Geometry Or Layout Of Interconnection Structure (epo) Patents (Class 257/E23.151)
  • Patent number: 7888808
    Abstract: A system in package integrating a plurality of semiconductor chips, including a first chip mounted commonly in a plurality of system in packages and at least including a CPU, a second chip having a different specification for each of the plurality of system in packages depending on a connection of internal lines, and a module substrate including the first chip and the second chip adjacent to each other and having a shape common to the plurality of system in packages. The first chip includes a first module connection terminal on the first chip along a first side facing the second chip or in an area different from the first chip and facing the second chip. A second side of the second chip includes a second module connection terminal to be connected with the first chip. The first and the second module connection terminals are connected by a bonding wire.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: February 15, 2011
    Assignee: Renesas Electronics Corporation
    Inventors: Katsunobu Suzuki, Junichi Iwasaki
  • Patent number: 7888705
    Abstract: A method is disclosed for defining a dynamic array section to be manufactured on a semiconductor chip. The method includes defining a peripheral boundary of the dynamic array section. The method also includes defining a manufacturing assurance halo outside the boundary of the dynamic array section. The method further includes controlling chip layout features within the manufacturing assurance halo to ensure that manufacturing of conductive features inside the boundary of the dynamic array section is not adversely affected by chip layout features within the manufacturing assurance halo.
    Type: Grant
    Filed: January 11, 2008
    Date of Patent: February 15, 2011
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Michael C. Smayling
  • Patent number: 7888788
    Abstract: Mutual inductance from an external output signal system to an external input signal system, in which parallel input/output operation is enabled, is reduced. A semiconductor integrated circuit has a plurality of external connection terminals facing a package substrate, and has an external input terminal and an external output terminal, in which parallel input/output operation is enabled, as part of the external connection terminals. The package substrate has a plurality of wiring layers for electrically connecting between the external connection terminals and module terminals corresponding to each other. A first wiring layer facing the semiconductor integrated circuit has a major wiring for connecting between the external input terminal and a module terminal corresponding to each other, and a second wiring layer in which the module terminals are formed has a major wiring for connecting between an external output terminal and a module terminal corresponding to each other.
    Type: Grant
    Filed: August 20, 2010
    Date of Patent: February 15, 2011
    Assignee: Renesas Electronics Corporation
    Inventors: Yasuhiro Yoshikawa, Motoo Suwa, Hiroshi Toyoshima
  • Patent number: 7888800
    Abstract: A semiconductor structure including a first rigid dielectric layer and a second rigid dielectric layer. A first non-rigid low-k dielectric layer is formed between the first and second rigid dielectric layer. A plurality of dummy fill shapes is formed in the first non-rigid layer which replace portions of the first non-rigid low-k dielectric layer with lower coefficient of thermal expansion (CTE) metal such that an overall CTE of the first non-rigid low-k dielectric layer and the plurality of dummy fill shapes matches a CTE of the first and second rigid dielectric layers more closely than that of the first non-rigid low-k dielectric layer alone.
    Type: Grant
    Filed: October 22, 2008
    Date of Patent: February 15, 2011
    Assignee: International Business Machines Corporation
    Inventor: Howard S. Landis
  • Patent number: 7880303
    Abstract: An integrated circuit structure includes a semiconductor substrate; a metallization layer over the semiconductor substrate; a first dielectric layer between the semiconductor substrate and the metallization layer; a second dielectric layer between the semiconductor substrate and the metallization layer, wherein the second dielectric layer is over the first dielectric layer; and a contact plug with an upper portion substantially in the second dielectric layer and a lower portion substantially in the first dielectric layer. The contact plug is electrically connected to a metal line in the metallization layer. The contact plug is discontinuous at an interface between the upper portion and the lower portion.
    Type: Grant
    Filed: February 13, 2007
    Date of Patent: February 1, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chen-Nan Yeh, Chih-Hsiang Yao, Wen-Kai Wan, Jye-Yen Cheng
  • Patent number: 7880284
    Abstract: With embodiments disclosed herein, the distribution of gated power is done using on-die layers without having to come back out and use package layers.
    Type: Grant
    Filed: September 29, 2007
    Date of Patent: February 1, 2011
    Assignee: Intel Corporation
    Inventors: Michael Zelikson, Alex Waizman
  • Patent number: 7872351
    Abstract: A multi-layered metal line of a semiconductor device includes a semiconductor substrate; a lower metal line formed on the semiconductor substrate and recessed on a surface thereof; an insulation layer formed on the semiconductor substrate including the lower metal line and having a damascene pattern for exposing a recessed portion of the lower metal line and for delimiting an upper metal line forming region; a glue layer formed on a surface of the recessed portion of the lower metal line; a first diffusion barrier formed on the glue layer to fill the recessed portion of the lower metal line; a second diffusion barrier formed on the glue layer and the first diffusion barrier; a third diffusion barrier formed on the second diffusion barrier and a surface of the damascene pattern; and an upper metal line formed on the third diffusion barrier to fill the damascene pattern.
