a plane parallel to the reference plane, and having, in perpendicular projection on the reference plane, a bottom electrode projection; and an active layer with changeable resistivity interposed between the top electrode element and the bottom electrode element. The top electrode projection and the bottom electrode projection overlap in an overlapping region that comprises a corner of the top electrode projection and/or a corner of the bottom electrode projection, and an area of the overlapping region constitutes less than 10% of a total projected area of the top electrode element and the bottom electrode element on the reference plane.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: August 12, 2014
    Assignee: IMEC
    Inventor: Ludovic Goux
  • Patent number: 8790976
    Abstract: A conductive pattern on a substrate is formed. An insulating layer having an opening exposing the conductive pattern is formed. A bottom electrode is formed on the conductive pattern and a first sidewall of the opening. A spacer is formed on the bottom electrode and a second sidewall of the opening. The spacer and the bottom electrode are formed to be lower than a top surface of the insulating layer. A data storage plug is formed on the bottom electrode and the spacer. The data storage plug has a first sidewall aligned with a sidewall of the bottom electrode and a second sidewall aligned with a sidewall of the spacer. A bit line is formed on the data storage plug.
    Type: Grant
    Filed: July 15, 2013
    Date of Patent: July 29, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Gyu-Hwan Oh, Sung-Lae Cho, Byoung-Jae Bae, Ik-Soo Kim, Dong-Hyun Im, Doo-Hwan Park, Kyoung-Ha Eom, Sung-Un Kwon, Chul-Ho Shin, Sang-Sup Jeong