    Type: Grant
    Filed: October 28, 2009
    Date of Patent: January 18, 2011
    Assignee: Hynix Semiconductor Inc.
    Inventors: Jeong Tae Kim, Baek Mann Kim, Soo Hyun Kim, Young Jin Lee, Dong Ha Jung
  • Patent number: 7868455
    Abstract: An integrated circuit structure is provided. The integrated circuit structure includes a semiconductor substrate; and a metallization layer over the semiconductor substrate. The metallization layer includes a conductive line; a low-k dielectric region adjacent and horizontally spaced apart from the conductive line by a space; and a filler dielectric material filling at least a portion of the space, wherein the filler dielectric material and the low-k dielectric region are formed of different materials. The integrated circuit structure further includes a capping layer over and adjoining the filler dielectric material and the low-k dielectric region. The filler dielectric material has a dielectric constant (k value) less than a k value of the capping layer.
    Type: Grant
    Filed: November 1, 2007
    Date of Patent: January 11, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Hsien-Wei Chen
  • Patent number: 7863726
    Abstract: A method of manufacture of an integrated circuit package system includes: forming a package substrate with a top substrate side and a bottom substrate side; forming a corner contact in a first corner of the bottom substrate side, the corner contact extending to a substrate edge of the package substrate; mounting an integrated circuit device over the top substrate side; connecting an electrical interconnect between the integrated circuit device and the top substrate side; and forming a package encapsulation over the top substrate side, the integrated circuit device, and the electrical interconnect.
    Type: Grant
    Filed: November 4, 2009
    Date of Patent: January 4, 2011
    Assignee: Stats Chippac Ltd.
    Inventors: Seng Guan Chow, Tae Hoan Jang
  • Publication number: 20100327458
    Abstract: There is provided a semiconductor device including: a metal wiring line formed on a semiconductor substrate; an inside chamfer provided only at the inside of a bend in the metal wiring line, widening the wiring line width at the inside of the bend; and a protection film covering the metal wiring line.
    Type: Application
    Filed: June 23, 2010
    Publication date: December 30, 2010
    Applicant: OKI SEMICONDUCTOR CO., LTD.
    Inventor: Hidehiko Ichiki
  • Patent number: 7859112
    Abstract: Memory devices, such as DRAM memory devices, may include one or more metal layers above a local interconnect of the DRAM memory that make contact to lower gate regions of the memory device. As the size of semiconductor components decreases and circuit densities increase, the density of the metal routing in these upper metal layers becomes increasingly difficult to fabricate. By providing additional metal routing in the lower gate regions that may be coupled to the upper metal layers, the spacing requirements of the upper metal layers may be eased, while maintaining the size of the semiconductor device. In addition, the additional metal routing formed in the gate regions of the memory devices may be disposed parallel to other metal contacts in a strapping configuration, thus reducing a resistance of the metal contacts, such as buried digit lines of a DRAM memory cell.
    Type: Grant
    Filed: January 13, 2006
    Date of Patent: December 28, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Terry McDaniel, James Green, Mark Fischer
  • Patent number: 7855419
    Abstract: An improved layout pattern for electrostatic discharge protection is disclosed. A first heavily doped region of a first type is formed in a well of said first type. A second heavily doped region of a second type is formed in a well of said second type. A battlement layout pattern of said first heavily doped region is formed along the boundary of said first heavily doped region and said second heavily doped region. A battlement layout pattern of said second heavily doped region is formed along the boundary of said first heavily doped region and said second heavily doped region. By adjusting a distance between the battlement layout pattern of a heavily doped region and a edge of well of said second type, i.e. n-well, a first distance will be shorter than what is typically required by the layout rules of internal circuit; and a second distance will be longer than the first distance to ensure that the I/O device have a better ESD protection capability.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: December 21, 2010
    Assignee: Himax Technologies Limited
    Inventor: Tung-Yang Chen
  • Patent number: 7847408
    Abstract: An integrated clock and power distribution network in a semiconductor device includes assigning a first tile to a location on a placement grid corresponding to a top metal layer. An orientation is assigned to the first tile relative to the top metal layer placement grid. The first tile is placed on a representation corresponding to the top metal layer in accordance with the assignments. A second tile is assigned to a location on a placement grid corresponding to a top-1 metal layer. The orientation is assigned to the second tile relative to the top-1 metal layer placement grid. The second tile is placed on a representation corresponding to the top-1 metal layer in accordance with the assignments. The first and second tile are arranged as a full-dense-mesh distribution structure. The first tile includes an integrated clock and power distribution structure. The second tile includes a low impedance underpass structure.
    Type: Grant
    Filed: January 16, 2009
    Date of Patent: December 7, 2010
    Assignee: Oracle America, Inc.
    Inventors: Robert P. Masleid, Duncan Collier
  • Patent number: 7843068
    Abstract: A semiconductor chip includes a semiconductor substrate 11, a through via 12 provided in a through hole 17 that passes through the semiconductor substrate 11, insulating layers 21-1 to 21-3 laminated on the semiconductor substrate 11, a multi-layered wiring structure 14 having a first wiring pattern 22 and a second wiring pattern 23, and an external connection terminal 15 provided on an uppermost layer of the multi-layered wiring structure 14, wherein the through via 12 and the external connection terminal 15 are connected electrically by the second wiring pattern 23.
    Type: Grant
    Filed: June 29, 2006
    Date of Patent: November 30, 2010
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Kei Murayama, Mitsutoshi Higashi
  • Patent number: 7842959
    Abstract: Disclosed is a light emitting device having a plurality of light emitting cells and a package having the same mounted thereon. The light emitting device includes a plurality of light emitting cells which are formed on a substrate and each of which has an N-type semiconductor layer and a P-type semiconductor layer located on a portion of the N-type semiconductor layer. The plurality of light emitting cells are bonded to a submount substrate. Accordingly, heat generated from the light emitting cells can be easily dissipated, so that a thermal load on the light emitting device can be reduced. Meanwhile, since the plurality of light emitting cells are electrically connected using connection electrodes or electrode layers formed on the submount substrate, it is possible to provide light emitting cell arrays connected to each other in series.
    Type: Grant
    Filed: June 18, 2010
    Date of Patent: November 30, 2010
    Assignee: Seoul Opto Device Co., Ltd.
    Inventors: Chung Hoon Lee, Lacroix Yves, Hyung Soo Yoon, Young Ju Lee
  • Publication number: 20100289147
    Abstract: A semiconductor device having a redistribution layer, and methods of forming same, are disclosed. After fabrication of semiconductor die on a wafer, a tape assembly is applied onto a surface of the wafer, in contact with the surfaces of each semiconductor die on the wafer. The tape assembly includes a backgrind tape as a base layer, and a film assembly adhered to the backgrind tape. The film assembly in turn includes an adhesive film on which is deposited a thin layer of conductive material. The redistribution layer pattern is traced into the tape assembly, using for example a laser. Thereafter, the unheated portions of the tape assembly may be removed, leaving the heated redistribution layer pattern on each semiconductor die.
    Type: Application
    Filed: July 26, 2010
    Publication date: November 18, 2010
    Inventors: Chien-Ko Liao, Chin-Tien Chiu, Jack Chang Chien, Cheemen Yu, Hem Takiar
  • Publication number: 20100289118
    Abstract: A semiconductor device has an inductor. The inductor has a first metal interconnection layer formed in the insulation film to extend in a first direction which is parallel to a substrate face of the semiconductor substrate, and connected electrically at a first end part thereof to the first terminal; a first via interconnection formed in the insulation film to extend in a second direction perpendicular to the substrate face, and connected at a top part thereof to a second end part of the first metal interconnection layer; and a second metal interconnection layer formed in the insulation film to extend in the first direction under the first metal interconnection layer, facing to the first metal interconnection layer, insulated from the first metal interconnection layer by the insulation film, connected at a first end part thereof to a bottom part of the first via interconnection, and connected electrically at a second end part thereof to the second terminal.
    Type: Application
    Filed: March 2, 2010
    Publication date: November 18, 2010
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Koichi Kokubun
  • Patent number: 7829997
    Abstract: A semiconductor device (601) is provided which comprises a substrate (603); a semiconductor device (605) disposed on said substrate and having a first major surface; a first metal strap (615) which is in electrical contact with said substrate and which is adapted to provide power to a first region (608) of said semiconductor device; and a second metal strap (616) which is in electrical contact with said substrate and which is adapted to provide ground to a second region (609) of said semiconductor device.
    Type: Grant
    Filed: April 4, 2007
    Date of Patent: November 9, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Kevin J. Hess, Chu-Chung Lee, James W. Miller
  • Publication number: 20100270676
    Abstract: An array of contact pads on a semiconductor structure has a pitch less than twice an overlay tolerance of a bonding process employed to vertically stack semiconductor structures. A set of contact pads within the area of overlay variation for a matching contact pin may be electrically connected to an array of programmable contacts such that one programmable contact is connected to each contact pad within the area of overlay variation. One contact pad may be provided with a plurality of programmable contacts. The variability of contacts between contact pins and contact pads is accommodated by connecting or disconnecting programmable contacts after the stacking of semiconductor structures. Since the pitch of the array of contact pins may be less than twice the overlay variation of the bonding process, a high density of interconnections is provided in the vertically stacked structure.
    Type: Application
    Filed: April 27, 2009
    Publication date: October 28, 2010
    Applicant: International Business Machines Corporation
    Inventors: Leland Chang, Matthew R. Wordeman, Albert M. Young
  • Patent number: 7812439
    Abstract: A semiconductor apparatus includes a semiconductor chip, a wired board, a plurality of bump electrodes, a plurality of external terminals, and insulating material. The semiconductor chip includes a plurality of electrode pads arranged in a central area on one surface. The wired board is arranged as facing one surface of the semiconductor chip, and includes a wiring. The bump electrode is provided between surfaces at which the semiconductor chip and the wired board face each other, and electrically connects the electrode pad and the wiring. The external terminal corresponds to a plurality of bump electrodes, and is mounted on the wired board. The insulating material is provided between the semiconductor chip and the wired board, and covers at least a connection part between the bump electrode and the wiring.
    Type: Grant
    Filed: July 8, 2008
    Date of Patent: October 12, 2010
    Assignee: Elpida Memory, Inc.
    Inventors: Mitsuhisa Watanabe, Ichiro Anjo
  • Patent number: 7812446
    Abstract: A method of manufacturing a semiconductor device including a PMOS transistor and a NMOS transistor is described. The method facilitates obtaining a FUSI phase of a suitable composition for the NMOS transistor and the PMOS transistor respectively, with fewer mask layers and through a fewer number of manufacturing steps.
    Type: Grant
    Filed: April 23, 2008
    Date of Patent: October 12, 2010
    Assignee: NEC Electronics Corporation
    Inventor: Yoichiro Kurita
  • Patent number: 7808079
    Abstract: A circuit arrangement includes a plurality of type-identical and identically operated active components, or separate sections of an active component, and includes a branched wiring structure for the interconnection of component connections. In each case the wiring end portions lie between a branching point and an input of different components or sections, wherein the wiring end portions are formed with predetermined geometrical asymmetry with respect to one another in such a way that there is an electrical symmetry of the interconnection configuration between all the connected type-identical components or sections. More particularly, the impedance values between the branching point and the different inputs and outputs are substantially identical.
    Type: Grant
    Filed: June 6, 2007
    Date of Patent: October 5, 2010
    Assignee: Infineon Technologies AG
    Inventors: Winfried Bakalski, Michael Asam, Markus Zannoth, Krzysztof Kitlinski
  • Publication number: 20100237512
    Abstract: A semiconductor memory device includes a cell array layer including a first and a second wiring, which cross each other; a third wiring formed on a first wiring layer below the cell array layer; a fourth wiring formed on a second wiring layer above the cell array layer; and a contact extending in a stacking direction for connecting the third and the fourth wiring, wherein the device further comprises a redundant wiring layer being formed between the first and the second wiring layer, the redundant wiring layer being formed with a redundant wiring having a portion extending in the same direction as at least one of the third and the fourth wiring, and the third and the redundant wiring, and the fourth and the redundant wiring being connected by a plurality of contacts arranged along the portion extending in the same direction as the third or the fourth wiring.
    Type: Application
    Filed: March 5, 2010
    Publication date: September 23, 2010
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yuki OKUKAWA, Satoru TAKASE
  • Patent number: 7800214
    Abstract: Mutual inductance from an external output signal system to an external input signal system, in which parallel input/output operation is enabled, is reduced. A semiconductor integrated circuit has a plurality of external connection terminals facing a package substrate, and has an external input terminal and an external output terminal, in which parallel input/output operation is enabled, as part of the external connection terminals. The package substrate has a plurality of wiring layers for electrically connecting between the external connection terminals and module terminals corresponding to each other. A first wiring layer facing the semiconductor integrated circuit has a major wiring for connecting between the external input terminal and a module terminal corresponding to each other, and a second wiring layer in which the module terminals are formed has a major wiring for connecting between an external output terminal and a module terminal corresponding to each other.
    Type: Grant
    Filed: November 27, 2006
    Date of Patent: September 21, 2010
    Assignee: Renensas Electronics Corporation
    Inventors: Yasuhiro Yoshikawa, Motoo Suwa, Hiroshi Toyoshima
  • Patent number: 7800228
    Abstract: A reliable and mechanical strong interconnect structure is provided that does not include gouging features in the bottom of the an opening, particularly at a via bottom. Instead, the interconnect structures of the present invention utilize a Co-containing buffer layer that is selectively deposited on exposed surfaces of the conductive features that are located in a lower interconnect level. The selective deposition is performed through at least one opening that is present in a dielectric material of an upper interconnect level. The selective deposition is performed by electroplating or electroless plating. The Co-containing buffer layer comprises Co and at least one of P and B. W may optionally be also present in the Co-containing buffer layer.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: September 21, 2010
    Assignee: International Business Machines Corporation
    Inventors: Chih-Chao Yang, Oscar Van Der Straten
  • Patent number: 7795646
    Abstract: A semiconductor device includes a first metal region, a plurality of vias, a plurality of second metal regions, a plurality of openings and a third metal region. The first metal region conducts source/drain current. The second metal regions are electrically connected to the first metal region through the vias for conducting the source/drain current, in which each of the second metal regions is disposed in a distance from the adjacent second metal regions. The third metal region is electrically connected to the second metal regions through the openings, in which the resistance of the third metal region is smaller than the resistances of the first metal region and the second metal regions.
    Type: Grant
    Filed: April 3, 2008
    Date of Patent: September 14, 2010
    Assignee: Himax Analogic, Inc.
    Inventors: Kuan-Po Hsueh, Kuo-Hung Wu
  • Patent number: 7791193
    Abstract: An integrated circuit and method of fabricating the same are provided. Included are an active circuit, and a metal layer disposed, at least partially, above the active circuit. Further provided is a bond pad disposed, at least partially, above the metal layer. To prevent damage incurred during a bonding process, the aforementioned metal layer is meshed.
    Type: Grant
    Filed: November 20, 2007
    Date of Patent: September 7, 2010
    Assignee: NVIDIA Corporation
    Inventors: Inderjit Singh, Howard Lee Marks, Joseph David Greco
  • Patent number: 7786546
    Abstract: A system-on-chip (SoC) that is immune to electromagnetic interference has block shield rings fabricated therein. The SoC includes a microprocessor core; an on-chip bus interface; an embedded memory block; and an analog/mixed-signal integrated circuit shielded by an EMI shield ring encircling the analog/mixed-signal integrated circuit for protecting the analog/mixed-signal integrated circuit from electromagnetic interference. The EMI shield ring is grounded and includes a metal rampart consisting of multi-layer metals and vias. A pickup diffusion is connected to the metal rampart. In one embodiment, the memory block is also shielded.
    Type: Grant
    Filed: December 8, 2006
    Date of Patent: August 31, 2010
    Assignee: United Microelectronics Corp.
    Inventor: Yu-Hao Hsu
  • Publication number: 20100201000
    Abstract: According to certain embodiments, integrated circuits are fabricated using brittle low-k dielectric material to reduce undesired capacitances between conductive structures. To avoid permanent damage to such dielectric material, bond pads are fabricated with support structures that shield the dielectric material from destructive forces during wire bonding. In one implementation, the support structure includes a passivation structure between the bond pad and the topmost metallization layer. In another implementation, the support structure includes metal features between the topmost metallization layer and the next-topmost metallization layer. In both cases, the region of the next-topmost metallization layer under the bond pad can have multiple metal lines corresponding to different signal routing paths.
    Type: Application
    Filed: October 31, 2007
    Publication date: August 12, 2010
    Applicant: AGERE SYSTEMS INC.
    Inventors: Joze F. Antol, John W. Osenbach, Kurt G. Steiner
  • Publication number: 20100193958
    Abstract: A technique is provided for improving the security of information stored in a semiconductor device. Multilayer wiring layers are formed over a semiconductor substrate. Wirings are formed on the uppermost wiring layer among those multilayer wiring layers. On the wirings, there is formed, in the following order, a silicon oxide film, a colored thin film, and a silicon oxide film, over which, a silicon nitride film serving as a surface protective film is formed. In other words, the invention is characterized by that the colored thin film is formed between the wiring constituting the uppermost wiring layer and the silicon nitride film serving as the surface protective film. The colored thin film has a function of attenuating visible light and laser light in the specific wavelength region, and is formed of, for example, a silicon oxide film containing cobalt oxide.
    Type: Application
    Filed: April 15, 2010
    Publication date: August 5, 2010
    Inventors: Kozo WATANABE, Michimoto KAMINAGA, Katsuhiko HOTTA
  • Patent number: 7768102
    Abstract: A semiconductor device comprises a semiconductor chip having a rear surface provided with an uneven structure having a preselected pattern and comprised of concave and convex portions. The preselected pattern of the uneven structure is tilted so as to be in parallel to a crystal orientation of <110> of the semiconductor chip. An electrode is disposed on the concave and convex portions of the uneven structure.
    Type: Grant
    Filed: April 14, 2006
    Date of Patent: August 3, 2010
    Assignee: Seiko Instruments Inc.
    Inventor: Tomomitsu Risaki
  • Patent number: 7768117
    Abstract: A microelectronic unit has a structure including a microelectronic element such as a semiconductor chip with a first contact disposed remote from the periphery of the structure. The unit further includes first and second redistribution conductive pads disposed near a periphery of the structure and a conductive path incorporating first and second conductors extending toward the first contact, these conductors being connected to one another adjacent the first contact. The conductive path is connected to the first contact, and can provide signal routing from the periphery of the unit to the contact without the need for long stubs. A package may include a plurality of such units, which may be stacked on one another with the redistribution conductive pads of the various units connected to one another.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: August 3, 2010
    Assignee: Tessera, Inc.
    Inventors: Belgacem Haba, Richard Dewitt Crisp, Masud Beroz
  • Patent number: 7768133
    Abstract: A semiconductor device is provided with a silicon substrate and a structure filled in a through hole that has a rectangular cross section and extends through the silicon substrate. The structure comprises a pipe-shaped through electrode, stripe-shaped through electrodes, silicons, a first insulating film, a second insulating film and a third insulating film. The pipe-shaped through electrode is utilized as a pipe-shaped electric conductor that extends through the silicon substrate. In addition, the stripe-shaped through electrodes are provided in the interior of the pipe-shaped through electrode so that the stripe-shaped through electrodes extend through the silicon substrate and is spaced away from the pipe-shaped through electrode. A plurality of through electrodes are provided in substantially parallel within the inner region of the pipe-shaped through electrode.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: August 3, 2010
    Assignee: NEC Electronics Corporation
    Inventors: Satoshi Matsui, Masaya Kawano
  • Publication number: 20100187697
    Abstract: An embodiment of the present invention provides an electronic device package, which includes a chip having a first surface and an opposite second surface and a trench extending into a body of the chip along a direction from the second surface to the first surface, wherein a bottom portion of the trench includes at least two contact holes.
    Type: Application
    Filed: June 13, 2008
    Publication date: July 29, 2010
    Inventors: Chia-Lun Tsai, Wen-Cheng Chien, Po-Han Lee, Wei-Ming Chen, Chien-Hung Liu, Ying-Nan Wen
  • Patent number: 7755182
    Abstract: A hybrid integrated circuit device having high mount reliability comprises a module substrate which is a ceramic wiring substrate, a plurality of electronic component parts laid out on the main surface of the module substrate, a plurality of electrode terminals laid out on the rear surface of the module substrate, and a cap which is fixed to the module substrate to cover the main surface of the module substrate. The electrode terminals include a plurality of electrode terminals which are aligned along the edges of the module substrate and power voltage supply terminals which are located inner than these electrode terminals. The electrode terminals aligned along the substrate edges are coated, at least in their portions close to the substrate edge, with a protection film having a thickness of several tens micrometers or less. Connection reinforcing terminals consist of a plurality of divided terminals which are independent of each other, and are ground terminals.
    Type: Grant
    Filed: March 10, 2009
    Date of Patent: July 13, 2010
    Assignee: Renesas Technology Corp.
    Inventors: Shinji Moriyama, Tomio Yamada
  • Patent number: 7755151
    Abstract: A wafer level package for a surface acoustic wave device and a fabrication method thereof include a SAW device formed with a SAW element on an upper surface of a device wafer; a cap wafer joined on an upper part of the SAW element; a cavity part housing the SAW element between the cap wafer and the SAW device; a cap pad formed on an upper surface of the cap wafer; and a metal line formed to penetrate through the cap wafer to electrically connect the cap pad and the SAW element, the device wafer and the cap wafer being made of the same materials.
    Type: Grant
    Filed: May 2, 2006
    Date of Patent: July 13, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ji-hyuk Lim, Jun-sik Hwang, Woon-bae Kim, Suk-jin Ham, Jong-oh Kwon, Moon-chul Lee, Chang-youl Moon
  • Patent number: 7741696
    Abstract: A metal mesh structure for use in an integrated circuit is described. In one embodiment, a semiconductor integrated circuit includes a first region including, for example, a device layer having one or more active semiconductor devices. The circuit also includes a second region, which may include a metalization layer including circuit wires. The circuit further includes a layer of metal mesh interposed between the first and second regions, and which may be implemented on at least a portion of another metalization layer.
    Type: Grant
    Filed: December 16, 2004
    Date of Patent: June 22, 2010
    Assignee: ST-Ericsson SA
    Inventor: Augusto M. Marques
  • Patent number: 7741720
    Abstract: An electronic device that has an integrated circuit die with a plurality of contacts pads, a printed circuit board with a plurality of conductors corresponding to each of the contact pads respectively, wire bonds electrically connecting each of the contact pads to the corresponding conductors and, an adhesive surface positioned between the contacts pads and the corresponding conductors. The wire bonds are secured to the adhesive surface to hold them in a low profile configuration.
    Type: Grant
    Filed: March 12, 2008
    Date of Patent: June 22, 2010
    Assignee: Silverbrook Research Pty Ltd
    Inventors: Kia Silverbrook, Laval Chung-Long-Shan, Kiangkai Tankongchumruskul
  • Patent number: 7741702
    Abstract: A semiconductor structure is provided which eliminates the contact resistance traditionally associated with a junction between one or more contacts and a buried conductive structure formed in the semiconductor structure. The semiconductor structure includes a first insulating layer formed on a semiconductor layer and a conductive structure formed on at least a portion of the first insulating layer. A second insulating layer is formed on at least a portion of the conductive structure. At least one contact is formed through the second insulating layer and electrically connected to the conductive structure. The contact and the conductive structure are formed as a substantially homogeneous structure in a same processing step.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: June 22, 2010
    Assignee: Agere Systems Inc.
    Inventors: Bailey R. Jones, Sean Lian, Simon John Molloy
  • Patent number: 7737553
    Abstract: Fine-pitch first and second bonding pads are formed on a chip along its perimeter. The first bonding pads are formed at the peripheral parts on the chip, while the second bonding pads are formed inside the peripheral parts. An ESD protection circuit is connected to the first bonding pad, and an I/O circuit is connected to the second bonding pad. First and second bonding wires connect the first and second bonding pads to the same package pin, respectively. The second bonding wire is configured to be sufficiently longer than the first bonding wire, regardless of the pitch of the first bonding pads.
    Type: Grant
    Filed: October 5, 2005
    Date of Patent: June 15, 2010
    Assignee: Panasonic Corporation
    Inventors: Osamu Shibata, Yoshiyuki Saito
  • Patent number: 7728410
    Abstract: A semiconductor device includes a semiconductor element, a light-blocking region enclosing the semiconductor element, a plurality of contacts disposed in a staggered arrangement in a first region of the light-blocking region, and a linear contact formed to extend along at least a first direction in a second region of the light-blocking region differing from the first region.
    Type: Grant
    Filed: April 7, 2006
    Date of Patent: June 1, 2010
    Assignee: Seiko Epson Corporation
    Inventor: Hiroyuki Nakanishi
  • Patent number: 7727813
    Abstract: A method for making a device is disclosed. One embodiment provides a substrate having a first element protruding from the substrate. A semiconductor chip has a first electrode on a first surface and a second electrode on a second surface opposite to the first surface. The semiconductor chip is placed over the first element of the substrate with the first surface of the semiconductor chip facing the substrate. The second electrode of the semiconductor chip is electrically coupled to the substrate, and the substrate is at least partially removed.
    Type: Grant
    Filed: November 26, 2007
    Date of Patent: June 1, 2010
    Assignee: Infineon Technologies AG
    Inventors: Ralf Otremba, Xaver Schloegel, Rupert Fischer, Tien Lai Tan
  • Patent number: 7727883
    Abstract: A method of forming an interconnect structure is provided. The method includes depositing a cobalt metal layer in an interconnect opening formed within a dielectric material containing a dielectric reactant element. The method further includes, in any order, thermally reacting at least a portion of the cobalt metal layer with at least a portion of the dielectric material to form a diffusion barrier containing a compound of the reactive metal from the cobalt metal layer and the dielectric reactant element from the dielectric material, and forming a cobalt nitride adhesion layer in the interconnect opening. The method further includes filling the interconnect opening with Cu metal, where the diffusion barrier and the cobalt nitride adhesion layer surround the Cu metal in the interconnect opening.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: June 1, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Tadahiro Ishizaka, Shigeru Mizuno
  • Publication number: 20100127394
    Abstract: Through substrate vias for back-side electrical and thermal interconnections on very thin semiconductor wafers without loss of wafer mechanical strength during manufacturing are provided by: forming (101) desired device regions (21) with contacts (22) on the front surface (19) of an initially relatively thick wafer (18?); etching (104) via cavities (29) partly through the wafer (18?) in the desired locations; filling (105) the via cavities (29) with a conductive material (32) coupled to some device region contacts (22); mounting (106) the wafer (18?) with its front side (35) facing a support structure (40); thinning (107) the wafer (18?) from the back side (181) to expose internal ends (3210, 3220, 3230, 3240, etc.) of the conductive material filled vias (321, 322, 323, 324, etc.); applying (108) any desired back-side interconnect region (44) coupled to the exposed ends (3210, 3220, 3230, 3240, etc.
    Type: Application
    Filed: November 25, 2008
    Publication date: May 27, 2010
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Chandrasekaram Ramiah, Douglas G. Mitchell, Michael F. Petras, Paul W. Sanders
  • Patent number: 7718527
    Abstract: A method is provided for integrating cobalt tungsten cap layers into manufacturing of semiconductor devices to improve electromigration and stress migration in copper (Cu) metal. One embodiment includes providing a patterned substrate containing a recessed feature formed in a low-k material and a first metallization layer at the bottom of the feature, forming a cobalt tungsten cap layer on the first metallization layer, depositing a barrier layer in the recessed feature, including on the low-k dielectric material and on the first cobalt metal cap layer, and filling the recessed feature with Cu metal. Another embodiment includes providing a patterned substrate having a substantially planar surface with Cu paths and low-k regions, and forming a cobalt tungsten cap layer on the Cu paths.
    Type: Grant
    Filed: October 1, 2008
    Date of Patent: May 18, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Tadahiro Ishizaka, Shigeru Mizuno, Miho Jomen
  • Patent number: 7709958
    Abstract: One or more embodiments of the present invention relate to structures obtained by methods (a) for growing a film by an intermixing growth process, or (b) by depositing a film, which film includes chalcogenides of copper and/or silver (but excluding oxides), such as, for example, copper sulfide (CuSX and/or Cu2SX, where 0.7?X?1.3; and X=1.0 for stoichiometric compounds).
    Type: Grant
    Filed: June 17, 2005
    Date of Patent: May 4, 2010
    Inventor: Uri Cohen
  • Publication number: 20100102416
    Abstract: Integrated circuit packages incorporating an inductor and methods for their fabrication. The lead frame used in packaging the integrated circuit includes a first area for receiving the integrated circuit, and a second area having a plurality of connections from one side to the other side of the lead frame, thereby forming coil segments. After mounting the integrated circuit and wire bonding its connections, the lead frame is placed on a ferrite plate, the assembly is encapsulated in resin, and the leads trimmed and bent. Mounting of the packaged integrated circuit on a properly prepared printed circuit interconnects the coil segments in the package to coil segments on the printed circuit, thereby forming a single, multi-turn coil around the ferrite plate. Various embodiments are disclosed.
    Type: Application
    Filed: October 29, 2008
    Publication date: April 29, 2010
    Applicant: MAXIM INTEGRATED PRODUCTS, INC.
    Inventors: Ahmad Ashrafzadeh, Mansour Izadinia, Nitin Kalje, Ignacio McQuirk
  • Patent number: 7704800
    Abstract: A method for packaging an integrated circuit. A barrier metal pattern is disposed on a baseplate. A conductive layer is disposed on the barrier metal pattern. A photoresist having a pattern is applied to the conductive layer. A via is then disposed on the conductive layer. An integrated circuit is coupled to the via and encapsulated. Then, at least a part of the baseplate is removed. An integrated circuit package is produced by the method.
    Type: Grant
    Filed: April 27, 2007
    Date of Patent: April 27, 2010
    Assignee: Broadcom Corporation
    Inventor: Tonglong Zhang
  • Patent number: 7692309
    Abstract: An application-specific integrated circuit (ASIC) is customized using two non-adjacent via layers. An array of logic cells, each including a plurality of logic devices, are arranged in a plurality of non-customized base layers. A first routing grid, which includes a first non-customized metal routing layer, a customized via layer, and a second non-customized metal routing layer, is disposed on top of the plurality of non-customized layers. A second routing grid, which includes a third non-customized metal routing layer, another customized via layer, and a fourth non-customized metal routing layer, is disposed above the first routing grid. A non-customized via layer is disposed above the first routing grid and beneath the second routing grid. The routing grids and the non-customized via layer collectively facilitate routing connections to and from the logic cells.
    Type: Grant
    Filed: September 6, 2007
    Date of Patent: April 6, 2010
    Assignee: ViASIC, Inc.
    Inventor: William D. Cox
  • Patent number: 7689963
    Abstract: Systems and methods of double diamond clock and power distribution. In accordance with a first embodiment of the present invention, an integrated circuit comprises a first metallization layer. that is substantially a power plane and a second metallization layer disposed immediately adjacent to the first metallization layer. The first metallization layer and the second metallization layer are separated by an inter-plane distance. A signal trace on the first metallization layer is separated from the power plane by about three times the inter-plane distance.
    Type: Grant
    Filed: June 28, 2006
    Date of Patent: March 30, 2010
    Inventors: Robert P. Masleid, Scott Pitkethly